3769 results about "Rotary stage" patented technology

A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.

A lens unit and a sensor unit are held by a lens holding mechanism and a sensor shift mechanism. As the sensor unit is moved in a Z axis direction on a second slide stage, a chart image is captured with an image sensor through a taking lens so as to obtain in-focus coordinate values in at least five imaging positions on an imaging surface. An approximate imaging plane is calculated from the relative position of plural evaluation points which are defined by transforming the in-focus coordinate value of each imaging position in a three dimensional coordinate system. The second slide stage and a biaxial rotation stage adjust the position and tilt of the sensor unit so that the imaging surface overlaps with the approximate imaging plane.

A system for capturing and docking an active craft to a passive craft has a first docking assembly on the active craft with a first contact member and a spike projecting outwardly, a second docking assembly on the passive craft having a second contact member and a flexible net deployed over a target area with an open mesh for capturing the end of the spike of the active craft, and a motorized net drive for reeling in the net and active craft to mate with the passive craft's docking assembly. The spike has extendable tabs to allow it to become engaged with the net. The net's center is coupled to a net spool for reeling in. An alignment funnel has inclined walls to guide the net and captured spike towards the net spool. The passive craft's docking assembly includes circumferentially spaced preload wedges which are driven to lock the wedges against the contact member of the active craft. The active craft's docking assembly includes a rotary table and drive for rotating it to a predetermined angular alignment position, and mating connectors are then engaged with each other. The system may be used for docking spacecraft in zero or low-gravity environments, as well as for docking underwater vehicles, docking of ancillary craft to a mother craft in subsonic flight, in-flight refueling systems, etc.

The present invention is to make it possible to form a fine pattern, and improve a recording density on a magnetic recording medium and increase signal intensity. There is provided an electron beam irradiating method which irradiates an electron beam on a resist to perform irradiating using an electron beam irradiating apparatus provided with a moving mechanism which moves a state on which a substrate applied with the resist is put in one horizontal direction, and a rotating mechanism which rotates the stage. The electron beam irradiating method includes: exposing a portion once exposed while changing a deflection amount of the electron beam at least one time in the next round and rounds subsequent thereto, when exposure is performed while a deflection amount of an electron beam is being gradually changed so as to draw a concentric circle for each round.

A substrate-planarizing device and method of using the device comprising a substrate storage stage outside a room, and on a base inside the room, a multi-joint transfer robot, a temporary alignment platform, a movable transfer pad, a grinding process stage in which substrate holders that compose three stages of a substrate loading/unloading stage, a rough grinding stage, a finish grinding stage are arranged in a concentric pattern on the first index rotary table, and a polishing process stage that has a substrate holder table composing a substrate loading/unloading/finish polishing stage as well as a substrate holder table composing a rough polishing stage arranged in a concentric pattern on the second index rotary table.

The invention provides calibration method, device and calibration phantom of the geometric parameters in a CT (computer tomography) system. In the method, the calibration phantom is placed on a rotary table positioned between a light source and a detector, the calibration phantom comprises a calibration plate, as well as a small ball A and a small ball B which are arranged on the calibration plate, the calibration phantom is rotated for a circle along with the rotary table, and a center point coordinates of projection images of the small ball A and the small ball B are collected by the detector; the coordinate of an intersection point of a projective point line of projection ellipses of the small ball A and the small ball B is calculated and obtained according to the center point coordinates of the projection images and and the center coordinates of the projection ellipses of the small balls, and the torsion angle of the detector, the distance from the light source to the detector, the projection center point coordinate of the light source on a imaging plane, the swinging angle of the detector and the distance from the light source to the rotary table can be calculated based on the coordinate of the intersection point of the projective point line and a elliptic equation. The invention can calibrate a plurality of parameters, and can sufficiently meet the requirement of subsequent CT image correction.

A test probe alignment apparatus includes a rotatable θ stage that is decoupled from a workpiece positioning stage so that the workpiece positioning stage can move a workpiece in an X-Y plane without moving the θ stage, thereby inhibiting vibration in and inertia of the workpiece positioning stage, and improving the speed and accuracy of workpiece movements. The θ stage is driven for rotation about an axis substantially perpendicular to the X-Y plane. The rotatable stage supports a carriage adapted for holding a probe card. The carriage rotates in concert with the θ stage to thereby align the probe card relative to the workpiece. A Z-stage is operatively engaged with the carriage for moving the carriage along the axis of rotation relative to the workpiece. A computer processor performs coordinate transformations on preprogrammed movement vectors, to adjust for angular misalignment of the workpiece as measured by a position sensor.

The ball type camera able of changing a lens module comprises: a swivel table mechanism for rotating in a horizontal plane for 360 degrees without segmentation and a rocking mechanism for rotating up and down for 90 degrees without segmentation. Wherein the rocking mechanism has a rotation seat driven by the swivel table mechanism for rotating for 360 degrees and a rocking member; the rotation seat is mounted thereon with a motor and a driving gear, the rocking member mounted with the lens module is pivotally connected to the rotation seat, the rocking member has thereon a sheet gear engaging with the driving gear; the motor on the rotation seat runs to move the sheet gear through transmitting of the driving gear to make the rocking member move the lens module on the vertical plane for rotating up and down for 90 degrees without segmentation; With this combination, the lens module can be removed from the rocking member for changing.

