Provided are: a
radiation-sensitive composition capable of exhibiting excellent sensitivity, CDU performance, DOF performance, pattern circularity, LWR performance, pattern rectangularity, and development defect suppression when forming a pattern; a
pattern formation method; and an
onium salt. This
radiation-sensitive composition contains an
onium salt represented by formula (1) (hereinafter, also referred to as an "
onium salt (1)"), a
polymer containing a
structural unit (I) having an acid-dissociable group, and a
solvent. (In formula (1), Ar1 is an (a1 + b1 +1)-valent aromatic ring. Ar2 is an (a2 + b2 +1)-valent aromatic ring. X1 and X2 are each independently a monovalent
organic group having 1-20 carbon atoms, a cyano group, a nitro group, or a
halogen atom. When multiple X1 and multiple X2 are present, the multiple X1 and the multiple X2 are each identical to or different from each other. Y1 is a monovalent
organic group having 4-20 carbon atoms and bonded via Ar1 and -O-, -S-, or-SO2-, or a monovalent perfluoroalkyl group having 1-20 carbon atoms. When multiple Y1 are present, the multiple Y1 are identical to or different from each other. Y2 is a monovalent
organic group having 4-20 carbon atoms and bonded via Ar2 and -O-, -S-, or -SO2-, or a monovalent perfluoroalkyl group having 1-20 carbon atoms. When multiple Y2 are present, the multiple Y2 are identical to or different from each other. L is a
single bond or a
divalent linking group having 1-5 carbon atoms. a1, a2, b1, and b2 are each independently an integer of 0-5. When the aromatic ring of Ar2 is a
benzene ring, b1 + b2 ≥ 1.)