47 results about "Numerical aperture" patented technology

The application provides a continuous zoom optical system and a stereomicroscope for the stereomicroscope, and the optical lens unit comprises, in sequence along a main optical axis, an upper fixed lens group, a compensation lens group, a middle fixed lens group, a zoom lens group and a lower fixed lens group; a variable diaphragm is arranged between the middle fixed lens group and the zoom lens group along the main optical axis; the upper fixed lens group, the compensation lens group, the zoom lens group and the lower fixed lens group are all configured as double lens combinations, the focal length values of the upper fixed lens group and the zoom lens group are negative, and the focal length values of the compensation lens group and the lower fixed lens group are positive; the middle fixed lens group is configured as a double-concave single lens; the compensation lens group and the zoom lens group are axially moved along the main optical axis based on a first zoom fitting curve and a second zoom fitting curve respectively; and the advantages are that the system has smooth magnification, suppresses vignetting phenomenon, and dynamically adjusts the numerical aperture, the depth of field and the light throughput to adapt to different scene requirements.

The embodiment of the application provides an optical assembly, a communication device and an optical communication network, and relates to the field of optical communication. The performance of the optical assembly is optimized. The specific scheme comprises: the optical assembly comprises a laser and a first optical waveguide. The laser is used for outputting a multimode signal light. The first optical waveguide comprises a first end and a second end arranged oppositely; the first end is used for receiving the first multimode signal light, and the second end is used for outputting a light beam from the first end. Wherein, the diameter of the core layer of the first end is 10-45 mu m, and the numerical aperture of the first end is 0.1-0.25. The rate of the multimode signal light is greater than or equal to 50 Gbps. The core layer of the first end can intercept the light rays of the high-order modes in the reflected light which are opposite to the transmission direction of the multimode signal light, reduce the noise of the laser, optimize the reliability of the laser and the optical assembly, and improve the problem of optical link flash.

A spatial image simulation method includes the following steps: constructing a DMD-based optical system simulation model; uniformly sampling the angle and intensity of illumination light within the illumination numerical aperture, and selecting a simulation area; for each illumination angle, simulating the complex amplitude distribution of the micromirror in the open state and the complex amplitude distribution of the micromirror in the closed state; obtaining the interference data of the micromirror at the entrance pupil plane for each illumination angle; obtaining the spatial frequency spectrum at the exit pupil plane for each illumination angle; simulating the corresponding light intensity distribution based on the complex amplitude distribution for each illumination angle, and superimposing the light intensities corresponding to all illumination samples to obtain the final light spot result. Based on the actual working scenario of the DMD, and considering that the tilt angle of the DMD micromirrors has a significant impact on its diffraction, the introduction of various tilt-induced phase differences and tilt factors results in more accurate simulation effects.

A method for maintaining focus of an optical system on a target surface is provided. The method includes directing at least one beam of light through an objective lens to a sample, wherein the at least one beam of light is associated with at least two effective numerical apertures and receiving at least one reflected beam at the objective lens. The at least one reflected beam is associated with the at least two effective numerical apertures. The method also includes determining at least one image based on the at least one reflected beam, determining a baseline of a feature for each of the one or more objects, and when the feature differs from the baseline, adjusting a working distance between the objective lens and the sample.

This invention discloses a deep ultraviolet wide-band, large field-of-view, large numerical aperture bright-field wafer defect detection device, relating to the field of optical technology. The device comprises: a first lens structure including a plurality of concave and convex mirror groups arranged in the optical path direction; a second lens structure disposed on one side of the first lens structure in the light transmission direction; and a third lens structure disposed on the side of the second lens structure away from the first lens structure. The second lens structure includes a biconvex lens and a first concave mirror, with the concave surface of the first concave mirror facing the convex surface of the biconvex lens, and a gap between the first concave mirror and the biconvex lens. This invention aims to improve the accuracy and efficiency of defect detection.

Remote refocus microscope systems are disclosed. The system includes a first microscope arranged to receive light from the sample in a medium having a sample refractive index ns with a first objective lens having a first numerical aperture NAi and a first immersion medium with a first refractive index m, a second microscope including a second objective lens having a second numerical aperture NA2 and a second refractive index U2, and an optical compensator disposed between the first microscope and the second microscope, the optical compensator comprising at least one lens having a linearly adjustable position to provide for MRR to be continuously tuned to approximately equal to a ratio of (ns / n2). The system is modular where the first objective can be changed to permit operation in one of three modes. Methods for configuring a remote refocus microscope into one of three modes are also disclosed.

