7711 results about "Inductor" patented technology

The invention relates to a power supply module which comprises an inductance circuit, a switch circuit, a check driving circuit and a controller, wherein the inductance circuit is provided with an inductor and a voltage feedback line, and the voltage feedback line feeds back the end voltage of the inductor. The switch circuit is electrically connected with the inductance circuit to drive the inductance circuit. The check driving circuit is electrically connected with the switch circuit and the voltage feedback line, and the check driving circuit controls the switch circuit and generates a current feedback signal according to the end voltage of the inductor. The controller is electrically connected with the check driving circuit, and controls the check driving circuit according to the current feedback signal.

The invention relates to the technical field of electric power monitoring analysis, and discloses an intelligent analysis system for electric power monitoring data based on a mutual inductor. The system comprises a mutual inductor data acquisition and structuring module which acquires a current waveform, a voltage waveform and a harmonic component in real time, and generates a standardized monitoring data unit through preprocessing, field mapping and association identification establishment; the theoretical monitoring value calculation module constructs a dynamic calculation model according to historical power data, and an input standard data unit outputs a theoretical value; the rule conformity verification module is used for matching the equipment type with the operation rule and generating single compliance judgment; a multi-dimensional difference analysis module compares a theoretical value with a measured value from time domain deviation, frequency domain deviation and waveform distortion, and generates an equipment-level difference coefficient matrix; the association network construction module is used for constructing a multi-monitoring-point association map according to the equipment identifier and the position information; and the anomaly positioning and strategy generation module combines the map, compliance judgment and a difference matrix, calculates a risk score, generates an anomaly probability distribution map, positions anomaly and matches a monitoring strategy.

The invention relates to the technical field of wireless communication, and provides a radio frequency low-noise amplifier which comprises an input matching module, a power amplification module, an output matching module, an RC attenuation module and an RC feedback module, the first end of the first inductor serves as the input end of the output matching module, the first end of the first inductor is connected with the output end of the power amplification module, the control end of the switch and the first end of the first adjustable resistor, and the second end of the first inductor is connected with the first end of the second inductor and the first end of the third capacitor. The output end of the switch is connected with the first end of the first capacitor and the first end of the second capacitor. The second end of the second capacitor is connected with the second end of the first adjustable resistor and the second end of the second inductor and used for being connected with a power supply. The second end of the first capacitor is connected with the second end of the third capacitor and serves as the output end of the output matching circuit. The radio frequency low-noise amplifier is adjustable in gain, low in noise and good in linearity performance.

The invention relates to a paraffin type thermostat. The paraffin type thermostat comprises a main valve 1, a cover and seal gasket assembly 2, an upper support 3, a rubber pipe 4, a valve seat 5, a vent hole 6, a lower support 7, paraffin 8, an inductor 9, a bypass valve 10, a central rod 11 and a spring 12. The upper support, the lower support and the valve seat of the thermostat are riveted into a whole. The upper end of the central rod is fixed to the center of the upper support. The lower portion of the central rod is inserted into a central hole of the rubber pipe. The lower end of the central rod is conical. A cavity between the rubber pipe and a shell of the inductor contains the paraffin. The upper portion and the lower portion of the shell of the inductor are provided with the main valve and the bypass valve which are in linkage. The vent hole is formed in the main valve. The paraffin type thermostat is high in heat conductivity and guarantees that an engine cannot be excessively cold.

The invention belongs to the technical field of unmanned aerial vehicle full-aviation electromagnetic detection, and particularly relates to a full-aviation frequency domain electromagnetic emission system and a control method. A broadband frequency mixing and matching circuit is connected in series between an H-bridge power inverter and an emission coil of an unmanned aerial vehicle electromagnetic emission system; the broadband mixing and matching circuit comprises a first resonance unit formed by connecting a fixed capacitor and an adjustable inductor in parallel and a second resonance unit formed by connecting a fixed capacitor and an adjustable inductor in parallel, and the first resonance unit and the second resonance unit are connected in series. The adjustable inductor is matched with the dynamic impedance of the inductive load by adjusting the inductance value, and the broadband frequency mixing and matching circuit can adjust the impedance in real time, so that the matching of different resonant frequencies is realized, and the frequency range of a matching signal can be obviously widened.

