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33 results about "Dimethylhydrazine" patented technology
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Dimethylhydrazine is the name of two compounds with the molecular formula C₂H₈N₂.
Ge-Sb-Te FILM FORMING METHOD, Ge-Te FILM FORMING METHOD, AND Sb-Te FILM FORMING METHOD
ActiveUS20140162401A1Improve surface smoothnessImprove featuresSemiconductor/solid-state device manufacturingChemical vapor deposition coatingDimethylhydrazineMetallurgy
A Ge—Sb—Te film forming method includes a Sb source material introducing process, a first purging process, a Te source material introducing process, a second purging process, a Ge source material introducing process, a third purging process. An additive gas containing at least one of ammonia, methylamine, dimethylamine, hydrazine, monomethylhydrazine, dimethylhydrazine and pyridine is introduced in at least one of the Sb, Te and Ge source material introducing processes and the first to third purging processes.
Owner:TOKYO ELECTRON LTD
Preparation method of p type GaN and AlGaN semiconductor material
ActiveCN102903615AEasy to desorbImprove bindingSemiconductor/solid-state device manufacturingDimethylhydrazineSemiconductor materials
The invention discloses a preparation method of a p type GaN and AlGaN semiconductor material. A substrate, and a buffer layer or a transition layer, an unintended doped layer and an acceptor doped layer grown on the substrate from bottom to top are contained; in a growth process of the structure, ammonia or nitrogen dimethylhydrazine is used as a five-group nitrogen source; trimethyl gallium or TEGa used as a three-group gallium source, trimethylaluminium or triethyl aluminum used as a three-group aluminium source, and trimethylindium or TEIn used as a three-group indium source are collectively called three-group metal sources; and the trimethylindium or the TEIn is also used as a surface active agent and used in the acceptor doped layer. According to the method, the trimethylindium or the TEIn is used as the surface active agent to assist growth, and simultaneously, the acceptor doped layer is prepared by adopting a delta doping method. According to the method, the doping efficiency of acceptor doped magnesium atoms is increased, and simultaneously, the self-compensation effect is suppressed, so that the p type GaN and AlGaN semiconductor material with favorable crystalline quality and high hole concentration is obtained.
Owner:SUN YAT SEN UNIV
Nitrogen sources for molecular beam epitaxy
InactiveUS7255746B2Polycrystalline material growthSemiconductor/solid-state device manufacturingDimethylhydrazineNitrogen source
MBE nitrogen sources of dimethylhydrazine, tertiarybutlyhydrazine, nitrogentrifloride, and NHx radicals. Those nitrogen sources are beneficial in forming nitrogen-containing materials on crystalline subtrates using MBE. Semiconductor lasers in general, and VCSEL in particular, that have nitrogen-containing layers can be formed using such nitrogen sources.
Owner:II VI DELAWARE INC
Method for quickly and efficiently degrading high-concentration unsym-dimethylhydrazine wastewater
ActiveCN105036289AImprove utilization efficiencyReduce the amount addedWater contaminantsMetal/metal-oxides/metal-hydroxide catalystsHigh concentrationDimethylhydrazine
The invention discloses a method for quickly and efficiently degrading high-concentration unsym-dimethylhydrazine (UDMH) wastewater. The method comprises the following steps: performing catalytic oxidation on H2O2 by use of a nano sandwich-structured iron-based catalyst and a hydrogen peroxide stabilizer to produce a hydroxyl free radical (.OH); quickly and efficiently degrading UDMH and derivatives thereof. The catalyst is coupled with the free radical for reaction, the practicability is high, COD in UDMH wastewater can be greatly removed at a relatively low temperature and within a relatively wide pH range, and high-toxic UDMH is oxidized into ammonium salt NH4<+>, HCHO, CO2 and the like. The method can efficiently and quickly degrade high-concentration UDMH wastewater, the hydrogen peroxide utilization efficiency can be remarkably improved after the hydrogen peroxide stabilizer is added, the adding amount of hydrogen peroxide is reduced and the treatment effect is improved.
