The invention belongs to the technical field of power semiconductors, and relates to a transverse enhancement type
gallium oxide field effect transistor with a NiO extended gate field plate. When the device is in forward conduction, an
electron accumulation layer is formed in the drift region below the extended gate field plate, so that the on-resistance of the device is reduced, and the defect that the specific on-resistance of an enhanced
MOSFET (
Metal-
Oxide-
Semiconductor Field Effect Transistor) is large is overcome; in a blocking state, the extending gate structure and the N-type
gallium oxide drift region form a super-junction-like structure,
electric field distribution is modulated, depletion of the drift region is assisted, the
breakdown voltage of the device is improved, the
doping concentration of an epitaxial layer of the device is further improved, and the on-resistance is reduced. The invention has the beneficial effects that the device is an enhanced device and has the dual advantages of low on-resistance and high
breakdown voltage, in addition, the applied
nickel oxide deposition process is simple, an additional
etching process is not introduced, and the manufacturing cost is reduced. And
etching damage in the drift region of the device and advanced breakdown caused by an interface problem between
gallium oxide and
nickel oxide are avoided.