The invention relates to the technical field of micro-grids, and discloses an inverter output waveform optimization control method, an inverter and a storage medium, and the method comprises the steps: constructing a switching period average model and an output waveform optimization function of a single-phase off-grid inverter, and carrying out the optimization control of the output waveform of the single-phase off-grid inverter based on the output waveform optimization function and the switching period average model, determining a calculation model of a modulation wave compensation signal; acquiring an input signal for controlling the output waveform of the inverter, performing double closed-loop control on the inverter based on the input signal, and outputting an original modulated wave signal; calculating a modulation wave compensation signal based on the input signal, an inductive current reference value generated in double closed-loop control and a modulation wave compensation signal calculation model; and superposing the original modulated wave signal and the modulated wave compensation signal to obtain an optimized modulated wave signal. According to the method provided by the invention, the modulation wave signal is compensated and optimized, and the purpose of optimizing the waveform quality of the output voltage when the single-phase off-grid inverter is loaded with the nonlinear load is achieved.

An IPD high-selectivity band-pass filter based on a weak coupling transformer technology comprises an LC parallel resonance circuit, an LC series resonance circuit, an LC parallel resonance circuit and a fourth capacitor C4, and inductors in the LC parallel resonance circuit and inductors in the LC parallel resonance circuit have a weak transformer coupling relation; the coupling coefficient required by the weak coupling transformer provided by the invention is very small and can be realized in a mode of adjacently placing metals on the same layer, so that the structural complexity of the filter is effectively reduced; the band-pass filter is based on an IPD technology, an extra decoupling equivalent inductor is introduced through a weak transformer coupling technology, the extra decoupling equivalent inductor and a parallel capacitor which is connected between the input end and the output end of the filter in a bridging mode form a new resonance path, and a transmission zero point is introduced into an upper stop band and a lower stop band of the filter respectively to improve the selectivity of the filter. According to the invention, the selectivity of the filter can be effectively improved on the premise of not additionally introducing an inductance element and not increasing the order of the filter.

The present invention relates to a magnetic resonance system and a gradient amplifier filter for a magnetic resonance system. The filter includes a plurality of non-magnetic core inductors and a printed circuit board having a multilayer structure, a plurality of filter capacitors being formed in a plurality of regions of the printed circuit board, respectively, wherein each non-magnetic core inductor is provided on the printed circuit board and spanning two of the plurality of filter capacitors.

The invention discloses an inductor heat dissipation installation structure, an integrated heat dissipation inductor structure and a converter, and the structure comprises a liquid cooling radiator which is internally provided with a first liquid cooling flow channel, is suitable for the circulation of a cooling liquid, and is provided with a heat dissipation surface; the liquid cooling radiator is provided with a first interface and a second interface which are communicated with the inlet end and the outlet end of the first liquid cooling flow channel; the inductor shell is defined by the side plates in the circumferential direction and located on the heat dissipation face so as to be matched with the liquid cooling radiator to form a containing cavity suitable for containing the inductor body; a second liquid cooling flow channel is arranged in a side plate of the inductor shell and is suitable for circulating cooling liquid, and a third interface and a fourth interface which are used for forming an inlet end and an outlet end of the second liquid cooling flow channel are formed in the side plate; at least part of the bottom surface of the accommodating cavity is a heat dissipation surface; the first connector communicates with the third connector, and the second connector communicates with the fourth connector. By adopting the inductor heat dissipation mounting structure, the heat dissipation effect of the inductor can be improved.

The invention relates to the technical field of power system relay protection, and discloses a relay protection device mutual inductor adjustment system and method, and the system comprises a system connection initialization module, a data collection reference data generation module, a power frequency background signal offset module, a pilot frequency current injection error calibration module, and a calibration result verification output module. The method comprises the following steps: initializing sampling frequency of a to-be-calibrated mutual inductor and calibration source output precision of a calibration system, collecting amplitude and phase data of real-time power frequency current of the mutual inductor, generating offset current with equal amplitude and opposite directions through power electronic compensation based on reference data, optimizing offset current parameters through a closed-loop adjustment algorithm, and adjusting the offset current parameters through a closed-loop adjustment algorithm. Power frequency background signal offset is completed, pilot frequency calibration parameters are set, a difference value between a mutual inductor pilot frequency output signal and a calibration source standard signal is extracted by adopting a zero pointing technology, an optimal calibration coefficient is automatically calculated, verification of a calibration result is completed, and accuracy and reliability of the calibration result are ensured.

