Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

283 results about "Numerical aperture" patented technology

In optics, the numerical aperture (NA) of an optical system is a dimensionless number that characterizes the range of angles over which the system can accept or emit light. By incorporating index of refraction in its definition, NA has the property that it is constant for a beam as it goes from one material to another, provided there is no refractive power at the interface. The exact definition of the term varies slightly between different areas of optics. Numerical aperture is commonly used in microscopy to describe the acceptance cone of an objective (and hence its light-gathering ability and resolution), and in fiber optics, in which it describes the range of angles within which light that is incident on the fiber will be transmitted along it.

Deep ultraviolet spherical catadioptric detection objective lens

The invention discloses a deep ultraviolet spherical catadioptric detection objective lens, and relates to the technical field of optics, the deep ultraviolet spherical catadioptric detection objective lens comprises a first lens group, a second lens group and a diaphragm, one side of the first lens group is arranged to be an object plane, the first lens group is located between the second lens group and the object plane, the first lens group is used for converging light and correcting residual aberration of the second lens group, and the diaphragm is arranged between the second lens group and the object plane. The diaphragm is arranged in the middle of the second lens group, and the second lens group and the diaphragm are used for correcting vertical axis aberrations such as coma of the system. The objective lens adopts a spherical catadioptric structure, can realize deep ultraviolet band application, has a large numerical aperture, the numerical aperture can reach 0.8, the smaller wavelength and the larger numerical aperture have higher resolution, so that smaller defects can be detected, the working distance can be greater than 10mm, and the detection precision is improved on the basis of realizing the large NA design. The length of the system is reduced, the number of original parts is reduced, only five lenses are needed, the structure is simple, and installation and detection are convenient.
Owner:CHANGCHUN ZHIRAN PHOTOELECTRIC TECH CO LTD

Preparation method of barrier type antimonide infrared detector and infrared detector

The invention provides a preparation method of a barrier type antimonide infrared detector. The preparation method comprises the following steps: selecting a gallium antimonide substrate; a gallium antimonide buffer layer, an indium arsenide heavily-doped layer, a class II superlattice absorption layer and an aluminum-arsenic-antimony barrier layer are sequentially grown on the substrate in an epitaxial mode through a molecular beam epitaxy method; mechanically stripping the hexagonal boron nitride two-dimensional material, and transferring the stripped hexagonal boron nitride to the aluminum-arsenic-antimony barrier layer to form a Van der Waals heterojunction and composite barrier layer structure; depositing electrodes by using an ultraviolet lithography technology and a thermal evaporation mode to form one electrode arranged on the gallium antimonide buffer layer and the other electrode arranged on the boron nitride; a large-numerical-aperture micro-lens array is processed on a substrate, and the micro-lens array is composed of gallium antimonide cylinders with a phase modulation function; therefore, the antimonide medium-wave infrared detector with the composite barrier layer can be formed, the quantum efficiency is improved, the order of magnitude of dark current is reduced, and room-temperature medium-wave infrared detection can be realized.
Owner:CHINA ACADEMY OF SPACE TECHNOLOGY

Multi-marked endoscopic imaging lens for digestive tract

ActiveCN119805714BGastroscopesOesophagoscopesDigestive canalOphthalmology
The application discloses a multi-marked endoscopic imaging lens for digestive tract, and belongs to the field of biomedical microscopic endoscopic imaging. The endoscopic imaging lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens; the first lens focuses laser; the second lens is matched with the first lens to limit a light beam in an effective light aperture of the lens; the third lens corrects chromatic aberration; the fourth lens and the fifth lens are combined to correct aberration; the sixth lens adopts an aspheric lens to correct spherical aberration caused in a collimating and focusing system; and the seventh lens is matched with the sixth lens to correct chromatic aberration. The working spectral range of the microscopic objective lens group is 488-860 nm, the effective light aperture is less than 1.8 mm, the mechanical outer diameter is not greater than 2.6 mm, the numerical aperture at the object side or the tissue is 0.55, the imaging field of view is 450 microns, the magnification is 2.14 times, and the working distance is 84 microns. The effect of matching excitation and fluorescence spectrum of a clinically available fluorescence contrast agent is realized.
Owner:HUAZHONG UNIV OF SCI & TECH

PINN-based large-numerical-aperture photoetching objective lens vector diffraction field calculation method

