Methods and apparatus are described for 
cantilever structures that include a vertically aligned 
nanostructure, especially vertically aligned 
carbon nanofiber scanning probe 
microscope tips. A method includes A method, includes fabricating a 
cantilever structure having a vertically aligned 
nanostructure including: forming a doped layer at a first side of a substrate; depositing an etch 
mask layer on a second side of the substrate; forming a plurality of alignment marks that are coupled to the first side of the substrate; depositing a catalyst 
nanoparticle at a deterministic site that is coupled to the doped layer; growing the vertically aligned 
nanostructure at the deterministic site with the catalyst 
nanoparticle; depositing a first protective layer that surrounds at least a portion of the vertically aligned nanostructure; patterning the first protective layer to define an outline of a 
cantilever body; transferring the outline of the cantilever body from the first protective layer into the doped layer to form the cantilever body from the doped layer; depositing a second protective layer that coats at least a portion of a surface of the cantilever body; patterning the etch 
mask layer to define an outline of a relieved volume; transferring the outline of the relieved volume from the etch 
mask layer into the second side of the substrate to remove the relieved volume from the substrate, where the cantilever body is not removed.