The invention provides a six-freedom precision positioning stage capable of compensating Z-direction position, comprising a XY stage and an exposure stage structurally. The XY stage is a horizontal precision positioning stage for implementing horizontal (X, Y directions) precision positioning by a set of horizontal driver, an accurate and effective transmission device and closed-loop control; the exposure stage is divided from the top down into three layers which are a rotating stage, a leveling and focusing mechanism and a silicon slice thickness compensating mechanism. A silicon anastomosis mechanism is disposed between the rotating stage and the silicon slice compensating mechanism. The invented six-freedom precision positioning stage capable of compensating Z-direction position can be used in an occasion with a large stroke, a high speed and a high precision in horizontal direction, and can implement submicron precision adjustment in three freedoms in vertical direction.

The invention provides an aviation hole-forming robot end effector which is suitable for plane skin drilling and can be used for automatically adjusting the attitude. The end effector comprises a leading screw feeding module, a binary angle adjusting mechanism, a compacting chip-absorbing module, a drilling module and a sensor module. The leading screw feeding module mainly comprises a leading screw driving motor, a synchronous transmission component and a dual-ball leading screw and is used for realizing feeding motion of drilling; the binary angle adjusting mechanism mainly comprises a stepping motor, a transmission gear, a wedge-shaped turn table and a spherical hinge and is used for realizing the automatic adjustment of the tail end attitude; the compacting chip-absorbing module mainly comprises a cylinder, a pressing cylinder, a cylinder connecting rod and a compacting head and is used for realizing compaction of a skin and the absorption of metal drill chips; the drilling module mainly comprises a drilling servo motor, a transmission shaft, a drill chuck and a drill bit and is used for realizing high-accuracy drilling; and the sensor module comprises a proximity sensor and a laser distance-measuring sensor and is used for realizing zero addressing and limiting of the movement of a main shaft, and the measurement of the normal line of a drilling point.

A laser indicator includes a weight mechanism having a bracket with a weight secured to the bracket in a manner where the weight is suspended by gravity. A plurality of laser generators are arranged about the weight, including a horizontal beam generator, a center laser generator arranged at the axial center of the bottom of the weight for emitting a laser point coaxial to the axial line of the weight, and a plurality of vertical beam generators positioned in spaced-apart manner around the axial center of the weight at the top of the weight. The laser indicator can include a stand that includes a seat having a plurality of legs, and a rotary table having a plurality of legs, with the weight mechanism coupled to the rotary table, and the rotary table removably coupled to the seat so that altitude of the weight mechanism can be adjusted. In addition, the laser indicator can include a securing mechanism for coupling the weight to the upper bracket of the bracket.

The invention relates to a high-precision positioning rotational station, comprising a horizontal rotating platform, a vertical rotating platform, a horizontal driving motor, a vertical driving motor and a controller. The controller comprises a power supply unit, a data communication circuit, a control unit and a motor drive unit. The high-precision positioning rotational station is characterizedin that the control unit comprises a data processing unit, a real-time longitude and latitude memory, a positioning longitude and latitude memory and a comparator. Because of the arrangement of the real-time longitude and latitude memory, the positioning longitude and latitude memory and the comparator, a control center can send out final positioning longitude and latitude information of the horizontal rotating platform and the vertical rotating platform and can continuously send out the information for more than one time for improving the reliability, and the controller of the rotational platform can control the horizontal driving motor and the vertical driving motor to work after the comparison of the comparator to obtain a relative longitude and latitude position only by receiving the final positioning longitude and latitude once, thereby improving the measurement precision and the reliability of the high-precision positioning rotational station.

It is one object of a hale-machining method and apparatus thereof according to the present invention to achieve an easy preparation of an NC machining program and perform a high geometrical accuracy in the predetermined three-dimensional free curved surface.

A haling tool 34 is set on a tool holder 32 in such a manner that a cutting point P of the haling tool 34 is substantially coincided with an intersection of a first rotating axis B, a second rotating axis A and a third rotating axis C. A rotary table 16 and a rotary base 24 are rotated in such a manner that a tool axis direction of said haling tool is substantially coincided with a normal direction of said machined surface. A tool holder 32 is rotated in such a manner that a front rake surface of the haling tool 34 is substantially directed in perpendicular to a feeding direction of said haling tool 34. A workpiece table holding a workpiece and the tool holder are relatively moved along a machined surface of said workpiece in three perpendicular axes including an axis parallel to said first rotating axis.

A film deposition apparatus includes a rotary table having a substrate placement area to support a substrate, a vacuum container including a container and a top panel, an open-and-close mechanism configured to open and close the top panel, reactant gas nozzles disposed through and supported by an outer wall of the container to be situated at different angular positions with respect to a rotation center of the rotary table to face areas in which the substrate placement area passes, the reactant gas nozzles having gas discharge ports arranged in radial directions to supply respective reactant gases to the wafer thereby to form respective process areas, a discharge gas supply unit situated at an angular position between the process areas to supply purge gas to form an isolation area that isolates atmospheres of the process areas from each other, and an exhaustion unit configured to exhaust atmosphere inside the vacuum container.

