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396 results about "Tunneling current" patented technology

The tunneling current to the tip measures the density of electrons at the surface of the sample, and this information is displayed in the image. In semiconductors, such as silicon, the electron density reaches a maximum near the atomic sites.

Method for fabricating programmable memory array structures incorporating series-connected transistor strings

A three-dimensional flash memory array incorporates thin film transistors having a charge storage dielectric arranged in series-connected NAND strings to achieve a 4F2 memory cell layout. The memory array may be programmed and erased using only tunneling currents, and no leakage paths are formed through non-selected memory cells. Each NAND string includes two block select devices for respectively coupling one end of the NAND string to a global bit line, and the other end to a shared bias node. Pairs of NAND strings within a block share the same global bit line. The memory cells are preferably depletion mode SONOS devices, as are the block select devices. The memory cells may be programmed to a near depletion threshold voltage, and the block select devices are maintained in a programmed state having a near depletion mode threshold voltage. NAND strings on more than one layer may be connected to global bit lines on a single layer. By interleaving the NAND strings on each memory level and using two shared bias nodes per block, very little additional overhead is required for the switch devices at each end of the NAND strings. The NAND strings on different memory levels are preferably connected together by way of vertical stacked vias, each preferably connecting to more than one memory level. Each memory level may be produced with less than three masks per level.
Owner:SANDISK TECH LLC

Method for fabricating programmable memory array structures incorporating series-connected transistor strings

A three-dimensional flash memory array incorporates thin film transistors having a charge storage dielectric arranged in series-connected NAND strings to achieve a 4F<2 >memory cell layout. The memory array may be programmed and erased using only tunneling currents, and no leakage paths are formed through non-selected memory cells. Each NAND string includes two block select devices for respectively coupling one end of the NAND string to a global bit line, and the other end to a shared bias node. Pairs of NAND strings within a block share the same global bit line. The memory cells are preferably depletion mode SONOS devices, as are the block select devices. The memory cells may be programmed to a near depletion threshold voltage, and the block select devices are maintained in a programmed state having a near depletion mode threshold voltage. NAND strings on more than one layer may be connected to global bit lines on a single layer. By interleaving the NAND strings on each memory level and using two shared bias nodes per block, very little additional overhead is required for the switch devices at each end of the NAND strings. The NAND strings on different memory levels are preferably connected together by way of vertical stacked vias, each preferably connecting to more than one memory level. Each memory level may be produced with less than three masks per level.
Owner:SANDISK TECH LLC

Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof

The invention discloses a resonance-equilibrium tunnel current type three-axis acceleration transducer and a manufacturing method thereof, which belong to the field of microelectronic mechanical systems. The resonance-equilibrium tunnel current type three-axis acceleration transducer is structurally characterized in that the three-axis transducer comprises an intermediate silicon wafer (1), a top cover plate (2) and a bottom plate (3), and double-end fixing beam resonators (4), a mass block (6) and supporting beams (5) are manufactured on the intermediate silicon wafer (1). Besides, in the aspect of the detection principle, acceleration signals of the X-axis and the Y-axis in the plane of the chip are detected by the double-end fixing beam resonators (4), variation of resonant frequency of the double-end fixing beam resonators (4) reflects acceleration and direction thereof, a tunnel tip (9), a control electrode (10) and a biased electrode (7) form a portion for detecting acceleration signal of the Z-axis, detection is realized according to the tunnel current type sensitive principle, and the transducer works in a closed-loop equilibrium mode. Besides, the normal displacement of the mass block (6) on the chip is small, and the cross interference introduced by the acceleration signals of the Z-axis to detection of X-axis acceleration and Y-axis acceleration is low.
Owner:CHINA JILIANG UNIV

SiC vertical double diffusion metal oxide semiconductor structure (VDMOS) device with composite gate dielectric structure

The invention discloses a SiC vertical double diffusion metal oxide semiconductor structure (VDMOS) device with a composite gate dielectric structure, and belongs to the technical field of power semiconductor devices. A thought of differentiating modulation of electric fields is adopted according to difference of intensities of electric fields and difference of defect concentrations of gate dielectrics in different areas, namely, high-k gate dielectrics are adopted in channel regions with high-defect concentration and a low electric field, so that a large quantity of trap states caused by using a SiO2 / SiC interface is avoided; the influence on Fowler-Nordheim (FN) tunneling current is obviously reduced; and meanwhile, because the electric field intensity in a channel injection area is small, the reduction on gate dielectric breakdown voltage caused by small offset of conduction band / valence band is weakened; and moreover, a SiO2 gate dielectric (a junction field-effect transistor (JFET) area is formed in a way of extension and is not subjected to ion injection, the surface quality of the JFET area is good, and the SiO2 / SiC interface state is low) is adopted by the JFET area with low defect concentration and a high electric field, and enough high conduction band offset is supplied by the SiO2 dielectric, so that the ahead breakdown of the gate dielectric is avoided.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA
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