245results about How to "Improve density uniformity" patented technology

A plasma reactor for processing a semiconductor wafer includes a side wall and an overhead ceiling defining a chamber, a workpiece support cathode within the chamber having a working surface facing the ceiling for supporting a semiconductor workpiece, process gas inlets for introducing a process gas into the chamber and an RF bias power generator having a bias power frequency. There is a bias power feed point at the working surface and an RF conductor is connected between the RF bias power generator and the bias power feed point at the working surface. A dielectric sleeve surrounds a portion of the RF conductor, the sleeve having an axial length along the RF conductor, a dielectric constant and an axial location along the RF conductor, the length, dielectric constant and location of the sleeve being such that the sleeve provides a reactance that enhances plasma ion density uniformity over the working surface. In accordance with a further aspect, the reactor can include an annular RF coupling ring having an inner diameter corresponding generally to a periphery of the workpiece, the RF coupling ring extending a sufficient portion of a distance between the working surface and the overhead electrode to enhance plasma ion density near a periphery of the workpiece.

A plasma processing apparatus for performing a plasma process on a target substrate includes a process container configured to accommodate the target substrate and to reduce pressure therein. A first electrode is disposed within the process container. A supply system is configured to supply a process gas into the process container. An electric field formation system is configured to form an RF electric field within the process container so as to generate plasma of the process gas. A number of protrusions are discretely disposed on a main surface of the first electrode and protrude toward a space where the plasma is generated.

Provided is helical resonator plasma processing apparatus. The plasma processing apparatus comprises a process chamber having a substrate holder for supporting a substrate, a dielectric tube disposed on the process chamber to communicate with the process chamber, a helix coil wounded around the dielectric tube, and an RF power source to supply RF power to the helix coil. The dielectric tube has a double tube shape and comprises an inner tube and an outer tube, and a plasma source gas inlet port to supply plasma source gas into a space between the inner tube and the outer tube is disposed in the outer tube. A control electrode to control plasma potential is disposed in the dielectric tube. This plasma processing apparatus provides a uniform plasma density distribution along a radial direction of a wafer, and easy control of the plasma potential in the process chamber.

The invention discloses a cutting tool for improving a coating structure. The cutting tool comprises a matrix and a coating covering the matrix. The coating comprises an inner layer B, a transitional layer C and an outer layer D from inside to outside. The inner layer B consists of transitional elements and nonmetal compounds. The transitional layer C comprises a transitional layer C1 and/or a transitional layer C2. The transitional layer C1 and C2 are mainly formed by carbon oxynitride with titanium. The outer layer D has a single phase alpha-Al2O3 structure. The thickness d of the outer layer D is 0.5-4 mu m. The mean grain size S is greater than or equal to 0.2 mu m but less than or equal to 0.5 mu m. The preparation method comprises the following steps of: first, preparing the tool matrix; then, sequentially depositing the inner layer B, the transitional layer C2, the transitional layer C1 and the outer layer D in a same coating period; and then, performing surface treatment to manufacture the cutting tool. The cutting tool provided by the invention is high in hardness and good in wear resistance, and has excellent cutting performance in cutting materials such as steel, stainless steel and cast iron.

A foam dam in the insulation cavity of an electric water heater comprises a plastic bag into which liquid foam insulation is injected, the bag having an essentially closed top edge portion with only a small opening for receiving the injected insulation. A small portion of the insulation injected into the bag is forced outwardly therefrom via small metering holes to form external protrusions on the bag that mechanically interlock with a second batch of insulation subsequently injected into the cavity and prevent the hardened second insulation batch from pulling away from the bag. The substantially closed top edge of the bag permits the insulation injected into the bag to pack therein and increase the top-to-bottom hardened foam density uniformity. Side edges of the bag may be pleated to increase the sealing area of the foam dam.

The invention discloses a radiation-free multi-component rare earth tungsten electrode material and a preparing method thereof. The radiation-free multi-component rare earth tungsten electrode material contains lanthanum oxide, zirconia, yttrium oxide, lutecia, rhenium and tungsten. The mass percent of each rare earth oxide in the material is 0.5-1.5%, the mass percent of the total quantity of the rare earth oxide in the material is 2-3%, the mass percent of alloy element rhenium in the material is 1-4%, and the balance is tungsten. The preparing method for the radiation-free multi-component rare earth tungsten electrode material comprises the procedures of solution disposition, drying, reduction, isostatic cool pressing, sintering, vertical melting, medium frequency induction annealing, B202 rotary forging, B201 rotary forging, drawing, straightening, cutting, polishing and grinding. The prepared radiation-free multi-component rare earth tungsten electrode material is easy to machine and better in use performances.

