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7599results about "Active medium shape and construction" patented technology
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Ultraviolet laser apparatus and exposure apparatus using same
InactiveUS7023610B2Easy to getReduce spatial coherenceLaser using scattering effectsLaser arrangementsFiberUltraviolet lights
An ultraviolet laser apparatus having a single-wavelength oscillating laser generating laser light between an infrared band and a visible band, an optical amplifier for amplifying the laser light, and a wavelength converting portion converting the amplified laser light into ultraviolet light using a non-linear optical crystal. An exposure apparatus transfers a pattern image of a mask onto a substrate and includes a light source having a laser apparatus emitting laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively, and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.
Owner:NIKON CORP
Modular, high energy, widely-tunable ultrafast fiber source
InactiveUS6885683B1High peak and high average powerReduce noiseCladded optical fibreLaser using scattering effectsNonlinear optical crystalHigh peak
A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Peak power handling capability of the fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of the ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used.
Owner:IMRA AMERICA
Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier
InactiveUS6014249ALong pulse widthLow costLaser using scattering effectsLaser arrangementsFiberDouble-clad fiber
An apparatus generates femtosecond pulses from laser amplifiers by nonlinear frequency conversion. The implementation of nonlinear frequency-conversion allows the design of highly nonlinear amplifiers at a signal wavelength (SW), while still preserving a high-quality pulse at an approximately frequency-doubled wavelength (FDW). Nonlinear frequency-conversion also allows for limited wavelength tuning of the FDW. As an example, the output from a nonlinear fiber amplifier is frequency-converted. By controlling the polarization state in the nonlinear fiber amplifier and by operating in the soliton-supporting dispersion regime of the host glass, an efficient nonlinear pulse compression for the SW is obtained. The generated pulse width is optimized by utilizing soliton compression in the presence of the Raman-self-frequency shift in the nonlinear fiber amplifier at the SW. High-power pulses are obtained by employing fiber amplifiers with large core-diameters. The efficiency of the nonlinear fiber amplifier is optimized by using a double clad fiber (i.e., a fiber with a double-step refractive index profile) and by pumping light directly into the inner core of this fiber. Periodically poled LiNbO3 (PPLN) is used for efficient conversion of the SW to a FDW. The quality of the pulses at the FDW can further be improved by nonlinear frequency conversion of the compressed and Raman-shifted signal pulses at the SW. The use of Raman-shifting further increases the tuning range at the FDW. For applications in confocal microscopy, a special linear fiber amplifier is used.
Owner:IMRA AMERICA
Organic vertical-cavity surface-emitting laser
InactiveUS6160828ALaser active region structureExcitation process/apparatusVertical-cavity surface-emitting laserThin layer
Organic vertical-cavity surface-emitting lasers ("OVCSELs"), in which a thin layer of organic material is disposed between highly reflective mirrors to thereby form a vertical cavity within a stacked arrangement. The lasers of the present invention each comprise a first mirror layer; a layer of active organic material over the first mirror layer; and a second mirror layer over the layer of first active organic material. The active organic material lases when pumped to thereby produce laser light. The present invention provides for optical semiconductor lasers with desired properties such as narrow bandwidth emission, the minimal use of active organic materials, and the facilitation of wavelength tuning and electrical pumping.
Owner:PRINCETON UNIV THE TRUSTEES OF
Optical fiber and method for making such fiber
ActiveUS7313312B2Coupling efficiency is highIncrease optical powerOptical fibre with polarisationOptical fibre with multilayer core/claddingFiberRare earth
According to one example of the invention an optical fiber comprises: (i) silica based, rare earth doped core having a first index of refraction n1; (ii) at least one silica based cladding surrounding the core and having a second index of refraction n2, such that n1>n2; wherein at least one of the core or cladding is doped with Al2O3, such that the ratio of max wt % to min wt % of Al2O3 concentration is less than 2:1.
