The invention discloses a SiC
MOSFET (
Metal-
Oxide-
Semiconductor Field Effect Transistor) device and a preparation method thereof, and relates to the technical field of semiconductors. The epitaxial layer is located on the first surface of the substrate; the first
graphene layers are located on the surface, away from the substrate, of the epitaxial layer, and the two first
graphene layers are arranged at intervals in the direction parallel to the substrate; the source electrodes are located on the surface, away from the substrate, of the first
graphene layer, the two source electrodes are arranged at intervals in the direction parallel to the substrate, and the
orthographic projection of the source electrodes is overlapped with the
orthographic projection of the first graphene layer in the direction perpendicular to the substrate; the second graphene layer is located on the second surface of the substrate; wherein the first surface and the second surface of the substrate are oppositely arranged; the drain
electrode is located on the surface, away from the substrate, of the second graphene layer; the
gate dielectric layer is located on the surface, away from the substrate, of the epitaxial layer and located between the two source electrodes; and the gate is located on the surface, deviating from the substrate, of the
gate dielectric layer. According to the invention, the performance of the SiC
MOSFET device can be improved.