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1747results about "X-ray apparatus" patented technology

Power supply control method and system of X-ray generating device

The invention relates to the technical field of power supply control, in particular to a power supply control method and system of an X-ray generating device. According to the method, working state parameters of an X-ray tube are detected in real time, and corresponding voltage / current deviation correction is generated according to a preset voltage-current characteristic curve; dynamically adjusting the driving frequency of the high-frequency inverter based on the voltage / current deviation correction, and collecting the ripple characteristic quantity fed back by the output end of the power supply to form a closed-loop correction factor; carrying out coupling analysis on the closed-loop correction factor and the X-ray tube cathode emission current change rate; reconstructing a trigger time sequence graph of the power switch device according to the phase compensation instruction, and synchronously injecting thermodynamic parameters of a pipe body to carry out duty ratio secondary correction; and generating a multi-parameter cooperative control instruction by iteratively optimizing the matching relationship between the trigger time sequence map and the duty ratio correction value. The self-adaptive precise adjustment of the power supply system is realized, so that the X-ray tube can obtain optimized power supply under different working conditions.
Owner:合肥博雷电气有限公司

Light source device and optical device

To provide a light source device and an optical device which can improve stability of light generated from a light source.SOLUTION: A light source device 100 includes: a target holding part 110 having a holding region for holding a target material TM for generating light L0 by giving excitation light LR thereto; a rotation shaft 120 for supporting the target holding part 110; and an axial rotation driving part 130 connected to the rotation shaft 120, and rotating the target holding part 110 around a central axis C of the rotation shaft 120 through the rotation shaft, wherein the target holding part 110 is rotated at a predetermined target rotation angular velocity, and the target holding part 110 has a mass such that a dangerous angular velocity in rotation becomes 85% or less of the target rotation angular velocity.SELECTED DRAWING: Figure 1
Owner:LASERTEC CORP

Control method and device for controllable fly-focus X-ray tube

The invention relates to the technical field of X-ray tube control, and discloses a control method and device for a controllable flying focus X-ray tube, and the method comprises the steps: building an orthogonal electromagnetic deflection system based on an electron beam flight path of the X-ray tube, and the orthogonal electromagnetic deflection system comprises an X-direction electromagnetic coil and a Y-direction electromagnetic coil; creating a conversion relation for converting the target focus position function into an electromagnetic coil current value; executing nonlinear magnetic field response compensation to obtain high-speed switching control signals of the X-direction electromagnetic coil and the Y-direction electromagnetic coil; and performing focus trajectory prediction based on the high-speed switching control signal to obtain a focus motion trajectory formed by the electron beam on the target material, and performing thermal load distribution optimization on the focus motion trajectory to obtain a focus position control scheme for uniform distribution of the surface temperature of the target material. Accurate positioning control of the electron beam on the target material is achieved, and the X-ray imaging quality is improved.
Owner:DEEPSEA PRECISION TECH (SHENZHEN) CO LTD

Complex metal product internal defect analysis method based on ray detection

The invention discloses a complex metal product internal defect analysis method and system based on radiographic inspection, a spiral track scanning path is generated through a workpiece three-dimensional model, a six-axis cooperative mechanical arm is utilized to drive a miniature X-ray source to move along the path, and + / -5 [mu] m positioning compensation is realized in combination with a piezoelectric ceramic driving mechanism. And the detector array module is matched to carry out multi-mode ray scanning and real-time data acquisition. Collected data are transmitted to a real-time data processing module through an LVDS differential interface, an FDK algorithm is executed by a JetsonTX2 embedded GPU to complete tomographic image reconstruction, a 3D-ResNet neural network model is loaded through a TensorRT inference engine to achieve intelligent defect recognition, and finally a detection report is generated and uploaded to an MES system. The system comprises a ray generation module, a multi-degree-of-freedom mechanical arm bearing module and the like, a high-voltage generator circuit comprises a ZVS resonance circuit, and a motion control module adopts an FPGA + ARM dual-core architecture.
Owner:王永志

Methods and systems for controlling voltages of x-ray imaging systems and x-ray imaging systems, devices, and storage mediums

Methods and systems for controlling a voltage of an X-ray imaging system and X-ray imaging systems are provided. A method includes: obtaining an initial tube voltage and a target tube voltage; and adjusting an actual tube voltage of the X-ray imaging system by controlling a working state of one or more devices of the X-ray imaging system based on the initial tube voltage and the target tube voltage in an inter-frame period of time. An output voltage of a high voltage generator is changed to the target tube voltage required when the X-ray imaging system starts imaging to obtain the target frame in the inter-frame period of time, so that the actual tube voltage is equal to or close to the target tube voltage when the target frame is loaded.
Owner:SHANGHAI UNITED IMAGING HEALTHCARE

