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A reticle, or reticule (from Latin reticulum, meaning 'net'), also known as a graticule (from Latin craticula, meaning 'gridiron'), is a pattern of fine lines or markings built into the eyepiece of a sighting device, such as a telescopic sight in a telescope, a microscope, or the screen of an oscilloscope, to provide measurement references during visual examination. Today, engraved lines or embedded fibers may be replaced by a computer-generated image superimposed on a screen or eyepiece. Both terms may be used to describe any set of lines used for optical measurement, but in modern use reticle is most commonly used for gunsights and such, while graticule is more widely used for the oscilloscope display, microscope slides, and similar roles.
Apparatus and methods for predicting wafer-level defect printability
Disclosed are methods and apparatus for qualifying a photolithographic reticle. A reticle inspection tool is used to acquire images at different imaging configurations from each of a plurality of pattern areas of a test reticle. A reticle near field for each of the pattern areas of the test reticle is recovered based on the acquired images from each pattern area of the test reticle. A lithography model is applied to the reticle near field for the test reticle to simulate a plurality of test wafer images, and the simulated test wafer images are analyzed to determine whether the test reticle will likely result in an unstable or defective wafer.
Owner:KLA TENCOR CORP