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52 results about "Charge-coupled device" patented technology

A charge-coupled device (CCD) is a device for the movement of electrical charge, usually from within the device to an area where the charge can be manipulated, such as conversion into a digital value. This is achieved by "shifting" the signals between stages within the device one at a time. CCDs move charge between capacitive bins in the device, with the shift allowing for the transfer of charge between bins.

Deformable tracked pipeline robot and differential turning method thereof

ActiveUS20250180152A1Pipe elementsEndless track vehiclesComputer graphics (images)Charge coupled device camera
Provided are a deformable tracked pipeline robot, and a differential turning method thereof. The deformable tracked pipeline robot includes a robot main body. Three tracked foot modules in a circular array are arranged on an outer side surface of the robot main body, each tracked foot module is connected to the robot main body through a center variable-diameter module. A spacing between the tracked foot module and the robot main body can be adjusted through the center variable-diameter module, making all three tracked foot modules in contact with an inner wall of a pipeline. According to a differential turning method based on space curve measurement, the pipeline robot can pass through pipelines with various curvature radii. A pipeline axis is measured by a Charge Coupled Device camera module as a bending curvature of a space curve. The accuracy of space curve fitting is improved by a recursive algorithm.
Owner:ZHONGBEI UNIV

Visual image processing method and device based on strain mechanism, equipment and medium

The invention discloses a visual image processing method and device based on a strain mechanism, equipment and a medium, and the method comprises the steps: obtaining the energy information of a plurality of light quanta based on a charge-coupled device camera or an infrared camera, and extracting the change elements between the light quanta based on the energy information of the light quanta, the change elements comprise fluctuation difference change, dimension change and frequency change; a plurality of energy fields are generated according to the change elements between the light quanta, the energy fields comprise a plurality of pieces of feature information, and the types of the feature information comprise boundary features, morphological features and scale features; according to the feature information of the energy fields, spatial reasoning is carried out, the energy fields are spliced, and the geometrical shape of the object is obtained. The invention belongs to the field of image processing. According to the visual image processing technology based on the strain mechanism, a general algorithm for visual image processing is realized, the global application problem is solved, the interested target can be accurately and reliably found in any environment, and the energy consumption is reduced.
Owner:SICHUAN KANGJISHENG TECHNOLOGY CO LTD

Incident beam wavefront detection method based on wavefront reconstruction neural operator

The invention belongs to the technical field of optical detection, and particularly relates to an incident beam wavefront detection method based on a wavefront reconstruction neural operator. According to the invention, an optical heterogeneous receiving and self-supervised training wavefront SWRNO technology is adopted; the optical heterogeneous receiver detects light field intensity distribution at different depth positions so as to weaken precision loss caused by uncertain problems; the SWRNO is composed of a neural network embedded by a light field propagation physical model; self-supervision training is carried out on the SWRNO through a pre-training data set collected by a simulation platform, a model obtained through training can establish direct mapping from received light field intensity to a wavefront phase, and the model serves as a neural operator to reconstruct wavefront through light field intensity detected by charge-coupled device image sensors, namely CCD cameras, at different depths; the method has the advantages of higher resolution, lower cost and higher wavefront reconstruction precision; and wavefront fluctuation characteristics with finer granularity can be detected, and the method has great significance for a self-adaptive optical system serving FSO.
Owner:FUDAN UNIVERSITY

Bevel sealing system and method of using the same

In an embodiment, a bevel sealing system includes a dispensing chamber that includes a first chuck configured to support a workpiece, the workpiece including a first wafer bonded to a second wafer, where the first wafer and the second wafer include beveled edges, a sealant dispenser configured to apply sealant along a perimeter of a bonding interface between the first wafer and the second wafer, a first Charge-Coupled Device (CCD) camera configured to capture 2-dimensional (2D) images of edges of the workpiece, and a first laser edge profiler configured to measure and collect profile data of the edges of the workpiece.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

High-resolution velocity field image optical measurement method and system based on coherent detection

