50 results about "Molecular beam" patented technology

The invention relates to the technical field of nuclear fusion, and discloses an ultrasonic molecular beam injection system for a fusion device.The ultrasonic molecular beam injection system comprises a gas source, a pressurizing unit, a storage unit and an injection unit, the pressurizing unit comprises a gas conveying pipeline, and the two ends of the gas conveying pipeline communicate with the gas source and the storage unit correspondingly; a booster pump is arranged on the gas conveying pipeline and used for pressurizing gas in the direction away from the gas source, and the storage unit can receive and store the pressurized gas so that the gas can reach a preset pressure value; the injection unit comprises an injection pipeline and a nozzle, one end of the injection pipeline is communicated with the storage unit, the other end of the injection pipeline is provided with the nozzle, the nozzle is used for stretching into a Tokamak vacuum chamber of the fusion device, and the injection pipeline can convey gas in the storage unit to the nozzle so as to form an ultrasonic molecular beam current through the nozzle. According to the invention, the injection function of the ultrasonic molecular beam in a large fusion device can be realized.

To provide a photoresist having excellent photon absorptivity and low line edge roughness.SOLUTION: A multilayer molecular film photoresist, comprising: a plurality of molecular beams extending in an upper direction of a substrate and arranged in a horizontal direction, wherein each of the molecular beams includes a plurality of inorganic monomolecules and organic monomolecules interposed between at least some of the inorganic monomolecules, the inorganic monomolecules and the organic monomolecules being connected to each other by bonding.SELECTED DRAWING: Figure 1

The invention provides a molecular beam rectifying device, a doping source furnace and a use method of the molecular beam rectifying device. The doping source furnace comprises a fixing device and a molecular beam rectifying device. The device comprises a crucible body and an insertion piece, the crucible body is used for containing a source material, and the insertion piece is used for being placed in the crucible body and can cover the whole cross section of the crucible body; a through hole is formed in the insertion piece, and the hole is used for allowing molecular beams formed by heating the source material to pass through. According to the device, the injection amount of the molecular beam can be adjusted through the holes in the insertion piece, so that the uniformity of the molecular beam at the outlet of the crucible body is improved, and the product yield is improved.

The invention provides a low-temperature molecular beam device, which relates to the field of low-temperature physical chemistry and comprises a refrigeration assembly, a primary shielding cover and a buffer cooling structure. The refrigeration assembly comprises a first-stage cold head and a second-stage cold head; the first-stage shielding cover is provided with a first-stage shielding inner cavity; the first-stage cold head is connected with the first-stage shielding cover and is used for cooling the first-stage shielding cover; the second-stage cold head is accommodated in the first-stage shielding inner cavity; the buffer cooling structure is connected to the second-stage cold head and is accommodated in the first-stage shielding inner cavity; the buffer cooling structure is provided with a buffer cooling inner cavity, and the buffer cooling inner cavity is used for introducing buffer gas and target molecules. According to the low-temperature molecular beam device in the embodiment of the invention, the temperature of the buffer gas can be further reduced.

This invention relates to a molecular beam epitaxy shutter and apparatus, and pertains to the field of epitaxial growth technology. In the molecular beam epitaxy shutter of this invention, the first and second blades of the shutter plate have an included angle, such that when the shutter plate blocks the furnace opening, the molecular beam stream and thermal radiation emitted from the furnace opening intersect the shutter plate at an angle. The molecular beam stream and thermal radiation are reflected by the shutter plate and fall outside the furnace, thus avoiding the problem that existing shutter structures cannot effectively prevent source material splashing and thermal reflection to the furnace opening, affecting the stability of epitaxial growth and the coating quality.

