The invention relates to the technical field of lasers, and discloses a multi-junction
vertical cavity surface emitting laser and a preparation method thereof. The
laser comprises a substrate layer, an epitaxial structure, a first
oxide layer and a second
oxide layer, wherein the epitaxial structure comprises a first reflector layer, an
active layer comprising a plurality of barrier
layers and tunnel junctions, and a second reflector layer; the first oxidation layer with a first oxidation hole is arranged on one side of the
tunnel junction, the second oxidation layer is arranged on the other side of the
tunnel junction and is provided with a second oxidation hole concentric with the first oxidation hole, and the oxidation depth of the first oxidation layer is larger than that of the second oxidation layer; and one
tunnel junction, the first
oxide layer and the second oxide layer form an integrated structure which is arranged in one trough of the
standing wave field. An
optical field limiting structure in which oxide
layers with long upper parts and short lower parts are arranged on two sides of a tunnel junction is formed, so that more high-order optical
modes in the
resonant cavity are ensured, transverse current can be effectively limited, increasing of series resistance and shortening of the effective cavity length of a
standing wave field can be avoided, and the
photoelectric conversion efficiency is further improved.