The invention discloses a method for clearly imaging a
mask under an optical objective, and relates to the technical field of optical detection and
image processing, and the method comprises the following steps: S1, constructing a
light intensity distribution model based on the boundary condition of the
field of view of the optical objective in combination with the reflection characteristic and incident angle change rule of a
metal edge material, and determining the coverage range of
metal edge reflection
crosstalk, generating a
mask boundary interference prediction map; s2, according to the
mask boundary interference prediction map, performing region division on the micro-
reflectivity image, extracting
brightness gradient characteristics of
reflectivity lifting in an interference region, and generating a
brightness gradient parameter set required by image filtering; the method is based on
light intensity modeling, fusion direction filtering, pixel stripping, gradient reconstruction and credibility weighted fusion, realizes closed-
loop control from interference prediction to pixel restoration, has
high resolution and adaptivity, can accurately strip edge reflection artifacts and restore a
real image structure, remarkably reduces misjudgment and
rework rate, and is suitable for large-scale popularization and application. And the mask yield and the stability of the detection
system are improved.