40 results about "Plasma reactor" patented technology

The present application relates to the technical field of plasma catalysis, and particularly relates to a method for catalytically converting methane and water into methanol and hydrogen under plasma conditions, a device used and a catalyst used. The bubbling-fluidized plasma reactor of the present application is formed by connecting a bubbling corona discharge plasma reactor at the lower part and a fluidized bed dielectric barrier discharge reactor at the upper part in series, and is filled with a catalyst in a discharge channel. Methane mixed with argon is preheated and then enters a gas bubbling column from a raw material inlet. A corona discharge is formed in the gas bubbles by a bubbling tip to generate plasma, so that the methane-water is preliminarily converted in cooperation. The gas after the preliminary conversion is introduced into the discharge channel to react under the action of the catalyst, and hydrogen and methanol are obtained by conversion.

The application discloses a kind of plasma reactor and the method for power compensation to focus ring, and plasma reactor includes: reaction cavity, substrate support unit, is arranged at the inside bottom of reaction cavity;Substrate support unit includes: pedestal, which is connected to the radio frequency power supply device located outside the reaction cavity by matching circuit;Electrostatic chuck is arranged on the pedestal;The upper surface of electrostatic chuck is used to adsorb substrate;Focus ring, focus ring surrounds electrostatic chuck;Power regulating device is respectively connected with focus ring and matching circuit radio frequency coupling;Power regulating device includes: series inductance and variable capacitor, for adjusting the impedance of branch where focus ring is located, to adjust the radio frequency power coupled on focus ring, prolong the service life of focus ring, prolong maintenance period.

The invention discloses a plasma activated water preparation system based on fuzzy PID (Proportion Integration Differentiation) adaptive temperature and power matching cooperative control. The plasma activated water preparation system comprises a human-computer interface, a main controller, a temperature / power sensor, a parallel double fuzzy PID controller, an intelligent coordinator, a power / temperature actuator and a plasma reaction machine, a temperature / power sensor sends a water body temperature Tfb and a discharge power Pfb to a main controller in real time, a temperature fuzzy PID controller and a power fuzzy PID controller output suggested powers Ut and Up, an intelligent coordinator outputs a final power instruction and a cooling control signal after arbitration according to a state machine that Tfb is smaller than or equal to Tset normal power, Tfb is larger than Tset and Pfb is larger than Pmin and power is preferentially reduced, and Tfb is larger than Tset and Pfb is smaller than or equal to Pmin and is forcibly cooled. And the power actuator continuously adjusts the discharge power according to the discharge power, and the temperature actuator implements auxiliary heat dissipation, so that the water temperature is accurately locked in the optimal active matter generation interval under the nonlinear and time-varying working conditions, the discharge intensity is ensured not to be lower than Pmin, and high-activity, high-energy-efficiency, continuous and stable plasma activated water preparation is realized.

An air treatment device for removing unwanted substances from air, the air treatment device comprising : a non-thermal plasma reactor stage housing comprising an air inlet for receiving the air to be treated, a plurality of non-thermal plasma reactor units for treating the air and an air outlet for exhausting the treated air from the non-thermal plasma reactor stage housing; wherein each of the plurality of non-thermal plasma reactor units comprises a dielectric substrate having a first surface and a second surface, a first electrode disposed on the first surface of the dielectric substrate and a second electrode disposed on the second surface of the dielectric substrate, wherein the first electrode comprises at least one window exposing the dielectric substrate to the air to be treated in the non-thermal plasma reactor stage housing.

The present disclosure provides an abatement device including a foreline plasma reactor, a reagent delivery system configured to provide one or more reagent gases to a foreline coupled upstream of the foreline plasma reactor, and a system controller incorporated within the reagent delivery system and configured to simultaneously control reagent delivery and abatement functions of multiple chambers of a substrate processing tool. The system controller dynamically adjusts a flow of reagent gases based on emission profiles of the multiple chambers. The system controller regulates reagent gas delivery to each of the multiple chambers while simultaneously managing abatement processes to neutralize or capture byproducts.

The present application relates to the technical field of low carbon alkane conversion, and particularly relates to a kind of plasma reactor and the method for low carbon alkane conversion, the plasma reactor includes reactor body and at least one electrode arranged in the reactor body, it further includes the flow guide tube arranged in the reactor body, the distance from the upper end of the flow guide tube to the lower part of the reactor body is greater than the distance from the lower end of at least one electrode to the lower part of the reactor body, and the lower end of the flow guide tube extends to the downstream of reactant stream direction.The flow guide tube is additionally arranged in the reactor body, so that the raw material gas more concentratedly passes through the plasma area, and the flow guide tube reduces the flow area, improves the inlet gas flow rate, which is conducive to improving the non-equilibrium type of sliding arc;it can improve the conversion rate of low carbon alkane in low carbon alkane conversion, and is especially suitable for methane conversion.

