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1557 results about "Nonmetal" patented technology

In chemistry, a nonmetal (or non-metal) is a chemical element that mostly lacks the characteristics of a metal. Physically, a nonmetal tends to have a relatively low melting point, boiling point, and density. A nonmetal is typically brittle when solid and usually has poor thermal conductivity and electrical conductivity. Chemically, nonmetals tend to have relatively high ionization energy, electron affinity, and electronegativity. They gain or share electrons when they react with other elements and chemical compounds. Seventeen elements are generally classified as nonmetals: most are gases (hydrogen, helium, nitrogen, oxygen, fluorine, neon, chlorine, argon, krypton, xenon and radon); one is a liquid (bromine); and a few are solids (carbon, phosphorus, sulfur, selenium, and iodine). Metalloids such as boron, silicon, and germanium are sometimes counted as nonmetals.

Method for Forming Single-Phase Multi-Element Film by PEALD

A method for forming a single-phase multi-element film on a substrate in a reaction zone by PEALD repeating a single deposition cycle. The single deposition cycle includes: adsorbing a precursor on the substrate in the absence of reactant and plasma; decomposing the precursor adsorbed on the substrate by an inert gas plasma; and reacting the decomposed precursor with a reactant gas plasma in the presence of the inert gas plasma. The multi-element film contains silicon and at least two non-metal elements constituting a matrix of the film, the precursor contains silicon and optionally at least one non-metal element to be incorporated in the matrix, and the reactant gas contains at least one non-metal element to be incorporated in the matrix.
Owner:ASM JAPAN

Anti-fingerprint coating construction

An anti-fingerprint coating construction (23) for application to a surface of a substrate (21) includes a layer formed of a material selected from the group consisting of a hydrophobic nano-composite material, an oleophobic nano-composite material, and a super-amphiphobic nano-composite material. When the anti-fingerprint coating construction is employed on a metal surface or a nonmetal surface, sweat or / and grease on fingers of a user is not liable to be adhered to the surface. Therefore a fingerprint of the user is prevented from being imprinted on the surface, and the surface can remain clean and aesthetically pleasing. Because the anti-fingerprint coating construction is easy to clean, the anti-fingerprint coating construction has good anti-corrosion and antibacterial properties. The anti-fingerprint coating construction contains no chromium, and therefore does not need to be processed by an acid or alkali solution. This makes the anti-fingerprint coating construction environmentally friendly.
Owner:HON HAI PRECISION IND CO LTD

Laser ablation feedback spectroscopy

Methods, for use with a laser ablation or drilling process, which achieve depth-controlled removal of composite-layered work-piece material by real-time feedback of ablation plasma spectral features. The methods employ the use of electric, magnetic or combined fields in the region of the laser ablation plume to direct the ablated material. Specifically, the electric, magnetic or combined fields cause the ablated material to be widely dispersed, concentrated in a target region, or accelerated along a selected axis for optical or physical sampling, analysis and laser feedback control. The methods may be used with any laser drilling, welding or marking process and are particularly applicable to laser micro-machining. The described methods may be effectively used with ferrous and non-ferrous metals and non-metallic work-pieces. The two primary benefits of these methods are the ability to drill or ablate to a controlled depth, and to provide controlled removal of ablation debris from the ablation site. An ancillary benefit of the described methods is that they facilitate ablated materials analysis and characterization by optical and / or mass spectroscopy.
Owner:BLUMENFELD WALTER +2

Method for preparing high efficiency metallic, non-metallic ion co-doped nano-TiO2 visible-light responsive photocatalyst

The invention discloses a process for preparing a high efficiency nanometer Tio2 visible light catalyst codoped with metal and non metallic ion, belonging to the photocatalysis technology field. The invention adopts titanic acid ester as precursor, uses metal salt and non-metallic compound as dopant, in accordance with sol-gel method, prepares the nanometer TiO2-based photocatalyst with codoping, high efficiency and visible light catalytic activity, wherein the catalytic activity is greatly higher than that of single-doped TiO2-based catalyst. The invention is characterized by the following: 1. due to codoping of the metal and non metallic ion, discrete localized doping level is formed respectively on the lower part of the conduction band energy level and the upper part of the valence band energy level of the TiO2-based catalyst, thus increasing the absorption of visible light and greatly improving the catalytic activity; 2. the doping level can inhibit the recombination of photogenerated carrier, promote the probability of the photogenerated carrier entering into the photocatalytic reaction and efficiently degrade pollutant molecules.
Owner:NANKAI UNIV