Owner:SOUTHEAST UNIV
Growth method of p-type AlGaN semiconductor material
ActiveCN108987256AReduced Displacement Formation EnergyImprove retentionSemiconductor/solid-state device manufacturingDimethylhydrazineIndium
The invention discloses a growth method of p-type AlGaN semiconductor material, the semiconductor material is grown by a technical method of adding a gallium source through step into a surfactant-assisted magnesium delta doping, Ammonia gas or dimethylhydrazine nitrogen is used as group V nitrogen source in the growth of p-type AlGaN semiconductor material, Trimethylgallium or triethylgallium is used as a Group III gallium source, trimethylaluminum or triethylaluminum is used as a Group III aluminum source, trimethylindium or triethylindium is used as a Group III indium source, collectively referred to as a Group III metal source, and trimethylindium or triethylindium is also used as a surfactant in the acceptor doping layer. The method of the invention can improve crystal quality, increase doping concentration of acceptor doped magnesium atoms, reduce acceptor ionization energy by enhancing valence band modulation, and further suppress self-compensation effect, thereby obtaining p-type AlGaN semiconductor material with high crystal quality and high hole concentration.
Owner:SUN YAT SEN UNIV
Method for recovering silver from silver-contained waste material
ActiveCN102994772AAchieve recyclingLow costProcess efficiency improvementDimethylhydrazineSilver ion
The invention discloses a method for recovering silver from a silver-contained waste material. The method comprises the following steps: (1) contacting the silver-contained waste material with an acid solution capable of dissolving silver, thereby dissolving silver out of the silver-contained waste material and filtering to obtain a silver ion-contained solution; (2) contacting acetylene with the silver ion-contained solution, thereby forming an acetylene silver precipitate; and (3) contacting the acetylene silver precipitate formed in step (2) with dimethylhydrazine, thereby forming metallic silver and acetylene. With the application of the method provided by the invention, a precipitator and the acetylene can be recycled, so that the environmental protection is enhanced and the cost is saved.
Owner:CHINA PETROLEUM & CHEM CORP +1
Catalyst for treatingw aste unsymdimethylhydrazine and its prepn process and application
InactiveCN1506156ALarge amount of processingCatalyst activation/preparationMetal/metal-oxides/metal-hydroxide catalystsDimethylhydrazineRare-earth element
The catalyst for treating waste unsym-dimethylhydrazine includes one or several of Pd, Pt and Rh as active component; one or several of IA, IIA, IIIB, VIII and RE elements as assistant; and Al2O3 or SiO2 as carrier. The preparation process includes the main steps of: soaking the carrier with solution containing the active component and assistant; drying and roasting the soaked carrier. The soaking step may be one of carrying active component before carrying assistant or one of carrying active component after carrying assistant. The catalyst may be used in the innocuous treatment of catalytically burning waste unsym-dimethylhydrazine or other hydrazine propellant. The addition of the assistant can improve the reaction and stabilizing performance of the catalyst effectively, and the carrier in the catalyst can raise the utilization of noble metal material effectively.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
Catalyst for catalytic hydrogenolysis of unsym-dimethylhydrazine and its prepn
InactiveCN1403194AHigh yieldSimple methodPreparation by N-O/N-N bondsMetal/metal-oxides/metal-hydroxide catalystsDimethylhydrazineAlkali metal oxide
THe catalyst for catalytic hydrogenolysis of unsym-dimethylhydrazine (UDMH) is one kind of improved loaded rhodium catalyst. The improved catalyst has added assistant, which is VIII element and alkali metal oxide. With the said improved catalyst and in the reaction conditions including temperature 100-300 deg.C, normal pressure, molar ratio between H2 and UDMH 1-10 and UDMH liquid space velocity 0.5-8 ml / ml catalyst, Hr, UDMH is converted to produce dimethylamine and ammonia. The said catalyst has simple preparation process, high reaction conversion rate and makes it possible to minimize the reaction apparatus.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
Application of caffeic acid 3,4-dyhydroxy phenethyl ester to preparing medicine for preventing colorectal cancer
InactiveCN108992434APrevent intrusionPrevent infiltrationOrganic active ingredientsAntineoplastic agentsDimethylhydrazineCyclin D1
The invention provides application of caffeic acid 3,4-dyhydroxy phenethyl ester (CADPE) to preparing a medicine for preventing colorectal cancer. The medicine is prepared from CADPE as an active component and a pharmaceutically acceptable carrier. The CAPDE is capable of effectively preventing early-stage occurrence of ICR (Institute for Cancer Research) mouse colorectal cancer induced by 1,2-dimethylhydrazine (DMH) and dextran sulphate sodium salt, has no conspicuous toxicity, and has the function mechanisms of inhibiting inflammatory cell invasion and infiltration and inhibiting NF-KappaB expression in monocyte, inhibiting expression of beta-catenin in aberrant crypt, reducing expression of cell proliferin PCNA and Cyclin D1, an anti-apoptoasis protein surviving and a cancer gene c-Myc,and inhibiting tumor vessel proliferation. Novel treatment means are provided for clinical prevention and treatment on colorectal cancer.