Integrated target waveguide devices and optical analytical systems comprising such devices are provided. The target devices include an optical coupler that is optically coupled to an integrated waveguide and that is configured to receive optical input from an optical source through free space, particularly through a low numerical aperture interface. The devices and systems are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The devices provide for the efficient and reliable coupling of optical excitation energy from an optical source to the optical reactions. Optical signals emitted from the reactions can thus be measured with high sensitivity and discrimination. The devices and systems are well suited for miniaturization and high throughput.

A metrology system may include a light source providing illumination, a single objective lens to direct the illumination to an overlay target with a top-substrate feature and a bottom-substrate feature and collect sample light from the overlay target, an adjustable illumination aperture stop to adjust an illumination numerical aperture, a detector configured to image the sample based on the sample light with both the top-substrate feature and the bottom-substrate feature within a field of view, and an adjustable collection aperture stop configured to adjust an imaging NA. The system may include a controller to receive a thickness of the top substrate, generate at least a portion of the metrology recipe defining imaging parameters providing a desired contrast, receive an image of the overlay target based on the metrology recipe, and generate an overlay measurement between the top substrate and the bottom substrate based on the image.

The application discloses a short-wave infrared high-NA achromatic superlens design method based on Latin square partition and hybrid optimization, and belongs to the technical field of micro-nano optics. Firstly, an electromagnetic response database of a silicon dioxide substrate-silicon nanometer cylindrical unit is constructed, covering a 2.1-2.3-micron wavelength band; then equal-area ring-belt-fan partition is adopted in combination with Latin square wavelength distribution, so that multiple wavelengths are uniformly distributed in the ring-belt and sector directions; a high-NA evaluation function containing a radial quadratic position weighting factor is constructed, so as to strengthen the optimization weight of the edge phase of the lens; finally, a genetic algorithm-pattern search three-stage hybrid collaborative optimization is executed, and the optimal nanometer structure size distribution is obtained through global search, local convergence and pixel-level discrete fine adjustment. The application can significantly suppress wavelength crosstalk and chromatic aberration, realizes broadband achromatic focusing under the condition of a numerical aperture NA=0.915, and the focal length variation coefficient is only 3.45%, the focused light spot is close to the diffraction limit, and the application is suitable for short-wave infrared high-NA imaging applications such as gas detection and environmental monitoring.

This invention discloses a quantitative phase imaging system and method for embryos based on dual liquid zoom lenses, which is installed in a time-difference incubator. It includes an illumination module, an imaging module, and a quantitative phase imaging module arranged sequentially along the optical path. The illumination module includes an LED light source, an illumination slit modulation structure, and a liquid zoom focusing system. The liquid zoom focusing system dynamically adjusts the numerical aperture of the illumination by changing the focal length. The imaging module includes an objective lens, a polarizer, a Nomaski prism, an analyzer, and a liquid imaging lens. The polarizer is positioned in the output optical path of the objective lens, the Nomaski prism is positioned between the polarizer and the analyzer, and the liquid imaging lens is positioned in the output optical path of the analyzer. The quantitative phase imaging module includes a spatial light modulator and an image acquisition unit. The spatial light modulator is used to perform phase-shift modulation on the optical path.

A high-throughput miniature Raman spectrometer, belonging to the field of spectroscopic analysis instruments, includes a laser module, an external optical path system, and a beam splitting system. The laser module comprises a narrowband laser module and a collimating mirror; the external optical path system includes a dichroic mirror, an aspherical lens, a stage, a long-pass filter, a cemented doublet lens, and a slit; the beam splitting system includes a collimating mirror, a blazed grating, a focusing mirror, and a linear charge-coupled device (CCD). By integrating the laser module and external optical path system with the beam splitting system, signal attenuation during fiber optic transmission is avoided; a large numerical aperture aspherical lens is used to achieve efficient sample excitation and signal collection; the cemented doublet lens converges the beam to the slit, reducing the optical path size and eliminating axial chromatic aberration; and the cascaded filtering structure of the dichroic mirror and long-pass filter effectively suppresses Rayleigh scattering interference. While maintaining resolution, the luminous throughput is significantly improved, offering low cost, high precision, and portability, making it suitable for fields such as food safety testing.