The invention discloses a PINN-based large numerical aperture photoetching objective lens vector diffraction field calculation method, which comprises the following steps: obtaining a three-dimensional vector diffraction light field of a large NA photoetching objective lens through simulation, reconstructing the three-dimensional vector diffraction light field at a sampling point position, and generating corresponding complex electric field distribution matrix data; performing physical purification on the complex electric field distribution matrix data to construct a corresponding data set; constructing a corresponding Helmholtz equation as a constraint equation based on the light field tight focusing characteristic of the large NA photoetching objective lens; constructing an initial model, and training the initial model by using the data set in combination with the constraint equation to obtain a PINN model for predicting complex electric field data; and inputting space coordinates of a to-be-predicted target into the PINN model to obtain complex electric field data. According to the method provided by the invention, the calculation efficiency of the vector diffraction field can be remarkably improved on the premise of keeping relatively high simulation precision, and the method is suitable for rapid modeling and analysis of the three-dimensional vector light field of the large-numerical-aperture photoetching object mirror.
Owner:ZJU HANGZHOU GLOBAL SCI & TECH INNOVATION CENT

Method and device for measuring a toothing

A method having the steps of measuring a geometry of a toothing using an optical measuring system, wherein a numerical aperture of the optical measuring system is adjustable and the numerical aperture of the optical measuring system is adapted depending on at least one geometric parameter of the toothing to be measured and / or is enlarged or reduced.
Owner:KLINGELNBERG GMBH

Differential interference optical system for semiconductor conductive particle detection task

The invention relates to the technical field of microscopic optical imaging, and discloses a semiconductor conductive particle detection task-oriented differential interference optical system, which comprises an objective lens group and a differential interference module, the objective lens group comprises a front group, a middle group and a rear group which are arranged in sequence; the front group is used for ensuring a large aperture angle and less introduction of spherical aberration and chromatic aberration, the middle group is used for compensating various aberrations introduced by the front group, and the rear group is used for correcting field curvature; the differential interference module comprises a Nomarski prism, a polarizer and an analyzer which are arranged in sequence; the Nomarski prism is used for splitting and combining the linearly polarized light beams; the polarization analyzer is used for converting linearly polarized light which passes through the Nomarski prism and is orthogonal in polarization direction into linearly polarized light with the same polarization direction; the system further comprises a beam splitter and a barrel lens group. According to the invention, long working distance and large numerical aperture can be realized in the visible light wave band, the light path design is optimized so as to reduce aberration introduction, and the anti-interference capability to weak signals is enhanced.
Owner:SOUTHEAST UNIV +1

Super-resolution micro lens and preparation method thereof

The invention discloses a super-resolution micro lens and a preparation method thereof. The lens comprises a photoresist spherical micro lens and a mixed substrate plane lens which are sequentially arranged from top to bottom. The specific preparation method comprises the following steps: S1, preparing a photoresist cylinder on a quartz substrate; s2, reflowing the photoresist cylinder into a micron lens by using a photoresist reflowing process; s3, preparing a mixed substrate plane lens on the surface of the to-be-detected sample; and S4, transferring the micron lens to the surface of the mixed substrate plane lens. By changing the thickness of the mixed substrate plane lens, adjustment of the amplification coefficient and the numerical aperture can be realized, and compared with a micro lens without a mixed substrate, the micro lens has higher imaging resolution. The method has a wide prospect in the technical field of optical imaging.
Owner:WUXI GUANGYUXI TECH CO LTD

Microscopic imaging system for detecting micro lens

The invention relates to the technical field of imaging detection, in particular to a microscopic imaging system for detecting a microlens, which comprises a light source path establishing module, an initial image position acquisition module, a peak coordinate recording module, a stability offset analysis module and an imaging quality judgment module. According to the invention, the numerical aperture normalization processing is carried out on the direction of the light passing through the specific aperture area, so that the precise control of the spatial distribution characteristic of the light beam is realized, the spatial mapping of the focus position is completed on the basis of the light in the unified direction, the direction consistency and the imaging stability in the image forming process are improved, and the imaging quality is improved. By combining continuous peak coordinate search of a light spot focusing position, a light spot change trend can be dynamically obtained, imaging deviation caused by infinitesimal displacement can be effectively distinguished, and an accurate marking mechanism for light spot stability is constructed by means of absolute difference extraction of three-dimensional offset data and Rayleigh criterion tolerance judgment. And the response sensitivity and the analysis reliability of weak instability factors in the imaging performance of the micro lens are improved.
Owner:ZHUHAI CHENGFENG ELECTRONIC TECH CO LTD

