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1663 results about "Imaging lens" patented technology

Hyperspectral recovery from two images

Hyperspectral imaging methods, devices and systems are described that improve the hyperspectral accuracy, and reduce manufacturing costs, by using two images that enable the recovery of hyperspectral images with high fidelity. One hyperspectral imaging device includes one or more imaging lenses, one or more sensors positioned to receive light associated with an object from the one or more imaging lenses, and a spectral filter. The hyperspectral imaging device is configured to capture a first image produced without using the spectral filer and to capture a second image produced with the spectral filter. The first image and the second image have different spectral contents, and the first and the second images are processed using a trained neural network for producing hyperspectral imaging data associated with the first and second images.
Owner:THE ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIV OF ARIZONA

Surface defect detection device and method based on polarized optical dark field imaging

The invention discloses a surface defect detection device and method based on polarized optical dark field imaging, and belongs to the technical field of industrial defect imaging detection, the device comprises a polarization camera, an imaging lens, a polarization annular LED light source and a sample to be detected which are coaxially arranged; wherein the polarization camera and the imaging lens form a polarization imaging system, the polarization annular LED light source emits linearly polarized light with an inclination angle, and the linearly polarized light is reflected and scattered on a sample to be detected; the linearly polarized light enters the surface of a to-be-detected sample, a small amount of reflection and most of scattered light of the to-be-detected sample are collected by the imaging lens and the polarization camera through a circular hole in the center of the polarization annular LED light source, and finally imaging is achieved. The defect depth can be calculated according to the defect width and the defect inclination angle, so that the defect depth is inversed by the low-frequency linear polarization degree, and the problem that the defect depth information cannot be effectively extracted in the prior art is solved.
Owner:UNIV OF SCI & TECH OF CHINA

Optical imaging lens

The invention discloses an optical imaging lens, which comprises an imaging lens group, the imaging lens group comprises a lens group and a spacing element group, and the lens group is composed of a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged from an object side to an image side along a first optical axis; the spacing element group comprises a first spacing element and a second spacing element; the optical imaging lens satisfies the following conditions: 6.74 lt; eP12 / T12lt; 12.80 and 31.30 lt, 12.80 and 31.30 CT2 / (T23 + CP2) lt; eP12 is the distance between the first spacing element and the second spacing element in the first optical axis direction, T12 is the spacing distance between the first lens and the second lens on the first optical axis, CT2 is the center thickness of the second lens on the first optical axis, T23 is the spacing distance between the second lens and the third lens on the first optical axis, and CP2 is the maximum thickness of the second spacing element.
Owner:ZHEJIANG SUNNY OPTICAL CO LTD

Image formation lens and microscope device

An image formation lens (IL) for a microscope comprises: a negative lens; and a positive lens (L13) that satisfies the following conditional expression:-0.002×(ν⁢dP-35)+0.602-θ⁢gFP<023<ν⁢dP<65where vdP: an Abbe number of the positive lens, and θgFP: a partial dispersion ratio of the positive lens that is defined by the following expression: θgFP=(ngP−nFP) / (nFP−nCP) where ngP is a refractive index of the positive lens to a g-line, nFP is a refractive index of the positive lens to an F-line, and nCP is a refractive index of the positive lens to a C-line.
Owner:NIKON CORP

Camera module and electronic device

A camera module includes an imaging lens having an optical axis, a variable through hole mechanism, an image sensor, an image sensor actuating module and a flexible printed circuit. The variable through hole mechanism is disposed corresponding to the imaging lens to adjust an amount of light into the imaging lens. The image sensor is disposed on the optical axis and is configured to convert imaging light passing through the imaging lens into an image signal. The image sensor actuating module is configured to move the image sensor. The variable through hole mechanism and the image sensor actuating module each have a coil disposed on the flexible printed circuit. The flexible printed circuit is electrically connected to the variable through hole mechanism and the image sensor actuating module.
Owner:LARGAN PRECISION