The invention belongs to the technical field of intelligent sensors, and particularly relates to a high-resolution velocity field image optical measurement method and system based on coherent detection. The method comprises the specific steps that light output by an intensity modulation laser is split into reflected light and reference light, the reflected light passes through a reflected light path and then enters an object to be measured, and the reference light passes through a reference light path and then enters a coherent image sensor together with a reflected light beam reflected by the object to be measured; the coherent image sensor comprises a space bridge and four charge-coupled devices, the space bridge splits incident light into four paths through beam splitting control, so that the four paths of incident light are uniformly distributed on the four charge-coupled devices, and the space bridge regulates the polarization state of the incident light; after a set integral exposure time, the controller collects voltage signals in each pixel unit of the four charge-coupled devices, combines the voltage signals and performs coherent processing to obtain a fundamental frequency signal, and calculates a target speed according to the fundamental frequency signal.
Owner:BEIJING INST OF TECH +1

Time-of-flight secondary ion mass spectrometry focusing offset measurement and calibration method and application

The invention relates to a time-of-flight secondary ion mass spectrometry focusing offset measurement and calibration method and application. Preparing a verification workpiece based on a micro-nano machining technology; the method comprises the following steps: placing a verification workpiece in a time-of-flight secondary ion mass spectrometry (ToF-SIMS) system, and acquiring an optical image and a secondary ion image SI of a charge-coupled device (CCD) of each dot-matrix array; the CCD optical image of each dot-matrix array is used as a reference image, image superposition comparison is carried out on the reference image and the corresponding SI image, a plurality of feature points are selected, the two-dimensional position deviation of each feature point in the SI image relative to the corresponding feature point in the CCD optical image is measured, the average value of the two-dimensional position deviation of all the feature points in each dot-matrix array is calculated, and the two-dimensional position deviation of all the feature points in each dot-matrix array is calculated. The focusing offset of the dot matrix array corresponding to each feature size is obtained; focusing offset data measured in the dot-matrix arrays are summarized, and a function relation between the feature size and the focusing offset is constructed and used for offset calibration or parameter adjustment of the time-of-flight secondary ion mass spectrometry system.
Owner:INSTITUTE OF PHYSICS CHINESE ACADEMY OF SCIENCES

Three-dimensional integrated charge-coupled device based imager

A 3D CCD based imager, comprising: a photosensitive layer, comprising a plurality of pixels to perform photoelectric conversion; a CCD gate stack, configured to store and transfer charge; and a readout layer, configured to read out a signal representative of the charge stored in the CCD gate stack. The CCD gate stack comprises: a plurality of gate layers and a plurality of spacer layers, which are alternatingly arranged one on the other along a first direction; a plurality of channels extending in the CCD gate stack along the first direction, for forming a plurality of strings of charge storage capacitors; and a plurality of dielectric layers extending in the CCD gate stack along the first direction, configured to isolate the plurality of channels from the plurality of gate layers.
Owner:INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)

A dynamic beam quality measurement device based on a fast deflecting mirror and microlens group

This invention provides a dynamic beam quality measurement device based on a fast deflecting mirror and a microlens group, comprising a first fast deflecting mirror, a second fast deflecting mirror, a microlens group, a focusing lens, and a charge-coupled device (CCD) camera arranged sequentially along the optical path. The first fast deflecting mirror reflects the laser beam to be measured onto the second fast deflecting mirror, and the second fast deflecting mirror reflects the laser beam modulated by the first fast deflecting mirror to the centers of different microlenses within the microlens group. The microlens group consists of multiple microlenses. The focusing lens is arranged in the transmission optical path of the microlens group, and the CCD camera is arranged at the focal point of the focusing lens in the transmission optical path of the focusing lens. In this invention, a single image acquired by the CCD camera can capture the distribution of four laser beam spots focused by lenses with different focal lengths. Combined with the high-speed deflection of the two fast reflecting mirrors, dynamic measurement of laser beam quality can be achieved while ensuring measurement accuracy.
Owner:HANGZHOU INST FOR ADVANCED STUDY UCAS