Flexible waveguide coupling structure for high-density optical engine and miniaturized packaging method of flexible waveguide coupling structure

PendingCN121028299ACoupling light guidesOptical waveguide light guidePolymer optical waveguideRefractive index
According to the flexible waveguide coupling structure for the high-density optical engine and the miniaturized packaging method of the flexible waveguide coupling structure, the polymer optical waveguide is adopted, the waveguide core layer is made of the high-refractive-index material, and the refractive index of the core layer is higher than that of the upper cladding and the lower cladding, so that light beams can reflect light rays on the surface or in the core layer; the light beam is limited in the core layer to be transmitted along the set path; the flexible waveguide is used in high-density optical engine packaging, a traditional ribbon optical fiber array is directly replaced, and the contradiction between space limitation and bending radius is solved; comprising a flexible waveguide, an MT / MPO connector and a microlens array, polymers such as PMMA, BCB, SU-8, FPPE, PSQ, PDMS / M-PDMS and the like are selected as flexible waveguide materials, the thickness is smaller than or equal to 0.2 mm, the bendable radius is smaller than or equal to 2 mm, the core / cladding refractive index difference delta n is larger than or equal to 0.01, the multimode numerical aperture NA is approximately equal to 0.3, the transmission loss in a 850 nm window is smaller than or equal to 0.25 dB / cm, the angle of a coupling end face is 40-50 degrees, and the requirements for low loss and high bandwidth of short-distance parallel optical interconnection are met.
Owner:JIANGSU ALLRAY

Inspection apparatus and inspection method

The present invention relates to an inspection apparatus and an inspection method which selectively adjust a numerical aperture of illuminating light in the form of collimated light when inspecting a target object, such as a wafer or the like, using a spectrum, thereby preventing a diffraction phenomenon caused by the illuminating light. The inspection apparatus may include: a camera unit disposed above a target object; an illumination unit configured to illuminate the target object with illuminating light; and a light detection unit configured to detect reflection light of the target object illuminated with the illuminating light, wherein the illumination unit comprises a numerical aperture adjustment device which has a first optical member having a first numerical aperture that is replaceable with a second optical member having a second numerical aperture different from the first numerical aperture so as to reduce a diffraction phenomenon caused by the illuminating light.
Owner:SYSTEM ENGINEERING MEGA SOLUTION CO LTD

A continuous zoom optical system for a stereomicroscope and a stereomicroscope

The application provides a continuous zoom optical system and a stereomicroscope for the stereomicroscope, and the optical lens unit comprises, in sequence along a main optical axis, an upper fixed lens group, a compensation lens group, a middle fixed lens group, a zoom lens group and a lower fixed lens group; a variable diaphragm is arranged between the middle fixed lens group and the zoom lens group along the main optical axis; the upper fixed lens group, the compensation lens group, the zoom lens group and the lower fixed lens group are all configured as double lens combinations, the focal length values of the upper fixed lens group and the zoom lens group are negative, and the focal length values of the compensation lens group and the lower fixed lens group are positive; the middle fixed lens group is configured as a double-concave single lens; the compensation lens group and the zoom lens group are axially moved along the main optical axis based on a first zoom fitting curve and a second zoom fitting curve respectively; and the advantages are that the system has smooth magnification, suppresses vignetting phenomenon, and dynamically adjusts the numerical aperture, the depth of field and the light throughput to adapt to different scene requirements.
Owner:NOVIVISION MEDICAL TECHNOLOGY (SUZHOU) CO LTD

Microscope system and corresponding method

Examples relate to a microscope system, such as a surgical microscope system, and to a corresponding method. The microscope system (100) comprises a microscope (120) with a first optical imaging sensor (122) for generating first imaging sensor data based on light having a first wavelength spectrum, a second optical imaging sensor (124) for generating second imaging sensor data based on light having a second wavelength spectrum, and a multispectral iris (130), configured to provide an opening with a first numerical aperture for the light having the first wavelength spectrum and an opening with a second numerical aperture for the light having the second wavelength spectrum, with the first numerical aperture being different from the second numerical aperture. The microscope system comprises one or more processors (114), configured to generate a composite image based on the first imaging sensor data and based on the second imaging sensor data.
Owner:LEICA INSTRUMENTS (SINGAPORE) PTE LTD