Owner:CORNING INC
Ytterbium-doped optical fiber, fiber laser, and fiber amplifier
ActiveUS8363313B2Avoid small quantitiesSuperior optical amplificationLaser using scattering effectsOptical fibre with polarisationYTTERBIUM OXIDEDiphosphorus
An ytterbium-doped optical fiber of the present invention includes: a core which contains ytterbium, aluminum, and phosphorus and does not contain germanium; and a cladding which surrounds this core. The ytterbium concentration in the core in terms of ytterbium oxide is 0.09 to 0.68 mole percent. The molar ratio between the phosphorus concentration in the core in terms of diphosphorus pentoxide and the above ytterbium concentration in terms of ytterbium oxide is 3 to 30. The molar ratio between the aluminum concentration in the core in terms of aluminum oxide and the above ytterbium concentration in terms of ytterbium oxide is 3 to 32. The molar ratio between the above aluminum concentration in terms of aluminum oxide and the above phosphorus concentration in terms of diphosphorus pentoxide is 1 to 2.5.
Owner:FUJIKURA LTD
Single mode optical fiber
InactiveUS6334019B1High refractive indexGlass making apparatusOptical fibre with multilayer core/claddingRefractive indexFiber disk laser
A large core photonic crystal fiber for transmitting radiation having a core comprising a substantially transparent core material and having a core diameter of at least 5 mu. The fiber also comprises a cladding region surrounding the length of core material, wherein the cladding region comprises a first substantially transparent cladding material, having a first refractive index, and wherein the first substantially transparent cladding material has embedded along its length a substantially periodic array of holes, wherein the holes are filled with a second cladding material having a second refractive index less than the first refractive index, such that radiation input to the optical fiber is transmitted along the length of the core material in a single mode of propagation. In a preferred embodiment, the core diameter may be at least 20 mu, and may be as large as 50 mu. The fiber is capable of transmitting higher power radiation than conventional fibres, whilst maintaining propagation in a single mode. The core material may be doped with a material capable of providing amplification under the action of pump radiation input to the fiber. The invention also relates to a fiber amplifier and a fiber laser comprising a doped large core photonic crystal fiber. The fiber may also be used in a system for transmitting radiation comprising a plurality of lengths of large core photonic crystal fiber, separated by large core photonic crystal fiber amplifiers, such that the power of radiation transmitted through the system is maintained above a predetermined threshold power.
Owner:NKT RES & INNOVATION
Laser-based system for memory link processing with picosecond lasers
InactiveUS20040134894A1Quality improvementReduce reflectivitySemiconductor/solid-state device testing/measurementSemiconductor/solid-state device detailsPicosecond laserMicroscopic scale
A laser-based system for processing target material within a microscopic region without causing undesirable changes in electrical or physical characteristics of at least one material surrounding the target material, the system includes a seed laser, an optical amplifier, and a beam delivery system. The seed laser for generating a sequence of laser pulses having a first pre-determined wavelength. The optical amplifier for amplifying at least a portion of the sequence of pulses to obtain an amplified sequence of output pulses. The beam delivery system for delivering and focusing at least one pulse of the amplified sequence of pulses onto the target material. The at least one output pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond. The pulse duration being within a thermal processing range. The at least one focused output pulse having sufficient power density at a location within the target material to reduce the reflectivity of the target material and efficiently couple the focused output into the target material to remove the target material.
Owner:GSI LUMONICS CORP
Wavelength-selective and loss-less optical add/drop multiplexer
InactiveUS6122095ALoss can be compensatedOvercomes shortcomingRing-type electromagnetic networksWavelength-division multiplex systemsFiberGrating
A loss-less, optical add / drop multiplexer according to the present invention includes a rare earth-doped fiber amplifier integrated with a wavelength-selective fiber path coupled between two directional optical transfer devices for selectively adding and dropping optical signals from a multi-wavelength signal, such as a wavelength division multiplexed optical signal. One or more fiber gratings are disposed along the length of the rare earth-doped fiber amplifier or between segments of the rare earth-doped fiber so that at least one grating is used for reflecting each optical signal that is expected to be added to or dropped from the multi-wavelength optical signal. By using this configuration, appropriate amplification is provided to compensate for losses in the add, drop, and through paths.