LCOS projection device

The utility model relates to an LCOS (Liquid Crystal On Silicon) projection device, which comprises a light source module capable of emitting red, green and blue light beams, a polarization filter and an imaging lens which are sequentially arranged along a projection light path, an LCOS chip capable of modulating the polarization state of incident light is arranged on a projection light path between the polarization filter and the imaging lens, and an imaging lens group capable of imaging the incident light onto the LCOS chip is arranged on a projection light path between the light source module and the polarization filter. And a polarization layer capable of transmitting P polarized light and reflecting S polarized light is arranged on the polarization filter. Compared with a polarizing prism applied to a traditional LCOS projection light path, the LCOS projection light path has the advantages that through the arrangement of the polarizing filter and the polarizing layer which is arranged on the polarizing filter and can transmit P polarized light and reflect S polarized light, the LCOS projection light path has higher polarization efficiency, stray light is reduced, and optical efficiency is improved.
Owner:LINKSMART TECHNOLOGY (ZHONGSHAN) CO LTD

Projection lamp assembly and vehicle

The invention provides a projection lamp assembly and a vehicle, and belongs to the technical field of vehicle parts. The projection lamp assembly comprises a shell and a metal heat dissipation base which are matched with each other; the first circuit board is arranged in the shell, the bottom face of the first circuit board is attached to one surface of the metal heat dissipation base, and a light-emitting element is installed on the top face of the first circuit board. The heat conduction layer is arranged outside the lens barrel module and attached to the outer wall face of the lens barrel module, one part of the heat conduction layer corresponds to the position of the film assembly, the other part of the heat conduction layer is attached to or makes contact with the top face of the first circuit board, and the heat conductivity of the heat conduction layer is larger than that of the lens barrel module; the beneficial effects of the invention are that the heat conduction layer can guide the heat gathered in the lens barrel module to the first circuit board, so that the heat is released, and the temperature in the lens barrel module is reduced, thereby reducing the deformation of the imaging lens group caused by heating, and avoiding the reduction of the projection definition caused by long-time use.
Owner:FULDA (NINGBO) INTELLIGENT PHOTOELECTRIC CO LTD

Method and device for detecting residual stress of birefringent crystal

The invention discloses a method for detecting residual stress of a birefringent crystal, which is characterized by comprising the following steps of: fixing a sample to be detected on a sample loading table; the imaging lens is used for acquiring light rays which sequentially penetrate through the polarizer module, a sample to be detected on the sample loading table, the analyzer module and the camera module in four states in three states that polarization axes of the polarizer module and the analyzer module are mutually orthogonal and a polarization angle is gradually increased by 30 degrees, and in a state that the polarizer module and the analyzer module are in parallel, and the imaging lens is used for acquiring the light rays which sequentially penetrate through the polarizer module, the sample to be detected on the sample loading table, the analyzer module and the camera module in the four states; collecting a light intensity matrix set through a camera module; acquiring a reference light intensity matrix through normalized linear superposition, and performing pixel-by-pixel operation with the reference light intensity matrix on the basis of the first light intensity matrix, the second light intensity matrix and the third light intensity matrix to acquire corresponding phase delay matrixes; eliminating natural birefringence and updating a phase delay matrix by deducting respective overall average phase delay amount pixel by pixel; through pixel-by-pixel weighted stacking, isogradient lines are eliminated, and distribution information of residual stress is obtained.
Owner:SUZHOU WEIXIN SEMICONDUCTOR TECHNOLOGY CO LTD

Dimension space conversion plasma spectrum analysis system of multi-optical-fiber-bundle imaging mode

The invention discloses a multi-optical fiber bundle imaging mode dimension space conversion plasma spectrum analysis system, which is characterized in that a two-dimensional optical fiber array comprising M * N optical fiber micropores is arranged on an optical fiber area array, a one-dimensional optical fiber array comprising M * N optical fiber micropores is arranged on an optical fiber linear array, and an optical fiber surface is connected by adopting M * N optical fibers according to a preset connection relation, the two-dimensional optical fiber array is converted into the one-dimensional optical fiber array, the optical grating disperses light transmitted by the optical fiber linear array, then the light is focused by the imaging lens and then is subjected to optical imaging by the CCD detector, and the spectral data conversion module converts a spectral image into a spectral data graph of each optical fiber channel. According to one-to-one correspondence of optical fibers in the two-dimensional optical fiber area array and the one-dimensional optical fiber linear array, the distribution state of elements in the plasma is reconstructed, and multi-optical-fiber sample element content detection is achieved.
Owner:SICHUAN UNIV