The invention relates to a silky fine matt ceramic tile and a production method thereof. The blank material of the ceramic brick comprises 10-15% of nepheline powder, 5-10% of high-carbon mud, 20-25%of low-carbon mud, 10-15% of medium-and-high-carbon mud, 5-10% of recovered waste blanks, 5-10% of potassium and sodium stone powder, 20-25% of paving albite powder, 5-10% of waste porcelain powder, 0-7% of desulfurization waste residues, 20-30% of edging and polishing waste residues, 0.3-1.0% of a liquid dispergator and 0.2-0.8% of a liquid reinforcing agent. The production method comprises the following processes: proportioning and ball milling of blank raw materials, spray drying, aging, blank compression molding, drying, blank polishing, water spraying, glazing, pattern decoration and firing.

The invention relates to a reinforcement method for a fibre-quartz ceramic-base composite material, and belongs to the technical field of inorganic materials. The composite material relates to a wave-transmitting material, and the finished product of the composite material is prepared by the following steps: carrying out sol reinforced infiltration treatment of a composite material body prepared through liquid-phase filtration-in situ solidifying molding; and finally, carrying out gel formation and solidification. The sol slurry comprises the following compositions by mol percentage: 10 to 50 percent of analytically pure anhydrous ethanol, 6 to 20 percent of analytically pure tetraethyl orthosilicate, 30 to 70 percent of distilled water and 6 to 20 percent of acetylacetone or glycerol. The reinforcement method has the advantages that the method not only can increase material density and improve material density uniformity, but also can reinforce the bonding force among SiO2 powder granules, remarkably improve the overall performance of the composite material, and meet the requirements of a high Mach number antenna housing on material performance.

The invention discloses a method for manufacturing a microwave isolator/circulator cavity. The method comprises: a. a step of preparation of adhesive resin; b. a step of reparation of feed, in which alloy steel powder and adhesive resin are mixed and granulized to obtain feed grains; c. a step of injection forming, in which an injected embryo similar to the cavity is formed through injection forming; d. a step of degrease and dissolving the adhesive resin with a solvent; and e. a step of sintering, in which the injected embryo is subjected to heat treatment of sintering finally and the required cavity is obtained. The method has the advantages: 1. products have stable quality and good consistence as mold forming ensures the sizes of products produced in batch are consistent; 2. the production efficiency is high, the batch delivery cycle is short, and requirement of mobile communication market base station for rapid development is met, as 8,000 pieces of products can be produced through injection with four-cavity molds; 3. energy conservation and high efficiency are achieved due to an approximately 100 percent utilization rate of raw materials; and 4. the production cost and the processing procedures are reduced, and more than 30 percent of manufacturing cost are reduced in batch production compared with the prior processing method.

The invention adopts hollow polyester fiber, polyester short fiber and ES fiber according to mixture ratio of 1-4:1-4:2-8, including the steps of loosening-> quantitative feeding-> hot melting->cold roll forming->hot rolling->air cooling->trim cutting. The fiber of the invention is conglutinated after hot melting treatment; therefore, fiber pad has good toughness and uniform density and stable structure; the produced filtering material has large pore space, good loading capacity which is difficult to be deformed with small resistance and large dust holding performance and good filtering effect.

The invention discloses a filling method of redundant graphs. A layout is divided into an empty area and a non-empty area, wherein the empty area is filled through a traditional filling method; regarding the non-empty area, firstly, each side of blank areas of the non-empty area shrinks inwards by a certain distance, graphs of which the shape is the same as that of the blank areas are obtained, the graphs which do not meet the requirements for the size are filtered out, and the residual graphs are used for filling. The filling method divides the layout into the empty area and the non-empty area, the different filling methods are adopted according to the difference of the areas, the filling rate of the redundant graphs and uniformity of the graph density of the whole layout are improved, uniformity of silicon wafers in the chemical mechanical planarization is improved finally, and the manufacturing technique is further improved.