Owner:AVAGO TECH WIRELESS IP SINGAPORE PTE +1
Optical spectroscopy apparatus and method for measurement of analyte concentrations or other such species in a specimen employing a semiconductor laser-pumped, small-cavity fiber laser
InactiveUS20050030540A1Improve absorption efficiencyShort physical path lengthMaterial analysis by optical meansLaser arrangementsSpectroscopyRare earth
An optical spectroscopy apparatus determines the concentration of analyte in a specimen that utilizes a single radiation source which is hybrid laser comprising a semiconductor pump laser and small-cavity rare earth fiber laser where laser cavities of both lasers are butt coupled or otherwise optically coupled to form a plurality of laser cavities that produce a plurality of emission wavelengths, one which may be the pump laser emission wavelength at the output of the fiber laser thereby forming a multi-wavelength combined output where the wavelengths substantially match distinguishing spectral characteristic features along at least a portion of a characteristic optical spectrum of the analyte under examination. In lieu of complex data analysis of these wavelengths to determine values representing the concentration of the analyte in an examined specimen, the semiconductor pump laser or lasers are modulated as a plurality of tone frequencies, where at least a first of the modulation frequencies is below the maximum frequency response of the fiber laser so that the first modulation effectively modulates the pump emission wavelength and a first emission wavelength of the fiber laser in the hybrid laser combined output, and at least a second of modulation frequencies is above the maximum frequency response of the fiber laser so that the second modulation effectively modulates the pump emission wavelength but not the first emission wavelength of the fiber laser in the hybrid laser combined output. Further, one or more additional modulation frequencies may be applied to the pump laser which are intermediate of the first and second modulation frequencies where it is at least responsive to at least one further emission wavelength of the fiber laser and also provided in the hybrid laser combined output.
Owner:THORNTON ROBERT L
High power short pulse fiber laser
InactiveUS20050226278A1Reduce widthWeaken energyLaser using scattering effectsLaser arrangementsAudio power amplifierPigtail
A pulsed laser comprises an oscillator and amplifier. An attenuator and / or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and / or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs.
Owner:IMRA AMERICA
Optical fiber with irregularities at cladding boundary
InactiveUS6411762B1Glass making apparatusOptical fibre with multilayer core/claddingCouplingOptical fiber cable
An optical fiber (10) made with a central core (12), a first cladding layer (16), and a second cladding layer (18) having a series of perturbations or irregularities formed into the otherwise generally circular outer boundary of the first cladding layer (16). The irregularities in the first cladding layer (16) interrupt the propagation of skew rays and encourage coupling into the core (12).
Owner:FIBERCORE INC
Modular fiber-based chirped pulse amplification system
InactiveUS20050226286A1Eliminate the effects ofLaser using scattering effectsLaser arrangementsFiberAudio power amplifier
A modular ultrafast pulse laser system is constructed of individually pre-tested components manufactured as modules. The individual modules include an oscillator, pre-amplifier and power amplifier stages, a non-linear amplifier, and a stretcher and compressor. The individual modules can typically be connected by means of simple fiber splices.
Owner:IMRA AMERICA
Fiber laser
InactiveUS7027467B2Improve reflectivityNot to damageLaser using scattering effectsOptical resonator shape and constructionLaser lightLength wave
A fiber laser with a fiber for laser light generation having an entrance end and an exit end comprises a pump light source for generating pump light to be coupled via the entrance side into the fiber. At the exit end of the fiber a first resonator mirror is provided which is highly reflecting for the laser light to be generated in the wavelength range with the smallest light amplification and to the light of the pump light source. Spaced from the first resonator mirror a second resonator mirror is provided via which light of further wavelength ranges can be fed back into the fiber with the aid of a collimating lens.
Owner:EVOTEC TECH GMBH
Three dimensional engineering of planar optical structures
InactiveUS6952504B2High average index-of-refractionActive medium materialActive medium shape and constructionOptical processingOptical materials
Three dimensional optical structures are described that can have various integrations between optical devices within and between layers of the optical structure. Optical turning elements can provide optical pathways between layers of optical devices. Methods are described that provide for great versatility on contouring optical materials throughout the optical structure. Various new optical devices are enabled by the improved optical processing approaches.
Owner:NANOGRAM
Laser source comprising amplifier and adaptive wavefront/polarization driver
ActiveUS20050201429A1Compensation DistortionOptical measurementsLaser using scattering effectsWavefrontAudio power amplifier
A hybrid laser source including a solid state laser driven by an array of fiber laser amplifiers, the inputs of which are controllable in phase and polarization, to compensate for distortions that arise in the solid state laser, or to achieve desired output beam properties relating to direction or focus. The output beam is sampled and compared with a reference beam to obtain phase and polarization difference signals across the output beam cross section, at spatial positions corresponding with the positions of the fiber laser amplifiers providing input to the solid state laser. Therefore, phase and polarization properties of the output beam may be independently controlled by predistortion of these properties in the fiber laser amplifier inputs.
