The invention provides a salt spray environment parameter detection micro-nano sensor and a preparation and measurement method thereof, the salt spray environment parameter detection micro-nano sensor comprises a
silicon substrate, the upper surface and the lower surface of the
silicon substrate are respectively provided with a SiO2
insulation layer and a first Si3N4 film; the first Pt
resistor is arranged on the upper surface of the SiO2 insulating layer, a second Si3N4 thin film is deposited on the upper surface of the first Pt
resistor, and first Au interdigital electrodes are arranged on the two sides, in the length direction of the
silicon substrate, of the first Pt
resistor; the second Pt resistor is arranged on the lower surface of the first Si3N4 film; the third Pt resistor is arranged on the upper surface of the adhesion layer on the SiO2 insulating layer, a third Si3N4 thin film is deposited on the surface of the third Pt resistor, a patterned second Au interdigital
electrode is arranged on the upper surface of the third Si3N4 thin film, and a PI thin film is deposited on the upper surface of the second Au interdigital
electrode. The device has the beneficial effects that the
wetting time is shortened through the'hollow-window-flower-like 'interdigital microelectrodes, high-precision measurement of the temperature and heat exchange of the sensor body and salt mist gas can be realized, the influence of temperature and
humidity on
conductivity detection is eliminated through data compensation, the
desorption process is accelerated, and wet stagnation is reduced.