The invention provides a micro-disk structure
semiconductor laser and a preparation method, and belongs to the technical field of
semiconductor lasers. The high-concentration Zn-doped p-GaAs multi-
quantum-well multi-
quantum-well light-emitting
diode comprises a SiO2
barrier layer, an n-GaAs substrate with the thickness of 100 microns, an n-GaAs
contact layer with the thickness of 100 nm, a Si-doped n-AlGaInP limiting layer with the thickness of 200 nm, an n-AlGaInP
waveguide layer with the thickness of 400 nm, a first GaInP / AlGaInP multi-
quantum-well layer, a GaAs
barrier layer, a second GaInP / AlGaInP multi-quantum-well layer, an undoped p-AlGaAs
waveguide layer with the thickness of 150 nm, a Zn-doped p-AlGaInP limiting layer with the thickness of 200 nm and a high-concentration Zn-doped p-GaAs
contact layer with the thickness of 100 nm. By controlling the thickness and the
doping concentration of each layer, efficient limitation and injection of carriers are realized; due to the design of the double multi-
quantum well layer and the
barrier layer, the device can realize stable lasing in two wavebands of 808nm and 650nm; the undoped
waveguide layer effectively reduces the optical loss, prolongs the
photon lifetime, and improves the
laser output efficiency. And the
quantum efficiency and the temperature stability of the device are improved.