Owner:NORTHROP GRUMMAN SYST CORP
Waveguide architecture, waveguide devices for laser processing and beam control, and laser processing applications
InactiveUS20030161375A1Optical resonator shape and constructionActive medium shape and constructionEngineeringWaveguide
Methods and systems for laser-based processing of materials are disclosed wherein a scalable laser architecture, based on planar waveguide technology, provides for pulsed laser micromachining applications while supporting higher average power applications like laser welding and cutting. Various embodiments relate to improvements in planar waveguide technology which provide for stable operation at high powers with a reduction in spurious outputs and thermal effects. At least one embodiment provides for micromachining with pulsewidths in the range of femtoseconds to nanoseconds. In another embodiment, 100W or greater average output power operation is provided for with a diode-pumped, planar waveguide architecture.
Owner:GSI LUMONICS LTD
All-fiber chirped pulse amplification systems
InactiveUS20050105865A1Improve overall utilizationImprove performanceFibre transmissionCoupling light guidesLow noiseGrating
By compensating polarization mode-dispersion as well chromatic dispersion in photonic crystal fiber pulse compressors, high pulse energies can be obtained from all-fiber chirped pulse amplification systems. By inducing third-order dispersion in fiber amplifiers via self-phase modulation, the third-order chromatic dispersion from bulk grating pulse compressors can be compensated and the pulse quality of hybrid fiber / bulk chirped pulse amplification systems can be improved. Finally, by amplifying positively chirped pulses in negative dispersion fiber amplifiers, low noise wavelength tunable seed source via anti-Stokes frequency shifting can be obtained.
Owner:IMRA AMERICA
Photonic band gap fiber
InactiveUS6845204B1Lower areaHigh refractive indexGlass making apparatusLaser optical resonator constructionFiberMulti method
An optical fiber having a periodical cladding structure providing an photonic band gap structure with superior qualities. The periodical structure being one wherein high index areas are defined and wherein these are separated using a number of methods. One such method is the introduction of additional low index elements, another method is providing elongated elements deformed in relation to a circular cross section. Also described is a cladding structure comprising elongated elements of a material having an index of refraction higher than that of the material adjacent thereto. Using this additional material, prior art structures may obtain much better qualities.
Owner:CRYSTAL FIBRE AS
Modular, high energy, widely-tunable ultrafast fiber source
InactiveUS7167300B2High peak and high average powerReduce noiseLaser using scattering effectsCladded optical fibreHigh peakHigh energy
Owner:IMRA AMERICA
Method and apparatus for laser surgery of the cornea
InactiveUS7220255B2Easy to controlIncrease powerLaser surgerySurgical instrument detailsCorneal ablationSurgical lasers
A laser-based method and apparatus for corneal surgery. The present invention is intended to be applied primarily to ablate organic materials, and human cornea in particular. The invention uses a laser source which has the characteristics of providing a shallow ablation depth (0.2 microns or less per laser pulse), and a low ablation energy density threshold (less than or equal to about 10 mJ / cm2), to achieve optically smooth ablated corneal surfaces. The preferred laser includes a laser emitting approximately 100–50,000 laser pulses per second, with a wavelength of about 198–300 nm and a pulse duration of about 1–5,000 picoseconds. Each laser pulse is directed by a highly controllable laser scanning system. Described is a method of distributing laser pulses and the energy deposited on a target surface such that surface roughness is controlled within a specific range. Included is a laser beam intensity monitor and a beam intensity adjustment means, such that constant energy level is maintained throughout an operation. Eye movement during an operation is corrected for by a corresponding compensation in the location of the surgical beam. Beam operation is terminated if the laser parameters or the eye positioning is outside of a predetermined tolerable range. The surgical system can be used to perform surgical procedures including removal of corneal scar, making incisions, cornea transplants, and to correct myopia, hyperopia, astigmatism, and other corneal surface profile defects.