The invention belongs to the technical field of power electronics, and relates to an energy feedback high-power-factor air conditioner compressor driving system. Comprising a direct-current bus, a direct-current bus electrolytic capacitor, a motor driving circuit, a shutdown energy feedback circuit, a permanent magnet synchronous motor and a motor control module, wherein the two ends of the direct-current bus electrolytic capacitor are connected with the positive electrode and the negative electrode of the direct-current bus respectively; in the energy feedback control module for driving the combined switch device in the shutdown energy feedback circuit, the motor driving circuit and the shutdown energy feedback circuit, the second connecting end I of each phase of bridge arm is connected with the positive electrode of the direct-current bus, and the second connecting end II of each phase of bridge arm is connected with the negative electrode of the direct-current bus; the first connecting end of the phase bridge arm of the shutdown energy feedback circuit is connected with the phase power grid voltage through the phase filter inductor. The method can maintain the stability of the DC bus voltage, and reduces the influence of the power grid voltage fluctuation and the air conditioner compressor load fluctuation.

The invention discloses a mutual inductor digital output synchronism detection method and system, particularly relates to the field of electric power engineering detection, and is used for solving the problem of synchronism deviation concealment caused by phase-locked loop drift of digital output of an electronic mutual inductor in an intelligent substation. A uniform time frame is utilized to penetrate through the whole process, synchronization deviation is continuously mapped into a phase migration track, long-term drift and instantaneous jitter are analyzed on two scales by means of phase shift stacking quantity and pulse dispersion rate, two kinds of heterogeneous features are converted into a single drift tradeoff coefficient through Gaussian process regression, and a stability domain threshold value is dynamically revised according to the single drift tradeoff coefficient; after the threshold is triggered, the minimum adjustment amount is immediately issued to the phase-locked loop and is synchronously verified, so that the clock adjustment action and the drift monitoring are mutually nested; the protection device continuously receives the stable sampling sequence, the tripping misjudgment rate is remarkably converged, the inspection period is prolonged, and additional hardware investment is not needed.

The inductive position detector includes: a stator having a wiring board; a rotor having a non-conductive component disposed in opposed relation to the stator and rotatable relative to the stator about a rotation axis; a conductor pattern held by the non-conductive component so as to have cyclicity (geometrical periodicity) circumferentially about the rotation axis, and movable to pass through a rotation track defined about the rotation axis as the rotor is rotated; and a plurality of chip inductors surface-mounted on a major surface of the wiring board of the stator in opposed relation to the rotation track so as to have different spatial phases with respect to the conductor pattern, and respectively serving as detection coils that detect a magnetic field change occurring due to the passage of the conductor pattern.

According to some embodiments, a multi-level power converter, includes an output terminal, a reference terminal, an inductor, a flying capacitor, a first switching stage including a first switch connected to the output terminal and connected to the flying capacitor at a first node, and a second switch connected to the flying capacitor at a second node and connected to the reference terminal, a second switching stage including a third switch connected to the first node and the inductor, and a fourth switch connected to the inductor and the second node, and a pre-charge unit connected to the flying capacitor and the output terminal and configured to pre-charge the flying capacitor based on a voltage at the output terminal during a start-up cycle of the multi-level power converter.

The invention discloses a differential signal transmission link, a high-speed differential signal transmission composite chip and an intra-core differential signal transmission link configuration method. A strip line is arranged in a perforated cylinder in a penetrating manner, two differential microstrip lines are horizontally arranged at two ends of the perforated cylinder, one end of one differential microstrip line is connected with the upper end of the strip line, and one end of the other differential microstrip line is connected with the lower end of the strip line; the conductor strip and the two grounding strips in each differential microstrip line are arranged on the total slide glass side by side in the length direction of the total slide glass, the conductor strip is arranged between the two grounding strips, and the multiple capacitors and the multiple inductors are alternately arranged on the conductor strip in the length direction of one side of the conductor strip. The plurality of conductive blocks are uniformly arranged on the conductor belt along the length direction of the other side of the conductor belt; a high-bandwidth storage chip and a GPU chip in the high-speed differential signal transmission composite chip are horizontally arranged on a PCB composite board in parallel, and a differential signal transmission system is arranged among the PCB composite board, the high-bandwidth storage chip and the GPU chip in a penetrating mode.

