The invention relates to a high
breakdown voltage enhanced
gallium oxide field effect transistor and a preparation method thereof, the high
breakdown voltage enhanced
gallium oxide field effect transistor comprises a semi-insulating substrate, a buffer layer, a channel layer, a source
electrode, a drain
electrode, a
gate dielectric layer and a gate
electrode, the buffer layer is located on the semi-insulating substrate; the channel layer is located on the buffer layer, and the channel layer is formed by sequentially connecting a first full-width channel, a plurality of first trapezoidal inclined channels, a multi-channel fin-type channel, a plurality of second trapezoidal inclined channels, a second full-width channel and a third full-width channel; the source electrode is located on the first full-width channel, and the drain electrode is located on the third full-width channel; the
gate dielectric layer covers the plurality of first trapezoidal inclined channels, the multi-channel fin-type channel, the plurality of second trapezoidal inclined channels, the second full-width channel and the exposed surface of the buffer layer; the gate electrode wraps the
gate dielectric layer on the surface of the multi-channel fin type channel. According to the
transistor, high
threshold voltage and good grid control capability of a device are ensured,
on resistance of the device is reduced,
breakdown voltage of the device is improved, and the transistor has better power characteristics.