Illumination imaging method and equipment for mark identification

ActiveCN120529163ARadiologyImaging lens
The invention relates to the technical field of image sensors, and discloses an illumination imaging method and device for mark recognition, and the device comprises an image sensor array which is used for carrying out the line-by-line exposure collection of target region marks, enabling each line of pixel points to be in an exposure state, and forming a target mark image; the imaging lens system is used for guiding reflected light of the target mark image to be transmitted to the image sensor array and reducing interference of other stray light received by the image sensor array except for illumination of an illumination system of the imaging device; the one or more groups of illumination systems are used for providing specific illumination for the target mark image in a specific window period, so that the exposure intensity of image pixel points in the window period is higher than that in a non-window period; a set of control and computing subsystems; a group of power supply systems; and a group of substrates. According to the invention, the problem of jelly effect of the rolling shutter image sensor is effectively solved, and further application of the rolling shutter image sensor in the field of mark identification is greatly expanded.
Owner:NINGBO XINSHU TECH CO LTD

Grating interference measuring device and method based on large-size light spots

The invention relates to the technical field of optical measurement, in particular to a grating interference measuring device and method based on large-size light spots. The device comprises a light source module which adopts a laser light source with high stability, and the laser light source comprises a wavelength locking device; the collimation and beam expansion module is connected with the light source module; the light splitting module adopts a combined structure of a polarization splitting prism and a lambda / 4 wave plate; the reference grating module comprises a reference grating and a three-dimensional precision adjustment platform; the measuring grating module comprises a measuring grating and a self-adaptive height adjusting mechanism; the imaging module comprises a large-view-field telecentric imaging lens group and a high-speed CMOS image sensor; and a data processing module. One-time measurement of the surface of a large-area object is achieved through the collimation and beam expanding module, efficiency is improved, local interference errors are reduced, the stable laser light source and the reasonable design module are adopted, environmental influences are reduced, optical design is optimized, aberration is reduced, automatic and intelligent measurement is achieved, and convenience and efficiency are improved.
Owner:HUAIYIN TEACHERS COLLEGE

Polarization camera imaging system based on aperture coding

The invention provides a polarization camera imaging system based on aperture coding. The polarization camera imaging system comprises an imaging lens, a polarization dimension coding aperture and a polarization detector. The imaging lens comprises a front-group lens and a rear-group lens, the front-group lens is arranged in front of an aperture diaphragm of the imaging lens, and the rear-group lens is arranged behind the aperture diaphragm of the imaging lens; the polarization dimension coding aperture is arranged at an aperture diaphragm of the imaging lens, and the polarization detector is arranged at an image surface of the imaging lens; the front group of lenses consists of a plurality of lenses and is used for transmitting the collected target light information to the polarization dimension coding aperture; the polarization dimension coding aperture is used for modulating the polarization dimension of the incident light; the rear group of lenses consists of a plurality of lenses and is used for collecting target light information modulated by a polarization dimension coding aperture and transmitting the collected signal to a polarization detector; and the polarization detector is used for imaging according to the incident signal of the rear group of lenses, and the system can improve the upper limit of the dynamic range of the imaging camera by inserting a polarization dimension coding aperture at the diaphragm of the lens.
Owner:XIDIAN UNIV

