Lithium rich metal oxyfluorides are described with high specific capacity and, good cycling properties. The materials have particularly good high rate capabilities. The fluorine dopant can be introduced in a low temperature process to yield the materials with desirable cycling properties. In some embodiments, the positive electrode active materials have a composition represented approximately by the formula Li1+xNiαMnβCoγAδO2−zFz where:x is from about 0.02 to about 0.19,α is from about 0.1 to about 0.4,β is from about 0.35 to about 0.869,γ is from about 0.01 to about 0.2,δ is from 0.0 to about 0.1 andz is from about 0.01 to about 0.2,where A is Mg, Zn, Al, Ga, B, Zr, Ti, Ca, Ce, Y, Nb or combinations thereof.