The application discloses a production device and a production method of electronic-grade
trimethylgallium, wherein the production device comprises a high-purity
gallium-
magnesium alloy feeder, a
tertiary amine solvent storage tank, a
rare gas storage tank, a synthesis kettle reactor, a halogenated
alkane storage tank, a
microfiltration filter, a vacuum rectifying
tower, a high-temperature decomplexing kettle, a high-efficiency rectifying
tower, a falling-film
evaporator and a finished product receiving tank; the production method specifically comprises the following steps: (1)
rare gas is introduced, high-purity
gallium-
magnesium alloy is added,
tertiary amine solvent is added, stirring is carried out, and halogenated
alkane is added drop by drop to carry out a synthesis reaction; (2)
microfiltration; (3) vacuum rectification; (4) decomplexing; (5) secondary rectification; and (6)
evaporation, and the electronic-grade
trimethylgallium is obtained. The purity of the electronic-grade
trimethylgallium prepared by the application is higher than 99.9999%, and the purity can reach 6N level or even higher; the operation is simple, the reaction is safe and stable, easy to control, the synthesis yield is high, the product loss is small, the technology is mature, no impurities are introduced, and the large-scale industrial production can be realized.