Reflector structure for projection imaging lens

The invention discloses a reflector structure for a projection imaging lens, which comprises a reflector body, the reflector body is placed in an optical projection imaging lens with more than two lenses, and the reflector body comprises a middle light-passing area, a middle light-passing area and a middle light-passing area, so that light of the optical projection imaging lens is emitted through the middle light-passing area to become direct emergent light; the upper end of the first reflecting region is small and the lower end is large; the upper end of the second reflecting region is large and the lower end is small; the optical projection imaging lens is vertically placed, the light source or the image source is arranged below the optical projection imaging lens, and the lens is arranged above the optical projection imaging lens; the reflector body is configured to be matched with a circular projection imaging lens in rotational symmetry or a projection imaging lens in a non-rotational symmetry structure. The surface brightness and uniformity of the light-emitting surface of the projection lens are improved.
Owner:YEJIA OPTICAL TECH GUANGDONG CORP

Imaging lens system

An imaging lens system includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, and a seventh lens, sequentially disposed at intervals from an object side of the imaging lens system. The imaging lens system satisfies 1.5<Nd5<1.6, 30<V5<50, and TTL / 2IH<0.730, where Nd5 is a refractive index of the fifth lens, V5 is an Abbe number of the fifth lens, TTL is a distance from an object side surface of the first lens to an imaging plane, and 2IH is a diagonal length of the imaging plane.
Owner:SAMSUNG ELECTRO MECHANICS CO LTD

Multi-component insulating gas multispectral imaging device and application method thereof

The invention discloses a multi-component insulating gas multispectral imaging device and an application method thereof, belongs to the technical field of electric power safety detection, and relates to a problem how to design a multifunctional, miniaturized and portable multi-component insulating gas multispectral imaging device. Through combination of the visible light camera and the infrared imaging lens, a visible light image of an electric power scene can be provided, infrared detection of insulating gas can be realized, and the application range of the device is expanded; the infrared characteristics of the multi-component insulating gas can be extracted through a plurality of broadband optical filters; infrared images of the multi-component insulating gas are collected, and high-precision gas detection and analysis are realized in combination with the data processing capability of the signal processing board; through the view field adjusting function of the infrared imaging lens, clear imaging results can be obtained at different distances and angles; the device has the advantages of multiple functions, high precision, high portability, high data processing efficiency and the like, is suitable for detecting and monitoring insulation gas leakage of power equipment, and has a wide application prospect.
Owner:STATE GRID ANHUI ELECTRIC POWER CO LTD ELECTRIC POWER SCI RES INST

Camera module, electronic device and vehicle instrument

A camera module includes an imaging lens assembly module and an image sensor. The image sensor is disposed on an image surface of the imaging lens assembly module and includes a photoelectric converting layer, a micro lens arrays layer, a light filtering layer and an anti-reflecting layer. The photoelectric converting layer is for converting a light signal to an electric signal. The micro lens arrays layer is for converging an energy of the imaging light into the photoelectric converting layer. The light filtering layer is for absorbing a light at a certain wavelength region of the imaging light. The anti-reflecting layer is disposed on a surface of at least one of the light filtering layer and the micro lens arrays layer and includes an irregular nano-crystallite structure layer and an optical connecting layer. The optical connecting layer is connected to the irregular nano-crystallite structure layer.
Owner:LARGAN PRECISION

Imaging lens assembly module and electronic device

An imaging lens assembly module, which defines an optical axis, includes an optical element. The optical element includes a light blocking portion and an anti-reflecting thin film. The light blocking portion is opaque, and the light blocking portion is closer to the optical axis than the other portion of the optical element to the optical axis. The anti-reflecting thin film is disposed at least on a surface of the light blocking portion, and the anti-reflecting thin film includes a nano structure layer and at least one intermediate layer. The nano structure layer has a plurality of ridge-like protrusions which extends non-directionally. The intermediate layer is disposed between the nano structure layer and the optical element.
Owner:LARGAN PRECISION

Symmetrical double telecentric lens

The utility model relates to a symmetrical double telecentric lens, and relates to the technical field of measurement and control instruments in accurate manufacturing. Comprising an incident lens group, an imaging lens group and a diaphragm. The diaphragm is arranged between the incident lens group and the imaging lens group, and the focal lengths of the incident lens group and the imaging lens group are the same; and the incident lens group and the imaging lens group at the two sides of the diaphragm are respectively provided with seven lenses with the same number. According to the invention, an object is imaged according to the object-image proportion of 1: 1 through a small number of lens groups, so that the vision is more visualized, the illusion of people or interpretation errors caused by image distortion due to an image magnification or reduction mode are reduced, the authenticity is improved, and people can easily distinguish detail features of the object on a large-target-surface sensor. The problems that the number of built-in lenses of an existing lens is large, the magnification and imaging stability are insufficient, and the requirement for high precision cannot be met are solved.
Owner:SHENZHEN VICO TECH CO LTD

