The invention discloses an insulated gate MIS HEMT device, a preparation method, a
chip and
electronic equipment. The device structurally comprises a substrate layer, a nucleating layer, a
transition layer, a buffer layer, a channel layer, an
insertion layer, a
barrier layer and a C-doped C: GaN insulating layer, wherein the nucleating layer, the
transition layer, the buffer layer, the channel layer, the
insertion layer, the
barrier layer and the C-doped C: GaN insulating layer are sequentially located on the substrate layer. A
metal layer on the insulating layer; the isolation structure is located on the side wall of the HEMT device, penetrates through the
barrier layer, the
insertion layer and the channel layer and is located on the buffer layer; the
passivation layer is located on the upper surfaces of the
metal layer and the barrier layer and the side walls of the insulating layer and the
metal layer; the grid
electrode is located in the grid
electrode opening area and penetrates through the
passivation layer to the upper surface of the metal layer; the source
electrode and the drain electrode are located on different sides of the grid electrode respectively, and the source electrode and the drain electrode penetrate through the
passivation layer, the barrier layer, the insertion layer and part of the channel layer. Through the arrangement of the C: GaN insulating layer and the high-resistance buffer layer, the device has a relatively positive
threshold voltage, the gate electric leakage of the device is reduced, and the
voltage withstanding characteristic of the gate of the device is improved.