The invention provides a three-dimensional vertical structure
phase change memory and a preparation method thereof. The preparation method comprises the following steps: forming a word
line structure in a stacking structure on a substrate; symmetrical sunken structures are formed in the
electrode layer of the word
line structure; forming a gate layer in the recessed structure; filling an insulating medium, and forming a through hole structure in the insulating medium at two sides of the word
line structure; sequentially forming an
insertion layer and a
phase change layer on the outer side of the gating layer; and forming a top
electrode layer in the through hole structure. Aiming at the
bottleneck of a laminated hole
etching process, through hole
processing is carried out on an insulating medium, so that the
etching difficulty is reduced; the insulating medium forms a
thermal isolation groove at the periphery of the storage unit to block a thermal
diffusion path, so that the thermal
crosstalk of adjacent units is reduced, and the data storage reliability is improved; the storage density is doubled by optimizing the position of the
bit line circuit and the efficient arrangement of the multiple
layers of storage units. According to the method, an efficient solution is provided for high-density nonvolatile storage requirements in the fields of
artificial intelligence,
cloud computing and the like.