193 results about "Microelectrode" patented technology

The invention relates to the technical field of microfluidics, in particular to a high-throughput and high-efficiency cell extrusion microfluidic system and a particle introduction method. And a closed-loop control system integrating real-time cell deformation sensing, dynamic parameter decision and physical extrusion and alternating electric field cooperative application is constructed. The chip is provided with an inlet shunting device, a micro-channel and a channel structure of a microelectrode. The method comprises the steps of real-time deformation image acquisition and analysis and dynamic extrusion parameter decision and cooperative application. The invention provides a high-flux and high-efficiency cell extrusion microfluidic system and a particle introduction method, and aims to solve the problems that the drug loading efficiency and the survival rate are difficult to consider due to heterogeneity in the existing cell extrusion technology and a physical extrusion and electroporation coordinated regulation strategy is lacked, so that personalized precise treatment of cells is realized, and the cell quality is improved. The drug loading efficiency, the cell survival rate and the high throughput are obviously improved.

A method and system for decoding speech based on recorded brain signals is provided. The method can include receiving recorded brain signals via a microelectrode array. The method can include extracting one or more features from the recorded brain signals. The method can include converting the one or more extracted features into one or more feature embeddings. The method can include transforming, by one or more encoders, the one or more feature embeddings. The method can include predicting, by one or more decoders, phonemes based on the one or more transformed feature embeddings. The method can include predicting speech based on the predicted phonemes.

A method and system for protecting electrode arrays while implanted on a brain including a flexible electrode array including non-penetrating cortical surface microelectrodes, a ceramic layer covering the electrode array and a polymer layer adjacent the ceramic layer, wherein the ceramic layer and the polymer layer hermetically seal the electrode array. The ceramic layer can be configured to exhibit sufficient flexibility to allow the electrode array to be implanted using minimally invasive surgical techniques, while still hermetically sealing the electrode array from a biological environment.

The invention discloses an intelligent zinc-aluminum coating quality monitoring method and system for a wind power blade bolt, and solves the problems that internal defects of a coating cannot be found in an early stage and predictive maintenance cannot be realized in the prior art. The method comprises the following steps: acquiring multi-source monitoring data of coating internal defects, interface micro-strain and corrosion states through a terahertz imaging unit, a pre-embedded FBG sensing unit and a microelectrode array ECN acquisition unit which are integrated on an inspection robot; after carrying out local preprocessing by utilizing an edge computing gateway, synchronizing data to a digital twinborn analysis platform deployed with a coating state intelligent evaluation model so as to output a current health state grade and residual life prediction of the coating; finally, a maintenance decision suggestion is automatically generated or an equipment control instruction is triggered based on the result, closed-loop monitoring from state sensing to intelligent execution is formed, and the system comprises a corresponding hardware module and a software platform and is used for achieving the method.

The present application relates to the technical field of microelectrode preparation, and particularly relates to a transparent microelectrode array chip preparation method, comprising the following steps: S1. pretreating a glass substrate to improve the substrate surface cleanliness and adsorbability of the electrode film; S2. evaporating an ITO film on the surface of the pretreated glass substrate by using a magnetron sputtering process, as a transparent electrode; S3. spin-coating a photoresist on the surface of the ITO film and performing a patterning treatment, and then etching the ITO film to form a preset electrode structure by using a dry etching process, and then removing the photoresist and cleaning and drying; S4. coating an insulating layer on the surface of the substrate by using a PECVD process, patterning the insulating layer and etching by using a dry etching process to realize windowing, and then removing the photoresist and cleaning and drying; and realizing photoelectric synchronous detection. Avoiding metal residue interference: photoresist masks are used throughout the etching process to replace traditional metal hard masks.

A three-dimensional (3D) microelectrode array device for in vitro electrophysiological applications includes a substrate and micro vias extending from the bottom face to the top face of the substrate. A microneedle at each micro via extends from the bottom face upward beyond the top face and forms a hypodermic microneedle array on the top face. Metallic traces on the bottom face interconnect the hypodermic microneedles to form the 3D microelectrode array. A microheater is positioned on the bottom face of the substrate. Microfluidic ports may be formed at the substrate. Interdigitated electrodes may be formed at the substrate.