Liquid crystal on silicon for multiple charge-coupled device camera alignment

A method for verifying alignment of image sensors of a CCD camera, the method including casting a collimated light source through an LCOS controlled to be disposed in a first pattern, onto the image sensors to form a second pattern on each of the image sensors, the LCOS disposed between a collimated light source and the CCD camera, frame-differencing the first pattern with the second pattern of each of the image sensors to result in a differencing result for each of the image sensors, and adjusting at least one of an orientation and a position of one of the image sensors if the differencing result for the one of the image sensors is non-zero, to result in an optical mapping of pixel cells of the LCOS and pixel cells of each of the image sensors.
Owner:ML OPTIC CORP

Laser marking method, device and equipment and storage medium

The invention discloses a laser marking method, device and equipment and a storage medium, and relates to the technical field of product machining, and is applied to a laser marking system.The method comprises the steps that an image of a to-be-machined workpiece is shot through a charge-coupled device camera, and the position and direction of the to-be-machined workpiece are obtained through recognition based on the image of the to-be-machined workpiece; displaying the image of the to-be-processed workpiece in a display screen; the click position of the user in the display screen is received, the laser head is controlled to move to the corresponding position of the to-be-machined workpiece for laser marking based on the position and direction of the to-be-machined workpiece, and flexible marking operation can be conducted at any position of a product according to actual requirements.
Owner:SHENZHEN TETELASER TECH CO LTD

Wafer cleaning nozzle efficiency quantitative characterization method and system based on fluorescence tracing imaging technology

The invention discloses a wafer cleaning nozzle efficiency quantitative characterization method and system based on a fluorescent tracing imaging technology, and belongs to the technical field of semiconductor cleaning. The method comprises the following steps: uniformly mixing a pollutant standard solution with controllable viscosity and a fluorescent tracer agent to form a pollutant simulation solution capable of being quantitatively traced; spin-coating quantitative pollutant simulation liquid on the surface of the test substrate based on spin-coating equipment to form a uniform pollution layer; a to-be-evaluated cleaning nozzle is adopted to carry out directional cleaning on a preset polluted substrate, a fluorescence tracer is excited through an excitation light source, and a fluorescence signal distribution image in the cleaning process is collected through a charge-coupled device camera imaging system; the pollutant residual rate is accurately calculated through an image processing algorithm, and a quantitative evaluation index of the nozzle cleaning efficiency is established. According to the invention, visual monitoring of the whole cleaning process and accurate quantitative evaluation of the cleaning efficiency are realized, and a scientific quantitative basis is provided for parameter optimization and process verification of high-precision cleaning equipment.
Owner:XI AN JIAOTONG UNIV

Charge transfer element

PCT designated stageWO2026053284A1Electrical connectionEngineering physics
A charge transfer element (10) according to the present invention includes a substrate (101), a lower insulating film (102), a semiconductor channel (12), and an upper insulating film (103) in this order in the direction perpendicular to the surface of the substrate, and also includes a first gate (14) and a second gate (15), which are disposed in the lower insulating film or the upper insulating film, a source region (11) electrically connected to one end of the semiconductor channel, and a drain region (13) electrically connected to the other end of the semiconductor channel. The first gate and the second gate are disposed above the semiconductor channel to be in parallel in the direction in which the semiconductor channel extends, the source region includes a p-type semiconductor or a n-type semiconductor, and the drain region includes a semiconductor of a conductivity type opposite to the conductivity type of the source region. Thus, the present invention can provide a charge transfer element enabling the selection between electrons and holes and capable of transferring a single charge by a single element.
Owner:NT T INC

Device for measuring back engagement of slitting knife

Provided in the present application is a device for measuring the back engagement of a slitting knife. The device comprises a support unit and a measurement unit, wherein a knife holder of a slitting knife is placed on the support unit; and the measurement unit is connected to the support unit, and the measurement unit comprises a charge-coupled device (CCD) sensor assembly, the CCD sensor assembly being arranged towards the slitting knife, so as to measure the back engagement of the slitting knife. Compared with the determination of back engagement in a manual visual observation manner, using the CCD sensor assembly to measure the back engagement of the slitting knife can improve the measurement efficiency and the measurement precision, thereby guaranteeing the quality of products.
Owner:EVE POWER CO LTD

