Electropolymerization molecular imprinting technology-based double-parameter composite micro-sensor and preparation thereof
A molecular imprinting technology and micro-sensor technology, applied in the field of dual-parameter composite micro-sensor and preparation, can solve the problems of large equipment, high cost and high energy consumption
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[0064] A creatinine / urea composite microsensor based on electropolymerization molecular imprinting of the present invention. Such as figure 1 , figure 2 , image 3 As shown, the implementation steps are as follows:
[0065]1. First choose silicon wafer or glass as the substrate (1);
[0066] 2. Growing a silicon dioxide insulating layer (2) on the surface of the silicon wafer (as glass is not required);
[0067] 3. Based on the Lift-off technology, the counter electrode (3) and the reference electrode (4) are formed by photolithography and sputtering Pt thin film 400nm technology;
[0068] 4. Based on the Lift-off technology, the working electrode (5) is formed by photolithography and sputtering Au thin film 400nm;
[0069] 5. Based on MEMS technology, SU8 glue is used to cast a three-dimensional ring (7) with a height of 30 μm on the silicon dioxide insulating layer of the chip, which surrounds the working electrode and the counter electrode to form a micro-reaction poo...
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