40732 results about "Computational physics" patented technology

Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.

Methods of patterning low-k dielectric films are described. For example, a method includes forming and patterning a mask layer above a low-k dielectric layer, the low-k dielectric layer disposed above a substrate. Exposed portions of the low-k dielectric layer are modified with a plasma process. The modified portions of the low-k dielectric layer are removed selective to the mask layer and unmodified portions of the low-k dielectric layer.

A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.

Apparatus for projecting a pattern includes a first diffractive optical element (DOE) configured to diffract an input beam so as to generate a first diffraction pattern on a first region of a surface, the first diffraction pattern including a zero order beam. A second DOE is configured to diffract the zero order beam so as to generate a second diffraction pattern on a second region of the surface such that the first and the second regions together at least partially cover the surface.

A micropower Maximum Power Point Tracker (μMPPT) suitable for use in low power applications to maximize the power output for a solar-power cell array. In one embodiment, a μMPPT comprises an electrical circuit which includes a microprocessor/microcontroller used to execute the μMPPT control algorithm, and a modulator controller to control the pulse width or frequency to a high speed switch. In addition, the electrical circuit may include an analog-to-digital (A/D) converter usable to measure the input voltage from a connected solar array, the current through an inductor of the circuit, and the voltage of an attached energy store/load. In another embodiment, the μMPPT may operates in at least two modes depending on the energy store/loads conditions.

In a substrate vertical transistor cells are formed and are arranged, in a transistor cell array, row by row in an x direction and column by column in a y direction. Lower source/drain regions of the transistor cells are connected to a common connection plate. Upper source/drain regions of the transistor cells impart a contact connection for instance to a storage capacitor of a DRAM memory cell. Active trenches running between the transistor cells with word lines are formed along the x direction. The word lines form gate electrodes in sections. A potential at the gate electrode controls a conductive channel in an active region arranged in each case between the upper and the lower source/drain connection region. According to the invention, the active regions of adjacent transistor cells are sections of a contiguous layer body and are connected to one another. An accumulation of charge carriers in the active region and floating body effects are avoided without increasing the area requirement of a transistor cell.

An analytical device including an optically opaque cladding, a sequencing layer including a substrate disposed below the cladding, and a waveguide assembly for receiving optical illumination and introducing illumination into the device. The illumination may be received from a top, a side edge, and a bottom of the device. The waveguide assembly may include a nanoscale aperture disposed in the substrate and extending through the cladding. The aperture defines a reaction cell for receiving a set of reactants. In various aspects, the device includes a sensor element and the illumination pathway is through the sensor element. Waveguides and illumination devices, such as plasmonic illumination devices, are also disclosed. Methods for forming and operating the devices are also disclosed.

A memory device having a vacuum jacket around the first electrode element for improved thermal isolation. The memory unit includes a first electrode element; a phase change memory element in contact with the first electrode element; a dielectric fill layer surrounding the phase change memory element and the first electrode element, wherein the dielectric layer is spaced from the first electrode element to define a chamber between the first electrode element and the dielectric fill layer; and wherein the phase change memory layer is sealed to the dielectric fill layer to define a thermal isolation jacket around the first electrode element.

A method for separately calibrating an optical model and a resist model of lithography process using information derived from in-situ aerial image measurements to improve the calibration of both the optical model and the resist model components of the lithography simulation model. Aerial images produced by an exposure tool are measured using an image sensor array loaded into the exposure tool. Multiple embodiments of measuring aerial image information and using the measured aerial image information to calibrate the optical model and the resist model are disclosed. The method of the invention creates more accurate and separable optical and resist models, leading to better predictability of the pattern transfer process from mask to wafer, more accurate verification of circuit patterns and how they will actually print in production, and more accurate model-based process control in the wafer fabrication facility.

