A GaN
semiconductor device with improved
heat resistance of the Schottky junction
electrode and excellent
power performance and reliability is provided. In this
semiconductor device having a
Schottky gate electrode 17 which is in contact with an AlGaN
electron supplying layer 14, a gate
electrode 17 comprises a laminated structure wherein a first
metal layer 171 formed of any of Ni, Pt and Pd, a second
metal layer 172 formed of any of Mo, Pt, W, Ti, Ta, MoSi, PtSi, WSi, TiSi, TaSi, MoN, WN,
TiN and TaN, and a third
metal layer formed of any of Au, Cu, Al and Pt. Since the second metal layer comprises a metal material having a high
melting point, it works as a barrier to the interdiffusion between the first metal layer and the third metal layer, and the deterioration of the gate characteristics caused by high temperature operation is suppressed. Since the first metal layer contacting the AlGaN
electron supplying layer 14 has a high
work function, the
Schottky barrier is high, and superior Schottky contact is obtained.