715 results about "Numerical aperture" patented technology

The invention discloses a continuous zooming laser interference end point detection system, which is used for semiconductor etching and thin film process end point detection, and comprises an illumination module, a laser interference module and an imaging module, the laser interference module comprises a laser, a beam splitter, a beam splitting cube, a lens and a detector, a laser beam emitted by the laser passes through the beam splitter, the beam splitting cube and the lens and then is focused to a to-be-detected area on the surface of a wafer, and the surface of the wafer reflects the laser to the detector for detection; the focal length of the lens is continuously adjustable; the illumination module comprises a light source which is arranged on one side of the lens, and an illumination light beam emitted by the light source is used for illuminating a to-be-detected area on the surface of the wafer; and the imaging module comprises a camera which is arranged on one side of the lens and is used for recording and outputting image information of a to-be-detected area on the surface of the wafer. According to the invention, through continuous zooming and large numerical aperture of the lens, high-definition imaging and etching of a long working distance and accurate detection of a thin film process end point are realized.

The invention discloses a wafer detection scattered light collection objective lens, and relates to the technical field of optical imaging. The scattered light collecting lens is applied to wafer defect detection, the scattered light collecting lens sequentially comprises a first lens group, a second lens group, a third lens group and a fourth lens group from an object plane to an image plane in the optical axis direction of the lens, twelve lenses and an aperture diaphragm, and the twelve lenses and the aperture diaphragm are coaxially arranged; the first lens group is a catadioptric lens group, has positive focal power, and is used for imaging an object plane to an intermediate image plane through two times of reflection. The numerical aperture of the acquisition objective lens provided by the invention is equal to 0.9, the field of view is equal to 2.6 mm, the acquisition objective lens has the characteristics of large field of view, large numerical aperture and small center shielding, the capability of detecting scattered light of defects can be greatly improved, chromatic aberration is corrected by adopting a refraction and reflection mode, and a wider laser bandwidth can be realized compared with a general refraction mode of combining CaF2 and fused quartz.

The invention provides a flat-field apochromatic objective lens and an optical microscope, and relates to the technical field of optical imaging. The flat-field apochromatic objective lens comprises a first lens group, a second lens group and a third lens group which are sequentially arranged from an object plane to an image plane, both the first lens group and the second lens group have positive refractive power, the third lens group has positive refractive power or negative refractive power, the first lens group comprises at least two sub-lens groups with positive refractive power, and the second lens group comprises at least two sub-lens groups with negative refractive power. The sub-lens group is a single lens or a balsaming lens formed by gluing at least two single lenses, and the second lens group comprises at least one balsaming lens with positive refractive power and at least one balsaming lens with positive refractive power or negative refractive power. The third lens group includes at least one cemented lens having a positive refractive power and at least one cemented lens having a positive refractive power or a negative refractive power. On the basis, the flat-field apochromatic objective lens has a large field of view, a large numerical aperture and a long working distance.

The invention provides an optical imaging device, which comprises a lens group, a spacing element group and a lens barrel, the lens group comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a sixth lens which are sequentially arranged at intervals from the object side to the image side of the optical imaging device, and the half Semi-FOV of the maximum half field angle of the optical imaging device and the numerical aperture fno of the optical imaging device meet the following conditions: 1lt; fno / tan (Semi-FOV) < = 1.25; the effective focal length f of the optical imaging device and the effective focal length f1 of the first lens meet the following formula:-2.3 lt; f1 / flt; -1.2,-1.2; the inner diameter d0s of the object side end face of the lens barrel, the inner diameter d1s of the object side face of the first spacing element and the effective focal length f1 of the first lens meet the following condition:-1.45 < = (d0s-d1s) / f1lt; and-0.85. The problem that in the prior art, an ultra-wide-angle and large-aperture optical imaging device is serious in stray light is solved.