The present invention discloses a beam source system for generating low-temperature molecules, comprising a vacuum system, a pulse tube refrigerator, a gas reaction chamber, a gas pipeline, a flowmeter, a sample rod, a motor transmission device, a vacuum stepper motor, a motor driver, and a YAG laser. The present invention enables the low-temperature motor to drive the experimental sample rod to rotate continuously and stably at ultra-low temperatures; the YAG laser uniformly ablates the side surface of the sample rod, and an inert pre-cooled carrier gas is used to achieve the continuous and stable generation of low-speed and low-temperature atomic or molecular beams. The specially designed low-temperature motor has freely adjustable speed and ensures that, while the beam source is stable, motor heating will not cause the beam source cavity temperature to exceed 5K. Since the position of the YAG ablation focus does not need to be changed, the aerodynamic properties within the beam source cavity can be kept stable. The present invention has the advantages of high stability and good beam quality, and has significant application prospects in the field of atomic and molecular physics.

The application relates to the technical field of nuclear fusion, and discloses an ultrasonic molecular beam injection system for a fusion device and a use method thereof, wherein the ultrasonic molecular beam injection system comprises a gas source, a pressurizing unit, a storage unit and an injection unit; the pressurizing unit comprises a gas conveying pipeline, two ends of the gas conveying pipeline are communicated with the gas source and the storage unit respectively, a pressurizing pump is arranged on the gas conveying pipeline, the pressurizing pump is used for pressurizing the gas in a direction away from the gas source, and the storage unit can receive and store the pressurized gas so that the gas reaches a preset pressure value; the injection unit comprises an injection pipeline and a nozzle, one end of the injection pipeline is communicated with the storage unit, the other end is provided with the nozzle, the nozzle is used for extending into a tokamak vacuum chamber of the fusion device, and the injection pipeline can convey the gas in the storage unit to the nozzle so as to form an ultrasonic molecular beam flow through the nozzle. The application can realize the injection function of the ultrasonic molecular beam flow in a large fusion device.

The invention provides a swinging shutter device and molecular beam epitaxy equipment, and relates to the technical field of molecular beam epitaxy, and the swinging shutter device comprises a supporting seat which is arranged below a jet orifice of a source furnace; the baffle is arranged on the front side of the jet orifice of the source furnace, the lower end of the baffle is connected with a swing arm, and the swing arm can rotate relative to the supporting seat; first ends of the connecting rods are hinged to the swing arms; the lifting assembly pulls the connecting rod to drive the baffle to swing back and forth between a first position and a second position on the front side of a jet orifice of the source furnace; when the baffle is in the first position, molecular beams sprayed to the film growth area by the source furnace are completely blocked by the baffle; and when the baffle plate is in the second position, the baffle plate does not block the beam sprayed to the film growth area by the source furnace. The swing shutter device provided by the invention can be suitable for the transformation of the existing molecular beam epitaxy equipment, solves the problems of untight shutter blocking and slow response of the existing molecular beam epitaxy equipment, and ensures the long-term stable operation of the molecular beam epitaxy equipment.

The invention relates to the technical field of nuclear fusion, in particular to a spherical Tokamak feeding system based on ultrasonic molecular beam injection. Comprising the steps that a gas tank, a hydrogen tank, a pressure reducing valve, a needle valve and the like form a common gas supply loop to serve as an initial feeding channel so as to meet the feeding requirement of daily operation, and an ultrasonic molecular beam injection gas path is additionally arranged on the basis to serve as a secondary supplementing feeding channel in the plasma discharging process and used for improving the plasma density; and compared with a traditional air supply mode for secondary feeding, the response time is shorter, and the feeding efficiency is higher. Finally, the ultrasonic molecular beam injection gas path and the initial feeding channel are connected through a gas pressure measuring assembly so as to monitor the gas pressure of the two gas paths; based on the air pressure of the two air paths, the amount of air fed every time can be accurately measured. According to the invention, staged fuel gas injection can be carried out on the spherical tokamak, the injection efficiency of the fuel gas is greatly improved, and the wall circulation is reduced.