The present disclosure is directed to neural interface devices and methods that accesses the subarachnoid space to enable minimally invasive modulation and recording of neural structures. Exemplary embodiments may comprise an implantable pulse generator and a microelectrode catheter. In particular embodiments, the microelectrode catheter comprises one or more stimulating and recording electrodes. Exemplary embodiments may also include methods comprising performing a lumbar puncture to access the spinal subarachnoid space and advancing microcatheter through the spinal subarachnoid space.

The invention provides a method and system for matching images of different staining pathological sections, and relates to the technical field of pathological section diagnos.The method comprises the steps that multispectral image data of a target pathological section at the wave band of 380 nm to 1000 nm and redox potential distribution data measured by a microelectrode array are collected; a pure dye weight matrix is solved in combination with a constraint optimization model containing a spectral decomposition item and an oxidation state constraint item, an oxidation correction mask is generated through absorption peak offset and oxidation-reduction potential double threshold judgment, a virtual dyeing image is corrected and output, and finally a space deformation field is predicted through a cascade registration network to complete alignment. Therefore, the technical problems that a traditional method only depends on single spectral data, is easily interfered by dye oxidation artifacts and is low in spatial registration precision are solved, and accurate matching of different dyeing pathological section images is realized.

The application relates to an online monitoring device and method for microelectrodes, and belongs to the technical field of special machining.The online monitoring device is composed of a coaxial holographic imaging module, an LED backlight imaging module, a motion control module, an image acquisition card, a laser power controller and an LED brightness controller.The LED backlight imaging module is used for positioning the microelectrode image; the coaxial holographic imaging module is used for holographic interference imaging of the microelectrode; based on a holographic reconstruction algorithm, electrode profile information is obtained, and the electrode loss degree is judged.The coaxial holographic imaging module and the LED backlight imaging module switch the positions of the reflecting mirrors through the motion control module to realize control of different imaging modes; the collected images are input into a PC through the image acquisition card, image algorithm analysis is carried out, and the microelectrode loss degree is judged.The application realizes online monitoring of the microelectrode loss.

The present application relates to the technical field of semiconductor electrostatic chuck, in particular to an electrostatic chuck ceramic plate with microelectrode and a processing method. In the processing, the electrode forming surface of the ceramic layer is first determined, photoresist is coated and dried, and the photoresist reserved area and the exposed area are formed through exposure and development. The exposed area is subjected to metal plating, and then the photoresist in the reserved area is removed. After cleaning, the exposed area is plated with a metal layer to form a microelectrode. The electrostatic, temperature sensing and heating layer plates are independently manufactured into microelectrodes through the process, and then are bonded to form a ceramic plate. The present application replaces the traditional process with the precision process of photoetching and development combined with plating, improves the forming precision and layout density of the microelectrode, realizes independent manufacturing and high-density integration of the microelectrodes of the three types of layer plates, solves the problem of integration of functional electrodes in the prior art, can realize accurate control of multiple temperature zones, has a mature and coherent process, guarantees the forming quality of the microelectrode, improves the chucking and temperature control performance, meets the needs of semiconductor process, and has practicality and mass production value.

The application discloses an electronic tuning type multifunctional sensor and a preparation method thereof. The sensor comprises a quartz crystal, a composite electrode and an oscillation circuit; the first end of the composite electrode is connected with the first end of the oscillation circuit, the second end of the oscillation circuit is connected with the first end of the quartz crystal, the second end of the quartz crystal is connected with the second end of the composite electrode, and the second end of the oscillation circuit is an output end. The composite electrode comprises a substrate, a planar inductive microelectrode and a planar capacitive microelectrode which are arranged on two sides and are connected in series through a via hole; a nano-magnetic iron oxide film is deposited on the inductive side, a hydroxylated ultra-high specific surface area disordered porous carbon film is deposited on the capacitive side, and a perfluorosulfonic acid protective layer is coated on the surfaces of the two films. The application forms a frequency selection network by connecting the double-sided electrode and the quartz crystal in series, and outputs an anti-interference frequency signal; the protective layer is insulated and prevents short circuit on the inductive side, and improves the humidity response on the capacitive side; manual overturning can switch the detection of metal damage, non-metal defects and environmental humidity, and the sensor has the advantages of high stability and low cost.