The application discloses a kind of multi-channel annular protective gas structure, it is related to plasma reactor equipment technical field, specifically a kind of multi-channel annular protective gas structure, it is applied to double-layer water-cooled sandwich main reactor.The upper end of main reactor is annular with baffle structure, the lower end is double-layer inverted conical structure, all pass cooling water cooling, realize graphite powder cooling collection and guide airflow spiral upward into cyclone separator.Ring cavity protective gas inlet is equipped with three, it is distributed with 120 ° axial, independent with heat source working gas, is connected external gas source by flow controller, forms high-speed low-temperature inert gas reticular isolation gas film.It also has detachable sealing flange, high-temperature resistant ceramic lining, digital mass flowmeter, anti-adhesion coating and other characteristics, can improve maintenance convenience, erosion resistance, flow regulation accuracy and anti-powder adhesion effect, and optimize heat exchange, stable pressure, monitor temperature, observe reaction and adapt to thermal deformation performance.

This invention relates to the field of water environment management equipment technology, specifically to an intelligent, multi-depth, dual-mode plasma unmanned algae removal vessel and its application. The vessel includes a hull, power supply system, detection system, control system, algae removal system, and power system. An online chlorophyll sensor probe is installed at the front of the hull; photovoltaic panels are laid on the top of the hull, and batteries are embedded inside the hull; array-type jet discharge plasma reactors and lifting liquid phase discharge devices are installed on both sides of the hull; a propulsion device is located at the stern. This invention utilizes photovoltaic self-powering and integrates unmanned / manned dual control modes. It adjusts the power and operating mode of the plasma reactor in real time through online monitoring data, flexibly switching between 0-50cm jet discharge and 50cm-5m liquid phase discharge modes. It generates a large amount of active substances in situ to efficiently kill algae, and has advantages such as high mobility, low energy consumption, and no secondary pollution.

The utility model discloses a kind of multifunctional microwave plasma reactor devices, including: body;First microwave reactor includes: microwave resonant cavity;First quartz tube, through microwave resonant cavity setting, including first reaction tube section;First needle body, be arranged in first reaction tube section, set multiple;Flat waveguide, with microwave resonant cavity communication;Second microwave reactor, including: cooling jacket;Compression waveguide, insert mounting to cooling jacket and be connected fixedly with it;Second quartz tube, through compression waveguide insert mounting cooling jacket, including second reaction tube section;Base member, assembly to second quartz tube section, its inside is formed with air inlet channel;Second needle body, be arranged on base member, tip end is inserted into second reaction tube section;Microwave generating device is provided with interface component, interface component optionally with flat waveguide or compression waveguide connection.The utility model's multifunctional microwave plasma reactor device can satisfy the need different material processing demand.

To provide a hydrogen production apparatus that produces hydrogen more efficiently. [Solution] The hydrogen production apparatus 1 comprises an ammonia supply path 11, a plasma reactor 3, a mixture supply path 12, an oxygen supply path 13, and a catalyst unit 5. The ammonia supply path 11 includes a first ammonia supply path 11a that supplies ammonia to the plasma reactor 3. The plasma reactor 3 decomposes ammonia into hydrogen and nitrogen. The mixture supply path 12 supplies a mixture containing hydrogen, nitrogen, and undecomposed ammonia supplied from the plasma reactor 3 to the catalyst unit 5. The oxygen supply path 13 supplies oxygen to the catalyst unit 5. The catalyst unit 5 comprises a combustion catalyst 51 for burning hydrogen and oxygen, and an ammonia decomposition catalyst 52 for decomposing ammonia into hydrogen and nitrogen. The combustion catalyst 51 is positioned upstream of the ammonia decomposition catalyst 52 in the ammonia supply direction and generates heat by adsorbing oxygen.

