2 results about "Rocking curve" patented technology

An axial direction adjustment system for a purification furnace according to one embodiment may include an X-ray generator that irradiates X-rays in real time onto a crystal being grown as a single crystal, a sensor unit that detects X-rays reflected from the crystal, a control unit that calculates the full width at half maximum (FWHM) of a rocking curve generated by analyzing X-rays acquired from the sensor unit and generates a command to control the direction of a rotation axis connected to the single crystal according to the result of the calculated full width at half maximum, and an adjustment unit that adjusts the rotation axis based on the control command of the control unit.

The present application provides a composite substrate in which a high-quality AlN single crystal layer is firmly bonded to a support substrate. The composite substrate includes a support substrate and an AlN single crystal layer bonded to the support substrate. The AlN single crystal layer has a (0002) plane with an X-ray rocking curve half-value width of 20 to 350 arcsec, a (10-12) plane with an X-ray rocking curve half-value width of 20 to 500 arcsec, and a defect density of 1.0 x 10 3 cm 7 -1.0 x 10 －2 cm