This invention discloses an
optical path alignment device for a high-energy
ion implanter, comprising a planar
transceiver module, an energy-
transceiver module, an
radio frequency (RF) module, an analyzer, an energy-
transceiver laser mounting plate, a planar transceiver
laser mounting plate, and a three-
electrode alignment fixture. The planar transceiver module, energy-transceiver module,
RF module, and analyzer are all mounted on a screen-printed floor. The energy-transceiver
laser mounting plate is mounted on the magnetic yoke of the energy-transceiver module, and the planar transceiver laser mounting plate is mounted on the magnetic yoke of the planar transceiver module, used to hold the laser instrument. During
optical path alignment, the laser instrument is first placed on the planar transceiver laser mounting plate. By adjusting the positions of the feet of the planar transceiver module and the energy-transceiver module, the laser exits from the planar transceiver outlet and then from the energy-transceiver inlet and the energy-transceiver side. The laser instrument is then moved to the energy-transceiver laser mounting plate, and the positions of the feet of the
RF module and the analyzer are adjusted respectively, so that the laser exits sequentially from the energy-transceiver inlet, RF outlet, RF inlet, analyzer outlet, and analyzer inlet. This invention features a compact structure, convenient operation, and high stability.