Owner:ZHEJIANG UNIV
L1,1-dimethylhydarzine stabilizerand the stabilizer composition thereof
InactiveCN103421211AGood weather resistanceImprove heat resistanceOrganic chemistryDimethylhydrazinePhosphate
The present invention provides a dimethylhydrazine stabilizer. The dimethylhydrazine stabilizer assembled with the additive like the hindered phenol - base antioxidant, the phosphate - base antioxidant, the phosphite - base antioxidant, the benzotriazole light stabilizer, the hindered amine - base light stabilizer, the fluorescent brightener is the stabilizer composition is formed. And added to the organic material as the antioxidant, and the light stabilizer or the heat stabilizer. The organic material is prevented from the chemical property change which consequently is induced with heat or light.
Owner:FDC LEES CHEM IND +1
Cerebrospinal fluid and urinary protein liquid single reagent and preparation method thereof
ActiveCN105548171AEliminate sticky cuvettesHigh sensitivityMaterial analysis by observing effect on chemical indicatorDimethylhydrazineMolybdate
The invention provides a cerebrospinal fluid and urinary protein liquid single reagent detection reagent kit and a preparation method thereof and belongs to field of in-vitro diagnosis reagents in order to solve the problems that an existing cerebrospinal fluid and urinary protein liquid single reagent detection reagent kit is low in precision and stability, and reagents contaminate instruments. The reagent kit is composed of a single reagent. The invention further provides the preparation method of the cerebrospinal fluid and urinary protein liquid single reagent detection reagent kit. In the reagent, dimethyl sulfoxide is used for dissolving pyrogallol red, TritonX-305 is added into dimethylsulfoxide before dissolving, then pyrogallol red is added, reagent adhesive cuvette can be effectively removed, and the cuvette is prevented from being contaminated. Besides, pyrogallol red is dispersed evenly, and sensitivity and precision of the reagent are improved. 2-formyl-1,1-dimethylhydrazine is added into the reagent, so that a bluish violet composition formed by pyrogallol red-molybdate and protein obviously becomes darker, and reagent sensitivity is improved.
Owner:JILIN GETEIN BIOTECH CO LTD
Novel method for converting industrial waste 1,2-dimethylhydrazine into methylhydrazine
ActiveCN104151189ASolve effective useAvoid pollutionHydrazine preparationLiquid wasteDimethylhydrazine
The invention discloses a novel method for converting industrial waste 1,2-dimethylhydrazine into methylhydrazine. A by-product 1,2-dimethylhydrazine liquid waste in industrial production of methylhydrazine is directly oxidized by using an oxidant for the first time, and a high-purity methylhydrazine water solution is obtained in rectifying and concentrating manners, so that commercial use of the 1,2-dimethylhydrazine by-product is solved. The method is simple in reaction process, high in conversion rate, and low in cost, the fed oxidant can be recycled after being restored, above all, waste is changed into treasures, the environmental pollution caused by discharged highly toxic industrial waste is prevented, and the safety is improved.
Owner:DONGLI NANTONG CHEM +1
Preparation method of solid decontaminant for removing unsymmetrical dimethylhydrazine
InactiveCN111269327ANo deflagrationHas a dissolving effectChemical liquid solidificationDimethylhydrazineOrganosolv
The invention relates to a preparation method of a solid decontaminant for removing unsymmetrical dimethylhydrazine. The preparation method comprises the following steps: fully swelling cellulose in an organic solvent; mixing the fully swollen cellulose with alkali liquor for alkalization to obtain alkalized cellulose; mixing the alkalized cellulose with an acidifying agent for acidifying modification, and performing solid-liquid separation to obtain acidified cellulose, namely the so-called solid decontaminant. The solid decontaminant prepared by the invention has large adsorption capacity onunsymmetrical dimethylhydrazine, and a gelatinous solid is obtained after adsorption, so that unsymmetrical dimethylhydrazine can be prevented from flowing, spreading and volatilizing, detonation isprevented, and the solid decontaminant is easy to clean, quick, safe and convenient.