Ray generating device and control method thereof

A ray generating device and a control method thereof are provided. The ray generating device includes: an electronic beam generating device; a microwave generating device; a microwave circulator, having a power input port and at least two power output ports, the power input port being connected to the microwave generating device; a plurality of accelerating tubes respectively connected to at least two power output ports, configured to respectively receive a plurality of electronic beams, and accelerate electronic beams respectively through microwaves received from the at least two power output ports, and to respectively generate a plurality of rays having at least two different energies; and a controller, configured to perform chronological control on microwave power of the microwave generating device, and chronological control on beam loadings of the electronic beams generated by the electronic beam generating device and respectively corresponding to accelerating tubes.
Owner:TSINGHUA UNIVERSITY +1

X-ray high-voltage generator

The invention provides an X-ray high-voltage generator. The X-ray high-voltage generator comprises a resonance module; wherein the resonance module comprises a first inductor, a first capacitor and a second inductor which are connected in series at a primary winding of the high-voltage transformer; the first inductor and the second inductor form a common mode inductor, and the common mode inductor is an annular hollow inductor. According to the X-ray high-voltage generator provided by the invention, the problems of magnetic saturation risk, temperature sensitivity, magnetic core eddy current loss and the like of an existing resonance circuit are solved.
Owner:YIRUI POWER TECH (SHANGHAI) CO LTD

Quick head disconnect for x ray imaging system

X-ray imaging systems containing a quick disconnect feature for the X-ray head containing the X-ray source are described. The X-ray imaging systems comprise an X-ray head containing an X-ray source and supporting electronics including high-voltage electronics, a control device, an arm coupled to the X-ray head, and low voltage cabling disposed within the arm and configured to connect the supporting electronics to the control device, the electrical cabling comprising a disconnect between the supporting electronics and the control device, and where the X-ray head is removably attached to the arm so that when the electrical cabling is disconnected, the X-ray head can be removed from the X-ray system. These X-ray imaging systems offer an easier method for removing the X-ray head, such as for replacement, servicing, and / or repair. Other embodiments are described.
Owner:3DIO INC

Extreme ultraviolet light generation system and electronic device manufacturing method

An extreme ultraviolet light generation system, generating extreme ultraviolet light by irradiating a target substance with laser light, includes a tank storing the target substance in a liquid state, a nozzle outputting the target substance stored in the tank, a piezoelectric element applying vibration to the target substance to be output from the nozzle to generate droplets of the target substance, a droplet detection device detecting a time interval of passage of the droplets output from the nozzle, and at least one processor. The processor acquires a first value of a vibration parameter relating to the vibration of the piezoelectric element, acquires a variation of the time interval corresponding to each of a plurality of values including the first value of the vibration parameter, and generates the droplets using a second value with which the variation of the time interval is smaller than that with the first value.
Owner:GIGAPHOTON INC

X-ray generation apparatus and x-ray imaging apparatus

X-ray generation apparatus includes X-ray generation tube, driving circuit, and accommodating container. The X-ray generation tube includes insulating tube with first and second opening ends, cathode closing the first opening end and having electron emitting portion, and anode closing the second opening end and having target. The accommodating container has third opening end, and the X-ray generation tube closes the third opening end. The accommodating container defines first space storing the driving circuit, and second space protruding from the first space and storing at least part of the X-ray generation tube. The accommodating container includes protrusion portion surrounding the second space, and one end of the second space forms the third opening end.
Owner:CANON ANELVA CORP

Medical imaging system with a main rail system and a backup rail system

The invention relates to a medical imaging system (1) comprising a computer tomography gantry (20), a carriage (F), a main rail system (L) and a safety rail system (S), - wherein the computer tomography gantry (20) is movably mounted by means of the carriage (F) and the main rail system (L) such that a translational movement of the computer tomography gantry (20) can be carried out along the main rail system (L), - wherein the carriage (F) and the main rail system (L) are designed to transmit a drive force for the translational movement of the computed tomography gantry (20) from the carriage (F) to the main rail system (L) in a force-locking manner, - wherein the safety rail system (S) comprises at least one safety rail (SL) and at least one coupling element (KO), wherein the at least one safety rail (SL) is arranged on a floor section and is aligned in the same direction as the main rail system (L), wherein the coupling element (KO) is arranged on the carriage (F) or on the computed tomography gantry (20), wherein the coupling element (KO) is connected to the safety rail (SL) by means of a rear grip and / or in a form-fitting manner to prevent the computed tomography gantry (20) from tipping over.
Owner:SIEMENS HEALTHINEERS AG

