The invention discloses a p-Ga2O3 / n-Ga2O3pn junction
diode and a preparation method thereof, and solves the problems that
gallium oxide p-type
doping is difficult, and a
heterojunction diode is large in leakage current and low in withstand
voltage. The
gallium oxide homogeneous pn junction structure comprises
cathode metal, a substrate and an n-type Ga2O3 epitaxial layer from bottom to top, a p-type NiO layer is arranged above the n-type Ga2O3 epitaxial layer, a p-type Ga2O3 material layer is arranged between the n-type Ga2O3 epitaxial layer and the p-type NiO layer, and a
gallium oxide homogeneous pn junction is formed. The preparation method comprises the steps of epitaxial
wafer cleaning, p-type Ga2O3 material layer preparation,
cathode metal preparation, photoetching, p-type NiO film deposition, photoetching and
anode metal preparation. N / P
ion implantation is carried out on the upper portion of the
gallium oxide epitaxial layer, Ga atoms in Ga2O3 are separated out and react again through high-temperature annealing to form the effective p-type characteristic, meanwhile, the effective p-type characteristic is combined with the p-type characteristic of p-type
nickel oxide, p-type
doping of
gallium oxide is achieved through a simple process, the
gallium oxide homogeneous pn junction is obtained, reliability is high, leakage current is small, and the gallium oxide homogeneous pn junction is suitable for large-scale production. The preparation method is used for preparing the p-Ga2O3 / n-Ga2O3pn junction
diode with
high voltage resistance.