The invention discloses a method for identifying logging interpretation electrical standard parameters, and solves the problems of inaccurate difference and low efficiency caused by the influence of subjective factors on the manual identification result of the logging interpretation electrical standard parameters in the prior art. The method comprises the following steps: S1, establishing a benchmarking array for a well section to be identified; s2, matching the target well data on the apparent resistivity curve A based on the established benchmarking array; obtaining optimal matching data; s3, determining a reference layer identified by the electrical standard; s4, identifying a microsphere standard, a sound wave calcium judgment standard and a deep three lateral standard; s5, identifying a microelectrode standard; and S6, identifying a micro-gradient calcium judgment standard. The device for realizing the automatic identification of the logging interpretation electrical standard parameters comprises an establishing unit; a matching unit; a determination unit; a first identification unit; a second identification unit; and a third identification unit. According to the method, logging interpretation electrical standard parameters can be rapidly identified, and quality improvement and efficiency improvement of logging interpretation reservoir thickness division work are assisted.

The invention belongs to the technical field of beauty equipment, and particularly relates to a beauty light zirconium ion excitation device which comprises a device shell, the head of the device shell is provided with an ion excitation head, the ion excitation head comprises an insulating base and an excitation electrode group fixed on the insulating base, and the excitation electrode group is formed by arranging a plurality of microelectrodes in an array form; the device shell is internally provided with an ion excitation circuit, the ion excitation circuit comprises a high-voltage generation module and an electrode driving module, the high-voltage generation module is electrically connected with the electrode driving module, and the electrode driving module is respectively connected with each microelectrode in the excitation electrode group through a wire. According to the invention, the electrode group formed by arranging a plurality of independent microelectrodes in a specific array is arranged on the ion excitation head, the electrode driving module is respectively connected with the microelectrodes, and the array formed by the plurality of microelectrodes can physically form an ion excitation source with wider coverage and more dense distribution; and the generated ion current is milder and more stable.

The invention discloses an in-vitro biological neural network accurate regulation and control method and system based on a microelectrode array, and the method comprises the steps: S1, culturing and planting neuronal cells on a microelectrode array chip, and forming an in-vitro neural network with spontaneous activity; s2, preprocessing the in-vitro neural network to enable the in-vitro neural network to enter a stable function state capable of being effectively activated; s3, recording an electrophysiological signal, sampling the structure and function connection of the neural network, and dynamically selecting an optimal stimulation site; s4, applying electrical stimulation to the selected stimulation sites according to a preset regulation and control target, collecting neural network response signals in real time, and constructing a closed-loop regulation and control loop; and S5, performing quantitative analysis on the neural network based on the multi-dimensional evaluation index to form a comprehensive evaluation result, and feeding back the comprehensive evaluation result to the step S4 to optimize a subsequent stimulation strategy. According to the method, organic unification of sensing, intelligent decision making, closed-loop intervention and multi-dimensional quantitative evaluation of a neural network structure and a function state can be realized.

The invention discloses a three-dimensional heart chip device. The device comprises a pneumatic control layer, a flexible functional film layer and a microfluidic culture layer, wherein the flexible functional film layer is integrated with a stretchable microelectrode array with a snakelike structure, and the microfluidic culture layer is arranged on the flexible functional film layer; wherein the pneumatic control layer is used for driving the flexible functional film layer to generate periodic deformation and applying mechanical tensile strain to cardiac muscle tissues in the microfluidic culture layer, and meanwhile, the stretchable microelectrode array of the snake-shaped structure synchronously deforms along with the flexible functional film layer and keeps conformal electric contact with the cardiac muscle tissues, so that the mechanical tensile strain is applied to the cardiac muscle tissues in the microfluidic culture layer. The electrophysiological signals are monitored in the dynamic mechanical stretching process. The technical problem that in the prior art, stable electrophysiological monitoring cannot be carried out while dynamic mechanical stretching is applied is solved, physiologically-related mechanical stimulation can be applied to three-dimensional cardiac muscle tissue to promote maturity of the three-dimensional cardiac muscle tissue, and long-term and stable in-situ electrophysiological signal monitoring is achieved in the process; and a more accurate in-vitro model is provided for drug screening and disease research.