The present application provides a microscope objective lens, comprising a first lens group, a second lens group, a third lens group, and a positive lens which are sequentially arranged from an object side to an image side along an optical axis of the microscope objective lens. The first lens group has a positive focal power, and comprises a first lens and a second lens that are sequentially arranged from the object side to the image side. The first lens and the second lens satisfy the expression: 2.26<=f2 / Fobj<=2.82, where f2 is a combined focal length of the first lens and the second lens, and Fobj is an effective focal length of the microscope objective lens. The second lens group has a positive focal power. The third lens group comprises at least one negative lens. The above-described microscope objective lens can accommodate both a large field of view and a large numerical aperture. The present application further provides a microscope optical detection system and a sequencer.

A LiDAR device (14) for scanning measurement of a distance to an object (12) comprises a photonic integrated circuit (52) with a plurality of optical waveguides (38) and a plurality of couplers 40). Each coupler (40) emits light guided in the optical waveguide (38) into free space and / or couples light propagating in free space into the optical waveguide (38). A collimating optical system (44) collimates light beams emitted by the couplers (40) and / or focuses collimated light beams. Microlenses (54; 54a, 54b) form real or virtual images of associated couplers (40), said images being arranged in an object field (56) of the collimating optical system (44). The collimating optical system (44) has a collimator numerical aperture which is greater than each of the coupler numerical apertures. Each microlens (54; 54a, 54b) has a collimator-side numerical aperture that is greater than its coupler-side numerical aperture. In this manner, insertion losses caused by NA mismatch are reduced.

The application relates to a laser detection system for observing transparent sample particles or defects, and belongs to the technical field of laser measuring instruments. The application is characterized in that a special structure light collecting lens is arranged between an excitation light source and a light collimation system, the sample is arranged between the excitation light source and the S2 surface of the light collecting lens, the refraction light generated by the excitation of the particles or defects on the sample by the excitation light source is collected by the light collecting lens with the special structure, the refraction light is reflected four times in the light collecting lens and then is emitted and converged, and the light collimation system is arranged to capture the light, so that the overall optical path system length is effectively shortened, the problems of large equipment volume and complex structure are solved, and large numerical aperture light energy collection can be realized.

The utility model discloses a kind of optical fiber numerical aperture testing device and system, the device includes fixed part, collimating element, light splitting element and detecting element. Among them, fixed part is used to fix the optical fiber to be measured;Collimating element is set to the light outlet end of the optical fiber to be measured, and the light outlet end surface of the optical fiber to be measured is located at the focal point position of collimating element;Light splitting element is set on the light outlet direction of collimating element, for separating and guiding to the first power beam in laser beam and emit along first light outlet path;Detecting element is set on the first light outlet path of the light splitting element, for scanning first power beam and depicting the energy distribution two-dimensional diagram of its beam waist cross section. The first power beam received and scanned by detecting element is directly obtained using light splitting element in the application, avoid the problem that attenuation piece needs to be used to interfere with laser beam energy distribution in prior art;While detecting element can realize dynamic scanning laser beam, it is conducive to improve real-time measurement efficiency.

This invention provides a multi-channel three-dimensional quasi-phase matching method and apparatus. The method includes: focusing fundamental frequency light through a microscope objective to obtain fundamental frequency light with a modified focusing state; incident the modified fundamental frequency light onto a nonlinear photonic crystal via normal incidence, and obtaining an outgoing second harmonic through the nonlinear photonic crystal; and finally, outputting multi-channel frequency-doubled light waves based on the outgoing second harmonic. This invention focuses fundamental frequency light onto a nonlinear photonic crystal via a microscope objective, changing the direction range of the incident fundamental frequency wave vector simply by altering the numerical aperture of the focusing objective. Combined with the spatial reciprocal lattice vector combination of the three-dimensional nonlinear photonic crystal, the quasi-phase matching condition is satisfied, achieving variable multi-channel frequency doubling. This invention achieves controllable multi-channel second harmonic generation without structural changes.

This invention discloses a non-oil immersion large numerical aperture microscope objective, composed of a first lens group S1, a second lens group S2, a third lens group S3, and a fourth lens group S4. The total length (Lob) of the four lens groups is ≤50mm, and the focal length (EFL) of the microscope objective is... ob The focal length EFL of the first lens group S1 S1 The focal length EFL of the second lens group S2 S2 The focal length EFL of the third lens group S3 S3 The focal length EFL of the fourth lens group S4 S4 Satisfying: -3.40 ≤ EFL S1 / EFL ob ≤-3.90, 5.0≤EFL S2 / EFL ob ≤9.0, 8.0≤EFL S3 / EFL ob ≤21.0, 1.30≤EFL S4 / EFLob≤1.75, HI / EFLob≤0.139, where HI is the height of the observed object. The second lens group S2 can move along the optical axis. Its advantage is that the numerical aperture of the objective lens can be ≥0.95 without oil immersion. By adjusting the distance between the objective lens elements, the imaging blur caused by the processing error of the coverslip can be corrected, and the difference caused by the thickness of the coverslip can be compensated. It has a good effect on correcting chromatic aberration without using special optical materials such as DOE.