The invention relates to the field of integrated optical fiber microscopic endoscopy, in particular to an all-optical-fiber light beam modulation and collection system based on double super lenses and a design method of the all-optical-fiber light beam modulation and collection system. The system comprises a single-mode optical fiber, a coreless optical fiber for beam expansion and two super lenses (a super lens 1 and a super lens 2) with different functions. The super lens 1 is arranged on the end face of the fiber core of the single-mode optical fiber and focuses output exciting light to form extremely small waist spots, and the divergence angle of light beams is increased. The super lens 2 is arranged on the end face of the coreless optical fiber beam expanding area and used for refocusing the exciting light and focusing the collected fluorescence to the focus position of the super lens 1 at the same time, and the fluorescence is incident to the fiber core in parallel through the super lens 1. According to the invention, a double-super-lens system based on a high numerical aperture (NA) is fully utilized, wavefront modulation is carried out, the length of a beam expanding area is adjusted, and the loss of fluorescence in the beam expanding area is reduced, so that the collection efficiency of the fluorescence is remarkably improved, and an innovative solution is provided for the design of a super-lens-based optical fiber optical system.

The invention discloses a deep ultraviolet spherical catadioptric detection objective lens, and relates to the technical field of optics, the deep ultraviolet spherical catadioptric detection objective lens comprises a first lens group, a second lens group and a diaphragm, one side of the first lens group is arranged to be an object plane, the first lens group is located between the second lens group and the object plane, the first lens group is used for converging light and correcting residual aberration of the second lens group, and the diaphragm is arranged between the second lens group and the object plane. The diaphragm is arranged in the middle of the second lens group, and the second lens group and the diaphragm are used for correcting vertical axis aberrations such as coma of the system. The objective lens adopts a spherical catadioptric structure, can realize deep ultraviolet band application, has a large numerical aperture, the numerical aperture can reach 0.8, the smaller wavelength and the larger numerical aperture have higher resolution, so that smaller defects can be detected, the working distance can be greater than 10mm, and the detection precision is improved on the basis of realizing the large NA design. The length of the system is reduced, the number of original parts is reduced, only five lenses are needed, the structure is simple, and installation and detection are convenient.

The invention provides a preparation method of a barrier type antimonide infrared detector. The preparation method comprises the following steps: selecting a gallium antimonide substrate; a gallium antimonide buffer layer, an indium arsenide heavily-doped layer, a class II superlattice absorption layer and an aluminum-arsenic-antimony barrier layer are sequentially grown on the substrate in an epitaxial mode through a molecular beam epitaxy method; mechanically stripping the hexagonal boron nitride two-dimensional material, and transferring the stripped hexagonal boron nitride to the aluminum-arsenic-antimony barrier layer to form a Van der Waals heterojunction and composite barrier layer structure; depositing electrodes by using an ultraviolet lithography technology and a thermal evaporation mode to form one electrode arranged on the gallium antimonide buffer layer and the other electrode arranged on the boron nitride; a large-numerical-aperture micro-lens array is processed on a substrate, and the micro-lens array is composed of gallium antimonide cylinders with a phase modulation function; therefore, the antimonide medium-wave infrared detector with the composite barrier layer can be formed, the quantum efficiency is improved, the order of magnitude of dark current is reduced, and room-temperature medium-wave infrared detection can be realized.

The invention provides a 40-time infinite conjugate microscope objective, and relates to the field of objective lenses. The 40-time infinite conjugate microscope objective comprises a first lens group, a second lens group and a third lens group which are sequentially arranged along an optical axis from an object space to an image space. The first lens group comprises a first lens and a second lens which are sequentially arranged from the object side to the image side in the optical axis direction. The second lens group comprises a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens and a ninth lens which are sequentially arranged from the object space to the image space in the optical axis direction. The third lens group comprises a tenth lens and an eleventh lens which are sequentially arranged from the object space to the image space in the optical axis direction. The 40-time infinite conjugate microscope objective can realize a high-resolution flat image plane and apochromatic objective, under a short parfocal distance, the numerical aperture is larger, the illumination at the image plane is increased, the imaging is clearer, the on-axis field of view and the off-axis field of view are close to diffraction limits, and the point array radius is close to be within the Airy spot.

The invention discloses a large-view-field wide-spectrum achromatic coupling objective lens, which comprises a first lens group and a second lens group which are coaxially arranged in sequence from an object side to an image side, the first lens group has negative focal power and is composed of a first balsaming lens and a second balsaming lens which are sequentially and coaxially arranged from the object side to the image side. The second lens group has positive focal power and is composed of a third balsaming lens, a fourth balsaming lens and a meniscus lens which are sequentially and coaxially arranged from the object side to the image side. Specific parameters of each lens group and each lens are adjusted, so that the numerical aperture of the coupling objective lens is matched with the numerical aperture of an optical fiber bundle, meanwhile, achromatic design is performed on exciting light of 488 nm and fluorescence spectrum of 500-600 nm, and other aberrations are balanced, so that the coupling efficiency and sensitivity of the system are improved, the working distance reaches 6 mm, and the optical fiber coupling system has a wide application prospect. The imaging field of view reaches 1 mm, and diffraction limited imaging is provided in a large field of view and a wide spectral range.

