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122 results about "Focused beams" patented technology

Hybrid metasurface-refractive projector module

An optoelectronic apparatus includes an array of emitters configured to emit beams of optical radiation. Refractive optics focus the emitted beams with a first optical power. An optical metasurface splits the focused beams to form a pattern of spots and applies a vergence to the spots with a second optical power so as to project the pattern of spots toward a target.
Owner:APPLE INC

Cover for liquid delivery system with integrated plunger position sensing using focused optical beam and linear potentiometer

A sliding cover for a liquid delivery device, such as a cap (100) for a pen injector (200), incorporates a set of sensors including an optical sensor (110) with an output which changes during uncapping or capping motions on passing of a plunger (220) of the pen injector. This output is used together with a position sensor (120) to determine the position of the plunger along a cylinder (210) of the liquid delivery device. By monitoring changes in the plunger position, the quantity of dosages delivered by the liquid delivery device can be determined, displayed, stored and / or transmitted to an external device for further data processing or storage. Preferred implementations of the invention employ optical sensors with a converging beam (115), and / or position sensors employing linear potentiometer strips (132).
Owner:PATIENTS PENDING

High-power infrared spatial optical fiber coupling device and method

The invention relates to the technical field of laser, and discloses a high-power infrared spatial optical fiber coupling device and method, and the device comprises a light beam stabilizing system, a power adjusting unit, a core coupling light path, and an optical fiber fixing unit. The light beam stabilizing system is used for carrying out pointing stabilization and collimation processing on the incident high-power infrared space light; the power adjusting unit is arranged on the light output side of the light beam stabilizing system, the light input end of the power adjusting unit corresponds to the light output end of the light beam stabilizing system, and the power adjusting unit is used for receiving the stabilized light beam output by the light beam stabilizing system and adjusting the laser power entering the core coupling light path; the core coupling light path is used for accurately focusing the stabilized light beam to the end face of the optical fiber; the optical fiber fixing unit is arranged on the output end side of the core coupling light path and used for stably clamping an optical fiber and enabling the end face of the optical fiber to be located at a focusing light spot; the optical fiber fixing unit is arranged on the light output side of the core coupling light path and used for clamping the optical fiber to be coupled so as to receive the focused light beam output by the core coupling light path.
Owner:CHONGQING COLLEGE OF ELECTRONICS ENG

Measurement system, method, device, equipment, medium and product

The invention provides a measurement system, method, device and equipment, a medium and a product, and belongs to the technical field of optics. The system comprises a beam expander used for generating a first transmission light beam and a first reflection light beam when a light beam after beam expansion reaches a tested sample at a first preset position; a beam compressor; the receiver is positioned at a first position and is used for receiving the first transmission light beam to generate a first interferogram of the detected sample; the receiver is positioned at a second position and is used for receiving the first reflected light beam to generate a second interferogram of the detected sample; the first microscope objective is used for generating a second transmission light beam and a second reflection light beam by enabling the focused light beam to reach a detected sample at a second preset position; a second microscope objective; the receiver is positioned at a third position and is used for receiving the second transmission light beam to generate a third interference pattern of the detected sample; and the receiver at the second position is also used for receiving the second reflected light beam to generate a fourth interferogram of the tested sample.
Owner:THE HONG KONG POLYTECHNIC UNIV

Confocal microscopic imaging system based on laser focal depth characteristics

The invention belongs to the technical field of optical microscopic imaging, and relates to a laser focal depth characteristic-based confocal microscopic imaging system, which comprises a laser emission module, a collimating lens group, a light beam modulation module, a space scanning module and an information receiving module, and is characterized in that the light beam modulation module comprises a polarization beam splitter and a quarter-wave plate; the space scanning module comprises a biaxial galvanometer and a 4f telecentric light path assembly. The laser emission module, the collimating lens group, the polarization beam splitter 4 and the quarter-wave plate are coaxially arranged. The double-shaft galvanometer is obliquely arranged relative to the quarter-wave plate; the 4f telecentric light path assembly is configured to form a preset focal depth range by utilizing the focal depth characteristic of incident laser and scan a sample in the preset focal depth range by utilizing a focused light beam emitted by the 4f telecentric light path assembly; and the information receiving module is arranged beside the polarization beam splitter. According to the invention, the mechanical motion dependence of the optical imaging system is eliminated, the structural complexity of the optical imaging system is reduced, and the resolution and efficiency of laser scanning imaging are improved.
Owner:WUHAN INST OF TECH

