A method for producing
silicon carbide, SiC, epitaxial wafers in a
wafer growth
system (1) comprising an outer container, an insulating container arranged inside the outer container, a growth container (2) arranged inside the insulating container, and a heating arrangement arranged outside the outer container to heat an inside of the growth container (2). The method comprises providing a
source material (3) of polycrystalline SiC in the growth container (2), providing a substrate (4) of monocrystalline SiC in the growth container (2) substantially parallel to the
source material (3), the substrate (4) having a
doping concentration of ≤5—1016 cm−3, increasing the temperature in the growth container (2) to a sublimation temperature of the
source material (3), maintaining the temperature in the growth container (2) until a conductive layer (6) of monocrystalline SiC having a thickness of ≥10 μm and having a
doping concentration of ≥1·1018 cm−3 has grown on the substrate (4). The substrate (4) and the grown conductive layer (6) together define an epitaxial
boule. The method further comprises cooling the epitaxial
boule to
room temperature, and
slicing the epitaxial
boule, through the substrate (4) in a plane substantially parallel to the grown conductive layer (6), into an excess substrate (8) and an epitaxial
wafer comprising a substrate layer (7) having the grown conductive layer (6) thereon.