The invention discloses a linear polarization scattering reconfigurable array antenna, which belongs to the technical field of antenna manufacturing and comprises an antenna unit, an extension socket, a transmission type phase shifter and an inductor. The antenna unit comprises a radiation patch, a first dielectric substrate, a metal via hole, a metal patch, a second dielectric substrate, a perforated metal floor, a third dielectric substrate, a feed metal column and a radio frequency coaxial connector, the radio frequency coaxial connector is connected with the radiation patch through the feed metal column, and a variable capacitance diode and a capacitor are arranged on the transmission type phase shifter. The transmission type phase shifter is connected with the radiation patch through the feed metal column, the variable capacitance diode is connected with the punching metal floor, the bottom of the third dielectric substrate is provided with a direct current bias line, the direct current bias line is connected with the transmission type phase shifter through the inductor, and the transmission type phase shifter is connected with the radiation patch through the feed metal column. According to the invention, flexible regulation and control of antenna scattering beams can be realized, and the antenna has the characteristics of flexible control, fast response speed and high radiation efficiency.

The invention relates to a CVT error evaluation method and device, error evaluation equipment and a storage medium, and belongs to the technical field of mutual inductor error recognized.The CVT error evaluation method comprises the steps that a first data set is restored to a primary voltage level based on voltage proportionality coefficients of multiple CVTs to obtain a second data set, and a difference matrix is constructed based on the second data set; establishing a likelihood function based on the difference matrix, and converting the likelihood function into a posterior probability density function based on a Bayesian formula; extracting data corresponding to a preset number of CVTs from the second data set to construct a third data set, and determining a prior probability density based on the third data set; and based on a multi-chain MCMC algorithm fused with plant rhizome growth and a posterior probability density function, determining error values corresponding to a plurality of CVTs when the posterior probability density is maximum. According to the method, the accuracy of CVT error evaluation is effectively ensured, and meanwhile, the error evaluation efficiency is also improved.

An inspection system detects defects within a component using eddy current thermography. An infrared camera detects heat from a defect within the component generated by the eddy current interfering with the defect. The eddy current is generated in the component by a magnetic field applied to the component by an inductor assembly. The inductor assembly includes a magnetic core having magnetic core material and two arms, each arm including a coil to generate the magnetic field. The inductor assembly is configured to apply the magnetic field at an angle offset from a horizontal axis of the magnetic core such that the eddy current flows at an angle within the component relative to the offset angle. Further, the magnetic core material can be shaped to apply the magnetic field at the offset angle or to accommodate complex component shapes.

The invention relates to the technical field of power data analysis, in particular to a line loss abnormity associated mutual inductor insulation fault positioning method. Collecting multi-source operation data of a target station area, and obtaining a datum line loss rate sequence, a residual component sequence and an auxiliary feature vector based on the multi-source operation data; according to the reference line loss rate sequence, obtaining a comprehensive sensitivity vector representing the influence degree of the mutual inductor on the line loss; obtaining a preliminary diagnosis result according to the comprehensive sensitivity vector, the residual component sequence and the real-time load rate; performing spatial logic verification according to the preliminary diagnosis result and the electrical topological graph of the transformer area to obtain a fault positioning list; generating a correction amount according to the fault positioning list and the corresponding comprehensive sensitivity vector, and correcting the line loss rate according to the correction amount; and meanwhile, feedback optimization is performed on the machine learning model according to complete data of the diagnosis. According to the invention, accurate and efficient diagnosis and correction of the line loss abnormity of the target station area can be realized.

The invention discloses an automobile audio inductor and mylar feeding and assembling device which comprises an inductor feeding detector used for transferring m inductor workpieces each time and detecting the flatness of pins on the side faces of the inductor workpieces; the inductor overturning machine is used for overturning the inductor workpieces by 90 degrees one by one and forcing the mylar mounting surfaces of the inductor workpieces to face upwards; a plurality of jig discs are arranged on the periphery of the rotary disc at uniform intervals, and an inductor transfer machine, a dispensing machine, a glue detection machine, a mylar cutting and feeding device and a finished product receiving machine are sequentially arranged at the inductor feeding station, the dispensing station, the glue detection station, the mylar feeding station and the finished product discharging station on the outer circumference of the rotary disc. The assembling efficiency of the inductance workpiece and the mylar workpiece can be improved.