A rigid scope optical system for a rigid endoscope

ActiveCN121477465BTelescopesFluorescenceRigid endoscope
The application discloses a hard mirror optical system of a hard tube endoscope, which comprises an objective lens and a rod lens in sequence from an object side to an image side, and is characterized in that the rod lens comprises n groups of rod lens units, n is a positive odd number, and the rod lens unit is composed of symmetrically arranged object-side rod lens units and image-side rod lens units, and the advantage lies in that through systematic optical design, the focal length, entrance pupil diameter, numerical aperture of the objective lens and the rod lens, and the length of the rod lens unit and other performance parameters are reasonably set, so that the high-definition imaging requirement of the endoscope under the visible light and fluorescence double modes can be met.
Owner:NINGBO YONGXIN OPTICS

Variable-focus super-structure lens system

The invention relates to a variable-focus metamaterial lens system. The system comprises a first metasurface and a second metasurface. A first metasurface and a second metasurface are sequentially arranged on the same optical axis, and a preset distance is reserved between the first metasurface and the second metasurface. A group of sub-wavelength structure units are constructed on the surface of the first metasurface; a group of sub-wavelength structure units are constructed on the second metasurface, and the second metasurface rotates by an angle theta around the normal direction relative to the first metasurface; the equivalent phase distribution of the composite device can be adjusted through the relative rotation between the first metasurface and the second metasurface, and the continuous regulation and control of the focal length are realized along with the change of the numerical aperture. Therefore, the complexity is reduced, and the response speed is improved.
Owner:NANZHIXINSHI (NANJING) TECHNOLOGY CO LTD

Optical coherence tomography for measurement on the retina

Optical coherence tomograph for examining an eye (3) which features: - a lighting device (4, 5) for providing source radiation, - an illumination and measurement beam path (7) comprising a splitting element (6) for splitting the source radiation into illumination radiation (B) and reference radiation (R), with the illumination radiation (B) illuminating an illumination field in the eye (3) and collecting backscattered illumination radiation in the eye (3) as measurement radiation (M), wherein the illumination and measurement beam path (7) comprises a scanner (13) for adjusting the lateral position of the illumination field in the eye (3) and a front optic (12), - a reference beam path (8) which provides for the reference radiation (R) an optical path length (21) corresponding to an optical path length from the splitting element (6) to the illumination field and back to a superposition point (71), - a detection beam path (14, 15, 17) which receives the measuring radiation (M) from the illumination and measuring beam path (7) and the reference radiation (R) from the reference beam path (8) and superimposes them at the superposition point (71) and directs them onto a detector (19), - the illumination and measuring beam path (7) further exhibits - a beam splitter (11) for separating the measuring radiation (M) collected by the eye (3) from the illumination radiation (B) directed to the eye (3), wherein the beam splitter (11) directs the separated measuring radiation (M) to the detection beam path (14, 15, 17), and - a light splitting element (32, 34) that splits the illumination radiation (B) into spots in order to illuminate the retina (2) with a multi-spot pattern, characterized in that - the lighting device (4, 5) is tunable with respect to the wavelength of the source radiation, - the detector is an area detector (19), - the detection beam path further - an optical element (14) acting only on the measuring radiation (M), which interacts with the front optics (12) and adjusts the numerical aperture with which measuring radiation (M) is collected in the eye (3), and - an aperture (15) which is arranged in front of the area detector (19), in or near an intermediate image plane and which defines the size of an object field from which the measuring radiation (M) reaches the area detector (19), and - wherein the aperture prior to the area detector is designed as a first multi-hole aperture (15) and a first multi-lens array (36) is arranged between this multi-hole aperture and the area detector (19), which focuses the radiation emanating from each hole of the first multi-hole aperture (15, 15a, 15b) onto a pixel area of ​​the area detector (19) which has a spatial resolution of 4 to 100 pixels in one direction, preferably as a 2D pixel area with 5 to 50 pixels or 5 to 40 pixels per direction.
Owner:CARL ZEISS AG