The application provides a double-medium plasma reactor for a synthetic ammonia system, and relates to the technical field of chemical equipment.The double-medium plasma reactor comprises a central cooling water channel, an inner medium layer sleeved on the central cooling water channel, and an outer medium layer arranged outside the inner medium layer; the central cooling water channel is provided with a preset operation chamber, and an air inlet pipe and an air outlet pipe are arranged at both ends of the operation chamber; the central cooling water channel is arranged at the axial center of the reactor and is used for passing cooling fluid; a central high-voltage electrode is arranged between the central cooling water channel and the inner medium layer, the central high-voltage electrode is adjacent to the central cooling water channel, and both ends of the central high-voltage electrode are connected with a high-frequency high-voltage power supply; the double-medium plasma reactor solves the problem of low heat dissipation efficiency by arranging the central cooling water channel at the geometric center of the discharge area; and the central cooling water channel of the reactor can absorb heat generated in the discharge process in the shortest path, and the ammonia yield is significantly improved.

Disclosed are a plasma reactor, a gas conversion apparatus, and a gas conversion method. The gas conversion apparatus includes a plasma reactor for converting a processing target gas into a converted gas. The plasma reactor includes a ground electrode forming an inner wall of a reaction space and a high-voltage electrode facing the ground electrode inside the reaction space and generating an arc discharge. The high-voltage electrode has a taper shape including an enlarged portion, a reduced portion, and a boundary portion between the enlarged portion and the reduced portion. The reaction space includes a gas supply region between the enlarged portion and the inner wall, a discharge region where the discharge occurs between the reduced portion and the inner wall, and a connection region between the boundary portion and the inner wall and connecting the gas supply region to the discharge region. The processing target gas, a plasma driving gas, and an auxiliary gas are supplied to the gas supply region through at least one gas inlet.

The application discloses a synthesis ammonia system coupled with a supported metal catalyst and a plasma reactor, and the system comprises a double dielectric barrier discharge reactor and a supported metal catalyst filled in the double dielectric barrier discharge reactor. The reactor is in a concentric tube structure, and a cooling water jacket, an outer quartz glass tube and an inner quartz glass tube are coaxially nested in sequence from outside to inside. The general formula of the supported metal catalyst is xCu-yNi-zCa-(1-x-y-z)C, 5%<=x<=20%, 5%<=y<=15%, 1%<=z<=5%. The system is reacted under mild conditions of 20-50 DEG C and 0.1-0.3 MPa. Through the synergistic effect of the catalyst and the plasma, the ammonia decomposition is reduced, the ammonia yield is improved, and the ammonia synthesis energy efficiency is up to 5.14 g NH3 / kWh.

This invention discloses a low-temperature plasma-coupled, highly active, low-cost process for synthesizing ammonia using zero-valent iron, belonging to the field of ammonia synthesis technology. The process comprises: using a plasma reactor with hydrogen as a reducing agent to induce a plasma hydrogen reduction reaction in a Fe2O3 source to synthesize zero-valent iron; and using the synthesized zero-valent iron as a catalyst to induce a plasma ammonia synthesis reaction between H2 and N2 to produce ammonia. The plasma ammonia synthesis reaction is carried out at atmospheric pressure and a reaction temperature of 220-300℃. This invention, driven by low-temperature plasma, pioneers a cross-industry co-production process of "iron ore reduction-ammonia synthesis" in a single system. Specifically, it directly uses zero-valent iron obtained from the efficient reduction of iron ore by hydrogen-based plasma as a catalyst for low-temperature plasma ammonia synthesis. The overall process is simple, the synthesis conditions are mild, and the catalyst cost is low.

A method is disclosed for plasma-based conversion of methane in a plasma reactor, the plasma reactor (1) comprising a reaction chamber and an energy source to create the plasma in the reaction chamber, the reaction chamber being fluidly connected to a separate post-plasma reaction chamber, the plasma reactor comprising a gas inlet, the post-plasma reaction chamber comprising a gas outlet, the method comprising: a) generating a plasma in the reaction chamber by activating the energy source; b) providing a first gas flow comprising a CH4 component through the gas inlet and into the reaction chamber, allowing plasma-based conversion of the CH4 component into gaseous H2 and solid carbon and allowing the continuous removal of produced H2 through the post-plasma reaction chamber and through the gas outlet; c) in consideration of a solid carbon deposit being formed on a predetermined portion of an inner wall of the post-plasma reaction chamber, replacing the first gas flow with a second gas flow, the second gas flow comprising a plasma-activated CO2 component, allowing the oxidation of the deposited carbon, and allowing the continuous removal of produced CO through the gas outlet until the deposited carbon is substantially removed; and associated reactors and reactor systems

