12results about How to "Large numerical aperture" patented technology

The invention discloses a wafer detection scattered light collection objective lens, and relates to the technical field of optical imaging. The scattered light collecting lens is applied to wafer defect detection, the scattered light collecting lens sequentially comprises a first lens group, a second lens group, a third lens group and a fourth lens group from an object plane to an image plane in the optical axis direction of the lens, twelve lenses and an aperture diaphragm, and the twelve lenses and the aperture diaphragm are coaxially arranged; the first lens group is a catadioptric lens group, has positive focal power, and is used for imaging an object plane to an intermediate image plane through two times of reflection. The numerical aperture of the acquisition objective lens provided by the invention is equal to 0.9, the field of view is equal to 2.6 mm, the acquisition objective lens has the characteristics of large field of view, large numerical aperture and small center shielding, the capability of detecting scattered light of defects can be greatly improved, chromatic aberration is corrected by adopting a refraction and reflection mode, and a wider laser bandwidth can be realized compared with a general refraction mode of combining CaF2 and fused quartz.

The invention relates to the technical field of optical instruments, and discloses a visible-ultraviolet dual-wavelength microscope objective and an optical system.The visible-ultraviolet dual-wavelength microscope objective comprises a first lens set with positive focal power and a second lens set with negative focal power which are sequentially arranged from the object plane to the image plane of the microscope objective in the optical axis direction of the microscope objective; the second lens group comprises a front group with negative focal power, a middle group with positive focal power and a rear group with positive focal power; the microscope objective also comprises an aperture diaphragm; the aperture diaphragm is positioned between the two adjacent lenses in the middle group; according to the microscope objective, through reasonable matching of the positive focal power and the negative focal power, the influence of chromatic aberration under a wide-spectrum light source is effectively reduced, the high numerical aperture and the large view field characteristic are kept, and the microscope objective can adapt to the wide-spectrum ultraviolet laser wavelength.

The present invention discloses a wavefront sensing system and a wavefront information decoding method using single-channel polarization encoding. The polarization information in the wavefront signal is utilized for the first time to realize polarization encoding and decoding of the spot pattern position information, getting rid of the dependence of the traditional Shack-Hartmann sensor on the photoelectric array sensor, while also solving the pain points in the wavefront detection of dim targets, exploring the application potential of single-point detectors in the field of wavefront sensing, and further expanding the application field of adaptive optical systems.

The utility model provides an ultra-large field-of-view multiphoton microscopic imaging system, which adopts a large-field-of-view objective lens based on a large-aperture combined lens, and the objective lens has a high numerical aperture and a large field-of-view number. The method comprises the following steps of: obtaining objective lens parameters, determining sizes and optical parameters of optical elements such as an X-axis scanning mirror, a Y-axis scanning mirror, a scanning lens, a sleeve lens and the like according to the objective lens parameters and an optical invariant principle, and then designing an ultra-large-view-field multi-photon microscopic imaging system by utilizing the objective lens and the optical elements so as to achieve high-resolution large-view-field imaging. In addition, a double-shaft micro-electro-mechanical system rapid scanning mirror is adopted in the laser scanning system, and the double-shaft micro-electro-mechanical system rapid scanning mirror and a double-shaft galvanometer scanning mirror matched with the double-shaft micro-electro-mechanical system rapid scanning mirror are controlled. The imaging speed and the flexibility of switching among different imaging sub-regions are superior to those of a common combination of a galvanometer scanning mirror and a resonance galvanometer, and the system is suitable for carrying out ultra-large field-of-view imaging detection on a rapidly changing physiological process in living biological tissues.

The application discloses a wide-spectrum catadioptric objective. The wide-spectrum catadioptric objective comprises a first mirror group, a second mirror group and a third mirror group arranged in sequence along the optical axis direction; the first mirror group comprises a meniscus positive lens, a meniscus negative lens and a plano-convex lens, and the edge region of the first mirror surface of the meniscus positive lens and the second mirror surface of the meniscus negative lens is provided with a reflecting surface region; the incident light is reflected and refracted in the meniscus positive lens and the meniscus negative lens for multiple times, and then forms an intermediate image after passing through the plano-convex lens; the first mirror group has positive focal power, increases the numerical aperture and corrects aberration; the second mirror group and the third mirror group both have negative focal power; the intermediate image is emitted to an image plane in parallel light after passing through the second mirror group and the third mirror group, and satisfies 0.35<|R min / f|<1.5; f is the combined focal length of the meniscus positive lens and the meniscus negative lens, and R min is the minimum curvature radius of the reflecting surface. The wide-spectrum catadioptric objective has the characteristics of wide spectrum, high resolution, high numerical aperture, large field of view and long working distance simultaneously.

