821 results about "Collimated light" patented technology

A kaleidoscopic laser beam projector (KLBP) system that employs a single moving structure to project patterns of sweeping laser beams with diverse sweep directions and emission apertures. The system comprises a collimated light source, a spinning mirror deflector (“spindle / flutter mirror”) at the center, and a stationary kaleidoscopic mirror containing multiple facet mirrors arranged in a concave fashion around the spindle mirror. As the spindle mirror rotates, it directs laser beams in a radially whirling movement toward the facet mirrors, which then subdivide these beams into multiple short strokes and redirect them outward in different directions. Various embodiments include configurations with diffractive optical elements (DOEs) for beam splitting, different kaleidoscopic mirror geometries (hexagonal, octagonal, etc.), and innovative flutter mirror mechanisms that create controlled angular variations during rotation. The system enables a “4×1” configuration that replaces traditional “4×4” systems requiring eight motors and multiple moving structures. The KLBP system offers significant advantages including mechanical simplicity, reduced size and weight, improved energy efficiency, enhanced reliability, cost-effectiveness, and modular configurability. The diverse beam incidence angles enable superior illumination of complex three-dimensional objects for applications in machine vision systems, precision metrology, gap and flushness inspection, and robot-assisted assembly of complex structures.

The utility model provides a multi-axis shape and position error synchronous measuring device. The multi-axis shape and position error synchronous measuring device comprises a laser module, a light splitting steering system, a two-dimensional position detector A arranged on a sliding block of a first linear guide rail, a two-dimensional position detector B arranged on a sliding block of a second linear guide rail, and a two-dimensional position detector C arranged on a sliding block of a third linear guide rail, initial laser output by the laser module is divided into a first Y-axis collimated light beam, a second Y-axis collimated light beam and a third X-axis collimated light beam through the light splitting steering system, and the first Y-axis collimated light beam, the second Y-axis collimated light beam and the third X-axis collimated light beam enter the two-dimensional position detector A, the two-dimensional position detector B and the two-dimensional position detector C respectively. According to the utility model, multiple form and position errors such as parallelism and verticality between the guide rails can be measured at the same time through one-time measurement, one-by-one measurement is not needed, and the measurement efficiency is greatly improved.

The double-light module comprises a lens and a plurality of unit optical systems, the unit optical systems are sequentially arranged in the transverse direction, each unit optical system comprises a primary optical element and a light source, the lens is provided with a plurality of lens units connected in sequence, and the unit optical systems correspond to the lens units one to one; at least one unit optical system is a high and low beam combination unit system, the high and low beam combination unit system comprises at least one low beam light source, a low beam primary optical element, a high beam light source and a high beam primary optical element, and the high and low beam combination unit system corresponds to a high and low beam combination lens unit; the low-beam primary optical element is configured to collimate light emitted by the low-beam light source to the high-beam and low-beam combined lens unit and perform projection imaging, and the high-beam primary optical element is configured to collimate light emitted by the high-beam light source to the high-beam and low-beam combined lens unit and perform projection imaging. The system thermal risk can be improved, the light pattern broadening is effectively increased, and the cost is low.

The utility model provides a metasurface type speckle projector and depth detection equipment, which can realize a speckle projection function based on a light source array by using a metasurface and avoid the problem of zero-order bright spots or stronger background light generally existing when a diffractive optical element is used. The metasurface type speckle projector comprises a light source array used for emitting a plurality of conical light beams arranged in an array; the light modulation element has positive focal power, is arranged on the light emitting side of the light source array and is used for collecting the conical light beams from the light source array; and the metasurface element is arranged on one side, far away from the light source array, of the light modulation element and is used for regulating and controlling the light beams gathered by the light modulation element so as to form a plurality of collimated light beams projected towards different directions.

The invention discloses a composite additive system based on programmable laser beam-double arcs and a working method of the composite additive system. The composite additive system is mainly composed of a laser unit, a beam shaping unit, a deformation optical unit, a double-arc unit, a double-wire-feeding unit, a substrate unit and a light spot shape unit. According to the system, Gaussian laser is converted into a flat-topped beam through a pi Shaper collimation beam shaper, and the shape and intensity distribution of a light spot are dynamically regulated and controlled by combining an electromagnetic actuating self-adaptive optical element; the double arc units cooperate around the laser beam to achieve gradient deposition of heterogeneous materials such as titanium / aluminum and the like in cooperation with an independently-controlled wire feeding system. A closed-loop feedback mechanism is adopted, molten pool parameters are monitored in real time through an optical sensor, laser power, electric arc parameters and wire feeding speed are dynamically adjusted, and molten pool stability and metallurgical reaction control precision are remarkably improved. The system can meet the multi-material composite additive manufacturing requirements of multifunctional parts of complex structures, and is particularly suitable for efficient forming of high-performance titanium-aluminum alloy components in the aerospace field.