The present application relates to molecular beam mass spectrometry instrument, especially to a kind of vacuum ultraviolet light photoelectron ionization source device for molecular beam mass spectrometry.It includes vacuum ultraviolet light source, ionization source cavity, ring electrode, photocathode and differential electrode, wherein vacuum ultraviolet light source is arranged on the side wall of ionization source cavity, ring electrode and photocathode are sequentially arranged in ionization source cavity along the light path direction of vacuum ultraviolet light source, coaxial sampling cone and differential electrode are respectively arranged on the two side walls of ionization source cavity along the direction perpendicular to the light path of vacuum ultraviolet light source, the emitted light of vacuum ultraviolet light source irradiates photocathode to generate photoelectron, photoelectron collides with gas sample entering from sampling cone in ring electrode to obtain gas sample ion, and gas sample ion is output through differential electrode.The present application uses VUV light beam to irradiate molecular beam from side vertical intersection, to achieve threshold ionization effect;Single-photon ionization effect is realized simultaneously.

This invention provides a method and related equipment for measuring molecular beam density, applied to a molecular beam density measurement system. The system includes a vacuum chamber, a precision leak valve, a vacuum ion gauge, a microchannel plate detector, and a laser ionization device. The method includes: controlling the opening of the precision leak valve to introduce background gas into the vacuum chamber and obtaining the standard density of the background gas; photoionizing the background gas and acquiring a first ion signal through the microchannel plate detector; establishing a quantitative calibration relationship between the first ion signal and the standard density; maintaining the operating parameters of the laser ionization device consistent with those used when establishing the quantitative calibration relationship, controlling the laser ionization device to photoionize the target molecular beam and acquiring a second ion signal generated by the target molecular beam; and calculating the absolute density of the target molecular beam based on the second ion signal using the quantitative calibration relationship. This application can improve the accuracy of molecular beam density measurement by introducing a standard gas of known density to establish a quantitative calibration relationship.

The invention relates to a low-viscosity nano drag reducer applicable to a tight oil reservoir'fracturing-three-production 'integrated process as well as a preparation method and application of the low-viscosity nano drag reducer. The low-viscosity nano drag reducer comprises the following components in percentage by weight: 10-40% of a water-soluble monomer, 10-30% of a nonionic vinyl monomer and 10-50% of a cosolvent, 5-25% of inorganic salt; 0.01%-0.3% of an initiator; and the balance of water. The low-viscosity nano drag reducer suitable for the tight oil reservoir fracturing-three-production integrated process has a nanoscale molecular beam size, so that fracturing fluid can penetrate into a micro-nanoscale pore throat in a tight oil reservoir, and effective utilization of oil and gas resources is realized; the fracturing fluid prepared from the low-viscosity nano drag reducer has the characteristic of low viscosity, so that the fracturing fluid has small damage to a reservoir after gel breaking and flowback, and continuous production of oil and gas resources is facilitated.

The utility model relates to a crucible which is used for carrying out evaporation on a base plate of a circular structure, and comprises a bottle body used for containing raw materials; the bottle opening is provided with an opening, a molecular beam is generated after the raw material is heated and outwards diffused to the surface of the substrate through the opening of the bottle opening, the surface of the substrate is parallel to the horizontal plane during evaporation, and an acute angle is formed between the axis direction of the bottle body and the direction perpendicular to the surface of the substrate; wherein the cross section of the bottle opening is of an oval structure in the direction perpendicular to the axis of the bottle body, so that the cross section of a molecular beam diffused outwards through the opening of the bottle opening is of a circular structure. According to the crucible, the shape of a molecular beam can be matched with that of a substrate of a circular structure, so that the waste phenomenon of the molecular beam is greatly reduced, the consumption of expensive raw materials is greatly reduced, the energy consumption required by evaporation raw materials is greatly reduced, and the utilization rate of heat energy is improved; in addition, for raw materials with the same volume, more products can be evaporated, and the yield of the products is improved.

