The invention discloses a
resonance-equilibrium
tunnel current type three-axis acceleration
transducer and a manufacturing method thereof, which belong to the field of microelectronic mechanical systems. The
resonance-equilibrium
tunnel current type three-axis acceleration
transducer is structurally characterized in that the three-axis
transducer comprises an intermediate
silicon wafer (1), a top cover plate (2) and a bottom plate (3), and double-end fixing beam resonators (4), a
mass block (6) and supporting beams (5) are manufactured on the intermediate
silicon wafer (1). Besides, in the aspect of the detection principle, acceleration signals of the X-axis and the Y-axis in the plane of the
chip are detected by the double-end fixing beam resonators (4), variation of resonant frequency of the double-end fixing beam resonators (4) reflects acceleration and direction thereof, a tunnel tip (9), a control
electrode (10) and a biased
electrode (7) form a portion for detecting acceleration
signal of the Z-axis, detection is realized according to the
tunnel current type sensitive principle, and the transducer works in a closed-loop equilibrium mode. Besides, the
normal displacement of the
mass block (6) on the
chip is small, and the cross interference introduced by the acceleration signals of the Z-axis to detection of X-axis acceleration and Y-axis acceleration is low.