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6424 results about "Nitrogen source" patented technology

Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same

A method of forming a metal nitride film using chemical vapor deposition (CVD), and a method of forming a metal contact and a semiconductor capacitor of a semiconductor device using the same, are provided. The method of forming a metal nitride film using chemical vapor deposition (CVD) in which a metal source and a nitrogen source are used as a precursor, includes the steps of inserting a semiconductor substrate into a deposition chamber, flowing the metal source into the deposition chamber, removing the metal source remaining in the deposition chamber by cutting off the inflow of the metal source and flowing a purge gas into the deposition chamber, cutting off the purge gas and flowing the nitrogen source into the deposition chamber to react with the metal source adsorbed on the semiconductor substrate, and removing the nitrogen source remaining in the deposition chamber by cutting off the inflow of the nitrogen source and flowing the purge gas into the deposition chamber. Accordingly, the metal nitride film having low resistivity and a low content of Cl even with excellent step coverage can be formed at a temperature of 500° C. or lower, and a semiconductor capacitor having excellent leakage current characteristics can be manufactured. Also, a deposition speed, approximately 20 A / cycle, is suitable for mass production.
Owner:SAMSUNG ELECTRONICS CO LTD

Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same

A method of forming a metal nitride film using chemical vapor deposition (CVD), and a method of forming a metal contact and a semiconductor capacitor of a semiconductor device using the same, are provided. The method of forming a metal nitride film using chemical vapor deposition (CVD) in which a metal source and a nitrogen source are used as a precursor, includes the steps of inserting a semiconductor substrate into a deposition chamber, flowing the metal source into the deposition chamber, removing the metal source remaining in the deposition chamber by cutting off the inflow of the metal source and flowing a purge gas into the deposition chamber, cutting off the purge gas and flowing the nitrogen source into the deposition chamber to react with the metal source adsorbed on the semiconductor substrate, and removing the nitrogen source remaining in the deposition chamber by cutting off the inflow of the nitrogen source and flowing the purge gas into the deposition chamber. Accordingly, the metal nitride film having low resistivity and a low content of Cl even with excellent step coverage can be formed at a temperature of 500° C. or lower, and a semiconductor capacitor having excellent leakage current characteristics can be manufactured. Also, a deposition speed, approximately 20 A / cycle, is suitable for mass production.
Owner:SAMSUNG ELECTRONICS CO LTD

Nitrogen, phosphorus and sulphur doping or co-doping carbon dot and batch controllable preparing method and application thereof

The invention provides a nitrogen, phosphorus and sulphur doping or co-doping carbon dot and a batch controllable preparing method and application thereof. The method comprises the steps that a carbon source, a nitrogen source, a phosphorus source and a sulphur source are evenly mixed, and a mixture is obtained, wherein the molar ratio of C to N to P to S in the mixture is 1 to 0-0.8 to 0-0.4 to 0-0.4, and the contents of N, P and S are prevented from being zero at the same time; in the air, the mixture is heated to be fused, the reaction is carried out for 3 min to 60 min, natural cooling is carried out till the indoor temperature is reached, a reaction product is separated by a silicagel column, raw materials which do not react are removed, and the nitrogen, phosphorus and sulphur doping or co-doping carbon dot is obtained. According to the method, the technology is simple, the compound time is short, batch producing can be achieved, the doping amount can be adjusted and controlled accurately, the fluorescence color of the prepared carbon dot ranges from blue to green, the application can be achieved on bioluminescence marking and cell imaging aspects, and the good economic benefit and the application prospect are achieved.
Owner:XI AN JIAOTONG UNIV

Novel edible fungus culture medium and preparation method thereof

The invention discloses a novel edible fungus culture medium and a preparation method thereof. The novel edible fungus culture medium comprises 70-85% of main material, 15-20% of auxiliary material, 3-5% of additive material and 0.1-0.8% of absorbent resin, wherein the main material comprises sawdust, straws, corncobs, and cottonseed hull; the auxiliary material comprises bran, rice bran and maize meal; and the additive material comprises land plaster, slaked lime, calcium superphosphate, white sugar and urea. The preparation method disclosed by the invention comprises the following steps of: reasonably selecting raw materials in the ratio of nutrient ingredients according to the nutritional requirements of different kinds of edible fungi to prepare the culture medium, and adding the absorbent resin synthesized by the biological materials. The permeability and the water retaining capacity of the culture medium are greatly enhanced, and the accumulation of the various nutrient elements and the slow releasing capacity to the nutrient elements are enhanced; meanwhile, the properties of the cellulose and the protein of the absorbent resin provide the nutrition in the aspect of carbon source or nitrogen source so as to ensure the sufficient supplement of the required raw materials of the fungi; and by adopting the novel edible fungus culture medium disclosed by the invention, the output of a single bag is enhanced by 25%-35%, and the fungus output time is advanced by 4-6 days.
Owner:SUIHUA UNIV