Titania nanotube arrays, methods of manufacture, and photocatalytic conversion of carbon dioxide using same

Nitrogen-doped titania nanotubes exhibiting catalytic activity on exposure to any one or more of ultraviolet, visible, and / or infrared radiation, or combinations thereof are disclosed. The nanotube arrays may be co-doped with one or more nonmetals and may further include co-catalyst nanoparticles. Also, methods are disclosed for use of nitrogen-doped titania nanotubes in catalytic conversion of carbon dioxide alone or in admixture with hydrogen-containing gases such as water vapor and / or other reactants as may be present or desirable into products such as hydrocarbons and hydrocarbon-containing products, hydrogen and hydrogen-containing products, carbon monoxide and other carbon-containing products, or combinations thereof.
Owner:PENN STATE RES FOUND

Photocatalyst responding to visible light, and preparation method and application

A semiconductor photocatalyst responsive to visual light is composed of the particles of metallic oxide chosen from iron oxide, nickel oxide, cabolt oide, copper oxide, etc, the non-metal element chosen from N, C, S, B and P and semiconductor nanoparticles chosen frmo TiO2, SnO2, ZnO, CdS and WO3.
Owner:INST OF CHEM CHINESE ACAD OF SCI

Method for producing a titanium metallic composition having titanium boride particles dispersed therein

An article made of constituent elements is prepared by furnishing at least one nonmetallic precursor compound, wherein all of the nonmetallic precursor compounds collectively contain the constituent elements. The constituent elements include a titanium-base metallic composition, boron present at a level greater than its room-temperature solid solubility limit, and, optionally, a stable-oxide-forming additive element present at a level greater than its room-temperature solid solubility limit. The precursor compounds are chemically reduced to produce a material comprising a titanium-base metallic composition having titanium boride particles therein, without melting the titanium-base metallic composition. The titanium-base metallic composition having the titanium boride particles therein is consolidated without melting.
Owner:GENERAL ELECTRIC CO

Method for preparing non-metallic element doped carbon coated metal nanoparticle magnetic composite

The invention discloses a method for preparing a non-metallic element doped carbon coated metal nanoparticle magnetic composite. The method comprises the steps that water-soluble metal divalent salt, a cyanamide compound and a nitrogen or boron or sulfur containing non-metallic compound are added into a methanol solution to be mixed, dissolved, dried and ground, and obtained homogeneous-phase powder is subjected to roasting pyrolysis under the protection of inert gas; and a pyrolysis product is subjected to acid pickling, washing, drying and grinding, and a target product is obtained. According to the whole preparing process of the method, metal ion reduction, metal nanoparticle coating and doping of nitrogen / boron / sulfur and other non-metallic elements are achieved in one step. The composite prepared through the method is high in degree of graphitization, good in dispersity between particles and high in purity, and the preparing method has the advantages that the cost is low, the process is simple, and large-quantity synthesis can be easily achieved.
Owner:合肥庐阳科技创新集团有限公司

Doped multi-layer core-shell silicon-based composite material for lithium ion battery and preparation method thereof

ActiveCN109599551AInhibits and buffers swellingPrevent partial failureMaterial nanotechnologySecondary cellsCarbon filmComposite film
The present invention relates to a doped multi-layer core-shell silicon-based composite material for a lithium ion battery, and a preparation method thereof. Other than being doped with a necessary lithium element, the material is also doped with at least a non-metallic element and a metal element; the material has a structure in which a silicon oxide particle doped with elements is taken as a core, and a multilayer composite film which is tightly coated on the surface of the core particle is taken as a shell; the core particle contains uniformly dispersed monoplasmatic silicon nanoparticles,the content of doping elements gradually decreases from the outside to the inside without a clear interface, and a dense lithium silicate compound is formed on the surface of the core particle by embedding and doping the lithium element; and the multilayer composite film is a carbon film layer and a doped composite film layer composed of the carbon film layer and other elemental components. The doped multi-layer core-shell silicon-based composite material provided by the present invention has a high capacity, good rate performance, high coulombic efficiency, good cycle performance, a low expansion rate, and other electrochemical characteristics when the material is used for the negative electrode of lithium ion battery.
Owner:BERZELIUS (NANJING) CO LTD +1