Additive 3D Manufacturing Using Light-Cured Resin

High speed, accurate, scalable, and dimension-insensitive additive manufacturing of a Three-Dimensional (3D) object may use incrementally solidifying light-sensitive resin layers. A new layer is formed by supplying the resin liquid via a cavity in the formed 3D object, and curing the supplied resin by a focused light beam, such as a laser beam. The added layers are formed by supplying, 2024 / 184876 using a pump, the light-cured resin fluid to one or more bottom openings to be output from the top opening (or to multiple openings) via a vertical cavity (or multiple cavities) of the 3D object. The curing is by focusing a light beam to the area of the resin output from the top opening, while keeping the top opening non-cured, so that resin can be passed via the cavity. Such 3D printing may be directly applied to any surface, such as a floor, wall, wing structure, or machined part.
Owner:GROW OTB LTD

Conical optical illumination-based reflective scanning super-resolution optical microscopy system and method

PCT designated stageWO2026076918A1MicroscopesMountingsMicroscopic imageMicro imaging
Disclosed in the present invention are a conical optical illumination-based reflective scanning super-resolution optical microscopy system and method. The system comprises a sample displacement module, an optical microscopic imaging module, an annular focused beam generation module, a beam scanning module, a super-resolution focused illumination and collection module, a super-resolution optical imaging module and a computer. By means of using the advantages of annular focused beam illumination, high focusing efficiency of traditional lenses, and high beam scanning speed, high-efficiency super-resolution focused illumination with an extended depth of focus is achieved, and further traditional optical lenses can be used to achieve fast super-resolution optical microscopic imaging; fast label-free far-field super-resolution two-dimensional microscopic imaging is implemented by means of two-dimensional beam scanning; by means of performing label-free far-field super-resolution two-dimensional microscopic imaging on samples at different axial positions, super-resolution two-dimensional microscopic images of different cross sections of samples are obtained, thereby achieving three-dimensional tomography. The present invention can be applied to fast label-free super-resolution microscopic imaging of biological samples, and can also be applied to other fields such as industrial super-resolution microscopic inspection.
Owner:CHONGQING UNIV

In-situ laser-assisted machining system based on beam shaping

The application discloses an in-situ laser-assisted machining system based on beam shaping, which comprises a laser generating device for generating and emitting a low-power Gaussian laser; a beam shaping device for shaping the Gaussian laser into a focused beam with specific size, shape and energy distribution form according to the thermodynamic performance of the material to be machined, the size of the focused beam being smaller than the height of the cutting edge of the cutting tool from the upper surface thereof; wherein the shaping target of the beam shaping device is determined by simulating the temperature field of the material in the cutting area for different workpiece materials and different spot sizes, shapes and energy distributions, and the uniform temperature field is taken as an evaluation index; and a focal point adjusting device for adjusting the positions of the three degrees of freedom of the beam shaping device, so that the focused beam is passed through the cutting tool and emitted near the cutting edge thereof, and the laser focal plane is coincided with the machining plane. The application can effectively inhibit the surface and subsurface damage of the material to be machined and prolong the service life of the cutting tool.
Owner:HUAZHONG UNIV OF SCI & TECH

Compact and efficient non-coaxial reflective channel for a laser-phosphor white light engine