The invention discloses a spherical contact type friction characteristic testing device under ultrasonic vibration. The device consists of a main movement unit, a loading unit and a dynamometer unit, wherein the torque output by a step motor is converted into axial pressure of a sliding table through a lead screw nut pair of a trapezoidal screw, and an upper sample and a lower sample which are arranged at the bottom of a piezoelectric micromachined ultrasonic transducer are contacted with each other, and certain pressure is applied to the lower sample; when the piezoelectric micromachined ultrasonic transducer is connected with an ultrasonic power supply, the upper sample produces ultrasonic frequency vibration with micron-grade amplitude in the horizontal direction or the vertical direction, the lower sample rotates together with a rotating platform and forms a friction pair with the upper sample, so that the friction characteristic of the spherical contact under ultrasonic vibration can be tested. The device can be used for accurately controlling the testing parameters, is high in degree of automation, and can be used for performing spherical contact friction experiments of various types of friction materials under different ultrasonic vibration frequencies and vibration amplitudes.

The present invention provides an automatic detection apparatus, and belongs to the technical field of machinery, wherein the problem that the material feeding and the material discharge of the existing work-piece detection equipment adopt the artificial manner so as to provide low efficiency is solved. The automatic detection apparatus comprises a rack and a rotation disk, wherein the rack is provided with a material inlet device, a first detection device, a second detection device, a qualified product receiving device and a defective product receiving device, a plurality of benchmark plates are uniformly distributed on the rotation disk, the material inlet device comprises a guide column, a rotation table and a rotating motor, the guide column is vertically provided with a material taking telescopic gas cylinder, the material taking telescopic gas cylinder is provided with a material inlet suction nozzle, a product placement fixture is placed on the rotation table, the qualified product receiving device comprises a material storage mechanism and a material receiving mechanism arranged on the rack, the defective product receiving device comprises a recovery assembly and a grabbing assembly, and the detected defective product work-piece can be transferred into the recovery assembly with the grabbing assembly. The automatic detection apparatus has advantages of high work efficiency, high detection precision and high automation degree.

An apparatus and method for mounting a valve stem to the rim of an automotive vehicle wheel includes rims being supplied in series by a conveyor to a gauging station where the type and/or size of the rim and the location and alignment of an aperture for receiving the valve stem is determined by a machine vision system. An electronic control system directs a robotic manipulator to grasp either the valve stem or the rim, move the valve stem or the rim to a mounting station, position the valve stem or the rim with respect to the other such that the aperture in the rim is in coaxial alignment with the valve stem, and insert the valve stem through the aperture in the rim. If necessary, a power-actuated nut runner, mounted on the robotic manipulator or adjacent the mounting station, is used to tighten a nut over the valve stem. As an alternative to the machine vision system, the gauging station can use a rotating table which rotates the wheel about a central axis, and an “electric eye” optical sensor directing a beam of infrared light onto the rim. As the rim rotates through the beam, the presence or lack of a reflection of the light beam is used to detect the location of the aperture, and rotation of the table is stopped when the aperture is in alignment with the beam. A probe mounted on the gauging station can be extended to project into the aperture to confirm that the aperture is at the desired position and reposition the rim slightly to provide a precise positioning of the aperture.

An inclining and rotating table apparatus comprises a rotating table device having a rotating table, and a support base for rotatably supporting the rotating table having a shaft body provided perpendicular to a rotation axis of the rotating table, and a base for rotatably supporting the rotating table device using the shaft body. A table surface of the rotating table is inclined by making the rotating table device rotate. A first V-shaped groove is directly formed in the shaft body along its rotating direction. The base has a second V-shaped groove opposing the first V-shaped groove. A cross roller bearing is structured by providing rolling bodies, which are placed in contact with the first and second V-shaped grooves and are capable of rolling therebetween, between the shaft body and the base, and arranging a rolling axis of a rolling body perpendicular to that of an adjacent rolling body.

The present invention relates to a loading and unloading manipulator which is characterized by comprising a workbench, a motor, a speed reducing device, a rotating shaft, a rotating platform, a loading mechanism and an unloading mechanism. The motor is controlled by a controller and fixed in the workbench; the input end of the speed reducing device is connected with the motor, and the output end is connected with a gear pair in a gear box; the other end of the gear pair is connected with the rotating shaft; the rotating shaft is arranged vertically; two ends of the rotating shaft are arranged above the workbench through screws; one rotating platform is fixed on the top end of the rotating shaft, and the rotating platform is perpendicular to the rotating shaft; the loading mechanism and the unloading mechanism are fixed on two ends of the rotating platform; the loading mechanism is a sucking disc; and the unloading mechanism is a clamping claw. Due to the adoption of the loading and unloading manipulator during the mechanical processing, the manpower and the production cost are reduced effectively, the occurrence of personal safety accident in the production process is avoided, the requirement of the mass production of the modern industry is met, the production efficiency is improved, and the great economic benefits are brought to the manufacturers.