EUV collector mirror and aperture insert therefore

An EUV collector mirror (22) for a light source module has a collector surface with a reflection surface (23) for reflecting usable EUV light, which impinges on the reflection surface (23) from a source region to a subsequent EUV optics and an in an aperture (29) for pump light. The inner aperture (29) has an aperture surface area, which is smaller than 1.4 % of a surface area of the collector surface. Described is also an aperture insert (37) for insertion into a main aperture (36) of the EUV collector mirror (22), to reduce a size of an effective aperture for the pump light.
Owner:CARL ZEISS SMT GMBH +1

X-ray generation apparatus and x-ray imaging apparatus

An X-ray generation apparatus includes an X-ray generation tube. The tube includes an insulating tube with a first opening end and a second opening end, a cathode arranged to close the first opening end of the insulating tube and including an electron emitting portion, and an anode arranged to close the second opening end and including a target that generates X-rays when electrons from the electron emitting portion collide; and an accommodating container configured to accommodate the X-ray generation tube, wherein the accommodating container has a third opening end, and the anode is arranged to close the third opening end, the accommodating container is filled with an insulating liquid to contact a part of the anode, and at least a part of an outer surface of the insulating tube is surrounded by a member so as to reduce abnormal discharge between the cathode and the anode via the insulating tube.
Owner:CANON ANELVA CORP

X-ray generation apparatus and x-ray imaging apparatus

X-ray generation apparatus includes: X-ray generation tube, cathode having electron emitting portion, and anode having target; driving circuit for driving the X-ray generation tube, and accommodating container accommodating the X-ray generation tube and the driving circuit. The accommodating container defines first space storing the driving circuit, and second space protruding from the first space and storing at least part of the X-ray generation tube, the accommodating container includes protrusion portion surrounding the second space. The second space includes third space where X-rays from the target enter without being blocked by either the cathode or the anode, and fourth space where X-rays from the target are blocked by the cathode or the anode.
Owner:CANON ANELVA CORP

Connector retention cap assembly

A connector retention cap assembly includes an outer plate, an inner plate, at least one biasing mechanism, and a retention member. At least one biasing mechanism is disposed between the outer plate and the inner plate and biases the outer plate from the inner plate. A retainer connects the inner panel to the outer panel and limits displacement of the inner panel away from the outer panel within a maximum distance.
Owner:VAREX IMAGING CORP

Mechanical device capable of realizing three-dimensional motion of magnetic array of vacuum internal undulator

The invention discloses a mechanical device capable of realizing three-dimensional motion of a magnetic array of a vacuum internal undulator, and the mechanical device comprises a layered supporting structure which comprises an upper-layer mounting plate and a lower-layer mounting plate which are superposed through an orthogonal linear guide rail; the three-dimensional movement mechanism comprises an x-direction movement mechanism, a y-direction movement mechanism and a z-direction movement mechanism; the anti-interference mechanism is used for separating the x-direction motion path from the z-direction motion path through sliding connection; the copper foil dynamic connecting mechanism is used for realizing continuous electric connection between the moving magnetic array and the static flange plate; wherein motion decoupling is achieved through the anti-interference mechanism, and the mechanical device can achieve linear motion of the magnetic array in the x direction, the y direction and the z direction. Through the three-dimensional motion mechanism, the anti-interference mechanism and the copper foil dynamic connection mechanism, the problems that a traditional undulator magnetic array is single in motion and copper foil is prone to breakage are solved, the adaptability, stability and precision of equipment are remarkably improved, and the undulator has important engineering application value.
Owner:SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI

Cooling apparatus and radiation apparatus

A cooling apparatus and a radiation apparatus using same. The cooling apparatus (100) can be used for cooling an X-ray source (200) in the radiation apparatus. The cooling apparatus (100) comprises: a structural frame (110); a heat dissipation device (120), installed inside the structural frame (110), the heat dissipation device (120) being configured to form a heat dissipation airflow passing therethrough; and a cooling unit (130), installed inside the structural frame (110) independently of the heat dissipation device (120), and located in a region through which the heat dissipation airflow flows; wherein the cooling unit (130) is configured to provide a cooling medium to flow through the X-ray source (200) for heat exchange, and the heat dissipation device (120) is further configured to communicate with the cooling unit (130) to dissipate heat from the cooling medium entering the interior of the heat dissipation device (120).
Owner:NUCTECH CO LTD +2