Word line contact scheme in integrated three-dimensional charge-coupled device memory

The invention relates to a charge-coupled device (CCD) memory. Specifically, the present disclosure provides a design and contact scheme for a three-dimensional (3D) integrated CCD memory, which may be a multi-phase CCD memory. The 3D CCD memory includes a stack including a plurality of gate layers and spacer layers alternately arranged one above the other along a first direction; a plurality of semiconductor-based channels extending in the stack. The channel is combined with the gate layer and one or more gate dielectric layers to form a plurality of charge storage capacitor strings operable as a plurality of CCD registers. A plurality of contact vias extend in the stack. Each contact via is associated with one of a plurality of groups of non-intersecting gate layers, and is electrically connected to all of the gate layers of the group associated therewith, where at least one group includes two or more gate layers.
Owner:INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)

Multi-Bandgap Charge-Coupled Device (CCD)

A CCD comprises: a primary device configured to capture visible light and comprising: a first layer comprising a first semiconductor material; and a second layer comprising a second semiconductor material; and a secondary device configured to capture near-IR light and comprising: a third layer comprising a third semiconductor material and positioned such that the second layer is between the first layer and the third layer; and a fourth layer comprising a fourth semiconductor material and positioned such that the third layer is between the second layer and the fourth layer.
Owner:THE BOARD OF RGT UNIV OF OKLAHOMA

Single-exposure super-resolution microscopic digital holographic system and method

The invention relates to a single-exposure super-resolution microscopic digital holography system and a single-exposure super-resolution microscopic digital holography method, and belongs to the technical field of microscopic digital holography and synthetic aperture. The system is obtained by improving a Mach-Zehnder holographic optical path. The single-exposure super-resolution microscopic digital holographic system comprises an illumination modulation subsystem and a microscopic imaging subsystem. The illumination modulation subsystems are used for dividing the collimated light beam into six inclined light beams with different optical paths, the six inclined light beams with the same inclination angle and different optical paths are used for irradiating an object needing to be observed, and the object light path and the reference light path both comprise the illumination modulation subsystems; the microscopic imaging subsystem is used for amplifying an image formed by an object and finally imaging the image on the charge-coupled device; the reference light beam and the object light beam interfere on the image collector to form interference fringes, the interference fringes comprise amplitude and phase information of a sample, the computer collects the interference fringes, and the interference fringes are reproduced through the computer and further processed to obtain sample information exceeding the diffraction limit of the system.
Owner:KUNMING UNIV OF SCI & TECH

AI-assisted raman spectroscopy for diagnosis and analysis of intraocular tumors

These inventions disclose a non-invasive diagnostic system for intraocular tumor detection using AI-assisted Raman spectroscopy. A monochromatic laser source directs excitation light into intraocular tissue, generating Raman-scattered light that is collected and processed by a spectrometer equipped with a charge-coupled device (CCD). The resulting spectral data is analyzed by an artificial intelligence (AI) processor trained to detect spectral features associated with intraocular tumors. The system identifies known and newly discovered biomarkers, enabling real-time classification, risk stratification, and longitudinal monitoring of tumor evolution. An integrated user interface displays diagnostic results for clinical decision-making. The system supports dynamic updates to the AI model and biomarker database post-deployment, providing adaptive learning capabilities that extend its utility over time. Applications include detection of uveal melanoma, retinoblastoma, metastatic tumors, and related ocular pathologies. The inventions offer high sensitivity and specificity through multi-modal integration, advanced signal processing, and adaptable machine learning frameworks.
Owner:REYNARD MICHAEL

Preparation and application method of copper-iodine cluster-based micro-cubic scintillator and film