Laser speckle testing device based on hyperspectral imaging

The invention discloses a laser speckle testing device based on hyperspectral imaging, which realizes high-precision measurement of laser spots and speckle signals under the condition of not depending on an expensive refrigerating system by optimizing an optical structure and a control strategy. The device comprises an imaging lens, a lens electric control module, a liquid crystal tunable optical filter module, an ND filter wheel, a driving mechanism of the ND filter wheel, a two-dimensional image sensor, a main control unit, a three-axis acceleration sensor, a PC host and a tested screen. A noise calibration piece preset in an ND filter wheel is used for collecting noise data in real time before each time of measurement, and noise deduction is carried out before the filter is switched, so that the timeliness and accuracy of data correction are improved; meanwhile, the integrated three-axis acceleration sensor is used for monitoring vibration, and when vibration exceeding a preset threshold value is detected, it can be judged that currently collected data is invalid, and re-collection is automatically triggered. The device is compact in structure, low in cost and suitable for the fields of laser display, projection calibration, high-brightness light source detection and the like.
Owner:EAST CHINA NORMAL UNIV +1

View field self-stabilization and self-adjustment hyperspectral camera system and control method

The invention discloses a field-of-view self-stabilization and self-adjustment hyperspectral camera system and a control method, and relates to the technical field of hyperspectral imaging. The system comprises a first imaging lens group, a movable slit, a two-dimensional linear driver, a slit outer layer light shield, a collimating lens group, a light splitting element, a second imaging lens group, an area array image sensor, an attitude sensor and a control acquisition circuit. Angle disturbance is obtained in real time, two-dimensional compensation displacement of the slit is calculated to drive the slit to move reversely, field-of-view collection is kept basically constant, collection is triggered according to a set rhythm, slit position and attitude data are recorded synchronously, and the pre-calibrated slit position and mapping of original coordinates and ideal coordinates are combined, so that field-of-view collection is completed. Geometric transformation and resampling dynamic correction are carried out on view field inclination aberration and spectrum bending aberration generated along with slit position changes, the environmental adaptability and reliability are improved, a hyperspectral data cube with accurate space coordinates and a stable spectrum curve is output, and the method is suitable for unmanned aerial vehicle-mounted hyperspectral remote sensing.
Owner:HANGZHOU HYPERSPECTRAL IMAGING TECH CO LTD

Color light machine

The utility model discloses a color light machine, which comprises a display image source, a first imaging lens unit, a second imaging lens unit, a third imaging lens unit and a fourth imaging lens unit which are sequentially arranged along an optical axis, each imaging lens unit comprises at least one lens, and the display image source is used for emitting color light and meets the following conditions: 5 < = f1 < = 15; 10 < = f2 < = 20; -10 < = f3 < =-2; 5 < = f4 < = 15; 5 < = f < = 15; wherein f1-f4 are the focal lengths of the first imaging lens unit, the second imaging lens unit, the third imaging lens unit and the fourth imaging lens unit in sequence, f is the focal length of the color light machine, and the unit is mm. The optical machine has higher image quality and larger FOV while ensuring miniaturization and light weight, so that the whole AR glasses field has a good color effect and is close to a glasses form, and the wearing comfort and experience of a user are improved.
Owner:HANGZHOU LINGBAN TECH CO LTD