The utility model discloses a receiving end assembly of a high-speed optical module, which belongs to the technical field of optical devices and comprises a Receptacle optical interface, an optical fiber, a capillary tube, a lens, a wavelength division multiplexer, an array lens, a prism and a substrate, the optical fiber is used for transmitting light, the capillary tube, the lens, the wavelength division multiplexer, the array lens and the prism are fixed on the substrate, the Receptacle optical interface is connected with the optical fiber, and the optical fiber is connected with the substrate. The lens is located between the capillary tube and the wavelength division multiplexer, the array lens is located between the wavelength division multiplexer and the prism, the capillary tube converges light rays and enables the light rays to enter the lens, the lens enables collimated light converged by the capillary tube to enter the wavelength division multiplexer, the wavelength division multiplexer demultiplexes wavelengths, four paths of parallel light are formed and enter the array lens, and the array lens is located between the prism and the array lens. The array lens gathers incident light, and the gathered light beam is emitted from the prism and then gathers to the focus position. According to the invention, four light beams of 0.75 Pitch are converted into four light beams of 0.25 Pitch by using the turning prism; according to the invention, four light beams with the interval of 0.25 mm can be realized at the receiving end of the optical module.

The invention belongs to the field of optics, and particularly discloses a light spot shrinking device for an angle resolution scatterometer. Through the first lens, the beam shaping element and the second lens which are sequentially arranged along the light path, beam focusing, beam shaping and collimation are carried out in sequence, the collimated beam with the diameter smaller than that of the beam of the light source is formed, the collimated beam is combined with the subsequent light path, and the light spot shrinking function can be achieved at the detection end of the objective lens.

The invention relates to an optical fiber beam expanding contact piece and a hollow-core optical fiber connector, and belongs to the field of optical fiber connectors, the optical fiber beam expanding contact piece comprises a hollow-core optical fiber and a light transmission medium which is arranged in front of the hollow-core optical fiber and can output beam expanding collimated light, the light transmission medium is arranged in a connector pin, and the light transmission medium is a medium with a focusing function. The connector pin is mounted on the positioning piece, and the positioning piece is used for being matched and assembled with a connector shell of the hollow-core optical fiber connector; the hollow-core optical fiber connector comprises a connector shell and an optical fiber beam expanding contact piece arranged in the connector shell. Efficient optical signal transmission can be achieved, and the requirements of an optical fiber communication system for efficient and stable connection performance are met.

The invention relates to a Mini-LED display submodule and a large-size naked-eye 3D display device. The Mini-LED display submodule comprises a display panel, a first grating layer and a second grating layer which are arranged in sequence. The display panel comprises a plurality of pixel units, the first grating layer comprises a plurality of first lenses, and the first lenses are used for converting emergent light rays emitted by the corresponding pixel units into collimated light rays; the focal points of the multiple first lenses are arranged in a coplanar mode, light rays passing through the first lenses can be converted into collimated light rays with unified parameters, the multiple pixel units and the multiple first lenses are arranged in a one-to-one correspondence mode, independent regulation and control of single emergent light rays can be achieved, and the problem of cross crosstalk of different emergent light rays is greatly solved in combination with collimation processing of the first lenses; by arranging the second grating layer, directional refraction can be carried out on the collimated light rays output by different first grating layers, the collimated light rays after refraction are respectively projected to different viewpoint positions in the space, and naked eye 3D display can be realized.

The invention discloses a COB-based lensless laser gas sensing module and a packaging method. The COB-based lensless laser gas sensing module comprises a COB board and a lensless light path module covering the COB board, the lensless light path module comprises a module shell, an inner cavity of the module shell is provided with a first parabolic reflector, a second parabolic reflector and a communicated light beam channel, and the module shell, the parabolic reflectors and the light beam channel form a detection gas chamber; a laser beam emitted by the laser chip is reflected by the first parabolic reflector to form approximately collimated light, and the approximately collimated light passes through the light beam channel and is focused on the photosensitive surface of the detector through the second parabolic reflector. According to the invention, the bare chips of the laser chip and the detector chip are directly bonded on the PCB, and are matched with the light path combination member with the two correlation type parabolic reflectors, so that interference noise caused by the lens is eliminated; the optical path is only composed of the COB board, the three-in-one sensing module and the protective cover, so that the production and assembly complexity is greatly reduced, and the assembly precision and stability of the optical path are improved.

