The present invention provides a novel dibenzothiophenium salt compound and a method for producing the same. The present invention also provides a
photoacid generator containing the dibenzothiophenium salt compound, a
resist composition containing the
photoacid generator, a method for forming a
resist pattern using the
resist composition, and the like. The present invention relates to a compound represented by
chemical formula (I), a
photoacid generator containing the compound, a resist composition containing the
photoacid generator, and a method for forming a resist pattern using the resist composition. (In the formula, R1 and R2 are the same or different and each represent a
hydrogen atom, a
halogen atom, -CF3, -SO2R3, an
alkyl group having 1-10 carbons, -OH, a polymerizable group selected from formula (S-1) to formula (S-4), or an acid-reactive group selected from formula (R-1) to formula (R-7). R3 represents -CF3, -CF2CF3, an
alkyl group having 1-10 carbons, or a
phenyl group. [A]- represents a trifluoromethanesulfonic
acid anion (TfO-) or a
halide ion.) (In the formulae, R1a represents a
hydrogen atom or a
methyl group, and Y represents a
single bond or an alkylene group having 1-3 carbons.) (In the formulae, Y is as described above. R51 to R53 may be the same or different, and each represent a
hydrogen atom, an
alkyl group having 1-20 carbons, an alkenyl group having 2-8 carbons, or an aromatic group having 4-18 carbons, or R 51 and R52 may be linked to each other to form, together with the carbon atoms to which these are bonded, an
aliphatic hydrocarbon ring having 3-20 carbons. R54 and R55 are the same or different, and each represent a
hydrogen atom or an alkyl group having 1-6 carbons. R56 represents an alkyl group having 1-20 carbons or an alicyclic
hydrocarbon group having 3-20 carbons. -CH2- contained in the alkyl group, the
aliphatic hydrocarbon ring, and the alicyclic
hydrocarbon group may be substituted with -O- or -S-, and d represents an integer from 0 to 4. A case in which R51 to R53 are all hydrogen atoms in formula (R-1), formula (R-3), and formulae (R-5) to (R-7) is excluded.)