The invention discloses a reinforced p-GaN enhanced
gallium nitride device resistant to single-particle
burnout and a preparation method thereof, and mainly solves the problems that a
gallium nitride device is prone to single-particle
burnout in a
space radiation environment and is insufficient in reliability. Comprising a substrate, a nucleating layer, a buffer layer, a channel layer, a
barrier layer and a p-GaN cap layer which are sequentially grown on the substrate, a grid
electrode formed by
etching, and a mixed source
electrode and a mixed drain
electrode which are respectively formed by a plurality of deep embedded electrode regions and a plurality of surface
contact electrode regions which are alternately arranged and are positioned on two sides of the grid electrode, wherein the deep embedded electrode region comprises a deep embedded source electrode and a deep embedded drain electrode and penetrates through the
barrier layer and the channel layer, and the bottom of the deep embedded electrode region is in
metal contact with the buffer layer; the surface
contact electrode region comprises a conventional source electrode and a conventional drain electrode, and the bottom of the surface
contact electrode region is in
metal contact with the
barrier layer or the channel layer. Accumulation of carriers in a channel region can be effectively inhibited, the single-particle burning resistance of the device is remarkably improved, and the performance of the device is improved.