PCT designated stageWO2025261946A1Vehicle headlampsProjectorsPhosphorOptical axis
The invention provides a light generating system (1000) comprising a first light generating device (110), a second light generating device (120), a luminescent material (200), a diffuser assembly (1700), optics (500), and a light exit (1090), wherein: (A) the first light generating device (110) is configured to generate first device light (111), and the second light generating device (120) is configured to generate second device light (121); (B) the luminescent material (200) is configured to convert at least part of second device light (121) into luminescent material light (201); (C) the diffuser assembly (1700) comprises a diffuser (710), a condenser optical element (730), and a collecting optical element (740); (D) the condenser optical element (730) is configured to provide a focused beam (731) comprising first device light (111) in an optical path to the diffuser (710); (E) the diffuser (710) is configured to provide a diffused beam (711) comprising first device light (111) in an optical path to the collecting optical element (740), wherein an optical axis (Oi) of the focused beam (731) comprising first device light (111) and an optical axis (OR) of the diffused beam (711) comprising first device light (111) have a mutual angle (β), wherein the mutual angle (β) is selected from the range of 80°≤β≤140°; (F) the collecting optical element (740) is configured in a light-receiving relationship with the diffuser (710); wherein the collecting optical element (740) is configured to provide a collimated diffused beam (741) comprising first device light (111) in an optical path to the light exit (1090); (G) the optics (500) comprise one or more redirection optical elements (505) configured to direct one or more of: (i) the first device light (111) in an optical path to the diffuser assembly (1700), (ii) the collimated diffused beam (741) comprising first device light (111) in an optical path to the light exit (1090), (iii) the second device light (121) in an optical path to the luminescent material (200), and (iv) the luminescent material light (201) in an optical path to the light exit (1090); and (H) the light generating system (1000) is configured to generate in a first operational mode of the light generating system (1000) system light (1001) comprising at least part of the collimated diffused beam (741) comprising first device light (111) and at least part of the luminescent material light.
Owner:SIGNIFY HOLDING BV

Program cooling crystallization kettle and method capable of regulating and controlling sugar alcohol crystal granularity

PendingCN121944574AReduce holding volumeSolve for growth rateTemperatue controlSolution crystallizationAlcohol sugarsMaterials science
The invention relates to the technical field of crystallization control, and discloses a programmed cooling crystallization kettle and method capable of regulating and controlling sugar alcohol crystal granularity, and the method comprises the following steps: constructing a basic nonlinear cooling model in advance, and respectively collecting real-time torque and actual average chord length of the crystal by using a torque sensor and a focused light beam reflection measurement probe in the crystallization process; and the control system calculates the cooling rate correction according to the granularity deviation through a PID algorithm, calculates a rheology correction factor according to the torque change, and performs attenuation treatment on the sum of the basic rate and the correction by using the rheology correction factor to obtain a final cooling instruction to adjust the temperature in the kettle. Through dual feedback of coupling granularity and rheology, the contradiction between crystal growth and mass transfer resistance under a high-viscosity system is solved, the inclusion amount of the mother liquor is remarkably reduced while the target particle size is realized, and the purity and uniformity of the product are improved.
Owner:SHANDONG JIANYIHONG BIOTECHNOLOGY CO LTD

Lab-based 3D scanning x-ray laue microdiffraction system and method (Lab3DμXRD)

A laboratory-based 3D scanning X-ray scanning Laue microdiffraction system and method for crystal material characterization, comprising: focusing optics, a sample located at a distance from the focusing optics, a laboratory X-ray source, a stage to translate and rotate the sample, a detector arranged to detect a Laue diffraction pattern of diffracted X-rays. The method comprises scanning each layer of the sample by translating the sample at different rotations relative to the focused beam to illuminate each voxel in the layer in more than one rotation, and indexing each voxel in the layer using recorded Laue diffraction patterns in different rotations. By repeating the translation and rotation for different layers of the sample, a 3D image of the sample grain structure is reconstructed.
Owner:DANMARKS TEKNISKE UNIV

Ultrasound methods and devices for enhancing cytopathologic cell collection

A method of producing cytopathologic cell samples, the method including insonating a target tissue by ultrasound energy with a focused beam at that generates shear waves within the tissue. A method of producing cytopathologic cell samples, the method including insonating a target tissue by ultrasound energy at a first intensity level during a first period, insonating the target tissue by ultrasound energy at a second intensity level during a second period, wherein the first intensity level is higher than the second intensity level. Related apparatus and methods are also described.
Owner:ADENOCYTE LTD

