The invention discloses a
dielectric material
surface charge quantitative measurement method and
system based on a KPFM-AM mode, and relates to the fields of friction
catalysis technologies, friction nano-generators and the like. According to the method, the incidence relation between the surface potential and the
surface charge density is deduced by deeply analyzing the vibration characteristics of the probe driven by the
electric field force. On the basis, a series of
finite element simulation is carried out by using COMSOL
software, and the actual measurement process of the KPFM is simulated: on one hand, the applicability of a theoretical formula in an infinite uniform charged surface scene is verified, and on the other hand, the influence rule of a limited surface or a surface with non-uniform charge distribution on a
surface potential measurement result is explored. Meanwhile,
simulation analysis is conducted on the surface potential distribution of the point charges, and a fitting formula based on a Lorentz function is provided and used for accurate calculation of the surface potential distribution. Finally, on the basis of the theory and
simulation results, a special program capable of inversely calculating the
surface charge distribution according to the surface potential distribution is developed, and an important theoretical support and a practical tool are provided for efficient and accurate characterization of
dielectric material surface electrical properties.