The invention discloses a method for preparing a small numerical aperture microlens array, which comprises the following steps of: preparing a silicon-based surface adhesive layer, exposing and overlay, developing, hot melting, etching and the like, setting photoresist spin-coating to be multi-layer spin-coating, enabling photoresist materials and spin-coating parameters of different adhesive layers to be different, enabling the viscosities of three layers of photoresist to be obviously distinguished, and improving the resolution of the three layers of photoresist. The factor is a key factor for influencing subsequent small numerical aperture microlens forming; circular masks with different areas are designed, precise control on the aperture of the micro lens after hot melting of the lens can be realized after overlay exposure, and the surface uniformity of the micro lens array in the silicon-based wafer is improved; the temperature and time of hot melting and baking are the key of fusing the double-layer photoresist structure to form the micro lens; the etching parameters with the etching speed higher than that of silicon are selected, the curvature radius of the microlens can be further increased, the small numerical aperture and the size of the microlens are reduced, and therefore preparation of the small numerical aperture microlens array is effectively achieved.

The application discloses a multi-marked endoscopic imaging lens for digestive tract, and belongs to the field of biomedical microscopic endoscopic imaging. The endoscopic imaging lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens; the first lens focuses laser; the second lens is matched with the first lens to limit a light beam in an effective light aperture of the lens; the third lens corrects chromatic aberration; the fourth lens and the fifth lens are combined to correct aberration; the sixth lens adopts an aspheric lens to correct spherical aberration caused in a collimating and focusing system; and the seventh lens is matched with the sixth lens to correct chromatic aberration. The working spectral range of the microscopic objective lens group is 488-860 nm, the effective light aperture is less than 1.8 mm, the mechanical outer diameter is not greater than 2.6 mm, the numerical aperture at the object side or the tissue is 0.55, the imaging field of view is 450 microns, the magnification is 2.14 times, and the working distance is 84 microns. The effect of matching excitation and fluorescence spectrum of a clinically available fluorescence contrast agent is realized.

The invention discloses an endoscope optical system which is composed of a first lens, a steering prism, a diaphragm, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens and a beam splitter prism from an object plane to an image plane, the focal power of the first lens is negative, the object side is a convex surface, and the image side is a concave surface; the focal power of the second lens is positive, the object side is a plane, and the image side is a convex surface; the object side of the third lens is a convex surface, the focal power of the fourth lens is opposite to that of the third lens, and the image side is a convex surface; the focal power of the fifth lens is positive, and the image side of the fifth lens is a convex surface; the focal power of the sixth lens is negative, the object side is a concave surface, and the image side is a concave surface; the focal power of the seventh lens is positive, the object side is a convex surface, and the image side is a convex surface; the object space numerical aperture NA of the endoscope optical system is more than 0.001 and less than 0.006, and the endoscope optical system has the advantages that lens combinations with different surface shapes and focal powers are used, and the depth of field and the axial resolution capability of an endoscope are improved by reducing the object space numerical aperture.

The invention discloses an optical fiber multi-parameter testing device and method, and aims to realize integrated and efficient testing of optical fiber mode field diameter, attenuation, cut-off wavelength, macrobend loss and geometric parameters. The device comprises a three-dimensional adjusting frame, an image acquisition system, a photoelectric detection system, a light path switching device, an environment compensation module and a control unit, through optical path switching, rapid switching between an image channel and a detection channel can be realized, and full-parameter testing can be completed through one-time focusing of an end face; an objective lens with a large numerical aperture and a long working distance and an auxiliary convergent lens with NA = 0.5 are adopted, so that the mode field measurement precision is improved; the control system coordinates operation of all the modules and performs environment compensation and data processing; the scheme has the advantages of compact structure, quick test, stable result and the like, and is suitable for application scenes of optical fiber manufacturing, quality detection and the like.

