The invention discloses an epitaxial growth method with a p-layer special doped structure. According to the method, when a p-type layer of an LED (
Light Emitting Diode) is grown, double-element
doping of a GaN / AlGaN
superlattice structure is adopted, that is, a small amount of
silane is doped when
doping magnesium. The
silane is doped as a donor, however, due to the small amount of the doped
silane, the lattice imperfection caused by the doped
magnesium can be remarkably improved, a self-
compensation effect is reduced, the
crystal quality is improved, non-composite imperfection centers are reduced, a small number of scattering centers are caused, the carrier mobility and the
ionization efficiency of an accepter are improved, and in addition, as the growing temperature of AlGaN is high, such
doping is beneficial for improving the doping concentration of
magnesium, the doping effect of the p-layer is improved, and the overall lighting efficiency of the LED is greatly improved. Due to improvement of the
crystal quality and the improvement of
barrier layer conductivity, the current expansion capability is improved, and the reliability of the LED device is also improved.