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Method for forming thin film

Method for forming a thin film at low temperature by using plasma pulses is disclosed. While a purge gas or a reactant purge gas activated by plasma is continuously supplied into a reactor, a source gas is supplied intermittently into the reactor during which period plasma is generated in the reactor so that the source gas and the purge gas activated by plasma reacts, so that a thin film is formed according to the method. Also, a method for forming a thin layer of film containing a plural of metallic elements, a method for forming a thin metallic film containing varied contents by amount of the metallic elements by using a supercycle Tsupercycle comprising a combination of simple gas supply cycles Tcycle, . . . , and a method for forming a thin film containing continuously varying compositions of the constituent elements by using a supercycle Tsupercycle comprising a combination of simple gas supply cycles Tcycle, . . . , are disclosed. The methods for forming thin films disclosed here allows to shorten the purge cycle duration even if the reactivity between the source gases is high, to reduce the contaminants caused by the gas remaining in the reactor, to form a thin film at low temperature even if the reactivity between the source gases is low, and also to increase the rate of thin film formation.
Owner:ASM GENITECH KOREA

Target information generation and ad server

InactiveUS7155508B2Increase ratingsGreater profit margin for ad companiesDigital computer detailsTransmissionMass storageApplication software
An advertisement selection and delivery system for selecting advertisements based on profile information and rendering the advertisements as accessible to a user operating a network-capable appliance connected to a data-packet-network is provided. The system comprises, a first server node connected to the network, the first server node functioning as a user access point on the network, a mass storage repository accessible to the first server node, the repository for storing and serving user profile data, a second server node connected to the network, the second server node for generating user preference data, at least one advertisement server connected to the network, the advertisement server for serving advertisement data, a software application for generating user preference lists and performing advertisement selection and at least one network-capable appliance connected to the network the network-capable appliance for receiving the advertisement data. A user operating the network-capable appliance accesses the first server node and receives the advertisement data, the advertisement data selected for service by matching the user preference data to stored advertisements and rendered accessible to the user during the time of user access to the system from the network-capable appliance.
Owner:YODLEE COM INC
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