Optical imaging device

The utility model provides an optical imaging device, which comprises a lens group, a spacing element group and a lens barrel, the lens group from the object side to the image side of the optical imaging device comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a sixth lens which are sequentially arranged at intervals, and the half Semi-FOV of the maximum half field angle of the optical imaging device and the numerical aperture fno of the optical imaging device meet the following conditions: 1lt; fno / tan (Semi-FOV) < = 1.25; the effective focal length f of the optical imaging device and the effective focal length f1 of the first lens meet the following formula:-2.3 lt; f1 / flt; -1.2,-1.2; the inner diameter d0s of the object side end face of the lens barrel, the inner diameter d1s of the object side face of the first spacing element and the effective focal length f1 of the first lens meet the following condition:-1.45 < = (d0s-d1s) / f1lt; and-0.85. The problem that in the prior art, an ultra-wide-angle and large-aperture optical imaging device is serious in stray light is solved.
Owner:ZHEJIANG SUNNY OPTICAL CO LTD

Method and apparatus for processing workpiece by using laser

A method for processing a workpiece by laser ablation includes: a) preparing a mask having at least one transparent pattern segment and at least one light-shielding pattern segment, the transparent pattern segment and the light-shielding pattern segment being along a pattern edge corresponding to a main scanning direction, b) scanning a line-shaped laser beam over the mask; c) projecting a pattern beam that passes through the mask onto a workpiece by using a projection optical system; and d) processing a processing area in the workpiece. The width or size of the transparent pattern segment and the light-shielding pattern segment are smaller than a resolution depending upon a wavelength of the line-shaped laser beam and a numerical aperture of the projection optical system.
Owner:ORC MFG

High-power coaxial telecentric lens and camera module

PendingCN122632438AOphthalmologyImaging quality
Embodiments of the present application provide a high-magnification coaxial telecentric lens and a camera module. The high-magnification coaxial telecentric lens comprises, in order from the object side to the image side, a first lens group, a light splitting prism, a diaphragm, a second lens group and a third lens group. The first lens group comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens. The second lens group comprises a sixth lens and a seventh lens. The third lens group comprises an eighth lens and a ninth lens. The light splitting prism is provided with a coaxial light source on one side. The first lens, the third lens, the fifth lens, the sixth lens and the ninth lens all have positive refractive powers. The second lens, the fourth lens, the seventh lens and the eighth lens all have negative refractive powers. The first lens group comprises a first cemented lens. The focal length f J01 of the first cemented lens and the focal length f1 of the first lens group satisfy the relationship: 45 < f J01 / f1 < 55. The high-magnification coaxial telecentric lens achieves the purposes of high magnification, large numerical aperture and high imaging quality.
Owner:SHENZHEN DONGZHENG OPTICAL TECH CO LTD

Optical interconnect design for active short distance links

An optical interconnect system comprising: at least one light source for emitting light, the light comprising a distribution pattern having a predefined divergence angle; at least one communication medium for transmitting the light, wherein the at least one communication medium comprises a numerical aperture, and wherein at least one of the numerical aperture, the at least one light source, the predefined divergence angle, and the at least one communication medium, is dimensioned to minimize loss of optical power coupling of the light into the at least one communication medium; at least one light detector for receiving the light from the at least one communication medium; at least one optomechanical alignment system configured to optimize collection of the light at the least one light detector.
Owner:HYPERLUME INC

Deep ultraviolet microscope objective and microscope thereof

The invention relates to the field of microscopes, in particular to a deep ultraviolet microscope objective and a microscope thereof. Comprising a front lens group and a rear lens group which are sequentially arranged from an object side to an image side along an optical axis; the front lens group comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens and a ninth lens which are sequentially arranged from the object space to the image space along the optical axis. The rear lens group comprises a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, a fourteenth lens and a fifteenth lens which are sequentially arranged from the object space to the image space along the optical axis; the infinite conjugate microscope objective provided by the invention has the advantages of large numerical aperture, large field of view, telecentric object space, low distortion and near diffraction limit.
Owner:BEIJING ZHAOWEI XINYUAN COMM TECH

Imaging EUV optical unit for imaging an object field into an image field

An imaging EUV optical unit serves for imaging an object field into an image field. The imaging optical unit has a plurality of mirrors for guiding EUV imaging light at a wavelength of shorter than 30 nm along an imaging beam path. The imaging EUV optical unit has an image-side numerical aperture of at least 0.3. An overall transmission of the plurality of mirrors is greater than 10%. An overall mirror surface, which represents the sum of all used mirror surfaces of the plurality of mirrors, is less than 1.5 m2. This design can yield an imaging EUV optical unit with improved usability for an EUV projection exposure apparatus.
Owner:CARL ZEISS SMT GMBH