The present invention relates to a method for preparing and applying copper-iodine cluster-based microcube scintillator and thin film, which is a microcube scintillator capable of generating ionizing radiation excitation emission. The microcube scintillator comprises a copper-iodine cluster-based microcube scintillator doped in a substrate layer. The chemical formula of the copper-iodine cluster-based microcube scintillator is C 18 H 38 Cu4I6N4. The substrate layer is a polymer with high light transmittance, excellent chemical stability and good mechanical properties. Another aspect of the present invention is an ionizing radiation imaging system, in which the microcube scintillator is placed behind the digital camera of the substrate layer doped with the microcube scintillator. The photodetector can be any of the following. Typically, the photodetector is a photomultiplier tube (PMT) detector, a thin film transistor (TFT) photodiode sensor, a charge-coupled device (CCD) sensor, a complementary metal-oxide-semiconductor (CMOS) sensor or an indium gallium zinc oxide (IGZO) TFT sensor.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Radiometric calibration method for multi-ccd mosaic wide-field camera in orbit

The application provides a method for on-orbit radiation calibration of a multi-CCD (Charge-Coupled Device) spliced wide camera, which comprises the following steps: obtaining spliced remote sensing image data obtained when the wide camera with multiple CCDs passes through a calibration field; determining an absolute radiation calibration coefficient of any CCD as a reference CCD; recording a CCD with overlapping area of remote sensing image data of the reference CCD as a CCD to be calibrated; selecting multiple first areas in the remote sensing image data of the reference CCD in the overlapping area, and obtaining multiple second areas of remote sensing image data of the CCD to be calibrated based on the first areas; obtaining a third area in each first area and calculating radiance, and obtaining a fourth area in each second area and calculating an average pixel brightness value; obtaining an absolute radiation calibration coefficient of the CCD to be calibrated through linear fitting, and completing radiation calibration of other CCDs to be calibrated according to the absolute radiation calibration coefficient.
Owner:AEROSPACE INFORMATION RES INST CAS

Laser detection and treatment all-in-one machine and laser output control method

ActiveCN119632504AEasily damagedImprove the effect of laser treatmentSurgical instrument detailsSensorsBand-pass filterOutput device
The embodiment of the invention discloses a laser detection and treatment all-in-one machine and a laser output control method. According to one specific embodiment, the laser detection and treatment all-in-one machine comprises Raman detection information acquisition equipment, semiconductor laser output treatment equipment and touch screen processing equipment, the Raman detection information acquisition equipment comprises Raman exciting light output equipment, an exciting light transmission optical fiber, a collimating mirror, a Raman pump light narrow-band pass filter, a replaceable focusing mirror, a reflecting mirror, a Raman signal light transmission optical fiber, a first replaceable double-color piece, a second replaceable double-color piece, a third replaceable double-color piece and a first charge-coupled device camera; the system comprises a first charge-coupled device camera, a second charge-coupled device camera, a third charge-coupled device camera, an upper computer connecting line and an analog-to-digital converter. The Raman detection information acquisition equipment is used for acquiring Raman spectrum data of the to-be-detected object; the touch screen processing device is configured to perform tissue anomaly detection and laser output steps. According to the embodiment, the laser treatment effect is improved, and the operation treatment time is shortened.
Owner:LINGSU MEDICAL TECH (SHAANXI) CO LTD

A laser vibration measuring device suitable for 0.1 mHz~10 kHz

The application provides a laser vibration measuring device suitable for 0.1mHz-10kHz, which comprises a laser light source, a first polarization beam splitter prism, a second polarization beam splitter prism, a quarter-wave plate, a beam splitter, a first mirror, a second mirror, a frequency modulation device, a charge coupled device camera and a photoelectric detector arranged along an optical path in sequence. The laser vibration measuring device suitable for 0.1mHz-10kHz of the application uses a high-precision charge coupled device camera to measure the vibration parameters of a low-frequency vibrating object by measuring the interference fringes of light and dark, uses a photoelectric detector to measure the Doppler frequency shift to obtain the vibration parameters of a high-frequency vibrating object, and no matter whether the obtained vibration parameters are displacement or velocity, the vibration frequency can be converted through a mathematical relationship to realize vibration measurement, can be applied to the vibration measurement of most vibrating objects under the premise of ensuring good measurement accuracy, and thus the range of vibration measurement is greatly improved.
Owner:HANGZHOU INST FOR ADVANCED STUDY UCAS