The invention discloses an industrial solid waste autoclaved aerated concrete block and a preparation method thereof. The concrete block uses fly ash, carbide slag, red mud, lime, desulfurized gypsumand cement as main raw materials and aluminum powder, sodium hydroxide, water glass and the dispersing agent silica fume as additives; the coal ash reacts with components in the carbide slag to generate ettringite, so the strength of the concrete block can be enhanced; a large amount of aluminum oxide contained in the red mud can a replace part of lime and undergo a hydration reaction with the cement, and the aluminum oxide in the red mud can react with calcium hydroxide in the carbide slag, so the strength of the block is enhanced; the coal ash, the carbide slag and the red mud react with oneanother to generate hydrated calcium silicate and hydrated calcium aluminate, so the structural compactness of the block can be improved; and the additives can enhance the foaming stability of the aluminum powder and improve the early strength of the block under an alkaline condition. The method is green and environment-friendly, and the waste of non-renewable resources is effectively reduced.

A zirconia base ceramic target material for electron beam physical vapor deposition comprises Y2O3 and ZrO2. On the basis that the weight of the target material accounts for 100%, the content of Y2O3 is 6 wt%-9 wt%. A preparing method of the target material comprises the steps that raw material powder is weighed; part of the weighed raw material powder is dried for 10-12 h at the temperature ranging from 500 DEG C to 700 DEG C, original fine powder A is obtained, and the average grain size ranges from 10 nm to 30 nm; part of the weighed raw material powder is dried for 1-2 h at the temperature ranging from 1,400 DEG C to 1,500 DEG C, the coarse particle powder B is obtained, and the average grain size ranges from 400 nm to 1,500 nm; the coarse particle powder B and the original fine powder A are mixed according to the mass proportion of 9:1-1:1, polyvinyl alcohol accounting for 1-5% of the total mass of the coarse particle powder B and the original fine powder A is added, centrifugal spray drying granulating treatment is conducted, and spherical aggregated powder C is obtained; the spherical aggregated powder C is dried for 60-120 min under the condition that the temperature ranges from 80 DEG C to 100 DEG C and placed in a chloroprene rubber sleeve to be compacted by vibration; under the condition of 100-150 MPa and 10-40 min or under the condition of 150-200 MPa and 5-10 min, pressing forming is conducted, and a ceramic pressed blank is obtained; and the ceramic pressed blank is sintered for 5-15 h at the temperature ranging from 1,100 DEG C to 1,300 DEG C, and the target material is manufactured.

The invention relates to the field of concrete, and provides foam concrete aiming at the problem that compressive strength of the foam concrete is easily influenced by the porous structure. The foam concrete is prepared from the following components in parts by mass: 14-16 parts of water, 20-25 parts of Portland cement, 11-15 parts of limestone powder, 75-85 parts of sand, 103-106 parts of stone,0.3-0.5 parts of a foaming agent, 0.1-0.5 parts of a water reducing agent, 0.3-0.5 parts of starch, 0.5-1 part of hollow glass beads and 0.1-0.3 parts of pineapple leaf fiber. Pores among cement particles can be filled with the hollow glass microbeads, so that compactness of the foam concrete is improved, and the foam concrete is not prone to cracking under pressure. Besides, the hollow glass microbeads also have certain fluidity, contain thin gas inside, and have the functions of light weight, heat insulation and sound insulation, and thus, the foam concrete has higher compressive strength while maintaining superior performance.

The invention relates to a method for pretreating a technical cavity of a plasma device, which is applied to the aluminous inner wall or the surface of an interior part of the technical cavity to form a protective layer. The invention comprises the steps of: carrying out fluorization on the inner wall and the surface of an interior part with plasma containing fluorine, and forming an aluminum fluorine compound barrier layer at the inner wall and the surface of an interior part. The aluminum fluorine compound formed by the invention has strong binding force with the inner wall of the technical cavity and the interior part, the size of the binding force of all parts is basically same, the corrosion resistance of the plasma is increased, particulate pollutant can be avoided or reduced, and compared with a spraying method, the invention has low cost and reduced manufacture difficulty.

The conductive cloth producing process is one physical vapor deposition process. Continuous fiber fabric is made to pass through a serial technological process inside a vacuum equipment so that single or multiple sputtered metal film is formed on th fabric. The said process can producing conductive cloth with metal layer bonding to fiber fabric firmly continuously and in large scale.