Systems and methods for open path gas detectors with integrated optical sensor

Systems and methods are provided for an open path gas detection system having a receiver with an optical sensor configured to continuously capture optical image data. A field of view of the optical sensor may include a path of a focused light beam received by a light sensor of the receiver. The receiver may be configured to receive and temporarily store the optical image data in the memory buffer, and then transmit the optical image data to the persistent memory region upon receipt of a transfer command. In various cases, a transmission command may be provided, such as when a receiver requests, when a predefined object of interest is identified in the optical image data, or when an occlusion occurs and the light sensor no longer receives the focused beam.
Owner:MSA TECHNOLOGY LLC

Linear injector system and beam control method

The invention provides a linear injector system and a beam control method, and the system comprises a radio frequency quadrupole accelerator which comprises a first bunching segment disposed at the tail end of the radio frequency quadrupole accelerator, and the first bunching segment is used for carrying out the initial phase width compression of a beam; the at least one interdigital drift tube linear accelerator comprises at least one KONUS period, and each KONUS period sequentially comprises a second bunching section used for compressing the phase width of the beam from the upstream to obtain the beam subjected to phase width compression from the input end to the output end; the acceleration section is used for accelerating the beam current after the phase width compression at a constant synchronous phase to obtain an accelerated beam current; and the focusing section is used for focusing the accelerated beam on a plane perpendicular to the transmission direction to obtain a focused beam.
Owner:GUOKE ION (HANGZHOU) MEDICAL TECH CO LTD

Ultrasound methods and devices for enhancing cytopathologic cell collection

A method of producing cytopathologic cell samples, the method including insonating a target tissue by ultrasound energy with a focused beam at that generates shear waves within the tissue. A method of producing cytopathologic cell samples, the method including insonating a target tissue by ultrasound energy at a first intensity level during a first period, insonating the target tissue by ultrasound energy at a second intensity level during a second period, wherein the first intensity level is higher than the second intensity level. Related apparatus and methods are also described.
Owner:ADENOCYTE LTD

Optical system for automotive headlamps

An optical system (1) for a headlamp of a motor vehicle comprises a condensing optics (2) formed by a matrix of condensing lenses (3) and arranged to focus an incident light beam (5). It further comprises at least one reflecting shield (9) arranged to reflect at least a subset of the focused light beam (10) and to produce a cutoff line (33) of an outgoing light beam (11). It further comprises an imaging optics (15) formed by a matrix of imaging lenses (16) arranged to project the focused light beam (10) and a reflected light beam (18) in front of the headlamp so that the reflected light beam (18) contributes to an intensity hot spot (34) on one side of the cutoff line (33).
Owner:에이엠에스오스람아게

A multi-mode vortex laser with adjustable order

ActiveCN116345286BConvenient adjustment of multi-mode vortex laser outputsimple methodLaser detailsGaussian beamPlane mirror
The application discloses a multi-mode vortex laser with adjustable order, comprising: a cavity lens coated with a laser wavelength anti-reflection film system, a first laser output mirror and a second laser output mirror, both of which are plane mirrors, and both of which are coated with a film system partially transmitting laser wavelength on one side and an anti-reflection film system for laser wavelength on the other side; a high-order Laguerre-Gaussian beam is focused by the cavity lens, and the focused beam waist positions of each-order Laguerre-Gaussian mode vortex light are separated under the action of spherical aberration of the cavity lens, and the higher the mode order and the larger the spot size, the closer the focused beam waist of the mode to the cavity lens; the positions of the first laser output mirror and the second laser output mirror are adjusted so as to be located at the waist positions of a certain mode, and the first laser output mirror and the second laser output mirror located at different positions provide feedback for two different-order Laguerre-Gaussian mode vortex lights, so that multi-mode vortex laser oscillation and output are formed.
Owner:TIANJIN UNIV

Water-guided coupling system of long-focal-depth homogenized focused light beam and water-guided coupling homogenized focused light beam forming method thereof