This invention relates to a cosmetic powder with oil-absorbing, anti-dullness, and antioxidant functions, its preparation method, and its application, belonging to the field of functional powder materials and cosmetic technology. The photonic crystal-gold nanoparticle (PC-Au) composite particles comprise a photonic crystal formed by the self-assembly of aminated silica microspheres, and gold nanoparticles loaded on the surface of the photonic crystal. In this invention, the aminated photonic crystal aggregates are immersed in a gold precursor solution, causing the gold precursor to adsorb onto the aminated functionalized shell. The particles adsorbed with the gold precursor are then placed in a plasma reactor for treatment, allowing the gold precursor to be reduced in situ to gold nanoparticles. The plasma treatment, while reducing the gold nanoparticles, simultaneously constructs a micro-roughened structure on the surface of the composite particles, further increasing the specific surface area and porosity, unexpectedly enhancing the oil-absorbing capacity of the particles and successfully transforming a process "side effect" into a performance "advantage."

A teeth whitening gel carrier preparation machine includes: a feeding module, a plasma reactor, a stirring module, and a temperature control module. The feeding module is used to feed raw material A before activation in the plasma reactor. The stirring module is used to stir the activated raw material A liquid and raw material C. The cold air outlet of the temperature control module is close to the plasma reactor to maintain a low-temperature environment inside the machine. This invention solves the problems of poor stability of plasma teeth whitening gels, which are prone to degradation due to external environmental influences within 3 hours after preparation, leading to a significant decrease in whitening effect or even complete failure; and the problem that the heat generated during plasma activation superimposes, causing changes in the properties of some key active ingredients and failing to achieve the expected activation state. A teeth whitening gel carrier preparation machine that solves the above problems has been developed.

The application discloses a two-dimensional stretchable and bendable microarray plasma reactor and a preparation method thereof. In the application, the semi-flexible problem that the existing flexible plasma source can only be bent but cannot be stretched, and the large-size and high-precision preparation process problem required for realizing full flexibility are solved. The application provides a flexible plasma source with a coplanar dielectric barrier discharge structure and adopting PDMS and liquid gallium-indium alloy as materials, and a preparation method of the flexible plasma source based on a stamping method. The elasticity of the PDMS and the fluidity of the liquid gallium-indium alloy ensure that the flexible plasma source can be stretched and bent for a long time and many times, and has certain deformation and circuit breaking self-recovery ability. In addition, the stamping method manufacturing technology adopted by the application can make the effective discharge area reach 25cm 2 , and the electrode structure precision reaches 10mm, which is 10 times higher than the electrode structure precision of the plasma source manufactured based on the flexible printed circuit technology at present, thereby ensuring the uniformity and stability of the discharge generated plasma.

There is provided a system (1) comprising: - a plasma reactor (100) having an inlet (101) and an outlet (102) and a quenching arrangement (133) configured to quench nitrogen oxide, NOx, the plasma reactor (100) being configured to conduct NOx formation; - a conduit (103) for providing a gas mixture comprising oxygen and nitrogen downstream of the outlet (102) of the plasma reactor, the conduit (103) is configured to direct the gas mixture to the quenching arrangement (133) and / or to the outlet (102) of the plasma reactor; - a conversion arrangement (105) being configured to convert the NOx to nitric acid, HNO3, the conversion arrangement (105) is having an inlet (106), a first outlet configured to remove HNO3 (107) and a second outlet configured to remove residual gas (108), the inlet (106) of the conversion arrangement being configured to receive formed NOx from the plasma reactor (100); and - a compressor (109) having an inlet (110) and an outlet (111), the compressor being configured to increase pressure of gas to a pressure of ≥ 1.1 bar, the inlet (110) of the compressor (109) configured to receive residual gas from the second outlet (108) of the conversion arrangement (105); and the outlet of the compressor (111) is arranged upstream of the inlet (101) of the plasma reactor (100); and - optionally, a gas source arrangement (113) configured to provide the gas mixture to the conduit (103).

This invention discloses a plasma-induced low-temperature reforming method for hydrogen production from methanol using coupled adsorption enhancement. This method suppresses CO formation through adsorption enhancement and induces low-temperature activation of methanol through plasma discharge. In this invention, a reduced catalytic adsorbent sample is placed in a plasma reactor, nitrogen gas is introduced, and all gas in the device is purged and leaks are checked. Subsequently, the heating element is turned on to preheat the device to 120°C. A prepared methanol-water solution is vaporized in the heating zone using a constant flow pump, and then introduced into the plasma reactor for discharge experiments. The outlet is connected to a gas chromatograph (GC) to detect the gaseous components in the product. This invention utilizes high-energy electron collisions generated at low temperatures by dielectric barrier discharge to induce methanol activation. At temperatures below 160°C, the H2 concentration can reach over 95%, and the methanol conversion rate can reach 80%.