Integrated target waveguide devices and optical analytical systems comprising such devices are provided. The target devices include an optical coupler that is optically coupled to an integrated waveguide and that is configured to receive optical input from an optical source through free space, particularly through a low numerical aperture interface. The devices and systems are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The devices provide for the efficient and reliable coupling of optical excitation energy from an optical source to the optical reactions. Optical signals emitted from the reactions can thus be measured with high sensitivity and discrimination. The devices and systems are well suited for miniaturization and high throughput.

The invention provides a deep ultraviolet microscope objective lens and a microscope. The objective lens of the deep ultraviolet microscope comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens and an eighth lens which are sequentially arranged on the same optical axis from an object side to an image side. According to the scheme of the invention, the method is designed according to the wavelength range of 260-262 nm, and the design value of the resolution in the wavelength range is consistent with the theoretical value; independent design is completely achieved, and the problem that an existing 50-time objective lens cannot meet many use requirements in optical detection is solved; specific parameters and structures of all the lenses are set, so that the amplification factor of the objective lens of the deep ultraviolet microscope is 50 times, the object space view field is 0.6 mm, a tube lens with the focal length of 200 mm can be used in a matched mode, the working distance is 13 mm, the numerical aperture is 0.528, the object space view field and the working distance of the objective lens of the deep ultraviolet microscope are improved, and then the overall performance of the microscope is improved.

The present application relates to the field of optical lenses and discloses a microscope objective lens. The microscope objective lens includes in order from the emitting side to the objective side: a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, and a twelfth lens, and the following relationship expressions are satisfied: 1.50≤NA*f≤3.00; 0.15≤d4 / TTL≤0.25; 5.00≤f12 / f≤15.00; −7.00≤(R23+R24) / (R23−R24)≤−1.50. The microscope objective lens of the present application is capable of being used as a lens of the microscope with good optical performance, a large numerical aperture, and a wide working band with a magnification of 50 times.

The microscope objective lens comprises a first lens group, a second lens group, a third lens group, a fourth lens group, a fifth lens group and a sixth lens group which are sequentially arranged from an image side to an object side, the second lens group has positive focal power; the third lens group has positive focal power; the microscope objective lens satisfies the following relational expression: 1.5 lt; h2 / H3lt; 5; 0.05 lt; 0.05 lt; h1 / H2lt; 1; wherein H1 represents the lowest projection height of the edge light of the central field of view on the surface of the lens in the third lens group; h2 represents the highest projection height of the edge light of the central field of view on the lens surface of the second lens group; and H3 represents the projection height of the central field-of-view edge light on the lens surface closest to the image space in the first lens group. The numerical aperture of the microscope objective lens can be up to 1.25, the number of fields of view can be up to 32, the band chromatic aberration correction range can be up to 380 nm to 1700 nm, and good fluorescence performance can be ensured.

The invention discloses a PINN-based large numerical aperture photoetching objective lens vector diffraction field calculation method, which comprises the following steps: obtaining a three-dimensional vector diffraction light field of a large NA photoetching objective lens through simulation, reconstructing the three-dimensional vector diffraction light field at a sampling point position, and generating corresponding complex electric field distribution matrix data; performing physical purification on the complex electric field distribution matrix data to construct a corresponding data set; constructing a corresponding Helmholtz equation as a constraint equation based on the light field tight focusing characteristic of the large NA photoetching objective lens; constructing an initial model, and training the initial model by using the data set in combination with the constraint equation to obtain a PINN model for predicting complex electric field data; and inputting space coordinates of a to-be-predicted target into the PINN model to obtain complex electric field data. According to the method provided by the invention, the calculation efficiency of the vector diffraction field can be remarkably improved on the premise of keeping relatively high simulation precision, and the method is suitable for rapid modeling and analysis of the three-dimensional vector light field of the large-numerical-aperture photoetching object mirror.

The invention discloses an infrared refraction and super hybrid lens, and relates to the technical field of infrared imaging. Comprising a first lens with negative focal power, a diaphragm, a super-structure lens and a second lens with positive focal power which are sequentially arranged from an object plane to an image plane in the optical axis direction. Positive chromatic aberration is obtained through the refraction spherical surface, negative chromatic aberration is obtained through the diffraction surface, and chromatic aberration correction is achieved through focal power distribution. The refraction element with positive and negative focal power is used for bearing large focal power, and the metasurface element is used for correcting residual chromatic aberration and spherical aberration. According to the invention, a light-weight large-field-angle large-numerical-aperture infrared imaging system is realized; by utilizing the characteristic that the super lens is insensitive to temperature, the system has an athermalization effect; and an aspherical lens is not used and the number of lenses is small, so that the weight and the cost of the lens are effectively reduced.