High pressure and deep vacuum electrical feedthrough

PCT designated stage expiredWO2025131697A1X-ray tube with very high currentX-ray apparatus
A detection system is configured for a target material reservoir. The detection system includes: a feedthrough housing associated with a wall of the target material reservoir, the feedthrough housing defining a seal surface; an electrically-conductive member extending through the feedthrough housing; and a compressible element that is electrically insulating. The electrically-conductive member is inside the compressible element. The compressible element contacts the feedthrough housing at the seal surface of the feedthrough housing. The interface between the feedthrough housing seal surface and a surface of the compressible element forms a hermetic seal when the compressible element is compressed.
Owner:ASML NETHERLANDS BV

High-power compact VUV laser-sustained plasma light source

A compact LSP broadband light includes a gas containment structure containing a mixture of a first noble gas and a second noble gas, a filter tube positioned within the gas containment structure, an input window, and a pump source. The laser pump source directs an optical pump through the input window to sustain a plasma within the filter tube. The first noble gas absorbs broadband light within a first and a second wavelength band. The filter tube absorbs broadband light having a wavelength below a selected threshold. The absorption of broadband light by the first noble gas and the filter tube provide long-pass filtering to protect one or more downstream optical elements. The gas containment structure includes an output optical window for transmission of filtered broadband light. The gas containment structure includes a gas inlet and outlet for generating a reverse vortex flow pattern within the filter tube.
Owner:KLA CORP

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

An extreme ultraviolet light generation apparatus includes a target supply unit, a target passage detection device, a delay circuit, a laser device, a target image capturing device, and a processor. Here, the processor controls the vibrating element to provide irregular intervals between droplet targets adjacent to each other; generates integrated image data by integrating plural pieces of image data imaged at different times; specifies a position, in the integrated image data, of the droplet target most emphasized in the integrated image data; and sets a delay time based on a distance from a position of the most emphasized droplet target to a second detection position.
Owner:GIGAPHOTON INC

Method for temperature control of an X-ray device, X-ray device and computer program product

The invention relates to a method for controlling the temperature of an X-ray device, comprising: - Acquiring planning information comprising at least one operating parameter of at least one component of the X-ray device for a planned operation of the X-ray device, - identifying a planning temperature of the at least one component of the X-ray device based on the at least one operating parameter, - Operating the X-ray machine according to the planning information, wherein a temperature control unit of the X-ray device is controlled before and / or during operation of the X-ray device based on the planning temperature such that the temperature control unit tempers the at least one component of the X-ray device to a predefined temperature or a predefined temperature range by providing a heating and / or cooling power. The invention further relates to an X-ray device and a computer program product.
Owner:SIEMENS HEALTHINEERS AG

Method for efficiently generating high-brightness gamma radiation

The invention discloses a method for efficiently generating high-brightness gamma radiation, and belongs to the technical field of radiation. A relativistic electron beam is injected into the porous microstructure foam target material, and high-brightness gamma ray radiation is generated. According to the method, the used device is simple, only the single relativistic electron beam and the porous microstructure foam target material are needed to interact, compared with a traditional uniform-density solid material, the energy conversion efficiency in the interaction process of the electron beam and a substance can be remarkably improved, and the energy conversion efficiency can be remarkably improved through the effective constraint effect of a high-intensity magnetic field. And the problems of low energy conversion rate, low light source brightness, poor radiation directivity, complex device or difficulty in experiment implementation and the like of the existing high-energy gamma ray radiation source are solved.
Owner:SHENZHEN TECH UNIV

Arrangement, system and method for generating EUV radiation or for operating nuclear fusion, as well as manufacturing methods for producing microchips or semiconductor intermediates for producing microchips

Arrangement (26) for generating EUV radiation or for operating nuclear fusion by irradiating a target material (28) with a plurality of laser beams (20, 22, 24). The arrangement (26) comprises a target chamber (32) having an interior (34) with a target area (36) for irradiating the target material (28) with the plurality of laser beams (20, 22, 24), an insertion device (38) for introducing the target material (28) into the target area (36), and a manipulation device (46) for shaping and / or positioning the target material (28) in the target area (36).
Owner:TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE

EUV Light Source Target Metrology

PendingUS20250185147A1Laser detailsPhotomechanical apparatusLine widthNd:YAG laser
Disclosed is a system for and method of performing target metrology in an extreme ultraviolet light source in which illumination for a target imaging / detection system is selected to have a center wavelength less than 400 nm. In some embodiments the illumination is additionally selected to have a line width of at least 4 nm. In some embodiments illumination is obtained as a second harmonic of a Ti:sapphire laser or as a harmonic of an Nd:YAG laser.
Owner:ASML NETHERLANDS BV