The application relates to the technical field of chemical materials, and particularly discloses a preparation method of solid catalytic material with a surface rich in hydrogen bond microenvironment and application of the solid catalytic material in uranium separation, and the preparation method comprises the following steps: after washing and drying a metal material, the metal material is placed in a plasma reactor, then gas is introduced, plasma treatment is carried out, vacuum annealing is carried out after the treatment is completed, and the solid catalytic material is obtained. The application introduces a hydrogen bond special microenvironment on the surface of the metal material, has good photocatalytic uranium separation performance, realizes uranium separation in radioactive wastewater, and solves the problem that powder state photocatalytic materials are not applicable in actual popularization and application.

This invention belongs to the field of wastewater treatment technology, specifically relating to an integrated synergistic reaction device for treating aquaculture wastewater. The device includes a plasma reactor, a microbubble generator, and a high-voltage power supply. The plasma reactor is a coaxial cylindrical dielectric barrier discharge reactor, comprising a dielectric layer cavity, an inner electrode within the cavity, an outer electrode on the outer wall of the cavity, an outlet at the upper end of the cavity, and an inlet at the lower end. A discharge gap is formed between the inner electrode and the cavity. The outlet of the microbubble generator is connected to the inlet of the plasma reactor, allowing the microbubble clusters generated by the generator to directly enter the discharge gap of the plasma reactor. The discharge gap has a width of 2 mm. Under a release pressure of 0.60 MPa, the microbubble generator produces a cluster of micro-nano bubbles with an average diameter of 20.9 μm and a concentration as high as 1.2 × 10^8 particles / mL.

An air treatment device for removing unwanted substances from air, the air treatment device comprising: a non-thermal plasma reactor stage housing comprising an air inlet for receiving the air to be treated, a plurality of non-thermal plasma reactor units for treating the air and an air outlet for exhausting the treated air from the non-thermal plasma reactor stage housing; wherein each of the plurality of non-thermal plasma reactor units comprises a dielectric substrate having a first surface and a second surface, a first electrode disposed on the first surface of the dielectric substrate and a second electrode disposed on the second surface of the dielectric substrate, wherein the first electrode comprises at least one window exposing the dielectric substrate to the air to be treated in the non-thermal plasma reactor stage housing.

The present disclosure provides an abatement device including a foreline plasma reactor, a reagent delivery system configured to provide one or more reagent gases to a foreline coupled upstream of the foreline plasma reactor, and a system controller incorporated within the reagent delivery system and configured to simultaneously control reagent delivery and abatement functions of multiple chambers of a substrate processing tool. The system controller dynamically adjusts a flow of reagent gases based on emission profiles of the multiple chambers. The system controller regulates reagent gas delivery to each of the multiple chambers while simultaneously managing abatement processes to neutralize or capture byproducts.

The application discloses a mechanical auxiliary catalyst fluidized plasma reaction device, and a reaction cavity is formed by coaxial inner and outer medium pipes, two ground electrodes and a high-voltage electrode; the first ground electrode, the outer medium pipe, the high-voltage electrode, the inner medium pipe and the second ground electrode are arranged from outside to inside to form the reaction cavity; a sealing device is arranged at the port of the outer medium pipe, a motor in the sealing device is connected to the head port of the inner medium pipe through a transmission device to drive the inner medium pipe, the high-voltage electrode and the second ground electrode to rotate along a straight line with the central axis; gas enters the inner medium pipe through the gas inlet hole in the sealing device, enters the reaction cavity, enters the cavity between the inner and outer medium pipes through the tail end of the inner medium pipe and finally flows out from the gas outlet hole at the head of the outer medium pipe. The application solves the problem of weakened discharge caused by catalyst wall sticking while increasing gas treatment efficiency, and significantly improves energy utilization efficiency and synergistic effect.