A finity-corrected microscope objective for scanning applications has a numerical aperture of at least and an object field diameter of at least 1 mm. The objective is apochromatically corrected over a spectral bandwidth of at least 200 nm. A distance between an object plane and an intermediate image plane conjugated thereto is not more than 250 mm.

The invention provides a super-structure lens condenser and a microscopic imaging lighting device, and belongs to the technical field of microscopic imaging. The technical problems that a traditional Kohler illumination collecting lens is large in caliber, thickness and weight, high in price and not beneficial to light weight and miniaturization of a microscopic system are solved, the technical scheme is that the super-structure lens collecting lens achieves abrupt change of a light field phase through interaction of a micro-nano structure and the light field, and the light field phase change is achieved through the super-structure lens collecting lens. Therefore, the light propagation direction is changed, and the micro-nano structures of the plane lens and the super-structure lens condenser for realizing light beam convergence are periodically arranged according to a certain interval. The beneficial effects are that the super-structure lens is utilized to perform light beam deflection and convergence on a plane by utilizing phase mutation, the limitation that a traditional lens needs a convex surface type or a plurality of lenses to realize large numerical aperture condensation is solved, the limitation on the surface curvature and the transverse size during processing is solved, the longitudinal size of the condensing lens is reduced, and the processing efficiency is improved. And miniaturization of a microscopic imaging system is facilitated.

A method having the steps of measuring a geometry of a toothing using an optical measuring system, wherein a numerical aperture of the optical measuring system is adjustable and the numerical aperture of the optical measuring system is adapted depending on at least one geometric parameter of the toothing to be measured and / or is enlarged or reduced.

A finally corrected microscope objective (2) for scanning applications is designed such that it has a numerical aperture (NA) of at least 0.9, a Strehl ratio of at least 0.8 over the entire field of view, and that a distance (d) OI ) between an object plane (O) and an intermediate image plane (I) conjugate to it is at most 250 mm.

An imaging optic (10) for projection lithography serves to image an object field (5), in which a reticulum to be imaged can be arranged, onto an image field (11), in which a substrate to be exposed can be arranged. The imaging optic (10) has a plurality of mirrors (M1 to M8) for guiding imaging light (16) along an imaging beam path from the object field (5) to the image field (11). The image-side numerical aperture of the imaging optic (10) is greater than 0.75. The optical conductivity of the imaging optic (10) is greater than 45 mm. 2 The result is an imaging optic whose usability for a projection exposure system is improved.

The invention relates to the field of microscopic imaging, in particular to a flat-field apochromatic large-view-field large-numerical-aperture objective lens. The objective lens is composed of 14 convex lenses and concave lenses made of conventional optical glass, and each lens is coaxial with the center of an object plane. From left to right, the object plane, the first concave lens, the second convex lens, the third concave lens and the fourth convex lens are glued to form a glued lens, the fifth convex lens, the sixth concave lens, the seventh convex lens and the eighth concave lens are glued to form a glued lens, and the ninth convex lens and the tenth concave lens are glued to form a glued lens. And the diaphragm, the thirteenth convex lens and the fourteenth concave lens are imaged at infinity, and a balsaming lens formed by gluing the eleventh convex lens and the twelfth concave lens is formed by gluing the diaphragm, the thirteenth convex lens and the fourteenth concave lens. The working distance WD is larger than 15 mm, the amplification factor beta is equal to 8 *-10 *, the focal length f 'is equal to 20-25 mm, the numerical aperture NA is larger than 0.32, and the object view field phi is equal to 4 mm.