Owner:LAI SHUI T
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device
InactiveUS7098992B2Accurate and reliable light amount controlDegree of linearityLaser arrangementsPhotomechanical exposure apparatusFiberPeak value
The light source unit includes a single wavelength oscillation light source, a light generating portion which has an optical modulator converting and emitting light from the light source into a pulse light, a light amplifying portion made up of an optical fiber group in which each fiber has a fiber amplifier to amplify the pulse light from the optical modulator, and a light amount controller. The light amount controller performs a step-by-step light amount control by individually turning on / off the light output of each fiber making up the optical fiber group, and a light amount control of controlling at least either of the frequency or the peak power of the emitted pulse light of the optical modulator. Accordingly, in addition to the step-by-step light amount control, fine adjustment of the light amount in between the steps becomes possible due to the control of at least either the frequency or the peak power of the pulse light, and if the set light amount is within a predetermined range, the light amount can be made to coincide with the set light amount.
Owner:NIKON CORP
Optical Coupler Devices, Methods of Their Production and Use
InactiveUS20070237453A1Laser using scattering effectsOptical fibre with multilayer core/claddingDouble-clad fiberWaveguide
The present invention relates in general to coupling of light from one or more input waveguides to an output waveguide or output section of a waveguide having other physical dimensions and / or optical properties than the input waveguide or waveguides. The invention relates to an optical component in the form of a photonic crystal fibre for coupling light from one component / system with a given numerical aperture to another component / system with another numerical aperture. The invention further relates to methods of producing the optical component, and articles comprising the optical component, and to the use of the optical component. The invention further relates to an optical component comprising a bundle of input fibres that are tapered and fused together to form an input coupler e.g. for coupling light from several light sources into a single waveguide. The invention still further relates to the control of the spatial extension of a guided mode (e.g. a mode-field diameter) of an optical beam in an optical fibre. The invention relates to a tapered longitudinally extending optical waveguide having a relatively larger cross section that over a certain longitudinal distance is tapered down to a relatively smaller cross section wherein the spatial extent of the guided mode is substantially constant or expanding from the relatively larger to the relatively smaller waveguide cross section. The invention may e.g. be useful in applications such as fibre lasers or amplifiers, where light must be coupled efficiently from pump sources to a double clad fibre.
Owner:CRYSTAL FIBRE AS
Laser based material processing methods and scalable architecture for material processing
InactiveUS6738396B2Improve stabilityLaser using scattering effectsOptical resonator shape and constructionPower applicationNanosecond
Methods and systems for laser-based processing of materials are disclosed wherein a scalable laser architecture, based on planar waveguide technology, provides for pulsed laser micromachining applications while supporting higher average power applications like laser welding and cutting. Various embodiments relate to improvements in planar waveguide technology which provide for stable operation at high powers with a reduction in spurious outputs and thermal effects. At least one embodiment provides for micromachining with pulsewidths in the range of femtoseconds to nanoseconds. In another embodiment, 100W or greater average output power operation is provided for with a diode-pumped, planar waveguide architecture.
Owner:THE GSI GRP LLC
Controller which controls a variable optical attenuator to control the power level of a wavelength-multiplexed optical signal when the number of channels are varied
InactiveUS6025947AReduce degradationWavelength-division multiplex systemsOptical transmission with multiple stagesAudio power amplifierTransmittance
An optical amplifying apparatus which includes an optical amplifier, an optical attenuator and a controller. The optical amplifier amplifies a light signal having a variable number of channels. The optical attenuator passes the amplified light signal and has a variable light transmissivity. Prior to varying the number of channels in the light signal, the controller varies the light transmissivity of the optical attenuator so that a power level of the amplified light signal is maintained at an approximately constant level that depends on the number of channels in the light signal prior to the varying the number of channels. While the number of channels in the light signal is being varied, the controller maintains the light transmissivity of the optical attenuator to be constant. Subsequent to varying the number of channels in the light signal, the controller varies the light transmissivity of the optical attenuator so that a power level of the amplified light signal is maintained at an approximately constant level that depends on the number of channels in the light signal subsequent to the varying the number of channels.