Deposition System, Method And Materials For Composite Coatings

A composite powder for a deposition of a composite coating comprises a nonmetallic component and a metallic component, the metallic component having an amorphous structure or a nanocrystalline structure. The metallic component may include an amorphous metallic alloy. The metallic alloy may include constituents having the amorphous structure. The metallic component may include a combination of the metallic alloy existing in the amorphous state and constituents of the amorphous metallic alloy in the amorphous state. The composite metal-ceramic powders are used for depositing composite coatings on a selected surface. Disclosed are several methods and systems for producing such composite powders. Disclosed are also several methods and systems for depositing composite coatings. Advantageously, the deposited coatings exhibit high corrosion resistance, high wear resistance, and excellent structural properties.
Owner:BELASHCHENKO VLADIMIR E

Catalyst for decomposing hydrogen sulfide by photocatalysis and preparation method of hydrogen and liquid sulfur by employing same

The invention relates to a catalyst for decomposing hydrogen sulfide by photocatalysis and a preparation method of hydrogen and liquid sulfur by employing same. The catalyst comprises a carrier, active component and assistant and has the characteristics that the carrier is one or more selected from vanadate, niobate and tantalate, the active component is one or more selected from alkali metal hydroxide, alkaline earth metal hydroxide, alkali metal nonmetal oxysalt, alkali metal nonoxysalt, alkaline earth metal nonmetal oxysalt and alkaline earth metal nonoxysalt and the assistant is lanthanide oxide or VIII group oxide. The catalyst of the invention can be used for preparing hydrogen and liquid sulfur so that the produced sulfur is easy to be separated from the catalyst, the catalyst can be recycled and the sulfur contained in hydrogen sulfide can be fully recycled, thus realizing the comprehensive utilization of hydrogen sulfide.
Owner:BEIJING SJ ENVIRONMENTAL PROTECTION & NEW MATERIAL CO LTD

Movable bed catalyst for alkylation of toluene and methanol to produce paraxylene and low-carbon olefin

The invention provides a catalyst used for preparing para-xylene and low-carbon olefin fluidized bed by selective methylation of toluene with methanol, which is obtained by the modification of zeolite molecular sieve by metal, nonmetal or / and rare earth metal, mixing, spraying, drying and forming of amorphous adhesive containing silicon or aluminium and the zeolite molecular sieve, and decoration of surface acidity and porous structure by siloxane-based compounds, wherein, the content of the alkaline earth metal is 0.1-8wt percent of the total weight of the catalyst, the content of the nonmetal is 0.1-8wt percent of the total weight of the catalyst, the content of the rare earth metal is 0.1-5wt percent of the total weight of the catalyst, and the loading of the Si decorated by the siloxane-based compound is 0.1-10wt percent of the total weight of the catalyst; the catalyst is used for the reaction of preparing para-xylene and low-carbon olefin fluidized bed by selective methylation of toluene with methanol; in the products, the selectivity of the para-xylene in the xylene isomers is more than 99 percent and the selectivity of the ethane and propylene in the composition C1-C5 is more than 90 percent.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI

Electrolyte material for all solid-state lithium secondary battery, preparation method for electrolyte material and all solid-state lithium secondary battery

The invention provides an electrolyte material (LiaPbScMd) for an all solid-state lithium secondary battery and a preparation method for the electrolyte material. The electrolyte material, shown in a formula (I) LiaPbScMd, for the all solid-state lithium secondary battery is prepared from Li2S, P2S5 and a dopant, wherein the dopant is selected from one or more of compounds of nonmetal elements in main groups III, IV, V, VI and VII of lithium and compounds formed from at least two of the nonmetal elements in the main groups III, IV, V, VI and VII; in the formula (I), M is selected from one or more of the nonmetal elements in the main groups III, IV, V, VI and VII, a is more than 0 and less than or equal to 10, b is more than 0 and less than or equal to 5, c is more than 0 and less than or equal to 15, and d is more than 0 and less than 1. The electrolyte material for the all solid-state lithium secondary battery has high electrical conductivity, high electrochemical stability and the like, and is favorable for application. The invention also provides the all solid-state lithium secondary battery.
Owner:STATE GRID CORP OF CHINA +3

Method of encapsulating a projection and making an evacuated cabinet

The invention relates to a method of using high velocity metal forming to encapsulate a projection of a non-metallic article by a metallic article and a method of crimping terminal flanges defining an interstitial space therebetween, while trapping a vapor barrier element between the terminal flanges, thereby hermetically sealing the interstitial space.
Owner:WHIRLPOOL CORP