Semiconductor processing tool and methods of operation

An extreme ultraviolet (EUV) source includes a collector associated with the vessel. The extreme ultraviolet (EUV) source includes a plurality of vanes along walls of the vessel. Each vane includes a stacked vane segment, and the stacked vane segments for each vane are stacked in a direction of drainage of tin (Sn) in the vessel. The EUV source includes a thermal control system comprising a plurality of independently controllable heating elements, where a heating element is configured to provide localized control for heating of a vane segment of the stacked vane segments.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Remote control of cathode width voltage

Methods and systems are provided for controlling an electron beam generated by an X-ray tube assembly including a unipolar cathode with a long cable between driving electronics of the cathode and the X-ray tube. A voltage supplied to a gridding electrode of the cathode is controlled by a multi-stage switching unit including a first control circuit and a second control circuit. A bias voltage for switching the cathode on is generated by a high precision voltage source of the second control circuit, and a gridding voltage for switching the cathode off is generated by voltage sources of the first control circuit. A time taken to transition between the gridding voltage and the bias voltage is advantageously reduced by decreasing the supplied voltage to a common voltage (e.g., 0 V) in a first step, and then increasing the supplied voltage to the bias voltage or the gridding voltage in a second step.
Owner:GE PRECISION HEALTHCARE LLC

Reducing an electron emission of an electron emitter

A method for reducing electron emission of an electron emitter comprises: emitting electrons from a first current path via at least one first field effect emitter element, subject to an emission voltage between a gate electrode and an emission surface; determining a property of the first current path; and activating a first current limiting unit subject to the properties of the first current path to reduce the electron emission of the electron emitter.
Owner:SIEMENS HEALTHINEERS AG

X-ray generation apparatus and x-ray imaging apparatus

An X-ray generation apparatus includes: an X-ray generation tube including an insulating tube with a first opening end and a second opening end, a cathode arranged to close the first opening end of the insulating tube and including an electron emitting portion, and an anode arranged to close the second opening end and including a target that generates X-rays when electrons from the electron emitting portion collide; and an accommodating container configured to accommodate the X-ray generation tube, wherein the accommodating container has a third opening end, and the X-ray generation tube is arranged to close the third opening end, the accommodating container is filled with an insulating liquid, an outer surface of the cathode includes a cylindrical side surface and a circular bottom surface, and at least the entire side surface of the outer surface is surrounded by a member.
Owner:CANON ANELVA CORP

Power supply circuit for an X-ray device, X-ray device and method for operating an X-ray device

The invention relates to a power supply circuit for an X-ray device, comprising a voltage supply unit and a monitoring unit, wherein the power supply unit has an operating path and a maintenance path, wherein the operating path is designed to supply several components of the X-ray device for normal operation, wherein the maintenance path is designed to feed a subset of the plurality of components of the X-ray device for maintenance operation, wherein the monitoring unit is designed to detect an input voltage at a voltage supply input of the voltage supply unit by means of a sensor, wherein the voltage supply unit is designed to provide an electrical operating voltage via the operating path or an electrical maintenance voltage via the maintenance path to the respective components as a function of the input voltage. The invention further relates to an X-ray device and a method for operating an X-ray device.
Owner:SIEMENS HEALTHINEERS AG

HIGH BRIGHTNESS X-RAY REFLECTION SOURCE

ActiveDE112019003777B4X-ray tube laminated targetsX-ray tube anode coolingIridiumTitanium nitride
An X-ray target (10) comprising: a thermally conductive substrate (20) having a surface (22); and a plurality of structures (30) which are separated from one another, on or embedded in at least a portion of the surface (22), each of the at least two structures (30) of the plurality of structures (30) comprising: a thermally conductive first material (32) in thermal communication with the substrate (20), and at least one layer (40) over the first material (32), wherein the at least one layer (40) comprises at least one second material (42) that is different from the first material (32), wherein the at least one second material (42) is configured to generate X-rays when irradiated by electrons, wherein the first materials (32) of the at least two structures (30) are separated from each other and the at least one second material (42) of the at least two structures (30) are separated from each other and different from each other, and wherein the at least one layer (40) further comprises at least one third material (44) between the first material (32) and the at least one second material (42), wherein the at least one third material (44) is different from the first material (32) and the at least one second material (42), and the at least one third material (44) has a thickness between 2 nanometers and 50 nanometers and / or the at least one third material (44) comprises at least one of the following materials: titanium nitride, iridium, chromium, beryllium and hafnium oxide.
Owner:SIGRAY INC