The invention discloses an LCOS optical illumination system for an AR-HUD projection unit, and belongs to the field of photoelectric illumination and display technologies. The system comprises an illumination light source, a collimating lens, a fly-eye lens, an optical diffuser, a wavelength selective light combination element, a polarized light conversion device, a relay lens, a PBS prism and an LCOS display chip. The illumination light source is a three-color LED light source and is composed of a red light LED, a green light LED and a blue light LED. After red primary light, green primary light and blue primary light are collimated by the collimation system, the light parallelism is optimized, the collimated light sequentially passes through the light diffusion element to optimize the light field uniformity and the fly-eye lens to eliminate the non-uniform illumination, then is unified into a single linear polarization state by the polarized light converter, is shaped by the relay system and keeps the light beam transmission quality, and finally is transmitted to the light source. And polarization state separation and light combination are realized through the PBS prism, and finally, the light is accurately coupled to the LCOS display chip, so that high-efficiency polarization state matching and imaging quality optimization are completed. According to the HUD-PGU system, the illumination brightness of the whole system is improved, the color reducibility of the system is improved, the illumination uniformity of system imaging is improved, the light energy utilization rate of the system is improved, meanwhile, the size of the HUD-PGU is reduced, and the manufacturing cost is reduced.

The invention provides a coupling system for an on-chip light source and a photon chip. The coupling system comprises an input light source, a collimating lens, a focusing lens, a reflecting prism and an on-chip grating which are sequentially arranged in the direction of a light path, and an optical waveguide located on the side face of the on-chip grating. The collimating lens is used for primarily shaping emergent light of an input light source into a collimated light beam, the focusing lens is used for focusing the collimated light beam to the on-chip grating, and the collimating lens and the focusing lens are both aspheric plano-convex lenses. According to the system, non-uniformity caused by a large divergence angle of the semiconductor laser is effectively corrected through the aspheric micro lens, output of approximately parallel light beams is achieved, the light beams are accurately focused to the photon chip grating through the aspheric focusing lens subsequently, the coupling efficiency of light energy is greatly improved, and compared with two cylindrical lenses in the prior art, the coupling efficiency of light energy is greatly improved. The design of the focusing lens and the reflector is added, so that the number of optical elements is reduced, and error accumulation is reduced.

Apparatus and methods including miniaturization of a single focal plane collimated light-based aiming sights and their variants. One technical effect includes a user's ability to develop an effective, accurate and fast sight picture using ‘red-dot’ / reticle type sights while preserving the superior accuracy of these technologies. One new result is the reduction of the housing size, and overall footprint of the structural elements of these sights. In at least on embodiment, using LEDs, the power requirement for the aiming device is significantly lowered which means that the volume and weight of the aiming device is reduced. Accordingly, this enables positioning of the now miniaturized sight at the top of a pistol, firearm or apparatus. In at least one embodiment an aiming device is located with a firearm's front sight. In at least one embodiment, an aiming sight's structure, methods of fabrication, assembly, use includes kitting of the sights.

The invention relates to an experimental system and method for photodynamic therapy, photothermal therapy and combined research of photodynamic therapy and photothermal therapy. The experiment system comprises an optical irradiation module which comprises a plurality of laser light sources, each laser light source can output collimated light beams, the collimated light beams are combined to form a coaxial light path, and the coaxial light paths are projected to the surface of an observation object through a light beam adjusting assembly; the light path position adjusting module comprises an electric Z-axis displacement mechanism; the temperature monitoring module comprises an active temperature control substrate, an infrared thermal imager and an optical fiber temperature probe interface; the data acquisition and control module is configured to synchronously acquire laser output power, light spot area, electric Z-axis position, temperature of the active temperature control substrate, temperature sequences of a plurality of different areas and optical fiber temperature probe data, and associatively record the data with a unified timestamp; the power density can be calculated based on the real-time output power of the laser light source and the light spot area; and when the data of any temperature monitoring channel exceeds a preset safety threshold value, the laser light source is automatically controlled to close the output.

