The
point spread function calculation method and
system provided in the present application construct an optical analysis model, obtain the
image plane intersection point in the optical analysis model, obtain the intersection point of the lower edge light of the specified
field of view of the optical analysis model and the last
optical surface as the boundary of the tracing grid, establish
ray tracing grid points, and perform reverse
ray tracing based on the
image plane intersection point and the grid point to obtain the
pupil function. Compared with the traditional method that needs to find the
entrance pupil boundary and involves complex logical processes, the present application will avoid the complex
entrance pupil,
exit pupil and their boundary determination process, and directly calculate the
ray tracing boundary based on the surface aperture. The calculation process is closer to the real physical process, with low implementation complexity and good stability. Through reverse ray tracing, the
calculation error introduced by Fourier grid
distortion and the
approximation error of the traditional Fraunhofer propagation method are avoided, and an accurate ideal
point light source
diffraction image, that is, the
point spread function of the optical
system, can be obtained in the image space.