Owner:BEIJING INST OF AEROSPACE TESTING TECH
Method for preparing high-purity 1,2-dimethyl-3-phenylpyrazoline chlorate by utilizing industrial waste 1,2-dimethylhydrazine as raw material
ActiveCN109970649ATurn waste into treasureAchieving commercial mass productionOrganic chemistryDimethylhydrazineMannich reaction
The invention provides a method for preparing high-purity 1,2-dimethyl-3-phenylpyrazoline chlorate by utilizing industrial waste 1,2-dimethylhydrazine as a raw material. The 1,2-dimethyl-3-phenylpyrazoline chlorate is an important medicine and pesticide intermediate. In order to accomplish and overcome the disadvantages of instability and more reaction by-products of hydrazine compounds, the method of adding a related impurity protecting agent and an antioxidant into the starting material before the reaction is adopted, a mannich reaction is carried out in a higher alcohol solvent to obtain the high-purity 1,2-dimethyl-3-phenylpyrazoline chlorate powdered crystal, and the method provided by the invention solves the problems of more types of finally residual target impurities and complicated purification steps in industrial production, solves the problems existing in a conventional method for preparing high-purity 1,2-dimethyl-3-phenylpyrazoline chlorate, controls and eliminates all impurity sources, and realizes the advantages of having commercial scale production, reducing costs, and having simple equipment.
Owner:DONGLI NANTONG CHEM +1
Environment-friendly automobile cleaning and glazing agent and production method thereof
InactiveCN104559803AProtectGood thank you functionOrganic non-surface-active detergent compositionsInorganic non-surface-active detergent compositionsDimethylhydrazineHexahydropyridine
The invention creates and provides an environment-friendly automobile cleaning and glazing agent. The environment-friendly automobile cleaning and glazing agent comprises the following components in parts by weight: 10-30 parts of sodium silicate, 2-3 parts of hexahydropyridine, 4-6 parts of sodium valproate, 5-8 parts of potassium citrate, 1-5 parts of dimethylhydrazine, 10-20 parts of methyl bromoacetate, 3-4 parts of herba lycopi, 6-8 parts of clodronate disodium, 2-6 parts of tricarbon alcohol acid, 1-2 parts of tetrahydrofolate, 1-2 parts of tetrahydropyrane, 15-25 parts of sodium alginate, 1-2 parts of simvastatin, 4-8 parts of diethylenetriaminepentaacetic acid, 50-60 parts of ethanol, 1-3 parts of sodium oleate and 1-2 parts of clerodendrum inerme. The creation of the invention has the advantages and positive effects that the environment-friendly automobile cleaning and glazing agent has not only good cleaning and glazing effects, but also good environmentally friendly effect; components in the product have good degradation function and cannot cause harm to a human body and can simultaneously reduce environmental pollution.
Owner:TIANJIN YICHENG LONGDA ENVIRONMENTAL PROTECTION TECH DEV
A kind of preparation method of 1,2-dimethyl-3-phenylpyrazoline perchlorate
ActiveCN109970649BTurn waste into treasureAchieving commercial mass productionOrganic chemistryDimethylhydrazineMannich reaction
Owner:DONGLI NANTONG CHEM +1
Dimethylhydarzine stabilizer and stabilizer composition thereof
InactiveCN103421210BGood weather resistanceImprove heat resistanceOrganic chemistryDimethylhydrazineFluorescence
Owner:FDC LEES CHEM IND +1
Method for treating uns-dimethylhydrazine waste gas in combustion of gas fuel and its equipment
InactiveCN1142385CSimple processEasy to operateIncinerator apparatusDimethylhydrazineEmission standard
The present invention uses gas fuel as raw material, lights the burner, and introduces uns-dimethylhydrazine waste gas whose volume persentage concentration is 1-30% of make combustion together to produce water, CO2 and nitrogen gas so as to attain the goal of treating the said waste gas. The gas fuel inlet on the combustion furnace is communicated with waste gas inlet, and the secondary air can be introduced into the furnace cavity by 2-6 stages so as to make waste gas and fual obtain complete combustion. Tests show that its tail gas has no residual uns-dimethylhydrazine, and its tail gas discharge can meet the national discharge standard.
