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139 results about "Delta doping" patented technology
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DELTA AND SUPERLATTICE DOPING. Delta or superlattice doping is the deposition using molecular beam epitaxy (MBE) to deposit one to six Boron and Silicon layers. This is a multistep process where the number of layers is a trade off between the Modulation transfer function (MTF) and durability at the target frequency and power resiliance.