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21251results about How to "Low density" patented technology

Thin-film device and method of fabricating the same

A thin-film device includes a first electrical insulator, an oxide-semiconductor film formed on the first electrical insulator, and a second electrical insulator formed on the oxide-semiconductor film, the oxide-semiconductor film defining an active layer. The oxide-semiconductor film is comprised of a first interface layer located at an interface with the first electrical insulating insulator, a second interface layer located at an interface with the second electrical insulator, and a bulk layer other than the first and second interface layers. A density of oxygen holes in at least one of the first and second interlayer layers is smaller than a density of oxygen holes in the bulk layer.
Owner:NEC LCD TECH CORP

Wound treatment employing reduced pressure

A method of treating tissue damage comprises applying a negative pressure to a wound sufficient in time and magnitude to promote tissue migration and thus facilitate closure of the wound. The method is applicable to wounds, burns, infected wounds, and live tissue attachments. A wound treatment apparatus is provided in which a fluid impermeable wound cover is sealed over a wound site. A screen in the form of an open-cell foam screen or a rigid porous screen is placed beneath the wound cover over the wound. A vacuum pump supplies suction within the wound cover over the treatment site.
Owner:WAKE FOREST UNIV HEALTH SCI INC

Apparatuses and methods for atomic layer deposition

Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.
Owner:APPLIED MATERIALS INC

Organosilane compounds for modifying dielectrical properties of silicon oxide and silicon nitride films

The present invention discloses a process for depositing a carbon containing silicon oxide film, or a carbon containing silicon nitride film having enhanced etch resistance. The process comprises using a silicon containing precursor, a carbon containing precursor and a chemical modifier. The present invention also discloses a process for depositing a silicon oxide film, or silicon nitride film having enhanced etch resistance comprising using an organosilane precursor and a chemical modifier.
Owner:VERSUM MATERIALS US LLC

Methods of forming silicon dioxide layers using atomic layer deposition

Provided herein are methods of forming a silicon dioxide layer on a substrate using an atomic layer deposition (ALD) method that include supplying a Si precursor to the substrate and forming on the substrate a Si layer including at least one Si atomic layer; and (b) supplying an oxygen radical to the Si layer to replace at least one Si—Si bond within the Si layer with a Si—O bond, thereby oxidizing the Si layer, to form a silicon dioxide layer on the substrate.
Owner:SAMSUNG ELECTRONICS CO LTD

Energy harvesting computer device in association with a communication device configured with apparatus for boosting signal reception

ActiveUS20130157729A1Improve consumer electronics hybrid consumer electronics performanceLow densityMaterial nanotechnologyEnergy efficient ICTCellular telephoneCommunication device
Disclosed embodiments comprise an energy harvesting computer device in association with a communication device comprising interactive user interface operatively configured with CMOS multiple antennas on chip for boosting signal receptions and for providing faster data transmission speed. Disclosed embodiment encompasses three modes of communications—the Cell phone, wireless Internet applications, and Global communication and media information. Embodiments provide communication apparatus operable to enhance mobile communication efficiency with touch sensitive display comprising energy harvesting platform in communication with a charging circuit board configured with memories, processors, sensors, and modules. Embodiments further provide a gaming device, a wireless media device configured with touch pads comprising sensors being embedded in silicon substrate and fused in nano-fiber/microfiber material having excellent electrical characteristics. Certain embodiments provide communication apparatus configured for voice enabled applications comprising human voice auditory operable to convert text into voice auditory and/or voice auditory into text applications.
Owner:TABE JOSEPH AKWO

Laser-produced porous surface

A method of fabricating a porous or partially porous three-dimensional metal article for use as a tissue ingrowth surface on a prosthesis. The porous article is formed using direct laser remelting in a cross section of a layer of metallic powder on a build platform without fusing thereto. The power, speed, spot size and beam overlap of the scanning laser is coordinated so that a predetermined porosity of the metallic powder can be achieved. Laser factors also vary depending from the thickness of the powder layer, type of metallic powder and size and size distribution of the powder particles. Successive depositing and remelting of individual layers are repeated until the article is fully formed by a layer-by-layer fashion. In an additional embodiment, a first layer of metallic powder may be deposited on a solid base or core and fused thereto.
Owner:UNIV OF LIVERPOOL +1

Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)

The present invention relates to an enhanced sequential atomic layer deposition (ALD) technique suitable for deposition of barrier layers, adhesion layers, seed layers, low dielectric constant (low-k) films, high dielectric constant (high-k) films, and other conductive, semi-conductive, and non-conductive films. This is accomplished by 1) providing a non-thermal or non-pyrolytic means of triggering the deposition reaction; 2) providing a means of depositing a purer film of higher density at lower temperatures; and, 3) providing a faster and more efficient means of modulating the deposition sequence and hence the overall process rate resulting in an improved deposition method.
Owner:NOVELLUS SYSTEMS

Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches

A method for fabricating a layer structure in a trench includes: simultaneously forming a dielectric film containing a Si—N bond on an upper surface, and a bottom surface and sidewalls of the trench, wherein a top / bottom portion of the film formed on the upper surface and the bottom surface and a sidewall portion of the film formed on the sidewalls are given different chemical resistance properties by bombardment of a plasma excited by applying voltage between two electrodes between which the substrate is place in parallel to the two electrodes; and substantially removing either one of but not both of the top / bottom portion and the sidewall portion of the film by wet etching which removes the one of the top / bottom portion and the sidewall portion of the film more predominantly than the other according to the different chemical resistance properties.
Owner:ASM IP HLDG BV

Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches

A method for fabricating a layer structure in a trench includes: simultaneously forming a dielectric film containing a Si—N bond on an upper surface, and a bottom surface and sidewalls of the trench, wherein a top / bottom portion of the film formed on the upper surface and the bottom surface and a sidewall portion of the film formed on the sidewalls are given different chemical resistance properties by bombardment of a plasma excited by applying voltage between two electrodes between which the substrate is place in parallel to the two electrodes; and substantially removing either one of but not both of the top / bottom portion and the sidewall portion of the film by wet etching which removes the one of the top / bottom portion and the sidewall portion of the film more predominantly than the other according to the different chemical resistance properties.
Owner:ASM IP HLDG BV

Method for forming an interface between germanium and other materials

InactiveUS20060099782A1Improved carrier mobilityHinder germanium oxide formationSemiconductor/solid-state device manufacturingSemiconductor devicesIntegrated circuitSemiconductor structure
Interfaces that are portions of semiconductor structures used in integrated circuits and optoelectronic devices are described. In one instance, the semiconductor structure has an interface including a semiconductor surface, an interfacial layer including sulfur, and an electrically active layer (e.g., a dielectric or a metal). Such an interface can inhibit oxidation and improve the carrier mobility of the semiconductor structures in which such an interface is incorporated. The interfacial layer can be created by exposure of the semiconductor surface to sulfur donating compounds (e.g., H2S or SF6) and, optionally, heating.
Owner:MASSACHUSETTS INST OF TECH

Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same

Susceptor assemblies, reactors and systems including the assemblies, and methods of using the assemblies, reactors, and systems are disclosed. Exemplary susceptor assemblies include two or more sections that can be moved relative to each other to allow rapid changes in a substrate temperature. The movement of the two or more sections can additionally or alternatively be used to manipulate conductance of gas flow though a reactor.
Owner:ASM IP HLDG BV

Low density composite proppant, filtration media, gravel packing media, and sports field media, and methods for making and using same

InactiveUS20020048676A1Point becomes highImprove interfacial organic-inorganic adhesionPigmenting treatmentDead plant preservationFiltrationArtificial turf
Low density composite particles made of a binder and filler material are provided for use in subterranean formations. The filler includes low density filler and optionally other filler. The binder includes a polymer and optionally cement. The particles may be employed as proppants useful to prop open subterranean formation fractures. The particles are also useful for gravel packing in subterranean formations, water filtration and artificial turf for sports fields. Methods of making the composite particles are also disclosed.
Owner:HEXION INC
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