The invention relates to a uniform compaction method of a silicon oxide based antenna housing composite. According to the method, after fiber fabric is steeped, silicasol gel is changed into solid, so that overflow and loss of silicasol in subsequent procedures are avoided; quick drying is carried out by using a vacuum microwave drying technology subsequently; the above process is circulated for several times; finally, after uniform heat treatment, namely heating during rotation, the relatively compact composite with uniform density is obtained; the method significantly improves density uniformity of the material via a whole gel technology and a uniform heat treatment technology; the drying efficiency is improved via microwave drying based on the silicasol gel; time consumed by a drying procedure is shortened; and a material preparation period is shortened.

The invention discloses a multi-deposition-chamber CVI (chemical vapor infiltration) device for compacting a carbon/carbon crucible and a method using the same. The device comprises a chemical vapor deposition furnace consisting of an outer furnace tank and an inner furnace tank and also comprises multiple layers of graphite partition plates which are distributed in the inner furnace tank from bottom to top and multiple intake tubes which are inserted in the inner furnace tank from bottom to top; adjacent two layers of graphite partition plates are isolated by multiple graphite shores; the upper part of the graphite partition plate arranged on the most-top layer is provided with a gas-sealing plate; dependant deposition chambers are respectively formed between adjacent two layers of graphite partition plates and between the gas-sealing plate and the graphite partition plate arranged on the most-top layer; multiple deposition chambers are distributed from top to bottom; and the multiple intake tubes are respectively inserted into the multiple deposition chambers from bottom to top. The compacting method comprises the following steps: 1, charging of a crucible prefabricated body; and 2, compacting treatment. The device disclosed by the invention has simple structure, reasonable design, good use effect, good compacting effect, good density uniformity, large charging amount and the like, is convenient for assembling and easy to use and operate.

The invention relates to a method for manufacturing a golf club head. The method sequentially comprises the following steps of: cutting, bending and forming, and forging. The method mainly comprises the steps of: taking a cut base material, bending and forming the base material to be separated into a supporting part and a forming part; repeatedly performing cold forging and stamping on the obtained forming part, and forming a shape of the golf club head. Therefore, only the forming part is required to be locally stamped in the forging process, the loss rate of the forming die is reduced, any heating operation is not required in the whole process, the energy cost is saved, the formed golf club head is uniform in density, scraps of the base material in the forging process are avoided, and the operation and cost required to machine and remove the scraps after forging are saved.

The invention discloses a coating mold head with cavity pressure adjusted in a horizontal direction. The coating mold head includes an upper mold head and a lower mold head, a slit coating opening isformed in a front end clipper seam between the upper mold head and the lower mold head, a storing cavity is opened in the lower mold head, the storing cavity communicates with the slit coating opening, a cavity pressure adjustment mechanism is arranged on the upper mold head, and the cavity pressure adjustment mechanism includes a sliding block located in the storing cavity, and a transmission adjustment rod used to make a cam head be connected with the sliding block in a transmission mode. When the transmission adjustment rod rotates, the cam head can drive the sliding block to move in a horizontal direction of coating feeding to adjust the cavity pressure in the storing cavity. The coating mold head is provided with the cavity pressure adjustment mechanism, the cavity pressure in the storing cavity can be flexibly adjusted in real-time in the production process of coating, so that the flow velocity and flow of coating slurry can be adjusted, the coating mold head is provided with a gap adjustment mechanism coordinately, and the real-time adjustment of the flow velocity and flow of the coating slurry can be effectively finished in the production process of the coating.

The invention relates to a preparation method of a rare earth microalloyed high-density high-strength tungsten-nickel-copper alloy. The preparation method comprises the following steps: firstly, preparing tungsten nitrate, nickel nitrate, copper nitrate, yttrium nitrate and water into a mixed solution according to a preset metering ratio, then preparing an alkali solution together with certain concentration of ammonia water solution, stirring the alkali solution, crystallizing, filtering, washing and drying to obtain precursor powder; placing the precursor powder into a reducing atmosphere furnace for dissociating and reducing, to obtain yttrium-containing tungsten-nickel-copper alloy powder; and grinding the alloy powder and mixing together with a forming agent and press-forming, dewaxing the formed blank and performing high-temperature sintering to finally obtain the rare earth microalloyed high-density high-strength tungsten-nickel-copper alloy. The tungsten-nickel-copper alloy prepared by taking the rare earth microalloyed tungsten-nickel-copper alloy powder prepared by adopting a liquid/liquid doping method as a raw material through a proper powder metallurgy technology has the advantages that the density is more than or equal to 18.1g/cm<3>, the tensile strength is more than or equal to 850MPa, and the yielding strength is more than or equal to 690MPa.