The application discloses a kind of light stimulation, electric stimulation, concentration gradient combined control device and preparation method, including light stimulation light intensity gradient chip layer, cell capture culture chip layer and microelectrode layer;Cell capture culture chip layer is provided with several main sample introduction sections and several capture culture channels;Capture culture channel is provided with several groups of capture culture cavities, and capture culture cavity is provided with several capture structures;Light stimulation light intensity gradient chip layer is provided with several main liquid introduction sections and several light intensity adjustment channels, and each light intensity adjustment channel is provided with light intensity adjustment section;The interdigital electrode region on microelectrode layer corresponds to the position of capture culture cavity.There is also S1-S5 etc.Preparation step.The light stimulation, electric stimulation, concentration gradient combined control device of the application can realize integrated multi-factor combined stimulation based on microfluidic platform, parallel experiment, high integration, multiple units are operated simultaneously, and has the advantages of small pollution risk, low reagent loss etc..

The invention belongs to the technical field of analysis and detection, and particularly relates to a bifunctional zinc ion selective microelectrode, an ultramicro electrochemical sensor, a preparation method and application. The method comprises the following steps: preparing a platinum ultramicro disc electrode through the steps of laser drawing, polishing, electrode extraction and the like, doping a multi-walled carbon nanotube into a zinc ion selective membrane solution, and curing to form a membrane to obtain a target microelectrode; according to the ultramicro electrochemical sensor, the microelectrode is used as a core functional part and is matched with a reference electrode and an auxiliary electrode to form a three-electrode system. The diameter of the electrode is 25 [mu] m, the RG value is about 3, the linear correlation coefficient of zinc ions reaches up to 0.997, and the electrode has excellent selectivity, conductivity and position control accuracy. High-resolution monitoring of the concentration of zinc ions in a negative electrode interface in-situ micro-area under different electrolyte additive systems and different charge-discharge multiplying powers in the charge-discharge process of the aqueous zinc ion battery can be realized through a potential response mode of a scanning electrochemical microscope.

A medical device can comprise a catheter shaft comprising a proximal end and a distal end, the catheter shaft defining a catheter shaft longitudinal axis. A flexible tip portion can be located adjacent to the distal end of the catheter shaft, the flexible tip portion comprising a flexible framework. A plurality of curved microelectrodes can be disposed on the flexible framework and can form a flexible array of curved microelectrodes adapted to conform to tissue.

An experimental platform for implantable brain-computer interface of limited movement, comprising: a cooperative control module, which extracts the brain neuron signals of a limited rat through a microelectrode, pre-processes and extracts features of the neuron signals, analyzes and processes the movement information contained therein, converts the movement information into appropriate control instructions, and delivers the control instructions from Raspberry Pi to Arduino to control the corresponding actions of a machine rat made by the limited rat, so as to realize the movement control and sensing feedback between the limited rat and the machine rat; and an external control module, which is installed on the machine rat, and is used for carrying out epidural spinal cord electrical stimulation on the limited rat with partial movement function after incomplete spinal cord injury and combining with external equipment for rehabilitation training. The application can analyze and record the neuron signals of specific regions when the limited rat performs actions, which is helpful for in-depth analysis of the neuron activity characteristics and regulation mechanism of the limited rat.

The invention discloses a preparation process of a palladium nano-film hydrogen sensor, and belongs to the field of sensor preparation. The preparation process of the palladium nano-film hydrogen sensor comprises the following steps: step 1, pre-treating an aluminum sheet, and flattening to remove a surface oxide layer; 2, carrying out primary oxidation and secondary oxidation; thirdly, the aluminum oxide layer is subjected to chambering operation, and an aluminum-based negative mold is obtained; step 4, carrying out polymerization and demolding; 5, coating the PMMA nano-column array sample through electron beam evaporation equipment to form a palladium alloy nano-film; step 6, preparing and arranging a microelectrode; 7, completing electrical connection and packaging between the microelectrode and an external circuit; the response value and the response speed of the prepared palladium nano-film hydrogen sensor are remarkably improved, and the situation that the sensor is rapidly aged and breaks down due to embrittlement, cracking or stripping caused by substrate limitation and strong lattice stress is avoided.

The invention provides a chip copper interconnection layer deplating recovery method and system, electronic equipment and a medium, and the method comprises the steps: recognizing an active reaction boundary dissolved by a copper interconnection layer in real time, and dynamically dividing a microelectrode array into a core deplating region, an edge inhibition region and an isolation region according to the active reaction boundary; a forward dissolving electric field is applied to the core deplating area to efficiently remove a copper material, meanwhile, a reverse restraining electric field is applied to the edge restraining area to actively restrain transverse etching of the side wall, the isolation area avoids interference on a non-target area through a passive or high-resistance state, and therefore localized precise regulation and control of the deplating process are achieved. According to the invention, the uncontrollable erosion of the side wall of the micron-sized copper circuit is obviously reduced.