Owner:FUJITSU LTD
Modular, high energy, widely-tunable ultrafast fiber source
InactiveUS20050163426A1High peak and high average powerReduce noiseLaser using scattering effectsCladded optical fibreHigh peakHigh energy
A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Peak power handling capability of the fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. Dispersive broadening is introduced by dispersive pulse stretching in the presence of self-phase modulation and gain, resulting in the formation of high-power parabolic pulses. In addition, dispersive broadening is also introduced by simple fiber delay lines or chirped fiber gratings, resulting in a further increase of the energy handling ability of the fiber amplifiers. The phase of the pulses in the dispersive delay line is controlled to quartic order by the use of fibers with varying amounts of waveguide dispersion or by controlling the chirp of the fiber gratings. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used. A particularly compact implementation of the whole system uses fiber oscillators in conjunction with fiber amplifiers. Additionally, long, distributed, positive dispersion optical amplifiers are used to improve transmission characteristics of an optical communication system. Finally, an optical communication system utilizes a Raman amplifier fiber pumped by a train of Raman-shifted, wavelength-tunable pump pulses, to thereby amplify an optical signal which counterpropogates within the Raman amplifier fiber with respect to the pump pulses.
Owner:IMRA AMERICA
Pulsed light sources
InactiveUS6917631B2High saturationHigh energyLaser using scattering effectsActive medium shape and constructionPhase detectorLength wave
A source of pulses of coherent radiation at a wavelength of approximately 1 μm, comprises a pump source for producing pump light, a laser cavity comprising an Yb3+-doped gain medium arranged to receive the pump light, the laser cavity being modelocked to generate laser pulses at a defined repetition rate; a pulse detector arranged to generate a pulse selection signal indicative of the repetition rate; a pulse selector arranged to reduce the repetition rate of the laser pulses responsive to the pulse selection signal from the pulse detector by passing only selected ones of the laser pulses; and at least one optical amplifier for amplifying the laser pulses of reduced repetition rate. The at least one optical amplifier can be configured for chirped or parabolic pulse amplification.
Owner:UNIV OF SOUTHAMPTON
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device
InactiveUS20040012844A1Small footprintImprove accuracyLaser arrangementsPhotomechanical exposure apparatusFiberPeak value
The light source unit (16) comprises a single wavelength oscillation light source (160A), a light generating portion (160) which has an optical modulator (160C) converting and emitting light from the light source into a pulse light, a light amplifying portion (161) made up of an optical fiber group that each has a fiber amplifier to amplify the pulse light from the optical modulator, and a light amount controller (16C). The light amount controller (16C) performs a step-by-step light amount control by individually turning on / off the light output of each fiber making up the optical fiber group, and a light amount control of controlling at least either of the frequency or the peak power of the emitted pulse light of the optical modulator. Accordingly, in addition to the step-by-step light amount control, fine adjustment of the light amount in between the steps becomes possible due to the control of at least either the frequency or the peak power of the pulse light, and if the set light amount is within a predetermined range, the light amount can be made to coincide with the set light amount.
Owner:NIKON CORP
Large-mode-area optical fibers with reduced bend distortion
ActiveUS20090059353A1Reduces effective transverse mode areaReduce interactionGlass making apparatusLaser using scattering effectsEngineeringBend radius
In a LMA optical fiber the index of the core region is graded (i.e., as viewed in a radial cross-section) and has a grading depth of Δng, as measured from a central maximum at or near the axis to a lower level that is not greater than the central maximum and not less than the index of the cladding region. When the fiber is to be bent at a bend radius, the grading depth, the radius of the core region, and the difference between the central maximum index and the cladding region index are configured to reduce bend distortion. They may also advantageously be configured to maximize the effective mode-field area of the fundamental mode, suppress higher order modes, and reduce bend loss. In a preferred embodiment, the core region includes a centralized gain region, which in turn includes a dark region that is no more than 30% of the area of the gain region. Also described is a method of making such LMA fibers.
Owner:FURAKAWA ELECTRIC NORTH AMERICA INC
High power fiber chirped pulse amplification system utilizing telecom-type components
InactiveUS7113327B2Improve mechanical stabilityLaser arrangementsActive medium materialFiberChirped pulse amplification
An erbium fiber (or erbium-ytterbium) based chirped pulse amplification system is illustrated. The use of fiber amplifiers operating in the telecommunications window enables the implementation of telecommunications components and telecommunications compatible assembly procedures with superior mechanical stability.
Owner:IMRA AMERICA
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