Sagnac broadband linear polarization imaging structure

The invention belongs to the technical field of polarization imaging, and relates to a Sagnac broadband linear polarization imaging structure which comprises a second plane mirror, a first polarization beam splitter, a first polarization analyzer, a first imaging lens and a first focal plane array which are sequentially arranged on a first optical axis at intervals. The compensation plate is arranged close to the second plane mirror; the first plane mirror and the first polarization beam splitter are arranged on a second optical axis perpendicular to the first optical axis in a spaced mode and located on the side away from the compensation plate; the first blazed grating and the second blazed grating are reversely arranged at intervals and located on the light path between the first plane mirror and the second plane mirror, and the first blazed grating is close to the first plane mirror. The system provided by the invention is small in adjustment workload, high in accuracy, sufficient in shearing amount compensation, and good in broadband polarization imaging image precision and overall stability.
Owner:XI AN JIAOTONG UNIV

Hyperspectral imaging system and use method thereof

A hyperspectral imaging system is characterized by comprising an imaging unit, an optical fiber scanning device, an optical fiber spectrometer, a data processing unit and a control unit, the imaging unit comprises an imaging lens and a micro-lens array, the imaging lens images a target object onto the micro-lens array, the optical fiber scanning device scans an optical signal processed by the imaging unit, and the optical fiber spectrometer performs spectrum separation on light with different wavelengths in the scanned optical signal to form spectrum data; and the data processing unit processes the spectral data and reconstructs a hyperspectral image of the target object by using the spectral data. And only an important area is scanned point by point in an optical fiber scanning mode, and hyperspectral data acquisition of a local interested target is concerned, so that unnecessary overhead of full-frame data acquisition is greatly reduced. For an application scene needing quick or real-time monitoring, the directional scanning mode greatly shortens the required integral acquisition time, and reduces the overall time delay of the system.
Owner:SHANGHAI VISIRAY PHOTOELECTRIC TECHNOLOGY CO LTD

Optical imaging lens assembly

The present disclosure discloses an optical imaging lens assembly including, sequentially from an object side to an image side along an optical axis, a first lens having negative refractive power; a prism having an incident surface, a reflecting surface, and an exit surface, and an angle between the reflecting surface and the optical axis being 45°; a stop; a second lens having positive refractive power; a third lens having refractive power; a fourth lens having positive refractive power; and a fifth lens having negative refractive power.
Owner:ZHEJIANG SUNNY OPTICAL CO LTD

Laser cavitation diagnosis device and method based on double-frame delay synchronous phase shift

The invention discloses a laser cavitation diagnosis device and method based on double-frame delay synchronous phase shift. The device comprises an excitation module and a detection module. The excitation module comprises a first laser, a first 1 / 2 wave plate, a polarization splitting prism, a spectroscope, an energy meter, a convex lens and a water tank; the detection module comprises a second laser, a beam expanding lens group, a second 1 / 2 wave plate, a second polarization splitting prism, a third 1 / 2 wave plate, a first reflector, a second reflector, a fourth 1 / 2 wave plate, a third polarization splitting prism, a third reflector, a fourth polarization splitting prism, a first 1 / 4 wave plate, a first imaging lens, a first micro-polarization camera, a second 1 / 4 wave plate and a second imaging lens; and a second micro-polarization camera. According to the invention, a double-frame delay method is introduced into traditional synchronous phase-shifting interference, the defects of the existing cavitation detection technology are overcome, and instantaneous phase change observation in a single cavitation pulsation period is realized.
Owner:NANJING UNIV OF SCI & TECH

Device for generating hundred-milliwatt high-power high-repetition-frequency terahertz strong source at room temperature

ActiveCN120581944ALaser detailsNonlinear opticsReflecting telescope
The invention relates to a hundred-milliwatt high-power high-repetition-frequency terahertz strong source generating device at room temperature, belongs to the technical field of nonlinear optical frequency conversion, and solves the problems that the terahertz conversion rate is low and additional cooling equipment is needed in the prior art. The beam expanding lens group is used for carrying out light spot beam expanding on the femtosecond pumping laser until the diameter of a light spot is twice of the original diameter; the plane mirror group is used for guiding the pump laser after beam expansion; the first half-wave plate, the reflective diffraction grating, the gold reflector and the third ultrafast reflector are used for adjusting polarization and diffraction reflection; the 4-f telescope imaging lens group is used for reducing the spot diameter of the received pump laser and imaging the pump laser to the lithium niobate crystal; the lithium niobate crystal generates terahertz pulse radiation in the direction perpendicular to the wavefront; the terahertz collection module receives and focuses the terahertz pulse radiation; and the measuring device is used for receiving the focused terahertz pulse radiation for measurement.
Owner:HANGZHOU INTERNATIONAL INNOVATION INSTITUTE OF BEIHANG UNIVERSITY