3D integrated charge-coupled device memory

The present disclosure relates to a three-dimensional (3D) integrated charge-coupled device (CCD) block addressable storage class memory (SCM). The 3D CCD memory includes a layer stack including a plurality of gate layers and spacer layers alternately arranged one above the other along a first direction. The memory also includes a plurality of semiconductor-based channels extending in the stack, where the channels in combination with the gate layer and the one or more dielectric layers form a plurality of charge storage capacitor strings operable as a plurality of CCD registers. The memory includes a plurality of blocks, where each block includes a plurality of sub-blocks, and where each sub-block includes a set of CCD registers. Each block and each sub-block of the block are individually selectable in order to write information into at least one CCD register of the sub-block of the block.
Owner:INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)

Charge-coupled device with multi-well structure and preparation method thereof

PendingCN120379369AChannel-stopperPolysilicon gate
The invention discloses a charge-coupled device with a multi-well structure and a preparation method of the charge-coupled device. The epitaxial layer is arranged on the substrate; the composite well region is arranged on the epitaxial layer and comprises a first well, a second well and a third well, and the first well and the third well form a saddle point in the center of a pixel, so that well doping below a CCD pixel unit needs to be weaker than that on the two sides, a weak doping channel of the composite well region is formed, and the composite well region is used for a charge-coupled device to discharge excess charges; the CCD charge channel is arranged on the composite well region; the channel resistors are arranged on the composite well region, located on the two sides of the CCD charge channel and used for achieving isolation of the CCD charge channel between different unit columns of the charge-coupled device; the dielectric layer is arranged on the upper surfaces of the CCD charge channel and the channel resistor; and the polysilicon gate is arranged on the upper surface of the dielectric layer and is used as a functional electrode of the charge-coupled device. Therefore, the CCD device has the capability of discharging excess charges.
Owner:SUZHOU R&D CENT OF NO 214 RES INST OF CHINA NORTH IND GRP

Humidity sensor based on tunable photonic crystal grating and preparation method thereof

The invention discloses a humidity sensor based on a tunable photonic crystal grating and a preparation method of the humidity sensor, and belongs to the technical field of optical sensing, the sensor comprises the tunable photonic crystal grating formed by compounding a single-layer polystyrene microsphere array and humidity sensitive hydrogel, the lattice spacing of microspheres is regulated and controlled through hydrogel humidity response deformation, and the humidity sensitive hydrogel is obtained. The humidity change is converted into accurate displacement of Bragg reflection wavelength, a Czerny-Turner optical path structure is combined, spectral displacement is analyzed in real time by utilizing a linear array charge-coupled device, and high-precision detection of humidity is realized. Through a semi-embedded microsphere-hydrogel interface stress transfer structure, the sensitivity, precision and anti-interference capability of humidity detection can be improved.
Owner:ZHEJIANG UNIV

Spectral data acquisition method, cell classification method, and raman spectroscopy system

To provide a spectral data acquisition method which enables more uniform laser irradiation while reducing damage to cells further.SOLUTION: A spectral data acquisition method is provided, comprising circularly irradiating an area having cells 50 therein with laser light from a laser light source 12, receiving Raman scattered light emitted from the cells 50 caused by the irradiation using a spectroscope 14, and detecting a Raman spectrum corresponding to the received Raman scattered light using a CCD (charge-coupled device) detector 16.SELECTED DRAWING: Figure 1
Owner:NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY

A novel low-distortion optical fiber panel and its preparation method and application