Replacement gate with reduced gate leakage current

Replacement gate work function material stacks are provided, which provides a work function about the energy level of the conduction band of silicon. After removal of a disposable gate stack, a gate dielectric layer is formed in a gate cavity. A metallic compound layer including a metal and a non-metal element is deposited directly on the gate dielectric layer. At least one barrier layer and a conductive material layer is deposited and planarized to fill the gate cavity. The metallic compound layer includes a material, which provides, in combination with other layer, a work function about 4.4 eV or less, and can include a material selected from tantalum carbide, metallic nitrides, and a hafnium-silicon alloy. Thus, the metallic compound layer can provide a work function that enhances the performance of an n-type field effect transistor employing a silicon channel. Optionally, carbon doping can be introduced in the channel.
Owner:GLOBALFOUNDRIES INC

Optical film and retardation sheet, and liquid crystal compound

A compound of formula (1): wherein A1 and A2 are —O—, —NR—, —S—, or —CO—, in which R is a hydrogen atom or substituent; Z is one or two atoms selected from a carbon atom or a non-metal atom of Group 14, 15 or 16 in the Periodic Table, and forms a five- or six-membered ring with the C—C═C—C or C═C—C═C; R1, R2, and R3 each are a substituent; m is an integer of 0 to 4; L1 and L2 are a single bond or divalent linking group; X is a non-metal atom of Group 14, 15 or 16 in the Periodic Table, and may have a hydrogen atom or R4; and at least one of R, R1, R2, R3, and R4 is substituted with a polymerizable group; a liquid crystal composition, an optical film, a retardation sheet, a polarizing plate, and a liquid crystal display.
Owner:FUJIFILM CORP

Ternary and multi-nary iron-based bulk glassy alloys and nanocrystalline alloys

InactiveUS20050263216A1High glass forming abilityIncreased electrical resistivityMagnetic materialsAmorphous phaseAtomic radius
Disclosed in this invention is a family of ternary and multi-nary iron-based new compositions of bulk metallic glasses which possess promising soft magnetic properties, and the composition selection rules that lead to the design of such new compositions. The embodiment alloys are represented by the formula MaXbZc, where M represents at least one of ferromagnetic elements such as iron and may partly be replaced by some other substitute elements; X is an element or combinations of elements selected from those with atomic radius at least 130% that of iron and in the mean time is able to form an M-rich eutectic; and Z is an element or combinations of elements selected from semi-metallic or non-metallic elements with atomic radius smaller than 86% that of iron and in the meantime is able to form an M-Z eutectic; a, b, c are the atomic percentage of M, X, Z, respectively, and a+b+c=100%. When 1%<b<15% and 10%<c<39%, the alloys show a bulk glass forming ability to cast amorphous ribbons / sheets at least 0.1 mm in thickness. When 3%<b<10% and 18%<c<30%, the alloys show a bulk glass forming ability to cast amorphous rods at least 1 mm in diameter. The amorphous phase of these as-cast sheets / rods is at least 95% by volume. This invention also discloses the existence of nano-crystalline phase outside of the outer regime of the bulk glass forming region mentioned above.
Owner:NATIONAL TSING HUA UNIVERSITY

Rapid detection method and rapid detection device of non-metallic inclusions in metal

ActiveCN103123329AQuickly obtain 3D topographyQuick access to ingredientsUsing optical meansMaterial analysis by measuring secondary emissionImaging analysisNon-metallic inclusions
The invention discloses a rapid detection method of non-metallic inclusions in metal. The rapid detection method comprises the following five steps of: heating and smelting a metal test sample, separating the inclusions, detecting the total amounts and the sizes of the inclusions, condensing metal liquid, and detecting the three-dimensional shape and components of the inclusions. The invention further provides a special rapid detection device comprising a heating furnace device, a metal liquid rotation device, a video collection device and an image analysis system. The metal test sample is rapidly smelted and the steel liquid is driven to rotate; centrifugal force and gravity are used for rapidly upwards floating various non-metallic inclusions in the metal liquid and gathering the various non-metallic inclusions at the center of the surface of the metal liquid; high speed photography and video analysis software is used for rapidly obtaining the total amount and the size distribution of the non-metallic inclusions in the metal test sample; the metal liquid is rapidly cooled and condensed and the inclusions are cured on the surface of the metal test sample; and a scanning electron microscope and the energy spectrum analysis are used for obtaining the three-dimensional shapes and the components of the non-metallic inclusions in the metal test sample. According to the rapid detection method and the device disclosed by the invention, the direction is rapid and convenient, the analysis is accurate and visual, and cleaning and no pollution can be realized.
Owner:新兴发展集团有限公司