The invention relates to the technical field of microscopic optical imaging, and discloses a semiconductor conductive particle detection task-oriented differential interference optical system, which comprises an objective lens group and a differential interference module, the objective lens group comprises a front group, a middle group and a rear group which are arranged in sequence; the front group is used for ensuring a large aperture angle and less introduction of spherical aberration and chromatic aberration, the middle group is used for compensating various aberrations introduced by the front group, and the rear group is used for correcting field curvature; the differential interference module comprises a Nomarski prism, a polarizer and an analyzer which are arranged in sequence; the Nomarski prism is used for splitting and combining the linearly polarized light beams; the polarization analyzer is used for converting linearly polarized light which passes through the Nomarski prism and is orthogonal in polarization direction into linearly polarized light with the same polarization direction; the system further comprises a beam splitter and a barrel lens group. According to the invention, long working distance and large numerical aperture can be realized in the visible light wave band, the light path design is optimized so as to reduce aberration introduction, and the anti-interference capability to weak signals is enhanced.

The invention relates to the field of integrated circuit manufacturing, in particular to a joint correction method, device and equipment for a curve graph and a storage medium. According to the target wafer pattern, determining a corresponding curve mask pattern through a pre-trained optical proximity correction model; according to the curve mask pattern, determining a corresponding curve electron beam exposure pattern through a pre-trained mask process correction model; according to the curve electron beam exposure pattern, determining a corresponding Manhattan pattern and a numerical aperture; receiving a plurality of sample plate Manhattan patterns; according to the sample plate Manhattan graph, a corresponding sample plate curve graph is obtained through preset numerical aperture simulation; acquiring a mask scanning pattern corresponding to the sample plate curve graph; and calibrating a mask process calibration model to be trained according to the mask scanning pattern and the sample plate curve graph. According to the invention, the compatibility and the universality of the joint correction method for the curve graph are improved.

The invention provides a confocal microscope objective lens with high optical flux and long working distance, the confocal microscope objective lens comprises a first lens group and a second lens group which are sequentially arranged along the light transmission direction, the first lens group comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged along the light transmission direction, the first lens is a negative lens, and the second lens is a positive lens. The working distance is prolonged; the combination of the second lens, the third lens and the fourth lens has positive focal power and is used for focusing light, so that the objective lens obtains a larger numerical aperture; the second lens group comprises a sixth lens and a seventh lens which are sequentially arranged in the light transmission direction, and the combination of the sixth lens and the seventh lens has negative focal power and is used for enlarging the aperture of the light beam and reducing the angle of the incident light beam at the same time. According to the scheme, a view field of 12 mm is achieved, the numerical aperture reaches 0.5, the working distance reaches 17.7 mm, and excellent imaging performance is achieved while the large view field, the high resolution and the long working distance are considered.

The invention discloses a super-resolution microscopic interference measurement method based on broadband annular radial polarized light, which comprises the following steps of: selecting a broadband spectrum extended surface light source, providing uniform illumination covering a field of view to be measured and having a certain aperture angle by adopting a Kohler illumination system, and designing a two-stage relay system, amplitude and polarization modulation of the full-view-field light beam is realized through the liquid crystal spatial light modulator and the vortex wave plate; the expanded surface light source and the large-numerical-aperture microscope objective are combined to focus broadband annular radial polarized light, so that super-resolution microscopic interference imaging of the sample is realized; the super-resolution morphology measurement of the microstructure surface is realized in combination with a phase shift coherent method, the problem of low efficiency caused by traditional laser spot scanning is solved, the transverse resolution limitation of traditional microscopic interference morphology measurement is broken through, and the morphology resolution of traditional microscopic interference measurement is improved.

The invention discloses a multiphoton up-conversion super-resolution microscopic imaging method based on microsphere super-lens enhancement, which utilizes the super-resolution advantage of a microsphere super-lens and the nonlinear response advantage of a lanthanide doped rare earth up-conversion nano material to reduce the saturation excitation power of the rare earth nano material. And super-resolution imaging under the condition of a low-magnification and low-numerical-aperture objective lens is realized. An example verifies that under the condition that system complexity is not increased, excitation powers of 455 nm and 808 nm radiation fluorescence of an up-conversion nano material are respectively reduced by 15.40 times and 23.44 times, fluorescence imaging resolutions of 455 nm and 808 nm can be respectively improved by 3.14 times and 3.6 times under a 10x 0.25 NA objective lens, and corresponding transverse resolution limits can respectively reach 358.20 nm and 480.02 nm, so that the fluorescence imaging resolution of the up-conversion nano material can be improved by 3.14 times and 3.6 times under a 10x 0.25 NA objective lens. The method has the advantages of simple imaging system, low cost and good imaging effect, and is of great significance to biological application research.