Apparatus and methods for regulating delivery of electrical energy to a lighting load are disclosed. An electrical waveform is received from a source of electrical energy. An integration value is generated based on a square of an amplitude of the received waveform. Electrical energy is delivered to the load until the integration value exceeds a threshold value. Thereafter, the delivery of electrical energy to the load is discontinued.

A vertical NAND flash memory device includes a substrate having a face and a string of serially connected flash memory cells on the substrate. A first flash memory cell is adjacent the face, and a last flash memory cell is remote from the face. The flash memory cells include repeating layer patterns that are stacked on the face, and a pillar that extends through the series of repeating layer patterns. The pillar includes at least one oblique wall. At least two of the series of repeating layer patterns in the string are of different thicknesses. Other vertical microelectronic devices and related fabrication methods are also described.

A mutual capacitance touch screen and a combined mutual capacitance touch screen formed by the combination of mutual capacitance touch screens. A driving layer and a sensor layer are included, wherein the driving layer comprises driving electrodes distributed at intervals in the same plane; the sensor layer comprises sense electrodes distributed at intervals in the same plane; and the places where the sense electrodes are distributed in the sensor layer are just over against the intervals between the driving electrodes in the driving layer so that the driving electrodes and the sense electrodes together fill the touch area of the touch screen. The driving electrodes are not over against the sense electrodes in terms of space positions to increase the proportion of capacitance C_T to mutual capacitance C, wherein the capacitance C_T is formed between the driving electrodes and the top of the sense electrodes; consequently, the effective capacitivity of the mutual capacitance touch screen is effectively increased.

Systems, methods, and computer program products for induction charging with a closed magnetic loop are described herein. In one aspect, an apparatus for wireless power transmission comprises a plurality of coplanar coils, each of the plurality of coplanar coils configured to be individually energized and produce a magnetic field. Further, the controller is configured to reverse polarity of the magnetic field of at least one of the plurality of coplanar coils based on a measure of coupling between coils and to select at least two of the plurality of coplanar coils for wireless power transmission based on the measure of coupling between coils.

A compressed light field imaging system is described. The light field 3D data is analyzed to determine optimal subset of light field samples to be (acquired) rendered, while the remaining samples are generated using multi-reference depth-image based rendering. The light field is encoded and transmitted to the display. The 3D display directly reconstructs the light field and avoids data expansion that usually occurs in conventional imaging systems. The present invention enables the realization of full parallax 3D compressed imaging system that achieves high compression performance while minimizing memory and computational requirements.

A non-volatile semiconductor memory device having a write mode in which wrong writing is prevented surely. The storage device comprises a NAND cell comprising a plurality of memory transistors connected in series and also connected at one end via a select gate transistor CG1 to a bit line BL and at the other end via a select gate transistor SG2 to a common source line SL. A write voltage Vpgm is applied to a control gate of a selected memory transistor in the NAND cell and Vss is applied to the controls gates of non-select memory transistors each adjacent to the selected memory transistor to thereby write data into the select memory transistor. When a second memory transistor from the bit line BL side is selected in the writing operation, a medium voltage Vpass is applied to the control gate of a first non-selected memory transistor from the bit line BL side, and a medium voltage Vpass is applied to the control gates of third and subsequent non-selected memory transistors from the bit line BL side.

The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. An optical metrology model is developed that includes the selected top-view profile parameters of the repeating structures. The optimized optical metrology model is used to generate simulated diffraction signals that are compared to measured diffraction signals.

This invention is related to a flow fluorometric device and method employing a two-photon excitation and/or confocal optical set-up. The optical set-up of this invention is optimal for counting small fluorescent biological particles. The active focal volume is diffraction-limited and consequently much smaller than the volume of the flow channel. The excitation and detection concept has been found very efficient for rejection of the background signal. An objective lens with large numerical aperture for focusing the laser and for collecting the fluorescence is used and this restricts the active volume of measurement to a diffraction-limited volume which approximately corresponds to a volume of femtoliter. This volume is significantly smaller than the detection volume of ordinary flow cytometry.