Special diet and foodstuffs formula containing small peptide for tumor patient

The invention provides a formulation for a special prandial food, which contains short peptides and is provided for tumor sufferers to eat. The food uses food-originated short peptides as raw materials which are added with extracts of medical-edible Chinese herbal medicines such as champignons, dried orange peels, Chinese wolfberry, yams, tuckahoes, rhizoma polygonati, and the like, and compound complex formulation. With the food formulation, powdered or granular foods can be prepared and are dissolved with warm water to eat. The food prepared according to the formulation is easy to dissolve, can be absorbed and utilized quickly, provides a high quality nitrogen source for organisms, supplements various vitamins and minerals necessary for a human body, can correct the negative nitrogen balance of the tumor sufferers, improve the nutritional status of the tumor sufferers, and can play a role in improving organism immunity and suppressing and resisting cancers through the combined action of various factors such as bioactive components, the functional oligosaccharides, and the like in the food-originated short peptides and the extracts of the medical-edible Chinese herbal medicines, thus the food is suitable for the tumor sufferers, particularly for cancer patients who receive radiation therapy and chemotherapy to eat.
Owner:GUANGDONG SINO NUTRI-FOOD BIOLOGICAL TECH CO LTD

Nitrogen-doped porous carbon and preparation method thereof

The invention relates to a preparation method of nitrogen-doped porous carbon, and in particular relates to a method for preparing doped porous carbon by taking a heavy organism as a carbon source, belonging to the technical field of carbon material preparation. The method comprises the following steps of: firstly, conducting a reaction between a nitrogen source and formaldehyde to generate a prepolymer; then, mixing the prepolymer with a template and the carbon source, and reacting at certain temperature; and finally, curing and carbonizing a crosslinking product to obtain nitrogen-doped porous carbon. The method provided by the invention can obtain nitrogen-doped porous carbon with different pore structures and nitrogen contents through multiple ways such as control on the nitrogen source type, temperature control, control on the mass ratio of a carbon source to a nitrogen source, control on the dosage of a template agent and the like. By adopting a chemical polymerization blending carbonization method, the method effectively controls the loss of nitrogen in a thermal treatment process and improves the utilization rate of the nitrogen source; the selection range of the raw material is wide; and the method is easy to operate and easily realizes large-scale preparation while providing a new way for efficiently utilizing heavy organic matters.
Owner:DALIAN UNIV OF TECH

Composite material of nitrogen-doped porous carbon-wrapped carbon nano tube as well as preparation method and application of material

The invention relates to a composite material of a nitrogen-doped porous carbon-wrapped carbon nano tube as well as a preparation method and an application of the composite material. The preparation method comprises the following steps: dispersing the carbon nano tube in water, adding a carbon source to obtain a reaction system, subsequently performing hydrothermal reaction, performing thermal treatment on the carbon nano tube wrapped with a carbon layer on the surface, and a nitrogen source at the high temperature so as to obtain the composite material of the nitrogen-doped porous carbon-wrapped carbon nano tube. According to the preparation method, the carbon source is polymerized under a hydrothermal reaction condition so as to obtain the carbon layer, the outer surface of the carbon nano tube is wrapped with the carbon layer, subsequently the carbon layer is carbonized and decomposed to generate a porous structure under high temperature treatment, and at the same time, the gasified nitrogen source is diffused to the carbon layer through ducts to be subjected to in-situ doping. The composite material provided by the invention can be used as a cathode oxidation reduction catalyst of a fuel battery, is excellent in catalysis, and is high in oxidation activity when being compared with other nitrogen-doped materials reported in documents. The preparation method provided by the invention is simple and economic in process, convenient to operate and easy to achieve the large-scale production.
Owner:INST OF CHEM CHINESE ACAD OF SCI
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