The invention discloses a water-guided coupling system of a long-focal-depth homogenized focused light beam and a water-guided coupling homogenized focused light beam forming method thereof. At present, a processing mode for realizing the water-guided coupling homogenized focused light beam in a standardized manner does not exist. A first lens, a second lens, a third lens and a fourth lens are vertically arranged in parallel, the first lens, the second lens, the third lens and the fourth lens are sequentially, vertically and coaxially arranged, the two sides of the first lens are a first curved surface and a second curved surface respectively, the first curved surface is a convex mirror surface, and the two sides of the second lens are a third curved surface and a fourth curved surface respectively. The two sides of the third lens are a fifth curved surface and a sixth curved surface respectively, the two sides of the fourth lens are a seventh curved surface and an eighth curved surface respectively, the third curved surface, the fifth curved surface and the seventh curved surface are concave mirror surfaces, the distance between the center of the second curved surface and the center of the third curved surface is L1, the distance between the center of the fourth curved surface and the center of the fifth curved surface is L2, and L1 is a positive integer. The distance between the center of the sixth curved surface and the center of the seventh curved surface is L3.
Owner:GUILIN UNIV OF ELECTRONIC TECH

Spectroscopy systems, flow cells and methods for analyzing liquids at vacuum ultraviolet (VUV) wavelengths

The present disclosure provides a vacuum ultraviolet (VUV) detector for use with a liquid chromatography (LC) system (otherwise referred to herein as an LC-VUV detector) for the study of liquids. The LC-VUV detector incorporates a flow cell into the LC-VUV detector to render liquid samples at least semi-transparent to VUV light. The flow cell is specifically designed to: (a) interface with a focused beam of VUV light, (b) provide zero 'dead' volume, resulting in perfectly laminar flow through the flow cell, and (c) be modular and removable, allowing flow cells of different pathlength to be used within the LC-VUV detector. Methods for analyzing liquid samples using the LC-VUV detector and flow cell disclosed herein are also provided in the present disclosure.
Owner:VUV ANALYTICS

Method for pattern modification and extension

PCT designated stageWO2026101633A1Light beamMechanical engineering
A method for processing a substrate includes receiving the substrate including a patterned mask disposed over a layer stack including a second layer disposed over a first layer, the patterned mask including a feature pattern, and etching the substrate to transfer the feature pattern to the second layer and form first openings that expose the first layer. The method further includes exposing a first sidewall of the first openings to a first focused beam at a first processing angle to extend the first openings in a first direction and form second openings, and etching the substrate to transfer the second openings through the first layer and form third openings, And the method further includes exposing the first sidewall of the third openings to a second focused beam at a second processing angle to form fourth openings.
Owner:美国泰尔制造与工程公司

Laser phosphor-based pixelated light source

The present invention provides a light-emitting device (1000), comprising: (i) n laser light sources (10), (ii) focusing optics (20), and (iii) a luminescent body (200), wherein: (A) the n laser light sources (10) are configured to generate laser light source light (11); wherein the focusing optics (20) are configured to focus the laser light source light (11) into a focused beam (21) of the laser light source light (11); wherein n≥2; (B) the luminescent body (200) comprises a luminescent material (210), wherein the luminescent body (200) is configured to be in an optical receiving relationship with the n laser light sources (10), wherein the luminescent material (210) is configured to convert at least a part of the laser light source light (11) into luminescent material light (211); (C) the n laser light sources (10) and the focusing optics (20) are configured to provide a spot (300) of the laser light source light (11) on the luminescent body (200) in an operating mode; wherein k groups of spots (300) each have a separately selected number m of spots (300), wherein two or more spots (300) within each group have partial overlap, wherein 2≤m≤n and 1≤k<n; and (D) wherein a first spot region (310) is defined by 10%-100% of the maximum intensity of the spot (300), wherein for at least one spot (300) within at least one of the k groups, it is applicable to overlap with at least another first spot region within the range of 5%-80% of its first spot region (310).
Owner:SIGNIFY HOLDING BV

Energy beam methods for additive manufacturing machines

An additive manufacturing system may include an additive manufacturing machine and a control system. The additive manufacturing machine may include one or more irradiation devices respectively including a beam source configured to emit an energy beam, an optical assembly that has one or more optical elements configured to focus the energy beam emitted by the beam source, a beam source sensor configured to determine a beam source sensor value from a source measurement beam representative of the energy beam prior to the energy beam passing through one or more optical elements of the optical assembly, and an optics sensor configured to determine an optics sensor value from an optics measurement beam representative of the energy beam downstream from the one or more optical elements of the optical assembly.
Owner:GENERAL ELECTRIC CO