Embodiments of the present application provide a system, method and medium for pulsed molecular beam measurement, wherein the system comprises: a control module, a pulse valve, an ion gauge and an oscilloscope, the pulse valve, the ion gauge and the oscilloscope being connected with the control module respectively; the control module is used for controlling the pulse valve and the ion gauge to start; the pulse valve is used for spraying gas containing target molecules to a rear vacuum cavity after starting, the gas forms a molecular beam in the vacuum cavity; the ion gauge is used for emitting hot electrons to the vacuum cavity after starting, the molecular beam collides with the hot electrons in the vacuum cavity to form a current signal corresponding to the molecular beam; the control module is further used for collecting the current signal, amplifying and converting the current signal into a voltage signal, and transmitting the voltage signal to the oscilloscope; the oscilloscope is used for collecting and processing the voltage signal to obtain visualized molecular beam data, aiming to suppress noise interference in the process of pulsed molecular beam measurement and improve the accuracy of pulsed molecular beam measurement.

The invention provides a method and a device for evaluating the atomic oxygen resistance of a material. The method comprises the following steps: constructing an initial three-dimensional periodic molecular model of a to-be-evaluated organic material; performing NPT ensemble optimization and geometric optimization on the three-dimensional periodic molecular model to obtain an optimized three-dimensional periodic molecular model; introducing an atomic oxygen molecular beam into reaction molecular dynamics simulation, setting a plurality of atomic oxygen incident angles, and performing atomic oxygen action simulation on the optimized three-dimensional periodic molecular model to obtain atomic oxygen reaction data under each incident angle; processing the atomic oxygen reaction data to obtain an atomic oxygen reaction rate Ey corresponding to each incident angle; and judging the atomic oxygen resistance of the to-be-evaluated organic material according to the atomic oxygen reaction rate Ey. The evaluation method provided by the invention can improve the evaluation efficiency of the atomic oxygen resistance of the material.

The present application relates to the technical field of aerospace space metrology, and in particular, to a polyatomic molecular directed beam generation device, comprising a directed beam generation chamber, wherein a radio frequency ion source, an ion acceleration module, an ion screening module, an ion neutralization module and an ion absorption module which are arranged in sequence in an axial direction are provided inside the directed beam generation chamber, a radio frequency generation and pulse modulation module is provided on the outer wall of the directed beam generation chamber, and the radio frequency generation and pulse modulation module comprises a radio frequency signal generator, a pulse modulation module, a power amplifier and a radio frequency coil. According to the present application, for polyatomic molecules with complex compositions after ionization, a high-speed directed molecular beam with independently adjustable velocity and density, high gas purity and good velocity consistency can be formed by means of active regulation and screening, which can provide a standard test environment simulating an orbital gas environment for a space metrology-related instrument.

The utility model relates to a low-temperature ultrasonic molecular beam injection system suitable for a fusion device. The system comprises a low-temperature gas storage tank with a double-layer structure, a pulse electromagnetic valve and a Laval nozzle. The low-temperature gas storage tank is composed of an inner tank body and an outer tank body, the inner tank body is used for storing injected gas, and the outer tank body is used for maintaining a low-temperature state. The pulse electromagnetic valve is used for controlling injection of gas, and the Laval nozzle is used for accelerating the gas and injecting the gas into the vacuum cavity of the fusion device. A liquid nitrogen cooling mode is adopted, a low-temperature ultrasonic molecular beam injection system is formed, and the feeding efficiency after particles are injected into the Tokamak device can be effectively improved by utilizing the cluster effect of the low-temperature particles.

The invention belongs to the technical field of medicine preparations, discloses a preparation method of a high-stability medicine amorphous solid dispersion, and aims to solve the problems of medicine degradation, solvent residue, easiness in crystal returning in an amorphous state and the like in the preparation of the existing medicine amorphous solid dispersion. The preparation method comprises the following steps: in an ultra-high vacuum and ultra-low temperature environment, evaporating a drug and a carrier polymer into atom or molecular beams in an ultra-mild evaporation mode, and accurately controlling codeposition, so that the atom or molecular beams are subjected to ultra-fast condensation on the surface of an ultra-low temperature substrate, and an atom / molecular level compact amorphous structure is directly formed. By the adoption of the method, high temperature is thoroughly avoided, no organic solvent is left, extreme amorphous physical stability is achieved from the atomic / molecular level, and medicine back crystallization is fundamentally inhibited.