The present invention discloses a nano-synaptic integrated device and a preparation method of the nano-synaptic integrated device. The nano-synaptic integrated device includes a substrate, an insulating layer disposed on the substrate, and a plurality of nano-synaptic units disposed on the insulating layer. Each of the nano-synaptic units includes a first microelectrode and a second microelectrode disposed facing each other and a GaN-based nanowire disposed between the first microelectrode and the second microelectrode, a first end of the GaN-based nanowire is bond-connected to the first microelectrode, and a second end of the GaN-based nanowire is bond-connected to the second microelectrode. In the present invention, the GaN-based nanowire is used as a synapse element in the device. The GaN-based nanowire has a controllable direct band gap and stable physical and chemical properties. In this nano-synaptic integrated device, the plurality of nano-synaptic units are integrated and disposed on the same substrate, which can be prepared on scale, with small size and high integration level. The plurality of nano-synaptic units can be independently controlled or can be controlled in an overall array according to an arranged array pattern.

This disclosure provides a neural microelectrode with temperature regulation and temperature measurement functions, which can be applied in the field of microelectromechanical systems (MEMS) biosensor technology. The neural microelectrode includes: a substrate including a detection region; a microfluidic channel disposed within the substrate and overlapping with the detection region, the microfluidic channel being used to transport liquid; a microelectrode array disposed on the substrate and overlapping with the detection region, the microelectrode array being used to measure the electrical signal of the detection region; a temperature measuring element disposed on the substrate and overlapping with the detection region, the temperature measuring element being used to measure the temperature of the detection region; and an insulating layer disposed on the microelectrode array and the temperature measuring element, covering the microelectrode array and the temperature measuring element. This disclosure integrates temperature regulation and temperature measurement functions into a single microelectrode, enabling simultaneous temperature control of neurons and recording of neuronal electrical signals, as well as real-time measurement of neuronal temperature.

The invention provides a micro-glass nanopore manufacturing method which comprises the following steps: drawing a glass capillary into a micro-glass test tube with one closed end through a laser micro-tube drawing instrument for setting drawing parameters; acquiring image data of the closed end of the micro-glass test tube; analyzing and processing the image data of the closed end of the micro-glass test tube, judging whether the closed end of the current micro-glass test tube is matched with target drawing data or not, if so, stopping the drawing process of the micro-glass test tube, otherwise, adjusting drawing parameters, and drawing the micro-glass test tube again; placing the needle-shaped micro-electrode into the micro-glass test tube through the open end of the micro-glass test tube; a micro-glass test tube nano-pore preparation environment control chamber is constructed in advance, environment parameters of the micro-glass test tube nano-pore preparation environment control chamber are regulated and controlled, and a nano-pore is formed in the closed end of the micro-glass test tube through a dielectric breakdown method. The method provided by the invention is low in cost, and the formed nano aperture is controllable.

The application relates to the field of cell signal detection, in particular to a multi-size microelectrode array detection device coupled with microelectroporation and a preparation method thereof. The multi-size microelectrode array detection device comprises a first microelectrode array device, a second microelectrode array device, and an electrophysiological signal acquisition module. The first microelectrode array device comprises a first chip, a first printed circuit board and a first cell culture chamber, and the first chip comprises a plurality of microelectrodes with mixed sizes. The second microelectrode array device comprises a second chip, a second printed circuit board and a second cell culture chamber, and the second chip comprises a plurality of microelectrodes with the same size. The microelectrodes on the second chip of different second microelectrode array devices are not the same in size. The electrophysiological signal acquisition module collects the electrophysiological signals of cells collected by the first microelectrode array device and the second microelectrode array device. An upper computer stores and displays the electrophysiological signal data collected by the electrophysiological signal acquisition module. The application improves the adaptability of the cell detection device and the accuracy of the cell electrophysiological signal detection result.

A microelectrode probe for implantation in soft tissue, comprising a sheath of flexible polymeric material divided by a wall into a distal and a proximal compartment, said distal and proximal compartments being filled with a matrix of biocompatible material dissolvable or degradable in aqueous body fluids, and comprising a centrally disposed electrically conductive core passing through the wall and attached to it. The core is insulated at its proximal portion, from which it extends to a holder for attachment to tissue other than said soft tissue. The sheath and the core extending distally from said holder are embedded in a kindred additional matrix. The invention also discloses a method for its manufacture, an array comprising two or more microelectrode probes and a microelectrode probe for incorporation into the array and a method for the manufacture of the array.