The invention relates to the technical field of communication, in particular to an optical fiber array positioning device and an optical fiber array docking device.The optical fiber array positioning device comprises an optical fiber array positioning assembly, the optical fiber array positioning assembly is composed of a first positioning shell, a second positioning shell and a third positioning shell, and the second positioning shell and the third positioning shell are movably connected in a clamped mode; an optical fiber is arranged between the second positioning shell and the third positioning shell, and a lens is arranged at the front end of the optical fiber. The optical fiber array positioning assembly is installed in a modularized mode, when optical fibers are positioned and assembled, the pressing locking assembly and the optical fiber pressurizing assembly are combined with the second positioning shell and the third positioning shell, locking and inserting connection during assembly of the second positioning shell and the third positioning shell can be achieved, auxiliary pressing of the optical fibers after locking is completed is achieved, and the optical fibers can be conveniently assembled. The optical fiber array positioning assembly is prevented from loosening, and dynamic compensation is provided for the optical fiber, so that transmission light in the optical fiber forms a collimated light beam through the lens at the end part and then is stably emitted, and the transmission loss is reduced.

The invention provides a laser pulse width broadening device and a laser system. The laser pulse width broadening device comprises a first lens array, a plurality of optical fibers with different lengths, a second lens array and a focusing lens, the plurality of optical fibers with different lengths have the same incident plane and emergent plane; the first lens array divides the laser beam; the segmented laser beams are respectively transmitted in a plurality of optical fibers with different lengths, and the plurality of optical fibers with different lengths respectively emit a plurality of light beams with different delays based on the optical path difference of the plurality of optical fibers with different lengths; the second lens array collimates a plurality of light beams with different delays; and a plurality of light beams with different delays pass through the focusing lens and then are superposed to obtain uniformly distributed light beams with target sizes. The lens array can be used for segmenting light beams and coupling the light beams into optical fibers to improve the utilization rate of the light beams. The pulse width is broadened by using the optical path difference of the optical fibers with different lengths; the micro-lens array is used for collimating the light beams, the focusing lens is used for overlapping the light spots, small light spots are formed, and follow-up shaping and light beam coupling are facilitated.

A TGV substrate via waist depth detection device has a first DOF camera, a first collimated light source and microcontroller is illustrated. The first DOF camera and first collimated light source are respectively arranged above and below the glass substrate with at least one glass substrate via, and respectively obliquely face the upper surface and lower surface of the glass substrate. The microcontroller is coupled with the first DOF camera and first collimated light source. The first collimated light source is configured to emit the first collimated beam which obliquely irradiates the glass substrate, the first DOF camera is configured to obtain the first image, and the microcontroller is configured to obtain at least one detection result of at least one glass substrate via according to the first image.

The invention discloses an optical axis calibration method and device applied to a projection illumination light path, and belongs to the technical field of optics, and the device comprises a laser which is used for transmitting an initial collimated light beam; the forward beam expander is arranged on a light emitting path of the laser and is used for expanding the initial collimated light beam to form large-aperture collimated light; the beam splitter is arranged on an emergent light path of the forward beam expander and is used for splitting the large-aperture collimated light into a reflected light beam and a transmitted light beam; the reflecting mirror is arranged in a transmission light path of the beam splitter and is used for reflecting the transmission light beam back to the beam splitter; and the reverse beam expander is arranged in a reflection light path of the beam splitter and is used for converging the reflection light beams into a point light source. According to the invention, the abstract'optical axis alignment 'problem is converted into visual'light spot superposition' judgment, the principle breakthrough from traditional indirect energy measurement to direct spatial position comparison is realized, and the calibration precision is improved.

The invention provides a laser processing device and system, and relates to the technical field of underwater laser processing. The laser processing device comprises a circular polarizer, a collimation assembly, a phase modulation element and a focusing lens. The circular polarizer, the collimation assembly, the phase modulation element and the focusing lens are sequentially arranged in the transmission direction of the laser beam; the circular polarizer is used for converting a to-be-processed light beam into circularly polarized light; the collimation assembly is used for collimating the circularly polarized light to obtain a collimated light beam; the phase modulation element is used for performing phase modulation on the collimated light beam to obtain a modulated light beam; the focusing lens is used for focusing the modulated light beam to obtain a target light beam, and the target light beam is used for machining an underwater to-be-machined object. In the design, the Rayleigh length of the target light beam is longer, and the target light beam has good water turbulence resistance, so that phase disturbance caused by water turbulence can be effectively reduced, the underwater laser processing quality is ensured, and the underwater laser processing efficiency is improved.