The invention provides a beam characteristic integrated distribution measurement system for an ultrasonic molecular beam, relates to the technical field of ultrasonic molecular beam injection, and solves the limitation problem that vacuum environment compatibility and multi-parameter synchronous measurement requirements are difficult to meet in the prior art. In the system, a glow discharge module generates and maintains glow discharge in a vacuum chamber, so that existing gas is ionized to form plasma; the SMBI module maintains the preset vacuum degree of the vacuum chamber, configures SMBI neutral particle beams and injects the SMBI neutral particle beams into the area where the plasma is located in the vacuum chamber; the probe measurement module measures the saturation flow of the ultrasonic molecular beam particles and obtains the distribution measurement result of the beam velocity of the ultrasonic molecular beam particles; and the high-speed image acquisition module shoots the whole process of beam morphology change after ionization to obtain an optical morphology evolution measurement result. Through the synergistic effect of the functional modules, the measurement of parameters such as beam morphology, divergence angle, effective injection distance and the like of the ultrasonic molecular beam can be realized.

The invention relates to a small-signal free radical infrared spectrum detection method. The method comprises the following steps: 1, acting photolysis laser on a precursor molecular beam source to obtain a free radical and precursor mixed beam source; 2, infrared laser and free electron laser act on the free radical and precursor mixed beam source to obtain a semi-excitation mixed ion beam source; 3, after the semi-excitation mixed ion beam source passes through an accelerator, a flight time difference T is formed between precursor ions and free ions in the semi-excitation mixed ion beam source; 4, the ion beam source enters a deflection electric field, a first electrode of the deflection electric field applies a voltage pulse signal set according to the flight time difference T, precursor ions deflect, move and are discharged when the voltage pulse signal exists, and the ion beam source enters a detector after passing through a reflector when the voltage pulse signal does not exist. Deflection, movement and discharge of precursor ions are realized in the deflection electric field, free radical ion signals can be increased, and measurement of small-signal free radical infrared spectrum is realized.

The invention relates to a molecular beam epitaxial shutter and device, and relates to the technical field of epitaxial growth. According to the molecular beam epitaxial shutter, the included angle is formed between the first blade and the second blade of the shutter piece, so that when the shutter piece shields the furnace opening of the source furnace, molecular beam current and heat radiation emitted from the furnace opening of the source furnace are obliquely intersected with the shutter piece, and the molecular beam current and the heat radiation fall outside the source furnace after being reflected by the shutter piece; therefore, the problem that an existing shutter structure cannot effectively prevent the source material from splashing and heat from being reflected to the furnace opening of the source furnace, so that the epitaxial growth stability and the coating quality of equipment are affected is solved.

The application relates to the technical field of molecular beam epitaxy equipment, in particular to a long-neck vertical crucible, a source furnace and a molecular beam epitaxy equipment, which comprises a vertical crucible body and a diffusion neck integrally formed with the vertical crucible body, the inside of the vertical crucible body is provided with a charging cavity, the top end of the charging cavity is provided with a narrow mouth, the diffusion neck is provided with a diffusion channel, the feeding end of the diffusion channel is communicated with the narrow mouth, and the diffusion neck is arranged at an angle with the vertical crucible body. The application can keep the liquid surface area of raw materials constant, make the beam intensity of a molecular beam or an atomic beam long-term stable and not attenuate, eliminate the direct view of the liquid surface of the raw materials and the substrate, avoid thermal radiation interference, ensure the uniformity of the substrate temperature, crack and filter large molecular groups or large atomic groups, and significantly reduce the film defect rate, the vertical crucible body is arranged outside a growth cavity, the raw material loading capacity is greatly improved, the maintenance period is prolonged, the beam fluctuation when a baffle is opened is reduced, and the beam uniformity in the time scale is improved.

