This invention relates to the field of micro /
nano manufacturing technology, and in particular to a high-refractive-index fluidized
nanoparticle, a
hybrid photoresist, a patterned
coating, and methods for preparing the respective. The high-refractive-index fluidized
nanoparticle comprises a core, the core being modified with a first ligand and a second ligand; the first ligand is one or more selected from
methacrylic acid, 4-pentenoic acid, methacryloxypropyltrimethoxysilane, and
sodium methacrylate sulfonate; the second ligand is one or more selected from
piperidine, N,N-diisopropylethylamine, 1,5,7-triazabicyclo[4.4.0]
decene-5-ene, tetramethylguanidine,
triethylamine, and tetrahydropyrrole. This invention, through the design of ultra-small
metal oxide nanoparticles and innovative organic ligands, successfully solves the technical contradiction of traditional
photoresist materials in achieving
high resolution, high
refractive index, and low curing shrinkage.