A multi-geometry diffraction guiding device and an x-ray diffraction apparatus

The application provides a multi-geometry diffraction guiding device and an X-ray diffraction equipment, the device is used for guiding a diffraction beam to reach a target detector in the X-ray diffraction equipment; the device comprises: a shell, a parallel light path component and a quasi-focusing light path component; the parallel light path component and the quasi-focusing light path component are arranged on the inner side of the shell; the shell is provided with a mounting connecting part corresponding to the target detector; when the diffraction beam is a parallel beam geometry, the parallel light path component is configured to guide the diffraction beam to reach a first detection area of the target detector; when the diffraction beam is a quasi-focusing beam geometry, the quasi-focusing light path component is configured to guide the diffraction beam to reach a second detection area of the target detector. The application can realize fast and efficient mode switching to measure diffraction beams of different geometries, optimize the use efficiency of a large-area detector, and avoid or eliminate manual or mechanical intervention on optical devices during switching.
Owner:WENZHOU INST OF ADVANCED TECH OF CHINA SCI & TECH

Experimental device for drug crystallization process

PendingCN121819382AVibration crystallizationMeasurement devicesUltrasonic sensorPharmaceutical Substances
The invention discloses an experimental device for a drug crystallization process. The experimental device comprises a reactor, a lifting probe assembly, a crystallization guide assembly and a control system. The reactor comprises a reaction kettle and a heating base which are in heat conduction connection; the lifting probe assembly is mounted on the reaction kettle and can extend below the liquid level to shoot crystal images; the crystallization guide assembly comprises a rotary driving mechanism, a shaft tube, a first ultrasonic transducer, a second ultrasonic transducer, a focused light beam reflection measuring instrument, a turbidity sensor and a stirring piece; wherein the frequency of the first ultrasonic transducer is lower than that of the second ultrasonic transducer, and the first ultrasonic transducer and the second ultrasonic transducer are used for inducing nucleation and fine grain elimination; the focused beam reflection measuring instrument monitors the number and granularity of crystals; the heating base, the lifting probe assembly, the rotary driving mechanism, the first ultrasonic transducer, the second ultrasonic transducer, the focused light beam reflection measuring instrument and the turbidity sensor are all electrically connected with the control system, so that monitoring and control of the experiment process are realized, the crystallization efficiency is effectively improved, and high-quality crystals are obtained.
Owner:HARBIN UNIV OF COMMERCE

An optical fiber device, a method for manufacturing an optical fiber device, and a coupling device

PendingCN122362587APhotonicsLight beam
The application discloses an optical fiber device, a preparation method of the optical fiber device and a coupling device, and belongs to the technical field of micro-nano photonics. The application sequentially arranges a mode field expansion area and a phase modulation area at an exit end of an optical fiber, uses the mode field expansion area to expand a beam mode field diameter, uses a substrate film matched with the mode field expansion area in refractive index and a micro-nano unit with high refractive index to form the phase modulation area, realizes a target phase distribution based on geometric sizes and / or a rotation angle of the micro-nano unit, and then performs phase modulation and wavefront shaping on the expanded beam, so as to output a target light field such as a focused beam, a collimated beam, a Bessel beam or a Bessel beam array. The optical fiber device can realize high coupling efficiency, high alignment tolerance and multi-functional wavefront regulation at the exit end of the optical fiber, can solve the mode field mismatch problem in optical fiber-chip coupling, can reduce system complexity and realize multi-functional integration.
Owner:PENG CHENG LAB

A two-step flocculation adaptive control method for tailings slurry based on FBRM online monitoring