The invention relates to the technical field of power electronics, in particular to a network construction type STATCOM topological structure with a super-capacitor and a control method thereof, the topological structure is a star-shaped chain network construction type STATCOM system with a super-capacitor module power unit, the power unit comprises a super-capacitor module and an H-bridge module, and the super-capacitor module is connected with the H-bridge module in parallel; the super-capacitance module is formed by cascading three sub-modules, and each sub-module comprises a super-capacitor, a filter inductor and a DCDC circuit; the control method comprises the steps of voltage feed-forward unit phasor calculation, reactive voltage control and virtual internal potential angle calculation, virtual impedance amplitude limiting logic, bridge arm current reference instruction calculation and modulation wave instruction calculation. According to the invention, the applicability of the super capacitor module is enhanced, the design cost is saved, mutual interference between the frequency modulation characteristic and the inertia damping characteristic is avoided, the active power steady state control precision is improved, and the product safety is improved.

The invention provides a digital twin unmanned aerial vehicle circuit state monitoring method and system, and the method comprises the steps: firstly collecting a partial discharge pulse sequence of an unmanned aerial vehicle switching power supply circuit, separating environment electromagnetic noise through polarization filtering operation, and extracting real discharge pulses to generate partial discharge fingerprint data; inputting the fingerprint data into a pre-established fault search tree model, judging the type of a capacitor or inductor component through a first-stage branch node, and matching a degradation mode such as capacitance attenuation or magnetic saturation through a second-stage branch node to determine the fault type; then, corresponding component parameters of the equivalent circuit model are dynamically updated in the digital twin body, and the circuit operation state change trend is simulated; and finally, according to the state change trend, predicting the residual effective working time of the fault component and outputting a monitoring result. According to the invention, the accuracy of service life evaluation of key components in a complex electromagnetic environment is improved.

The invention discloses a large-current inductor based on thermal actuation multidirectional sealing compensation, and particularly relates to the technical field of inductor parts, the large-current inductor comprises an inductor lower cover, an inductor upper cover, two sliding strips and a multidirectional compensation piece, and the inductor upper cover is arranged above the inductor lower cover; the two sliding strips slide on the inner wall of the inductor lower cover; and one side of each sliding strip is provided with a multidirectional compensation piece. Through the multidirectional compensation piece, the multidirectional compensation mechanism obviously enhances the adaptability of the joint of the inductor upper cover and the inductor lower cover to thermal deformation in different directions, so that the sealing compensation capability of the inductor under multidirectional thermal expansion and cold contraction is more excellent, and the sealing durability of the inductor shell is greatly improved; therefore, the problems that the sealing compensation capacity of the inductor is insufficient under multi-directional thermal expansion and cold contraction, and the sealing durability of the inductor shell is poor are solved.

The invention discloses a wireless and passive carrier roller monitoring device and a using method thereof, and belongs to the technical field of online monitoring, the wireless and passive carrier roller monitoring device comprises a stator assembly fixedly arranged on the outer side of a carrier roller shaft in a sleeving mode and a rotor assembly fixed in a bearing seat of a carrier roller uterus body, an annular or semi-annular circuit board is arranged in the stator assembly, a sensor module, an inductance coil and a wireless transmission module are arranged on the circuit board, and permanent magnets are evenly arranged on the side, close to the carrier roller uterus body, of the rotor assembly. According to the stator and rotor separation type structural design, the monitoring device and a carrier roller mechanical structure are deeply fused, direct capture of energy of a rotating part and stable acquisition of signals of a static part are achieved, the problems of power supply and wiring on a rotating body in a traditional monitoring scheme are solved, and the system integration degree and reliability are improved.

A device may include a mainboard including a grounding unit, a radio-frequency circuit, and a conductor, wherein an annular radiation slot is provided on the conductor. The device may include a feeding terminal having a first end connected to a feeding point of the conductor and a second end electrically connected to the radio-frequency circuit of the mainboard. The device may include a first inductor having a first end connected to a grounding point of the conductor and a second end electrically connected to the grounding unit of the mainboard. The device may include a first capacitor provided in the annular radiation slot and having two electrodes respectively connected to both ends of the annular radiation slot in a width direction of the annular radiation slot, located between the feeding terminal and the first inductor in a length direction of the annular radiation slot.