The invention discloses a mobile sampling time-of-flight mass spectrometry detection device and application, and belongs to the technical field of mass spectrometry. The device comprises a reaction tube, a sleeve, a moving mechanism, a grading air exhaust mechanism, a photoionization chamber and a reflective time-of-flight mass spectrometer, wherein the wall surface of the reaction tube is provided with multiple axial sampling areas; the sleeve is sleeved outside the reaction tube; the side wall of the sleeve is provided with a quartz nozzle; during working, the moving mechanism drives the sleeve to enable the quartz nozzle to be aligned with a sampling area, gas forms an ultrasonic molecular beam through the funnel, neutral molecules are ionized by the light source after graded gas extraction and pressure reduction, and ions are analyzed by the mass spectrometer. The device is used for research on product selectivity and reaction mechanism by spatial distribution of short-chain olefin prepared by Fischer-Tropsch synthesis, isomeride can be distinguished, axial species distribution can be accurately represented, and detection selectivity and reliability can be improved.

The present invention belongs to the technical field of mass spectrometry ionization sources and provides a mass spectrometry ionization source for online detection of fuel gas components at the outlet of an aircraft engine combustion chamber. The mass spectrometry ionization source solves the problem that existing ionization sources are difficult to apply to field tests for measuring component concentrations at the outlet of a real aircraft engine combustion chamber. The mass spectrometry ionization source comprises an ionization source cavity and a radio frequency windowless discharge lamp. A flat plate electrode, a cone electrode, a lamp holder electrode, a direct current transmission electrode, a radio frequency transmission electrode, and a differential electrode are sequentially arranged inside the ionization source cavity along an axial direction. A discharge gas inlet is provided on the ionization source cavity. One end of the radio frequency windowless discharge lamp is connected to the discharge gas inlet, and the other end extends into the interior of the lamp holder electrode. The cone electrode allows fuel gas to be sampled in the form of a molecular beam, thereby ensuring efficient transmission of stable components and active components in the fuel gas. Efficient transmission of ions is achieved by combining the direct current transmission electrode with the radio frequency transmission electrode, thereby achieving full-spectrum online analysis of fuel gas components at the outlet of the aircraft engine combustion chamber.

The invention relates to an ultrasonic molecular beam generation device with a wide temperature regulation range, and belongs to the technical field of vacuum. The invention includes a molecular beam valve for generating a molecular beam. The molecular beam valve is fixed on the base, so that the use stability of the molecular beam valve is kept. An induction coil is arranged at a valve head of the molecular beam valve, and a molecular beam is heated through induced current of a high-frequency oscillating circuit. A semiconductor chilling plate is arranged on the molecular beam base and can play a role in cooling the whole molecular beam valve when high-temperature molecular beams are generated, and it is guaranteed that the temperature of other positions except the position of the valve head is stable. Under the condition that the induction circuit is not turned on, the refrigeration sheet can cool the whole molecular beam valve, and therefore ultrasonic molecular beams with the temperature lower than the room temperature are generated. And under the combination of heating and cooling, the temperature range of the molecular beam is widened.

The application discloses a mobile sampling time-of-flight mass spectrometry detection device and application, and belongs to the technical field of mass spectrometry analysis. The device comprises the following: a reaction tube with an axial multi-sampling area, a sleeve pipe sleeved outside the reaction tube and provided with a quartz nozzle on the side wall, a moving mechanism for driving the sleeve pipe to move axially, a staged pumping mechanism comprising a funnel and a multi-stage turbo pump, a photoionization chamber provided with a synchrotron radiation vacuum ultraviolet light source, and a reflection type time-of-flight mass spectrometer. When working, the moving mechanism drives the sleeve pipe so that the quartz nozzle is aligned with the sampling area, gas forms an ultrasonic molecular beam through the funnel, neutral molecules are ionized by the light source after pressure reduction through the staged pumping, and the mass spectrometer analyzes ions. The device is used for researching spatial distribution of short-chain olefins prepared through Fischer-Tropsch synthesis, product selectivity and reaction mechanism, can distinguish isomers, accurately characterizes axial species distribution, and improves detection selectivity and reliability.