Owner:SHANXI INST OF COAL CHEM CHINESE ACAD OF SCI
Method for removing waste gas uns-dimethylhydrazine in combustion of alcohol and its equipment
The present invention uses fuel alcohol as fuel, lights the burner and introduces uns-dimethylhydrazine waste gas whose volume percentage concentration is 1-30% to make combustion together to produce water, CO2 and nitrogen gas so as to attain the goal of treating uns-dimethylgy drazine waste gas. Its combustion furnace is simple in structure, the interior of furnace cavity is equipped with waste gas distributing rings so as to make waste gas obtain full combustion, and tests show that its tail gas contains no residual uns-dimethylhydrazine, and its tail gas discharge can meet the discharge standard.
Owner:SHANXI INST OF COAL CHEM CHINESE ACAD OF SCI +1
Graphene material for storage battery and preparation method for graphene material
The invention discloses a graphene material for a storage battery and a preparation method for the graphene material. The graphene material is prepared from the raw materials of xylene, graphite, fluosilicic acid, lithium manganate, sodium hydride, tetrafluoroboric acid tetraethylammonium, cesium nitrate, polyacrylonitrile, butyrolactone, vermiculite, dimethylhydrazine, heptane, butanol, crylic acid, and sodium hexametaphosphate; in 0.1M KOH solution, the electrocatalytic oxygen reduction limiting current density reaches 5.5-6.5mA / cm<2>; the initial potential reaches minus 0.05V vs.SCE; the raw materials are low in price, the operation is simple and easy to implement, and the stability is high; the capacity reaches 650-750mAh after 350-450 cycles; the manufactured storage battery can be fully charged within 6-10min, so that high conductivity is achieved; the process is simple, large-scale instrument equipment is not required, the yield is high, and large-scale production of the high-quality graphene material can be realized; and in addition, the graphene material can be widely produced and can replace the existing materials constantly.
Owner:江苏悠谷未来科技有限公司
p-type algan semiconductor material growth method
ActiveCN108987256BSuppression of self-compensating effectsImprove adsorption capacitySemiconductor/solid-state device manufacturingDimethylhydrazineSemiconductor materials
Owner:SUN YAT SEN UNIV
A kind of treatment method of unsymmetrical dimethylhydrazine wastewater
InactiveCN105314767BImprove adsorption capacityThorough treatmentWater contaminantsMultistage water/sewage treatmentActivated carbonDimethylhydrazine
Owner:LANZHOU UNIVERSITY
Catalyst for catalytic hydrogenolysis of unsym-dimethylhydrazine and its prepn
InactiveCN1136970CHigh yieldSimple methodPreparation by N-O/N-N bondsMetal/metal-oxides/metal-hydroxide catalystsDimethylhydrazineAlkali metal oxide
THe catalyst for catalytic hydrogenolysis of unsym-dimethylhydrazine (UDMH) is one kind of improved loaded rhodium catalyst. The improved catalyst has added assistant, which is VIII element and alkali metal oxide. With the said improved catalyst and in the reaction conditions including temperature 100-300 deg.C, normal pressure, molar ratio between H2 and UDMH 1-10 and UDMH liquid space velocity 0.5-8 ml / ml catalyst, Hr, UDMH is converted to produce dimethylamine and ammonia. The said catalyst has simple preparation process, high reaction conversion rate and makes it possible to minimize the reaction apparatus.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
Unsymmetric dimethylhydrazine resistant plugging and sealing material as well as preparation method and application
ActiveCN105820515ATo overcome the lack of low toughnessGood dispersionOther chemical processesDimethylhydrazineGlass fiber
The invention provides an unsymmetric dimethylhydrazine resistant plugging and sealing material as well as a preparation method and application. The plugging and sealing material has the beneficial effects that the deficiency that epoxy sealing materials generally have low toughness is overcome; chopped glass fibers are adopted as toughening and anti-solvent fillers; meanwhile, alkyl silazane is adopted as a dispersing agent to promote dispersion of the chopped glass fibers, thus increasing the addition of the chopped glass fibers, improving the solvent resistance of the epoxy plugging and sealing material, reducing the viscosity of the material before curing and facilitating smearing; the pasty material is convenient for vertical surface and bottom surface construction; the plugging and sealing material can be conveniently used as an adhesive or a joint mixture before curing and can be also used as a pressurized plugging and sealing material formed in place.
