Thin film transistor, display device having thin film transistor, and method for manufacturing the same

US20090090915A1Inactive Publication Date: 2009-04-09SEMICON ENERGY LAB CO LTD
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Patent Information

Authority / Receiving Office
US · United States
Current Assignee / Owner
SEMICON ENERGY LAB CO LTD
Publication Date
2009-04-09
Estimated Expiration
Not applicable · inactive patent

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Abstract

A thin film transistor with excellent electric characteristics, a display device having the thin film transistor, and methods for manufacturing the thin film transistor and the display device are proposed. The thin film transistor includes a gate insulating film formed over a gate electrode, a microcrystalline semiconductor film formed over the gate insulating film, a pair of buffer layers formed over the microcrystalline semiconductor film, a pair of semiconductor films to which an impurity element imparting one conductivity type is added and which are formed over the pair of buffer layers, and wirings formed over the pair of semiconductor films to which the impurity element imparting one conductivity type is added. A part of the gate insulating film or the entire gate insulating film, and / or a part of the microcrystalline semiconductor or the entire microcrystalline semiconductor includes the impurity element which serves as a donor.
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Description

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a thin film transistor, a display device having the thin film transistor at least in a pixel portion, and a method for manufacturing the thin film transistor and the display device.

[0003] 2. Description of the Related Art

[0004] In recent years, technology for forming thin film transistors using a thin semiconductor film (with a thicknesses of from several tens of nanometers to several hundreds of nanometers, approximately) formed over a substrate having an insulating surface has been attracting attention. Thin film transistors are applied to a wide range of electronic devices such as ICs or electro-optical devices, and prompt development of thin film transistors that are to be used as switching elements in display devices, in particular, is being pushed.

[0005] As a switching element in a display device, a thin film transistor including an amorphous semiconductor film, a thin film transistor...

Claims

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