The application provides a method for preparing a magnetic semiconductor thin film, which comprises the following steps: (1) placing a polycrystalline magnetic semiconductor target into a thin film deposition chamber; (2) placing K single element and Mn single element as beam source materials into two beam source furnaces respectively; (3) cleaning a substrate, and then mounting the cleaned substrate on a substrate table; (4) then, heating the substrate table and the substrate; (5) controlling the air pressure of the thin film deposition chamber to be 6-100 Pa by means of a non-reactive gas, and then using a molecular beam assisted pulsed laser deposition method to epitaxially grow a thin film on the substrate; and (6) after the thin film is grown, adjusting the air pressure of the thin film deposition chamber and cooling the substrate, so as to obtain a magnetic semiconductor thin film (Ba 1‑x K x )(Zn 1‑y Mn y )2As2, wherein 0.08

The invention discloses a vacuum cavity system integrating double particle beams and a velocity imaging spectrometer and a method. The system comprises a vacuum cavity main body, a nano-particle beam source, an atom and molecule beam source, a speed imaging spectrometer, a laser transmission assembly and a synchronous control assembly, the nano-particle beam source and the atom-molecule beam source are respectively arranged on the vacuum cavity main body, particle beam paths are oppositely collinear, the axis of the speed imaging spectrometer is perpendicular to the particle beam paths and the laser transmission path in pairs, and the laser transmission assembly can be compatible with various optical wavebands and ultrashort laser pulses with femtosecond to attosecond magnitude pulse widths. The synchronous control assembly achieves cooperative work of all the components. According to the invention, ultrafast dynamic research on two different-scale particles of nanoparticles and atoms and molecules can be realized on the same device, frequent replacement of the device is not needed, the experimental efficiency is improved, the research cost is reduced, the accuracy and reliability of experimental data are ensured, and a comprehensive and efficient experimental platform is provided for ultrafast dynamic research.

The invention belongs to the technical field of molecular beam source furnaces, and particularly relates to an electric beam source furnace baffle suitable for ultrahigh vacuum, quick response and tangential swing, which comprises a source furnace baffle driving component and a source furnace baffle action transmission component which are mounted on one side of an atmospheric environment, and a source furnace baffle action component mounted on one side of a vacuum environment, the source furnace baffle driving assembly and the source furnace baffle action transmission assembly transmit motion through a transmission pin, and the baffle action transmission assembly controls the source furnace baffle action assembly to move through a transmission shaft. The invention aims to more quickly and stably control the opening and closing of the baffle of the source furnace, enhance the stability and reliability of the movement of the baffle and optimize the quality of an epitaxial film; and meanwhile, due to the design of an integrated flange type and a quick disassembly type, time and labor are saved during maintenance operation.

The invention belongs to the technical field of molecular beam source furnace baffles, and particularly relates to a device for driving a beam source furnace baffle to rotate and be opened and closed in a linear driving mode. The two sides of a flange plate are the atmosphere side and the vacuum side respectively, one end of a compression corrugated pipe is fixedly connected with the surface of the atmosphere side of the flange plate, and the other end of the compression corrugated pipe is a free end; the linear motion air cylinder is fixed to the surface of the atmosphere side of the flange plate, the transmission rod can be arranged on the flange plate in a penetrating mode in a relative moving mode, one end of the transmission rod penetrates out of the free end of the compression corrugated pipe and then is connected with a power rod of the linear motion air cylinder through the floating connector, and one end of the transmission rod is fixedly connected with the free end of the compression corrugated pipe. The baffle supporting rod is fixedly connected to the vacuum side surface of the flange plate, one end of the connecting rod mechanism is connected with the other end of the transmission rod, the other end of the connecting rod mechanism is hinged to the baffle supporting rod, and the baffle assembly is installed at the other end of the connecting rod mechanism. The device has the characteristics of simple structure, convenience in assembly, stable movement, accurate beam control, wide application range and the like.