The application provides a high-optical-flux long-working-distance confocal microscope objective lens, which comprises a first lens group and a second lens group arranged in sequence along an optical transmission direction, wherein the first lens group comprises a first lens, a second lens, a third lens and a fourth lens arranged in sequence along the optical transmission direction, the first lens is a negative lens and is used for prolonging a working distance; the combination of the second lens, the third lens and the fourth lens has positive focal power and is used for focusing light rays, so that the objective lens has a larger numerical aperture; the second lens group comprises a sixth lens and a seventh lens arranged in sequence along the optical transmission direction, and the combination of the sixth lens and the seventh lens has negative focal power and is used for expanding a light beam aperture while reducing an incident light beam angle. The scheme has a field of view of 12 mm, a numerical aperture of 0.5 and a working distance of 17.7 mm, and realizes excellent imaging performance while taking into account a large field of view, high resolution and a long working distance.

A cladding-pumped fiber laser includes a fiber-optic laser resonator and a tapered rod to recycle residual pump light not absorbed by a gain fiber of the laser resonator. The tapered rod includes a proximal end arranged to receive the residual pump light from the gain fiber via a fiber-optic end mirror of the laser resonator, and a distal end, opposite the proximal end, having a reflective coating to at least partly reflect the residual pump laser light in direction back towards the gain fiber. A cross-sectional area of the tapered rod adiabatically increases from a smaller area at the proximal end to a larger area at the distal end, resulting in reduced power density and numerical aperture of the residual pump light at the distal end. The reduced power density allows for recycling of high-power pump light. The reduced numerical aperture is advantageous for the reflective-coating design.

The application relates to the technical field of semiconductor detection, and provides a deep ultraviolet detection objective lens and a wafer defect detection system. The deep ultraviolet detection objective lens comprises, in sequence from an object plane to an image plane along an optical axis direction: a first lens group with positive focal power; a second lens group with negative focal power; a diaphragm; a third lens group with positive focal power; and a fourth lens group with negative focal power. The first lens group, the second lens group, the third lens group and the fourth lens group form a full-transmission optical structure. Incident light sequentially passes through the first lens group, the second lens group, the diaphragm, the third lens group and the fourth lens group, and the light emitted from the fourth lens group is parallel light. The application realizes the high performance unification of a large numerical aperture and a large field of view in a deep ultraviolet wave band through a four-lens full-transmission structure and a global plane single material design, and guarantees good imaging quality and processing realizability.

It generates light that can be used for accurate and high-precision measurement of the state of a laser beam. [Solution] A light emitter comprising a light-emitting thin film that emits light of a different wavelength from the wavelength of the laser beam when the laser beam is focused by a light condenser and irradiated, wherein the thickness of the light-emitting thin film is 1.1 times or less the depth of focus calculated based on the wavelength of the laser beam and the numerical aperture (NA) of the light condenser. Also, a measuring device for measuring the focused shape of a laser beam comprising a light emitter having a support substrate and a light-emitting thin film formed on one side of the support substrate that emits measuring light of a different wavelength from the wavelength of the laser beam when irradiated by the laser beam, a light-receiving unit having a light-receiving element for receiving the measuring light, and a lens part for imaging the measuring light onto the light-receiving element, wherein the thickness of the light-emitting thin film is less than or equal to the depth of focus of the laser beam.

A wafer inspection tool including: an illumination system providing ultraviolet illumination light with wavelengths 2 below 300 nm and configured to direct light towards an object to be inspected; a detector array having a pixel pitch; one or more anti-aliasing (AA) elements; an objective having a numerical aperture (NA) and configured to collect light provided by the illumination system and returning from a plurality of field points on the object and to onwardly transmit a light beam formed from the returning light which has been collected towards the detector array via the one or more AA elements; a processor configured to: receive imaging requirements; control a NA of the objective; control, when the pixel pitch is larger than λ / (4*NA), position of the one or more anti-aliasing elements, based on the pixel pitch, the NA, and the imaging requirements.

A scanning probe microscope for determining a measurement location when a numerical aperture of an objective lens is relatively large. The scanning probe microscope includes a probe which scans a sample; a light source which irradiates the probe with excitation light via an objective lens; a detector which detects fluorescence generated at the probe; a reflective member arranged between the objective lens and the sample; and an imaging device which images a reflecting surface of the reflective member.