The utility model belongs to the technical field of semiconductor manufacturing, and provides a projection exposure device which comprises a light source assembly, a working platform deck, a first bearing assembly, a second bearing assembly and an imaging projection assembly. The first bearing assembly is used for bearing a photomask and located between the light source assembly and the working platform deck, a first space defined by the working platform deck is formed in the first bearing assembly, the second bearing assembly is placed on the working platform deck and used for bearing an exposure test piece, and a first fluid working medium for immersing the exposure test piece is arranged in the first space; the exposure light beam sequentially passes through the photomask, the imaging projection assembly and the first fluid working medium to irradiate the exposure test piece, and through the first fluid working medium, the numerical aperture of the projection exposure device is effectively increased, the resolution is improved, and the feature size of the exposure test piece is reduced.

The application discloses an ion trap and a quantum computing device, comprising: an integrated substrate, radio frequency electrodes and direct current electrodes prepared on the integrated substrate; wherein the integrated substrate has an axial light transmission slot. The ion trap of the embodiment of the application is designed based on the integrated substrate, eliminates the split misalignment problem caused by temperature changes, and enables the ion trap to be applied to a low-temperature environment; the ion trap obtains an open axial light transmission through the open slot, has a higher numerical aperture, and increases the light transmission degree of freedom of the ion trap, thereby providing support for large-scale application of quantum computing.

The invention aims to provide a multi-section plastic optical fiber. The multi-section plastic optical fiber comprises a tail-end plastic optical fiber, a lens unit and a head-end plastic optical fiber, the tail-end plastic optical fiber is connected with the head-end plastic optical fiber through the lens unit, and the diameter FLE of the tail-end plastic optical fiber and the diameter FLH of the head-end plastic optical fiber meet the relation of FLE > FLH. The multi-section plastic optical fiber provided by the invention is suitable for an electronic endoscope illumination system, is particularly suitable for endoscopes which can be inserted into bile ducts, pancreatic ducts and eyes, and has the advantages of high numerical aperture, large quantity of transmitted light and small diameter of the insertion part. In addition, the multi-section plastic optical fiber can further reduce the manufacturing cost of the endoscope and simplify the design of the lighting device.

This utility model relates to the field of lens technology, specifically to an optical microscope objective. Compared with similar designs, this objective has an ultra-long working distance (working distance greater than 6.10 mm) and a large numerical aperture (numerical aperture greater than or equal to 0.75), and is simple to manufacture, which can greatly reduce the actual production cost of the objective. The first group uses two sets of cemented doublet lenses and one set of lenses, which is beneficial for controlling field curvature and eliminating chromatic aberration; the second group uses two sets of cemented doublet lenses and two sets of cemented triplets lenses, which is beneficial for eliminating axial chromatic aberration of the system; the third group has at least three meniscus single lenses, which can be used to significantly increase the numerical aperture.

The invention relates to a homogenized optical fiber and a preparation method thereof. The homogenized optical fiber comprises a first core layer, a second core layer, a third core layer, an inner cladding layer and an outer cladding layer which are sequentially arranged from inside to outside, the center points of the first core layer and the second core layer coincide at a point A, the center points of the third core layer, the inner cladding layer and the outer cladding layer coincide at a point B, and the distance between the point A and the point B is larger than or equal to the radius of the first core layer; the first core layer is made of germanium and fluorine co-doped quartz glass; the second core layer is made of fluorine-doped quartz glass; and the third core layer is made of pure quartz glass. The optical fiber homogenizing effect can be improved.

The present invention relates to the field of optical technology, and specifically to an immersion microscope objective lens, wherein a cover glass is arranged on one side of the object surface, and a first lens group, a second lens group and a third lens group are arranged in sequence on one side of the cover glass, and a liquid is arranged between the cover glass and the first lens group. The present invention arranges the first lens group, the second lens group and the third lens group in the immersion microscope objective lens optical system, wherein the first lens group has positive refractive power, the second lens group has positive refractive power, and the third lens group has negative refractive power, so that the entire immersion microscope objective lens optical system has good optical performance, and by limiting the focal distance, refractive index, Abbe number and thickness of the first lens group and the second lens group, the field curvature, distortion and aberration sensitivity of the objective lens optical system are further improved, thereby ensuring the optical performance of the immersion microscope objective lens optical system.

This invention relates to an underwater visible and near-infrared image-side telecentric imaging system. Its optical system includes two spherical refractive lenses and one planar superlens, with all optical elements having a coaxial structure. The arrangement, in order of light incidence, is: a negative lens bent towards the light incidence direction, a positive lens facing away from the light incidence direction, and the planar superlens. The system's aperture stop is located on the front surface of the negative lens. This invention utilizes a combination of positive and negative lenses and a superlens to achieve aberration correction and balance. Designed with an image-side telecentric structure, this invention can serve as a telescope system for visible and near-infrared imaging spectrometers, and can also be used independently as a visible and near-infrared imaging lens. The system features a relatively large aperture, excellent imaging quality, and a compact, small structure.