The embodiment of the invention provides an image generation unit, a head-up display device and a vehicle. Wherein the image generation unit comprises an illumination light source, a collimating lens array and a display assembly which are sequentially arranged along the light transmission direction; the illumination light source provides illumination light; the collimating lens array is used for converting the illumination light into a collimated light beam; the display assembly comprises a liquid crystal screen, a first heat dissipation optical medium layer and a second heat dissipation optical medium layer, and the first heat dissipation optical medium layer and the second heat dissipation optical medium layer are glued to the back side and the light emitting side of the liquid crystal screen respectively. The beam expanding module is used for forming beam expanding light matched with an amplification light path in the vehicle-mounted head-up display equipment; an infrared high-reflection film is arranged between the liquid crystal screen and the second heat dissipation optical medium layer and used for reflecting infrared band light so as to reduce heat input. The thermal conductivity of the first heat dissipation optical dielectric layer and the thermal conductivity of the second heat dissipation optical dielectric layer are both not lower than 2 W / mK.

The invention provides a device and method for calibrating the wavelength of a spectrometer, and belongs to the technical field of optics, and the device comprises a light source module which is used for outputting wide-spectrum continuous light; the collimation module is used for outputting collimated light based on the wide-spectrum continuous light; the polarizer is used for generating linearly polarized light based on the collimated light; the rotating platform is used for placing a wave plate; the polarization analyzer is located in the light beam output direction of the wave plate; the focusing module is used for converging the light beams output by the polarization analyzer to the spectrograph; the spectrograph is used for detecting the energy of the input light beam so as to output corresponding optical data; the optical data comprises pixels and light intensity data of the input light beam; and a processor for determining a ratio of maximum response discrete light intensity data to minimum response discrete light intensity data based on the optical data, determining a peak center pixel position based on the ratio, and calibrating the spectrometer wavelength based on the pixel position. According to the invention, the technical problem of low accuracy of the wavelength calibration result of the existing spectrograph wavelength calibration method can be solved.

An optical integrated circuit includes a substrate, at least one open cavity provided in said substrate, at least one set of optical waveguides for each open cavity, each set including a first optical waveguide and a second optical waveguide. The first and second optical waveguides are arranged in the substrate and include a first end facet ending in the open cavity of that set, and a first collimating element for each set. The first collimating element is arranged in the open cavity at or near the first end facet of the first optical waveguide to collimate light from that waveguide. A second collimating element for each set is arranged in the open cavity at or near the first end facet of the second optical waveguide to collimate light into that waveguide. A method for fabricating the same.

The present invention proposes an ultra-narrow lens high and low beam module, comprising: a low beam module, a high beam module and a circuit board. The high beam module is arranged below or above the low beam module. A low beam light source emits low beam light, which is formed by a low beam primary optical structure and emits a low beam light pattern with a cutoff line. The low beam light pattern with a cutoff line passes through a low beam secondary optical structure to a low beam tertiary optical structure to form a low beam light pattern. A high beam light source emits high beam light, which is formed into a collimated light by the high beam primary optical structure and passes through the high beam secondary optical structure to form a high beam light pattern. The present invention solves the problem of traditional high and low beam modules occupying too much space inside the headlamp. While achieving the high and low beam functions, it greatly shortens the distance in the X direction and saves space inside the headlamp. The optical structure and optical path principle of the present invention are simple, providing a feasible method for the design of ultra-narrow lens high and low beam modules.

A light-transmitting substrate is deployed with a first of two major surfaces in facing relation to an eye of a viewer and guides light by internal reflection between the two major surfaces. An optical coupling-out configuration couples image light, that corresponds to a collimated image and that is guided by internal reflection between the two major surfaces, out of the light-transmitting substrate. A first optical coupling configuration collimates light from the eye to produce collimated light, and couples the collimated light into the light-transmitting substrate for guiding by internal reflection. A second optical coupling configuration couples the collimated light out of the light-transmitting substrate toward an optical sensor that senses the coupled-out light. A processing system derives current gaze direction of the eye by processing signals from the optical sensor.