Optical fiber numerical aperture measuring system

The invention relates to an optical fiber numerical aperture measurement system, which belongs to the technical field of optical fiber parameter measurement and comprises a light source module, a detector and a position regulator, the man-machine interaction module is used for determining sampling points and corresponding three-dimensional coordinates and angular coordinates and displaying a testing process and a testing result; the control module is used for controlling the light source module to generate a tested light beam, collecting light intensity based on the three-dimensional coordinates and the angular coordinates of the sampling points and completing data processing to obtain a numerical aperture of a tested optical fiber; the problems that an existing optical fiber numerical aperture measuring device is poor in compatibility, low in measuring efficiency and large in measuring result error are solved.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD

Macro lens for nucleic acid detection

The invention discloses a macro lens for nucleic acid detection, and relates to the technical field of molecular detection. The macro lens for nucleic acid detection comprises a lens group, the lens group comprises a lens barrel, a first biconvex lens is fixedly arranged in the lens barrel, a first doublet lens is arranged on the right side of the first biconvex lens, a second doublet lens is arranged on the right side of the first doublet lens, and the second doublet lens is arranged on the right side of the second doublet lens. A third doublet lens is arranged on the right side of the second doublet lens, a fourth doublet lens is arranged on the right side of the third doublet lens, and a fifth doublet lens is arranged on the right side of the fourth doublet lens. According to the macro lens for nucleic acid detection, aberration is corrected through a specific bonding lens group so as to realize high-definition fluorescence imaging, the fluorescence collection sensitivity is improved through a large numerical aperture and long back focal length structure, an exciting light module is convenient to integrate by using a turning light path of a corner prism, and the overall layout is more compact.
Owner:解亚平

Optical imaging system of rigid multidirectional coaxial spinal endoscope and endoscope

The invention provides an optical imaging system of a rigid multidirectional coaxial spinal endoscope and the endoscope. An objective lens group, a relay rod lens group, a 90-degree optical axis deflection angle prism, a coupling lens group and a camera module are sequentially arranged along an optical axis from an object side to an image side; the objective lens group sequentially comprises a negative lens, a viewing angle prism module and a positive lens in the direction of an optical axis, the viewing angle prism module is of a triple-cemented prism structure composed of a first viewing prism, a second viewing prism and a third viewing prism, and the second viewing prism is located between the first viewing prism and the third viewing prism; the side, close to the first viewing direction prism, of the second viewing direction prism is a first reflecting surface, the side, close to the third viewing direction prism, of the second viewing direction prism is a second reflecting surface, an air gap is reserved in the upper half section of the first reflecting surface, and the lower half section of the first reflecting surface is plated with a metal reflecting film. The invention has the advantages that the imaging resolution of the spine endoscope is improved in a limited space, high-definition and large-numerical-aperture imaging is realized, the focal depth is longer, the focusing operation is not needed, and the like.
Owner:TIANJIN YUEAN MEDICAL TECH CO LTD

Continuously variable zoom microscope objective

The application belongs to the technical field of optical design, and particularly relates to a continuous zooming microscopic imaging objective lens. The continuous zooming microscopic imaging objective lens comprises a front fixed group one, a variable aperture diaphragm, a front fixed group two, a variable magnification group and a rear fixed group arranged in sequence along the optical axis direction between an object plane and an image plane, and the front fixed group one is close to the object plane and the rear fixed group is close to the image plane; the continuous zooming of the microscopic imaging objective lens is realized by moving the variable magnification group along the optical axis direction, and the object side numerical aperture and the image side numerical aperture of the microscopic imaging objective lens are adjusted by adjusting the light passing aperture of the variable aperture diaphragm. The application can realize the continuous change of the object side imaging field between 10mm*10mm and 200mm*200mm, and meet the requirement of the change range of the large imaging field.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Coaxial and off-axis compatible illumination device and illumination method

PendingUS20260110914A1Photomechanical exposure apparatusOptical elementsGratingOff-axis illumination
An illumination device compatible with both coaxial and off-axis configurations, comprising: a coaxial illumination unit; multipole off-axis illumination units; a substrate, configured to mount the coaxial illumination unit and the multipole off-axis illumination units; and a motion mechanism, configured to drive the off-axis illumination units to move backward and forward, so as to accommodate gratings of different sizes and pattern periods, thereby achieving illumination with varying numerical apertures.
Owner:INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI

Femtosecond laser manufacturing system and method capable of dynamically regulating and controlling numerical aperture

The invention discloses a femtosecond laser manufacturing system and method capable of dynamically regulating and controlling a numerical aperture, and belongs to the technical field of femtosecond laser precision machining. The system comprises a femtosecond laser, a power adjusting unit, a beam expander, an aperture tunable diaphragm, a 4F imaging system, a scanning galvanometer and an objective lens which are sequentially arranged along a light path, by adjusting the clear aperture of the diaphragm, the beam diameter at the entrance pupil of the objective lens is changed in real time, so that the equivalent numerical aperture of the system is dynamically regulated and controlled. In the machining process, according to the feature size precision requirements of different areas in a three-dimensional model, the three-dimensional model is divided into high-precision machining areas, medium-precision machining areas and low-precision machining areas, different equivalent numerical aperture modes and laser parameters are matched, the diaphragm is adjusted in a linkage mode in the scanning process, and switching between the high-resolution finish machining mode and the long-focal-depth efficient machining mode is achieved. The contradiction between the machining efficiency and the resolution ratio is solved, the precision is ensured, meanwhile, the overall machining efficiency is improved by several times to dozens of times, and three-dimensional cross-scale rapid forming is achieved.
Owner:JILIN UNIVERSITY

DMD digital lithography exposure system and its alignment detection method

The application discloses a DMD digital lithography exposure system and a detection method thereof, and the system comprises a light source, an illumination system, a DMD, a projection system, a rear lens and a digital camera which are sequentially arranged, and the digital camera is installed on the back focal plane of the rear lens; the light emitted by the light source is irradiated on the DMD through the illumination system, the DMD is conjugated with the image plane to form an image, and the pattern of the DMD is imaged on the image plane through the projection system. The application can check the exposure system adjustment by observing the energy distribution, shape and size of the spectrum plane, and the spectrum plane of the exposure system is imaged on the focal plane of the rear lens and observed through the digital camera by reasonably selecting the light aperture and focal length of the rear lens according to the numerical aperture and focal length of the exposure system; when the focal length of the exposure system is unknown and only part of the spectrum plane can be observed, the pattern can be spliced by moving the digital camera, the structure is simple, the design is convenient, the spectrum plane can reflect more exposure details, and the matching problem of the illumination system and the projection system in the exposure system adjustment process can be better reflected.
Owner:JIANGSU YSPHOTECH INTERGRATED CIRCUIT EQUIP CO LTD

Multichannel multiplexing fluorescent display method and device

The invention belongs to the technical field of micro-nano optics, and discloses a multichannel multiplexing fluorescent display method and device. A metasurface is constructed, a plurality of unit structure arrays with different periods are spatially arranged on the metasurface, and the unidirectional radiation angle of guided wave fluorescence corresponding to each unit structure array is controlled by encoding the period of each unit structure array; by means of numerical aperture limitation of an imaging observation system, analog quantity regulation and control of the super-structure surface on the fluorescence radiation angle is converted into a discrete intensity coding state, a plurality of independently coded target fluorescence images are presented at different observation angles, and multi-channel multiplexing fluorescence display is achieved. According to the invention, multi-channel multiplexing display of fluorescence can be realized, the degree of freedom and flexibility of fluorescence multiplexing are improved, and the requirements of next-generation high-density display and information encryption can be met.
Owner:WUHAN INST OF QUANTUM TECH

Double-telecentric optical system for focusing and leveling and focusing and leveling system

The invention relates to a double telecentric optical system for focusing and leveling and a focusing and leveling system. The invention discloses a double telecentric optical system for focusing and leveling, which comprises an object plane, a first group of lenses, an aperture diaphragm, a second group of lenses and an image plane which are sequentially arranged along the direction of an optical axis, the first group of lenses and the second group of lenses are symmetrically arranged relative to the aperture diaphragm, the image space numerical aperture (NA) of the system is 0.1, the image space resolution is superior to 1.25 m, and the image space resolution is superior to 1.25 m. The back focal length of the system is longer than 220 mm, and the included angle between the principal ray of the system and the optical axis is 0.015 degrees. The invention further discloses a focusing and leveling system comprising the double telecentric optical system.
Owner:SHANGHAI TUSHUANG PRECISION EQUIP CO LTD