Braze materials and processes therefor

Braze materials and processes for using braze materials, such as for use in the manufacturing, coating, repair, and build-up of superalloy components. The braze material contains a plurality of first particles of a metallic material having a melting point, and a plurality of second particles comprising at least one nonmetallic material chosen from the group consisting of oxides, carbides, and nitrides of at least one metal. The nonmetallic material is more susceptible to heating by microwave radiation than the metallic material of the first particles, and the nonmetallic material is present in the braze material in an amount sufficient to enable the first particles to completely melt when the first and second particles are subjected to heating by microwave radiation.
Owner:GENERAL ELECTRIC CO

Nonstick cookware and manufacturing method thereof

The invention discloses nonstick cookware and a manufacturing method thereof, wherein the inner surface of the pot body of the nonstick cookware is provided with an uneven raised structure; a grain structure is distributed on the raised structure; and a nonstick coating covers outside the raised structure and the grain structure. The manufacturing method of the cookware comprises the following steps of: (1) forming the pot body of the cookware; (2) carrying out inner surface treatment on the pot body of the cookware to ensure that the uneven raised structure is formed at the inner surface of the pot body of the cookware; (3) carrying out meltallizing treatment on the cookware blank after being subjected to the roughening treatment to ensure that nanoscale hard metal-based or nonmetal-based grain structure is distributed on the raised structure of the pot body of the cookware; (4) spraying nonstick coatings on the inner surface of the pot body of the cookware after being subjected to the meltallizing treatment to ensure that the nonstick coating covers outside the raised structure and the grain structure; and (5) putting in a sintering channel at a temperature of 350-440 DEG C after the spraying to sinter for 5-20 minutes so as to obtain a finished product. The nonstick cookware disclosed by the invention is good in nonstick effect and abrasive resistance, simple in manufacturing process and suitable for large scale production.
Owner:谛卓(北京)咨询顾问有限公司

High-nickel ternary positive electrode material and preparation method thereof

The invention discloses a high-nickel ternary positive electrode material and a preparation method thereof. The high-nickel ternary positive electrode material is formed by a matrix and a coating layer, wherein the matrix is prepared from a high-nickel ternary precursor, a lithium source and a doping agent, the doping agent is a compound containing M', M' is a doping element, M' is one or more selected from a metal element and / or a non-metal element, the coating layer is formed by a coating material, and the coating material is a metal or non-metal compound. The preparation method comprises the following steps of: mixing a high-nickel ternary precursor, a lithium source and a doping agent, carrying out primary sintering and post-treatment to obtain a doped high-nickel ternary positive electrode material matrix, mixing the doped high-nickel ternary positive electrode material matrix with a coating material, and carrying out secondary sintering and post-treatment to obtain the high-nickel ternary positive electrode material. The high-nickel ternary positive electrode material is subjected to multi-element doping and surface coating co-modification, crystal lattices are stable, and alithium ion battery prepared from the high-nickel ternary positive electrode material has excellent rate capability, cycling stability and safety performance.
Owner:TIANJIN GUOAN MGL NEW MATERIALS TECH CO LTD

Doped porous carbon spheres used for negative electrode material of sodium ion battery and preparation method for doped porous carbon spheres

The invention discloses doped porous carbon spheres used for a negative electrode material of a sodium ion battery. At least one kind of non-metallic elements of N, B, P, S, F, Cl or Br is doped in the porous carbon spheres; and the doping amount of the non-metallic element is 0.5%-15% based on atomic ratio. When the doped porous carbon spheres prepared by the invention are used for the negative electrode material of the sodium ion battery, the advantages of high specific capacity, excellent cycling performance and excellent rate capability are represented. Meanwhile, the invention also provides a preparation method for the doped porous carbon spheres used for the negative electrode material of the sodium ion battery; and the preparation method is simple, the cost is low and industrial large-scale application is easy to achieve.
Owner:EAST CHINA NORMAL UNIV