A penta prism collimator having four freeform surfaces that fold the optical path of light received from a microdisplay collimates light for coupling to a waveguide. In some embodiments, the freeform surfaces are toroidal surfaces made from a single injection-molded element, such as a single piece of plastic. The freeform surfaces collimate the light at a variety of distances from an input pupil of a waveguide, allowing for more freedom of placement within a frame of a WHUD.

The invention discloses an array optical fiber collimator which is composed of a plurality of laminates and a plurality of collimators, spherical positioning surfaces are arranged on the laminates and the collimators respectively, the axes of the spherical positioning surfaces are perpendicular to the axis direction of the collimators, and the collimators are attached to the positioning surfaces of the laminates to form a universal joint structure for the collimators to finely adjust the axes of the collimators. According to the technical scheme, each optical fiber collimator can be conveniently and independently dimmed and fixed, so that the light beam pointing consistency of an area array optical fiber collimator product is ensured, and compared with the prior art, the light beam pointing uniformity of the area array optical fiber collimator product is improved, and compared with the prior art, the light beam pointing uniformity of the area array optical fiber collimator product is improved. A large amount of collimator screening and adapting work can be omitted, the technical bottleneck of array optical fiber collimator production is broken through, the production efficiency is high, the percent of pass is high, and the cost is low.

The invention discloses an atomic sensing laser collimation rounding method based on a function multiplexing metasurface. Through the metasurface phase regulation and control technology, a metasurface unit library meeting the collimation phase configuration requirement and circular polarization combined regulation and control is designed, and dual-function integration of collimation of emergent light of the atomic sensing laser and conversion from linear polarization to circular polarization is achieved. A highly circularly polarized collimated light beam is provided for atom system comprehensive polarization through a single-layer metasurface device. According to the technology, the size of a pumping light path in an atom sensing system can be remarkably reduced, the integration degree of a collimation circular polarization light path system is improved, and the technology is suitable for the optical regulation and control requirement of a miniaturized chip atom sensor.

The invention relates to the technical field of laser processing, and provides a dynamic focusing scanning system. The dynamic focusing scanning system comprises a dynamic focusing module, a light beam deflection module and a field lens focusing module which are sequentially arranged in the optical axis direction. The dynamic focusing module comprises a front convex lens group, a diaphragm and a rear convex lens group, the optical axis of the front convex lens group coincides with the optical axis of the rear convex lens group, and the center of the diaphragm is located on the optical axis of the front convex lens group; the front convex lens group is configured to focus the input collimated light to form a light spot, the diaphragm is located at a focus point of the front convex lens group, and the rear convex lens group is configured to expand a light beam passing through the diaphragm; the light beam deflection module is configured to deflect the light beam emitted from the rear convex lens group; the field lens focusing module is configured to focus the light beam emitted from the light beam deflection module to a focal plane. According to the invention, the diaphragm can be used for filtering the return light, so that the dynamic focusing scanning system is protected, and the damage to the dynamic focusing scanning system is reduced or avoided.

The invention relates to the technical field of optical scanning, and discloses an afocal optical system for scanning. Comprising an X-direction scanning galvanometer, a front lens group, a rear lens group and a Y-direction scanning galvanometer, the front lens group and the rear lens group are symmetrically arranged about a light convergence surface, the front lens group is located on the light emitting side of the X-direction scanning galvanometer, the rear lens group is located on the light emitting side of the front lens group, and the Y-direction scanning galvanometer is located on the light emitting side of the rear lens group; the front lens group comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are sequentially arranged along the light propagation direction; the rear lens group comprises a sixth lens, a seventh lens, an eighth lens, a ninth lens and a tenth lens which are sequentially arranged along the light propagation direction; wherein the focal length value of the afocal optical system is very large, that is, the focal power approaches to 0, so that after incident circular collimated light passes through the X-direction scanning galvanometer, the front lens group, the rear lens group and the Y-direction scanning galvanometer, the emergent light is still circular collimated light.

The present invention provides a method for in-situ measurement of film thickness and a chemical mechanical planarization device, the method comprising: on the basis of a reflection spectrum of a wafer film and an equivalent light source spectrum, generating an actually measured spectrum, the equivalent light source spectrum being data of the correspondence relationship between wavelength and light intensity generated by using reflected light passing through a planarization solution and a dielectric layer between the planarization solution and a collimating light source probe; matching the actually measured spectrum with a reference spectrum library; and obtaining a wafer film thickness corresponding to a reference spectrum matching the actually measured spectrum and using said thickness as a measurement result.