The application discloses a device and method for preparing methanol by using low-temperature plasma and catalysts. The device uses low-temperature plasma to generate discharge and activate H2 and CO2 in a plasma reactor, so that the thermal catalytic reaction rate is improved and the energy consumption is reduced. Condensed water is introduced outside the low-temperature plasma to improve the conversion rate and selectivity of the reaction. The gas treated by the low-temperature plasma is sent into a thermal catalytic reactor, the thermal catalytic reactor is provided with a partition plate, so that a reflux is formed at a local position in the thermal catalytic reactor, and a plurality of catalyst outer bed layers are arranged outside and inside the partition plate, so that different kinds of solid catalysts can be filled at different positions. The application can make the CO2 methanol reaction be carried out at normal pressure, reduce the energy consumption, activate the raw material gas by using a low-temperature plasma array, improve the thermal catalytic reaction rate, and reduce the energy consumption of the thermal catalysis. The multi-layer catalyst outer bed layer structure is used to control the reaction path and the product and improve the methanol yield.

The application provides a shielding isolation structure, a multi-cavity plasma reactor, a semiconductor processing device and a semiconductor processing method. The shielding isolation structure is arranged in an exhaust channel of the multi-cavity plasma reactor and comprises a shielding vertical plate made of a metal material and arranged along the extension direction of the exhaust channel to divide the exhaust channel into a plurality of exhaust units, wherein the exhaust channel comprises at least one exhaust hole on the side wall of each exhaust unit, and each exhaust unit is connected to a corresponding plasma reaction cavity via the at least one exhaust hole to exhaust the plasma reaction cavity; and a mounting base made of a metal material, fixedly connected to the inner wall of the exhaust channel and arranged at the bottom of the shielding vertical plate to support the shielding vertical plate, wherein a plurality of air passing holes are arranged on the mounting base to exhaust each exhaust unit via the plurality of air passing holes.

This invention proposes a process for separating and dewatering lump coal, belonging to the field of coal washing technology. A plasma reactor is used to ionize and activate flocculant solution 1 to form flocculant solution 2. The ionized and activated flocculant solution 2 is then sprayed onto the lump coal using a venturi tube. Subsequently, a plasma spray gun is used to emit plasma onto the lump coal sprayed with flocculant solution 2, thereby modifying the surface of the coal lump coated with flocculant solution 2 to form a solidified hydrophobic film. The lump coal with the solidified hydrophobic film is then separated to separate gangue from the lump coal, obtaining the final product. This effectively improves the hydrophobicity and brittleness of the lump coal, ultimately improving the dewatering effect of the lump coal.

The application discloses a device for large-scale preparation of plasma-activated liquid and application thereof in food sterilization. The device comprises a power supply, a gas supply system, a water tank and at least one mixed plasma reactor. The mixed plasma reactor is arranged in the water tank and comprises a medium pipe, a rod-shaped grounding electrode, a first high-voltage electrode and a second high-voltage electrode. The rod-shaped grounding electrode, the first high-voltage electrode and the second high-voltage electrode are fixed in the medium pipe. The first high-voltage electrode is a metal pipe and is sleeved outside the rod-shaped grounding electrode, and the rod-shaped grounding electrode is located at the center of the first high-voltage electrode. The inner surface of the first high-voltage electrode is provided with a dielectric layer. The second high-voltage electrode is arranged below the first high-voltage electrode and is sleeved outside the rod-shaped grounding electrode, and the rod-shaped grounding electrode is located at the center of the second high-voltage electrode. The application improves the types and concentrations of active components in the plasma-activated liquid, realizes high-level food sterilization application, has spectral antibacterial property, is simple in device, energy-saving and expandable, and can be applied to various food sterilization scenes.

The application discloses an in-situ preparation method of carbon nanotube / silicon composite material and belongs to the technical field of lithium ion battery negative electrode materials. A solution containing a carbon source and a catalyst is taken into a plasma reactor by a carrier gas and a reducing gas, and a silicon source gas is introduced at the same time; the material sequentially passes through a first double-electrode area (20-50 kW), arc discharge is cracked to generate carbon nanotubes and deposit silicon nanoparticles; then passes through a second double-electrode area (10-19 kW) to remove amorphous carbon impurities; and then passes through a third double-electrode area (1-9 kW) to reduce sp 3 Defects in the carbon nanotubes; after the reaction is finished, liquid nitrogen spraying, low-temperature nitrogen or water spraying is used for rapid cooling, gas flow grading or vibration screening is carried out to collect the carbon nanotube / silicon composite material. The in-situ growth of the carbon nanotubes, the silicon deposition, the removal of amorphous carbon and the repair are continuously completed in the same reactor, the reaction only takes a few minutes, the process is simple, the method is suitable for large-scale production, and the obtained composite material can be used for lithium ion battery negative electrodes.