The invention discloses a left auricle plugging device provided with a real-time atrial pressure monitoring chip, and particularly relates to the technical field of left auricle plugging, the left auricle plugging device comprises a plugging device body and a connector, the top end of the connector is provided with a signal supply module, and the signal supply module is located in the plugging device body; according to the left atrial appendage plugging device, after the inductor in the nut generates a voltage signal, the signal can be transmitted to the low-noise operational amplifier and amplified, meanwhile, the electromagnetic interference between the noise of a circuit and the outside world is restrained, and the plugging device can be used for plugging the left atrial appendage of the left atrial appendage of the left atrial appendage. The physical deformation is converted into corresponding electric signals, the electric signals are transmitted to an in-vitro receiving terminal through an antenna, and a doctor can indirectly judge the recovery condition of the atrial contraction function of the patient according to the pressure signal trend.

The invention provides a magnetic core mutual inductor with a magnetic core convenient to replace, and relates to the technical field of magnetic core mutual inductors. The magnetic core mutual inductor with the magnetic core convenient to replace comprises a base. Through the matching design of the limiting blocks between the base sinking groove and the connecting seat and the circumferentially distributed limiting grooves, the connecting seat can be positioned along a plurality of preset angles, the magnetic core can be adaptively adjusted along with the angle of a mounting base plane, and the magnetic core can be quickly positioned and locked by adopting a quick locking structure that the upper shell and the lower shell are hinged and matched through a transverse and longitudinal dual positioning and locking mechanism. Opening and closing of the upper shell and the lower shell can be completed through one-hand operation, the disassembly and assembly time for magnetic core replacement or maintenance is greatly shortened, through collaborative design of a graphene heat conduction layer, a phase change heat storage layer and a flexible buffer layer, heat conduction and absorption capacity are enhanced, meanwhile, thermal expansion stress is counteracted through a flexible material, heat dissipation efficiency improvement and structural reliability are both considered, and the application range is wide. And the technical defects of high-temperature accumulation and material deformation easily caused by a single heat dissipation layer design are overcome.

The invention provides automatic production equipment for a humanoid robot filter inductor, the automatic production equipment is used for assembling the inductor, the inductor comprises a bottom plate and two coils adhered to the bottom plate through glue, the two coils are arranged in the direction perpendicular to the extension direction of the single coil, and the assembling machine comprises a rack, a first support and a second support; a turntable assembly; the bottom plate feeding assembly is used for feeding the bottom plate to a clamping jaw located at a bottom plate feeding station; the bottom plate gluing assembly is used for gluing the upper surface of the bottom plate located at the bottom plate gluing station; the first coil feeding assembly is used for feeding one of the two coils to the bottom plate located at the first coil feeding station; the side face gluing assembly is used for gluing the outward side of the coil located on the bottom plate; the top gluing assembly is used for gluing the top of the coil located at the top gluing station; the second coil feeding assembly is used for feeding the other coil of the two coils onto the bottom plate; and the discharging assembly is used for discharging the assembled inductors.

The present invention provides a DCDC converter using a dual-mode adaptive off-time timer, comprising: a PWM comparator, an on-time timer, a current detection module, an off-time timer logic control circuit, a drive control circuit, a dual-mode adaptive off-time timer, an inductor LOUT, an NMOS transistor MH, an NMOS transistor ML, a resistor RFB2, a resistor RFB1, and a capacitor COUT. The present invention is implemented by means of the PWM comparator, the on-time timer, the current detection module, the off-time timer logic control circuit, the drive control circuit, and the dual-mode adaptive off-time timer. The off-time of the internal dual-mode adaptive off-time timer has the function of adaptively adjusting an input signal and an output feedback signal, and a minimum off-time timer and an overcurrent off-time timer are simultaneously implemented by using one off-time timer.

The invention provides a filter, a chuck, a shower head and semiconductor equipment. The inductor of the filter comprises a magnetic core and a winding; the magnetic core comprises a winding area; the winding comprises at least two winding wires, the at least two winding wires are gathered together and jointly wound on the winding area, at least one winding wire is used for transmitting a first current signal, at least one winding wire is used for transmitting a second current signal, and the current directions of the first current signal and the second current signal are opposite. One end of each winding wire is connected with a power supply, and the other end is connected with the chuck and an electrode of a heater of the shower head. According to the technical scheme of the invention, the inductor of the filter has high integration level, high inductance and good differential mode characteristic, so that the miniaturization of the filter is realized, the filtering performance of the filter is improved, the heating performance of a chuck or a shower head is stable, and semiconductor equipment can always have good working reliability.