Smart wearable mine detector

To improve the problems of conventional mine detectors, the purpose of the present invention is to provide a smart wearable mine detector comprising a human body antenna unit 100, a main microprocessor unit 200, a smart eyeglasses unit 300, a body-mounted LCD monitor unit 400, a wireless data transmission and reception unit 500, a belt-type power supply unit 600, a black box-type camera unit 700, and a security communication headset 800, the smart wearable mine detector: can be detachably worn on the head, torso, arm, waist, leg and the like of a body while a combat uniform is worn, thereby having excellent compatibility with conventional combat uniforms; enables a human body antenna unit which is detachably attached to a body and detects a mine through a super high-frequency RF beam and a neutron technique to be applied so as to detect the mine by identifying metals, nonmetals, and initial explosives of the mine; enables mines buried on the ground and under the ground to be detected in all directions (360°), and a distance, location, form, and materials of the mines to be exhibited on smart eyeglasses and a body-mounted LCD monitor unit in real time as 2D or 3D images such that a combatant can engage in battle avoiding mines, thereby improving combat efficiency by 90% when compared to existing combat efficiency; enables a battle to be carried out for three to seven days through a twin self-power supply system of a portable battery and a belt-type power supply unit even without need for charging power; and enables combat situations in a remote place to be monitored, in real time, in a remote combat command server, and allows each combatant to share combat information one to one such that it is possible to construct a smart combat command system capable of remotely commanding real combat situations as if one was on site of the battle.
Owner:FOUND FOR RES & BUSINESS SEOUL NAT UNIV OF SCI & TECH

Multi element daged-anatase type TiO2 collosol photo catalyst and its preparation method

A multiple elements doped anatase-type TiO2 sol photocatalyst features that its solvent is water or the mixture of water and unitary or binary alcohol, and its sol contains non-metal doped anatase-type TiO2 nanoparticles, and has a formula: TiO2-x-yAxBy, where x=0.0-0.1, y=0.0-0.1 and A or B is one or more of non-metal halogens or N-family elements. Its preparing process includes such steps as hydrolyzing organic or inorganic Ti source, doping, dispergating, and hydrothermal crystallizing.
Owner:SOUTH CHINA UNIV OF TECH

Method for producing a structure using nanoparticles

For forming a fine structure of a desired material, nanoparticles of the same material are prepared in a suspension. A layer of the suspension is applied by a drop-on-demand printing system to a substrate. At least part of the layer is exposed to laser light for melting the nanoparticles at least partially. Upon solidification, the molten particles are sintered together to form the desired structure. Due to the low melting point of nanoparticles as compared to the melting point of bulk material, this procedure avoids damage to the substrate and provides a better control over the structure generation process. It can be used for generating metallic and non-metallic structures on various substrates. The laser light may have non-Gaussian intensity distribution or can combine multiple beams of Gaussian and non-Gaussian distribution for improving the quality of the generated structure, or it may be pulsed for improved control of the heat flow into the substrate.
Owner:RGT UNIV OF CALIFORNIA +1

Low carbon high alloy steel for ball mill lining and its making process

The present invention is low carbon high alloy steel for ball mill lining and its making process, and the features that the lining steel has the composition of C 0.15-0.30 wt%, Cr 5.0-10.0 wt%, Ni 0-1.5 wt%, Mn 0.5-1.7 wt%, Mo 0-1.5 wt%, RE 0-0.8 wt%, Ti 0-1.0 wt%, Si 0-1.6 wt%, P 0.01-0.045 wt%, S 0.01-0.045 wt%, other metal and non-metal elements not more than 3 wt% and Fe for the rest. The lining of the low carbon high alloy steel has excellent wear resistance in the wet ore grinder environment, service life as long as twice that of lining of high manganese steel, and low cost.
Owner:HEFEI UNIV OF TECH

Cleaning fluid for cleaning plasma etching residue

The invention discloses washing liquid used in the semiconductor industry to wash plasma etching residues. The washing liquid contains citric acid / citrate buffer solution, fluorides, macromoledular corrosion inhibitor, anti-freeze agent and solvent. The washing liquid can effectively wash the plasma etching residues during the process of manufacturing a semiconductor, have low etching velocity on nonmetals and metal substrates such as Si, SiO2, tetraethoxy silane silicon dioxides (PETEOS), low-medium materials, Ti, Al, Cu and so on, is safe and harmless to the environment and the human body, and has good application prospect in the microelectronic field such as washing of semiconductor wafers and so on.
Owner:ANJI MICROELECTRONICS (SHANGHAI) CO LTD
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