PendingCN122351882AAvoid adaptive adjustmentsImprove densification performanceControl signalSlurry
This application provides a two-step flocculation adaptive control method for tailings slurry based on FBRM online monitoring, relating to the field of tailings treatment technology in the mineral processing industry. The method includes: online monitoring of the original tailings slurry using focused beam reflection measurement under no-doping conditions to obtain the particle size baseline characteristics of the original slurry; adding a primary flocculant to obtain a first slurry, and monitoring the dynamic particle size characteristics of the flocs during the flocculation process in real time; based on the dynamic particle size characteristics of the first slurry, determining whether the first slurry has reached a ready state suitable for secondary flocculation according to a preset primary flocculation completion criterion; when the first slurry reaches the ready state, automatically initiating the addition of a secondary flocculant to obtain a second slurry, and providing real-time feedback on the particle size distribution change in the second slurry as a control signal to adaptively adjust the dosing rate of the secondary flocculant. This method can automatically adapt to changes in ore properties, solid content, and operating conditions, and has strong potential for widespread application.
Owner:BEIJING MINING & METALLURGICAL TECH GRP CO LTD

Electron beam detection equipment and auxiliary irradiation device thereof

The utility model discloses an auxiliary irradiation device for electron beam detection equipment and the electron beam detection equipment. The auxiliary irradiation device comprises a light source, an optical assembly and a photoelectric detector. The optical assembly is used for receiving incident light emitted by the light source and guiding the incident light to be focused on the surface of the element to be detected at least twice; the optical assembly comprises a first optical element group and a second optical element group; the first optical element group is used for receiving incident light and forming a first focused light beam emitted to the surface of a to-be-detected element, and the first focused light beam is focused on a first focus on the surface of the to-be-detected element and can be reflected by the surface of the to-be-detected element to form a first reflected light beam; the second optical element group is used for receiving the first reflected light beam and forming a second focused light beam emitted to the surface of the to-be-detected element, and the second focused light beam is focused on a second focus on the surface of the to-be-detected element; the light spot at the first focal point coincides with the light spot at the second focal point; the photoelectric detector is used for detecting image information and / or light intensity information of the light spots.
Owner:DONGFANG JINGYUAN ELECTRON LTD

Self-homing optical device

Optical systems have uses, such as in spectrometers, for directing a beam. A spectrometer, for example, utilizes an optical system for directing an incident beam toward a sample and receiving a spectroscopy signal from the sample. In various implementations, for example, an optical system may be further configured to move a beam with respect to a target, such as a sample, and still provide a home position where the beam is directed in a stationary configuration. A self-homing (e.g., self-centering) optical system may provide a “home” position in which the beam is directed in a first stationary mode while still allowing a focused beam to be moved with respect to a target in a second dynamic mode.
Owner:MKS TECH (INC D B A SNOWY RANGE INSTR)

Method for measuring triangular profile based on broad spectrum light source

Disclosed is a method for measuring a triangular profile based on a broad spectrum light source, including the following steps: first, building a triangular laser measurement model; putting a calibrator in the triangular laser measurement model, measuring object plane coordinates (x, z) of the calibrator by virtue of a measuring instrument, moving the calibrator many times to acquire object plane coordinates of a plurality of groups of calibrators and corresponding image plane coordinates, so as to obtain a coefficient-determined relational expression of a two-variable linear function; and finally, putting a measured object in the triangular laser measurement model, acquiring, by an imaging detector, image plane coordinates (u, v) of a measured object plane, calculating a coordinate z of the measured object plane through the relational expression of the function, driving, by a displacement moving mechanism, the measured object to move relative to an optical axis of a focused light beam in a perpendicular direction to measure a coordinate y, and splicing an object plane profile (x, z) in a displacement distance to obtain a whole object plane profile of the measured object, so as to obtain a 3D size of the whole measured object. The present invention features a large tolerance angle, high compatibility, and a high measurement accuracy, and the volume and cost are greatly reduced.
Owner:XIAMEN WEIYA INTELLIGENT TECHNOLOGY CO LTD +1

Sample thickness metrology using focused beam interference

The disclosed systems and techniques relate to interferometric-based sample thickness metrology in manufacturing systems. For example, the disclosed techniques include directing a focused beam to a plurality of locations of a sample and detecting interference patterns (IPs) associated with light exiting the respective locations and generated after the focused beam interacts with the sample. The technique further includes determining a magnitude and sign of a difference between a first thickness of the sample at the first location and a second thickness of the sample at the second location based on a first IP associated with first light exiting the first location and a second IP associated with second light exiting the second location.
Owner:APPLIED MATERIALS INC