The present invention relates to a novel low-distortion optical fiber panel and its preparation method and application, and belongs to the field of optical fiber components. The problem of optical fiber single-filament distortion caused by high-temperature melting and pressing is solved. The preparation method comprises the following steps: primary multifilament layout: the primary multifilament is arranged to form a regular hexagonal rod with tight stacking and arrangement, so as to obtain a primary multifilament rod; primary multifilament rod curing treatment: the gap in the primary multifilament rod is filled with ultraviolet curing glue by pouring and curing method, and then the ultraviolet curing glue is cured to obtain a preliminary blank rod; low-temperature melting and pressing: the blank rod is melted and pressed at a first preset temperature at a low temperature; and then the panel blank is obtained after cutting; polishing: the panel blank is optically polished to obtain a novel low-distortion optical fiber panel. The optical fiber panel is used for coupling with a charge coupled device or a complementary metal oxide semiconductor. The present invention utilizes the pouring and curing method of ultraviolet curing glue, and the optical fiber panel prepared has the advantages of low deformation and no grid noise.
Owner:CHINA BUILDING MATERIALS ACADEMY CO LTD

Calibration wafer and method for determining metrology positioning bias

A kind of calibration wafer and method for determining metrology positioning deviation, comprising: providing calibration wafer, which is provided with metrology monitor pad capable of being used for optical ellipsometric measurement, the film layer thickness of metrology monitor pad linearly changes in at least one preset direction;Calibration wafer is loaded to wafer bearing component, and linear scanning is carried out to target metrology monitor pad along preset direction using optical ellipsometric measurement equipment, to obtain the fitting regression line of film thickness with the change of scanning position, the theoretical center coordinates of target metrology monitor pad are obtained by fitting regression line;Charge-coupled device camera field of view center is positioned to theoretical center coordinates, and the actual thickness of film at theoretical center coordinates of target metrology monitor pad is obtained, the actual center coordinates corresponding to actual thickness of film are obtained by substituting actual thickness of film into fitting regression line, and the actual center coordinates are obtained based on actual center coordinates and theoretical center coordinates to obtain metrology positioning deviation.The method can significantly improve the calibration accuracy and reliability of optical ellipsometric measurement system.
Owner:SHENZHEN PENGXIN MICRO INTEGRATED CIRCUIT MFG CO LTD

RPC-based on-orbit geometric calibration method for spaceborne segmented linear-array camera

ActiveUS12462556B2Image enhancementImage analysisComputational physicsRational polynomial coefficient
A robust on-orbit geometric calibration (GC) method based on the rational polynomial coefficient (RPC) model for spaceborne segmented linear-array camera is proposed. Through a series of processing steps, including obtaining reliable ground control point (GCP) observations based a priori gross error elimination, constructing the adjustment model for GC parameters, GC for absolute geometric distortion, GC for relative geometric distortions among segmented charge-coupled devices (CCDs), and the correction for the created bias field-of-view (FOV) distortion, this invention is able to achieve robust GC for camera distortion, as well as accurate geometric splicing and registration of segmented CCDs under the same geometric benchmark.
Owner:WUHAN UNIV

Advanced package substrate through hole detection device and method based on gray field edge diffraction

The invention relates to an advanced packaging substrate through hole detection device and method based on gray field edge diffraction, and the device comprises a light source, a light beam shaping assembly, an upper objective lens 5, a lower objective lens 7, and a charge-coupled device 8. The light beam shaping assembly comprises an upper axicon lens 2 and a lower axicon lens 3. A light beam generated by the light source is shaped into an annular light beam through the light beam shaping assembly, the annular light beam penetrates through the upper objective lens 5 to be shaped into a spherical wave surface light beam, the spherical wave surface light beam penetrates through a through hole of a substrate to be detected to generate diffraction light waves, the lower objective lens 7 amplifies the diffraction light waves, and the diffraction light waves are amplified by the lower objective lens 7. And the charge-coupled device 8 receives the amplified diffraction light waves to obtain diffraction images of different through hole depths. According to the invention, the subtle change of the diffraction pattern in the imaging plane can be detected.
Owner:BEIJING SMARTCHIP MICROELECTRONICS TECHNOLOGY CO LTD +1