The application relates to the technical field of electrophysiological detection, in particular to a sensor for synchronous acquisition of myocardial cell signals, a device and a related method, the sensor comprising a first control module, a second control module and a sensing module; a signal input end of the first control module is connected with a signal output end of the sensing module, a signal output end of the first control module is connected with a signal input end of the second control module, and a signal output end of the second control module is connected with an upper computer; the sensing module comprises a microelectrode array and an interdigital electrode array arranged on a glass substrate, the microelectrode array and the interdigital electrode array are electrically connected with the signal output end, the microelectrode array is used for sensing an electrophysiological signal, the interdigital electrode array is used for sensing an impedance signal, the first control module is used for applying an excitation signal to the sensor and collecting a response signal, and the second control module is used for processing the response signal output by the first control module. The application can realize synchronous acquisition of multiple parameter signals of cells.

This disclosure provides a neural microelectrode with temperature control and temperature measurement functions, which can be applied in the field of microelectromechanical systems (MEMS) biosensor technology. The neural microelectrode includes: a substrate including a detection region; a microelectrode array disposed on the substrate and overlapping with the detection region, the microelectrode array being used to measure the electrical signal of a analyte; a temperature control element disposed on the substrate and overlapping with the detection region, used to control the temperature of the detection region; a temperature measurement element disposed on the substrate and overlapping with the detection region, used to measure the temperature of the detection region; and an insulating layer disposed on the microelectrode array, the temperature control element, and the temperature measurement element, covering the microelectrode array, the temperature control element, and the temperature measurement element. This disclosure integrates temperature control and temperature measurement functions with the neural microelectrode, realizing temperature control and temperature measurement of neurons, while simultaneously recording the electrical signals of neurons.

The utility model relates to the technical field of microsphere polar plates, and discloses an SFEC microsphere polar plate of a microsphere and microelectrode caliper combination instrument, which comprises a rubber polar plate, an electrode is arranged inside the rubber polar plate, a screen plate and a reinforcing plate are arranged at the lower end inside the rubber polar plate, and a high-temperature-resistant coating is arranged on the surface of the rubber polar plate. According to the polar plate, the comprehensive performance of the polar plate is remarkably improved through the insulativity of the rubber polar plate, the pressure resistance and the compression resistance of the screen plate and the reinforcing plate and the heat resistance of the high-temperature-resistant coating, so that the polar plate effectively prevents electrical faults and short circuits in a high-voltage environment, ensures the safety and the stability of a system, protects the polar plate from physical damage in an extreme condition, and improves the service life of the polar plate. The service life is prolonged, stable operation of equipment is kept in a high-temperature environment, material degradation and functional faults are prevented, and the durability, stability and reliability of the polar plate are greatly improved.

The invention discloses an organ-like electrophysiological signal acquisition electrode, and relates to the technical field of biomedical engineering and microelectronics crossing, the organ-like electrophysiological signal acquisition electrode comprises a dynamic reconfigurable blade assembly and a high-density distributed electrode system, the dynamic reconfigurable blade assembly is composed of at least eight independent flexible blades, and each blade is of a multi-layer heterostructure; in the body fluid, controllable degradation of the sacrificial material and predetermined deformation of the stress response layer are utilized to automatically surround and fit similar organs with different sizes to form a conformal electric contact interface; the latter is integrated with not less than 120 micro electrode units which are arranged on the inner side and the outer side of the blade in a non-uniform topology mode, and synchronous collection and spatial distribution imaging of all-domain electrophysiological signals of the similar organs are achieved. According to the invention, a dynamic reconfigurable assembly with not less than eight flexible blades is adopted, and 0.3-2.5 mm organs are adapted by virtue of degradation of sacrificial materials and deformation of stress films, so that the 1t pressure is controlled; 5mN; 120 + electrodes are non-uniformly arranged, and a signal module is arranged to synchronously acquire and image in the whole domain; the compatibility of the packaging layer and surface treatment is improved, and the problems of narrow adaptation, easy damage, long-term monitoring failure and the like in the prior art are solved.