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1727 results about "Axis of symmetry" patented technology

Capacitively coupled plasma reactor with magnetic plasma control

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.
Owner:APPLIED MATERIALS INC

Capacitively coupled plasma reactor with magnetic plasma control

A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the sidewall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.
Owner:APPLIED MATERIALS INC

System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase

Systems and methods for placement of dummy metal fills while preventing disturbance of device matching and optionally limiting capacitance increase are disclosed. A computer-automated method for locating dummy fills in an integrated circuit fabrication process generally comprises receiving an input layout of the integrated circuit and specification of device matching for the integrated circuit and locating the dummy fills in the integrated circuit according to dummy rules while preserving device matching. Locating the dummy fills may include locating the dummy fills along the at least one axis of symmetry where device matching is along an axis of symmetry and locating the dummy fills so as to preserve matching of the repeated elements where device matching is repeated matched elements. The method may also include designating at least one net of the integrated circuit as a critical net, the critical nets being only a subset of all nets of the integrated circuit, identifying metal conductors corresponding to each designated critical net from the layout file, and delineating a net blocking exclusion zone extending a distance of a minimum net blocking distance (NBD) from the metal conductor for each metal conductor identified, wherein the step of locating locates the dummy fills outside of the net blocking exclusion zone.
Owner:MAGMA DESIGN AUTOMATION

LED module

An LED module that includes an LED (light-emitting diode) (1) and a rotationally symmetrical, bowl-shaped collimator lens (2) is provided. The collimator lens has an inner refractive wall (9), an outer reflective wall (7), a first surface (8) having an entrance aperture (3) with a recess (4) in which the LED is situated and which collimator lens is also provided with a second surface (10) from which light generated by the LED emerges, the normal to the surface extending substantially parallel to the axis of symmetry of the lens, and the LED module also includes one or more of the following structures : (1) a conic wall portion of the recess (4) of the inner refractive wall (9) at the entrance aperture (3) that includes a curved portion (9'), and an outer reflective wall (7) so configured in accordance with the structure of the inner refractive wall (9) to achieve substantial collimation of a source of light (1) at the entrance aperture; and/or (2) a first surface (8) of the lens (2) that is recessed away from the LED source (1); and/or (3) two surfaces (8), (11) of said refractive wall (9) between which the refractive function of said refractive wall (9) is divided. The LED module offers an improvement in the performance of the Flat top Tulip Collimator known in terms of reduced size, beam divergence, beam uniformity, and to some degree efficiency. Moreover, it allows a wider variety of choices in optimizing various performance characteristics, and this in turn allows more flexibility in the structure design.
Owner:SIGNIFY HLDG BV
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