The invention belongs to the technical field of a power
semiconductor, and particularly relates to a superjunction reverse conducting-
insulated gate bipolar transistor (IGBT) with a collector groove. Compared with a traditional superjunction RC-IGBT structure, the superjunction RC-IGBT has the advantages that a collector groove structure is mainly introduced to a bottom current collection region, an N drift region at the bottom of the collector groove can be consumed by P-type strips when a
new device is positively conducted and does not enter a bipolar mode, so that an
electron current path is occupied, the effective
electron concentration is reduced, the
electron current distribution resistance around the current collection region is increased, and a
snapback effect of the device can be eliminated by the
new device under relatively
small cell size; and when the
new device is switched off, the collector structure has an effect equivalent to a buffer layer, and the device can be enabled to bear
high pressure. The superjunction RC-IGBT has the beneficial effects that compared with the traditional superjunction RC-IGBT structure, the
snapback effect can be eliminated under smaller
cell size, meanwhile, the superjunction RC-IGBT has faster switch-off speed, and the
current distribution is more uniform in a reverse
diode mode.