The first object of the invention is to provide means that enables a
perovskite oxide thin film having (100) orientation, (001) orientation or (111) orientation to be easily obtained, and the second object of the invention is to provide a multilayer thin film comprising a unidirectionally oriented
metal thin film of good
crystallinity. The multilayer thin film according to the first embodiment of the invention comprises a buffer layer and a
perovskite oxide thin film present thereon. The interface between the buffer layer and the
perovskite oxide thin film is made up of a {111}
facet plane. Substantially parallel to the
facet plane there is present a {110} face of a cubic, rhombohedral, tetragonal or orthorhombic
crystal of the perovskite oxide thin film, a {101} face of the tetragonal or orthorhombic
crystal or a {011} face of the orthorhombic
crystal. The multilayer thin film according to the second embodiment of the invention comprises a
metal thin film that is a cubic (100) unidirectionally oriented epitaxial film, and a buffer layer where a {111}
facet plane is present on the interface of the buffer layer in contact with the
metal thin film.