This invention discloses an epitaxial structure of a triple-junction
solar cell and its manufacturing method, comprising a first sub-
cell, a second sub-
cell, and a third sub-
cell grown sequentially in
layers; the second sub-cell includes an InGaAs base region, an InGaAs emitter region, a first
back surface field layer, and a first window layer; the third sub-cell includes a GaInP base region, a GaInP emitter region, a second
back surface field layer, and a second window layer; one or more of the first window layer, the second
back surface field layer, and the second window layer are formed by multiple sets of alternately grown Al... x1 In 1‑x1 P layer, Al x2 In 1‑ x2 The
superlattice structure consists of P
layers, where 0.65 ≤ x1 ≤ 0.75, x2 = 0.4, and Al x1 In 1‑x1 Layer P is under tensile stress, Al x2 In 1‑x2 The P-layer is under compressive stress. In this application, the window layer and / or back field layer are set as a
superlattice structure, which effectively improves the ability of the back field layer and / or window layer to confine charge carriers under high temperature environment while ensuring
crystal quality.