The invention belongs to the related technical field of microelectronic devices, and discloses a ferroelectric vertical
transistor based on an
oxide semiconductor and a preparation method thereof, and the ferroelectric vertical
transistor comprises a substrate, a gate
metal electrode, a gate ferroelectric layer, a gate insulating
dielectric layer, an island-shaped source
electrode, the
oxide semiconductor, a source
electrode contact electrode and a top drain electrode. According to the invention, the
hafnium oxide-based ferroelectric material is used as the gate ferroelectric material, so that the information writing and reading can be realized, the regulation effect of the
gate voltage on the channel is amplified, the ratio of the
gate capacitance to the channel
capacitance is reduced, and the working
voltage of the
transistor is reduced, thereby reducing the
power consumption of the ferroelectric vertical transistor. Besides, a gate insulating
dielectric layer is prepared on the gate ferroelectric film to promote the formation of a ferroelectric phase, and the introduction of the insulating
dielectric layer can inhibit the injection of charges, so that the polarization state of the
hafnium oxide-based ferroelectric material is adjusted, and the overall performance of the ferroelectric transistor is improved.