Imaging lens and imaging apparatus

An imaging lens consists of, in order from an object side, a front group, a stop, and a rear group. The front group includes, in successive order from a side closest to the object side, a first lens that is a negative lens having a concave surface facing an image side and a second lens that is a negative lens having a concave surface facing the image side. Two or less focus lens groups are disposed on the image side with respect to the second lens. During focusing, the two or less focus lens groups move along an optical axis, and lenses other than the two or less focus lens groups are fixed with respect to an image plane. The imaging lens satisfies a predetermined conditional expression.
Owner:FUJIFILM CORP

Focusing imaging device and focusing imaging system

According to the focusing imaging device and the focusing imaging system provided by the invention, 3D imaging is realized by arranging the focusing imaging lens group, and the electron beam in the uplink path is not deflected and is not required to be subjected to reverse polarization compensation, so that the drop point energy of the downlink electron beam on the surface of a sample can be adjusted in a large range, and the requirement on working parameter switching can be met. The focusing imaging device can comprise an electron source, an intermediate lens group and a focusing imaging lens group. The electron source can be used for outputting a first downlink electron beam to the middle lens group. The middle lens group can be used for controlling the drop point position of the first downlink electron beam on the sample by scanning the first downlink electron beam. And the focusing imaging lens group can be used for focusing the first downlink electron beam to the surface of the sample according to the drop point position and imaging according to the uplink electron beam generated on the surface of the sample.
Owner:HUAWEI TECH CO LTD

Wafer nanoscale defect detection system and method based on multi-mode and feature fusion

The invention discloses a wafer nanoscale defect detection system and method based on multi-mode and feature fusion, the system comprises a multi-band LED light source group, a CMOS camera, a telecentric imaging lens and a displacement platform, the multi-band LED light source group is arranged at the uppermost part, and the CMOS camera, the telecentric imaging lens and the displacement platform are sequentially arranged below the multi-band LED light source group; the multiband LED light source group comprises an angle gt; an incident light LED with the angle of 70 degrees, an incident light LED with the angle of 10-30 degrees, a coherent light source and a phase shift module; the CMOS camera shoots a wafer picture, and the telecentric imaging lens captures details on the surface of the wafer; the displacement platform bears the wafer and carries out displacement. According to the method, the limitation of two-dimensional detection is broken through, and on the premise of not sacrificing the detection speed, high-sensitivity, high-precision and quantifiable online automatic detection of fisheye, pinhole and segment difference defects is realized through an innovative optical system design, a quasi-three-dimensional morphology reconstruction technology and an advanced deep learning network architecture.
Owner:HANGZHOU HUICUI INTELLIGENT TECH CO LTD +1

Optical component, imaging lens and electronic device

An optical component includes a substrate and an anti-reflective film. The substrate has an aspherical surface through which light passes. The anti-reflective film is disposed at least on the aspherical surface and includes a nanostructure layer and an intermediate layer. The nanostructure layer includes ridge-like protrusions that are non-directionally extended. A bottom of the ridge-like protrusions is closer to the substrate than a top of the ridge-like protrusions. The ridge-like protrusions gradually taper from the bottom toward the top. An average structural height of the ridge-like protrusions ranges from 108 to 368 nm. The intermediate layer is between the nanostructure layer and the substrate. A main component of the nanostructure layer is aluminum oxide. The nanostructure layer includes a metallic doping agent at least partially distributed inside the ridge-like protrusions. The metallic doping agent includes at least one of titanium, vanadium, chromium, titanium oxide, vanadium oxide, and chromium oxide.
Owner:LARGAN PRECISION