The application discloses a focusing compensation type long working distance large NA microscopic objective applied to semiconductor detection and belongs to the technical field of optical imaging. A first lens group G1, a second lens group G2, a third lens group G3 and a glass substrate L8 with varying thickness are sequentially arranged along an optical axis from an image side to an object side, the microscopic objective provided by the application has a total focal length f=5mm, a working distance WD=9mm, a numerical aperture NA=0.65, and can realize 40 times magnification by matching a sleeve lens with a focal length of 200mm, and the working wave band is 486nm-656nm, clear imaging can be realized at the bottom of the glass substrate with a thickness of 0.5mm-1.5mm by moving the focusing compensation ring left and right. The long working distance is favorable for avoiding contact between the lens and the sample, and the large numerical aperture ensures that the lens has good resolution, and the detection requirement of various chip packaging under different glass substrate thicknesses can be met.

The application discloses an ion trap and a quantum computing device, comprising: an integrated substrate, radio frequency electrodes and direct current electrodes prepared on the integrated substrate; wherein the integrated substrate has an axial light transmission slot. The ion trap of the embodiment of the application is designed based on the integrated substrate, eliminates the split misalignment problem caused by temperature changes, and enables the ion trap to be applied to a low-temperature environment; the ion trap obtains an open axial light transmission through the open slot, has a higher numerical aperture, and increases the light transmission degree of freedom of the ion trap, thereby providing support for large-scale application of quantum computing.

This invention discloses an optical imaging detection device and its automatic focusing method. The optical imaging detection device includes at least: a stage, a light source, a field stop, an objective lens unit, a baffle unit, a first detection unit, a second detection unit, and a control unit. The field stop includes a light-transmitting imaging field of view and a light-transmitting focus mark area. An incident beam emitted from the light source forms a first incident sub-beam through the imaging field of view, and a second incident sub-beam through the focus mark area. The baffle unit is used to block part of the second incident sub-beam to adjust the numerical aperture of the second incident sub-beam converged to the sample under test by the objective lens unit. By coupling the focusing optical path in the optical imaging detection device, the focusing optical path and the imaging optical path use the same light source, improving focusing stability. By using the baffle unit to block part of the second incident sub-beam, the accuracy of obtaining the imaging position of the focus mark area is improved, ensuring the subsequent detection effect of the sample under test.

The invention includes a method and system using a counter propagating trapping tweezer array input. In an example, the system has a backside imaging system characterized by a numerical aperture of 0.05 and greater. In an example, the backside imaging system is configured to generate a counter-propagating optical tweezer array and / or a weakly focusing beam to interfere with the optical tweezer array to selectively transport at least one of the plurality of atoms that are evanescently coupled to a nanofiber region.

The application discloses a linear dispersion spectrum confocal linear dispersion lens, which sequentially comprises a light splitting prism, a first lens assembly, a fifth lens, a diaphragm, a sixth lens, a second lens assembly and a tenth lens from an object side to an image side along an optical axis; the linear dispersion spectrum confocal linear dispersion lens is configured to meet the following conditions: an F number is 1.67, a focal length meets 150mm<=F1<=250mm, an object side numerical aperture meets 0.35<=NA1<=0.45, an object side line length meets 8mm<=L1<=12mm, an image side numerical aperture meets 0.23<=NA2<=0.3, and an image side line length meets 12mm<=L2<=15mm. The first lens assembly changes a light beam from a diffusion state to a converging state; the fifth lens and the sixth lens diverge the converging light beam and compensate for non-linear dispersion of the first lens assembly; the second lens assembly converges the light beam again; and the tenth lens expands a divergence angle of the light beam and corrects accumulated dispersion nonlinearity and aberration. It can be seen that the dispersion lens realizes a larger numerical aperture and a larger scanning line length at a light source end, the nonlinearity is only 0.5%, reaches an ultra-high precision standard, and the linear performance is extreme.

The present subject matter described an optical microscopy device (3) for a portable imaging system, such as a smartphone. The optical microscopy device (3) comprises an optical lens assembly with eight to fifteen lens elements. The optical lens assembly has an optical magnification in a range of about 1× to about 7.8×, an airy radius in a range of about 3 micron to about 23.25 micron, a depth of field in a range of about 20 micron to about 338 micron, a numerical aperture in a range of about 0.015 to about 0.115, a half field of view in a range of about 12 degrees to about 30 degrees, and a length in a range of about 6.5 millimeter (mm) to about 57 mm.