Owner:AEROSPACE RES INST OF MATERIAL & PROCESSING TECH +1
Medicinal composition for colon cancer and method for preparing effective monomers thereof
Owner:北京仁众药业有限公司
A kind of method utilizing industrial waste 1,2-dimethylhydrazine to convert into monomethylhydrazine
ActiveCN104151189BStop pollutionImprove conversion rateHydrazine preparationLiquid wasteDimethylhydrazine
Owner:DONGLI NANTONG CHEM +1
Preparation method of 3-(2,2,2-trimethylhydrazine)propionate dihydrate
InactiveCN102093254BReduce dosageHigh purityHydrazine preparationChemical synthesisDimethylhydrazine
The invention discloses a preparation method of 3-(2,2,2-trimethylhydrazine)propionate dihydrate, belonging to the technical field of chemical synthesis. The method comprises the following steps: adding tert-butyl acrylate into a three-neck flask with a mechanical stirring and dropping funnel, dropwisely adding excessive 5-50% unsymmetrical dimethylhydrazine, and distilling out 3-(2,2-dimethylhydrazine)tert-butyl propionate while depressurizing; dissolving the distillation product in ethanol, introducing or dropwisely adding excessive 5-30% methylation reagent, and washing with cold ethanol to obtain 3-(2,2,2-trimethylhydrazine)tert-butyl propionate; dissolving the 3-(2,2,2-trimethylhydrazine)tert-butyl propionate in water, adding a small amount of acid, and heating under reflux for 1-3 hours; depressurizing to remove water and acid; and adding solvent and organic amines into the remainder, filtering, and recrystallizing the solid with 95% ethanol to obtain the target product. The invention converts the alkaline hydrolysis in the prior art into acidic hydrolysis and consumes less acid, and the acid can be removed by depressurized distillation; and the neutralization only needs a small amount of alkali, and the salt generated after neutralization can be dissolved in the solvent so as to be removed, so that the purity of the obtained product is high.
Owner:SHAOXING UNIVERSITY
Ge—Sb—Te film forming method, Ge—Te film forming method, and Sb—Te film forming method
ActiveUS9246098B2Improve surface smoothnessImprove featuresElectrical apparatusChemical vapor deposition coatingDimethylhydrazineSource material
Owner:TOKYO ELECTRON LTD
Preparation technical method of high purity 1, 1-dimethylurea
ActiveCN109956891AHigh purityUrea derivatives preparationOrganic compound preparationDimethylhydrazineInstability
The invention discloses a preparation method of high purity 1, 1-dimethylurea. 1, 1-dimethylurea is a medical and pesticide intermediate and an important synthesis raw material of rocket fuel 1, 1-dimethylhydrazine which is used in national defense chemistry. According to the preparation method, a hydrazine type remover and a reaction controlling are added to avoid problems in the prior art that influences are caused by hydrazine type compound impurities, and generation of by-products is caused because of the instability of the reactants, a certain amount of a weak alkali oxidizing agent is added, and then routine cooling crystallization, centrifugation, recrystallization, and vacuum drying are carried out so as to obtain the high purify intermediate 1, 1-dimethylurea crystalline powder contains no high toxicity residue, all impurity sources are controlled and eliminated, commercial large scale product is realized, cost is reduced, and equipment is simple.
Owner:DONGLI NANTONG CHEM +1
Making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function
InactiveCN1170153CImprove performanceWith temperature and humidity compensation functionMaterial electrochemical variablesDimethylhydrazineUnsymmetrical dimethylhydrazine
The present invention belongs to the field of sensor. The making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function includes: depositing the first insulating medium isolating layer on the substrate; sputtering metal film electrode, laser etching figure to make the metal film heater; depositing the second insulating medium isolating layer on the metal film heater; sputtering metal film electrode; depositing unsym-dimethylhydrazine sensitive film between the electrodes; regulating resistance with laser, sputtering compact glass film and sputtering molecular sieve film. Owing to the temperature and humidity compensation function, the gas sensor has excellent performance to meet the requirement of carrier rocker even if in harsh environment condition.
Owner:NO 49 ELECTRONICS INST INFORMATION IND MINIST +1
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